Series AF modular style air filter is a cost effective, clean looking solution to your filtration needs. Its' modular design allows connection with other SMC air preparation equipment. The series is available in six size options with a wide range of accessories.Modular air filter , Prevents contamination , Lighter weight than old style modular AF , Thickness reduction of resin case provides

Series AF modular style air filter is a cost effective, clean looking solution to your filtration needs. Its' modular design allows connection with other SMC air preparation equipment. The series is available in six size options with a wide range of accessories.Modular air filter , Prevents contamination , Lighter weight than old style modular AF , Thickness reduction of resin case provides

Series AF modular style air filter is a cost effective, clean looking solution to your filtration needs. Its' modular design allows connection with other SMC air preparation equipment. The series is available in six size options with a wide range of accessories.Modular air filter , Prevents contamination , Lighter weight than old style modular AF , Thickness reduction of resin case provides

Body Size: 30, Pipe Thread: N (NPT), Port Size: 02 (1/4), Mounting: w/o Mounting Option, Nominal Filtration Rating: 5 (5µ), Water Removal Type: S (Water Drop Removal Type), Semi-standard: Z (Name Plate And Caution Plate For Bowl In Imperial Unit (PSI, °F))

Fluoropolymer Piping Equipment

LQ1E3A-T-R8 LQ1E3A-T-R9 LQ1E4A-T-R1 LQ1E4A-T-R8 LQ1E4A-T-R9 LQ1E5A-T-R8 LQ1E6A-T-R1 3/8" x 1/4" 1/2" x 3/8" 1/4" x 5/32" 1/2" x 3/8" 3/4" x 5/8" 3/8" x 1/2" 3/4" x 5/8" 1" x 7/8" 1" x 7/8" 3/4" x 5/8" Note 1) Products marked are produced upon receipt of order.

ZP

Tightening torque Dimensions: With Buffer ZP2-T WK -B5 ZP2-T 20 WK -B5 Width across flat 8 (Hexagon) M5 x 0.8 Width across flat 8 (Hexagon) M5 x 0.8 5 5 D E 13 D E 13 Width across flat 14 (Hexagon) Width across flat 14 (Hexagon) 3 3 3 3 M10 x 1 M10 x 1 (F) (F) M5 x 0.8 M5 x 0.8 6 6 a 8 8 Dimensions Model Dimensions Y Y a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 2 x

LX

Stroke + 126 3.3 24 1 5 3 5.8 8 3 21 59 F 5H9 +0.030 0 depth 5 T-slot dimensions (2/1) 29.5 5H9 +0.030 0 depth 5 6 T-slot 4-M5 x 0.8 (for body mounting) thread depth 8 (11.5) 38 E Refer to page 299 for mounting.

Stability of suction position,

Stroke 32 40 50 63 80 100 125 32 40 50 63 80 100 125 ZP3EU-(T/Y)F1JB10 10 V V V V ZP3EU-(T/Y)F1JB30 30 ZP3EU-(T/Y)F1JB50 50 ZP3EU-(T/Y)F2JB10 10 V V ZP3EU-(T/Y)F2JB30 30 ZP3EU-(T/Y)F2JB50 50 ZP3EU-(T/Y)F3JB10 10 V V V ZP3EU-(T/Y)F3JB30 30 ZP3EU-(T/Y)F3JB50 50 ZP3EU-(T/Y)F4JB10 10 V V ZP3EU-(T/Y)F4JB30 30 ZP3EU-(T/Y)F4JB50 50 ZP3EU-(T/Y)F5JB10 10 V V ZP3EU-(T/Y)F5JB30 30 ZP3EU-(T/Y)F5JB50

42

T NPTF Enclosure Nil Dust-protected SYJ Sub-plate W Dust-tight/ Water-jet-proof (IP65) SZ 0 5 VQ4 0 1 Plug-in 1 02 VF 1 5 G VQ4 2 5 1 02 Plug lead VP4 CE-compliant Porting specifications VQ 1/2 Type of actuation Nil Q CE-compliant 3-position closed center 2-position single Nil Side ported B Bottom ported VQ 4/5 VQ 4/5 (A) 4 (B) 2 (A) 4 (B) 2 1 3 Note) CE-compliant: For DC only.

2 Phase Stepper Motor/Without Motor Brake Series LXS

) (52) The dimension inside [ ] shows the location at which the home position switch operates. 58 28 N x P 5 U 36: T-slot pitch 20 N C 1 0.2 (5.1) 10 5.8 4 5.5 36 10.5 6.5 6.5 1 3 39 28 3.3 T-slot A 4H9+0.030 0 depth 4 C 4H9 +0.030 0 depth 4 Work piece mounting reference plane Body mounting reference plane T-slot A dimension T-slot B dimension L-M6 6.5 Refer to cross section C-C. 27.5 T-slo

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

How to Order JSXZ 3 1 C N 02 R 5 G D B w y e r t u o !

Series VQ Base Mounted Metal Seal/Rubber Seal

VQ 0 5 1 0 1 Y (Example) Manual override B C Flat cable with power supply terminal block and 3m cable VV5Q11-08C6G2 VQ1100-5 VQ1200-5 VQ1300-5 Series Non-locking push style Push-locking slotted style Push-locking lever style 1 set Manifold base No. 4 setsValve No. (Stations 1 to 4) 1 set Valve No. (Stations 5) 3 setsValve No.

Speed Controller with Indicator

5 !2 q !5 q t t r u u i i r y y w !6 w Meter-in type Meter-out type Meter-out type Meter-in type Seal method: Face seal For G thread e o !3 !1 !0 !4 !2 !5 q t u i r y !7 w Meter-in type Meter-out type Component Parts No.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Stations 3 m Manual override 10 Clean series VVQ1000-10A-1 VVQ1000-10A-1 VQ1200-5 VQ1200-51 Seal 0 1 Nil: Non-locking push type (Tool required) B: Locking type (Tool required) VQ1200-5 VQ1200-51 Copper/Fluorine/Silicone free + Low particle generation VQ1200-5 VQ1200-51 VQ1200-5 VQ1200-51 21 VQ1100-5 VQ1100-51 VQ1100-5 VQ1100-51 Metal seal Rubber seal VQ1100-5 VQ1100-51 VQ1100-5 VQ1100-51

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Stations 3 m Manual override 10 Clean series VVQ1000-10A-1 VVQ1000-10A-1 VQ1200-5 VQ1200-51 Seal 0 1 Nil: Non-locking push type (Tool required) B: Locking type (Tool required) VQ1200-5 VQ1200-51 Copper/Fluorine/Silicone free + Low particle generation VQ1200-5 VQ1200-51 VQ1200-5 VQ1200-51 21 VQ1100-5 VQ1100-51 VQ1100-5 VQ1100-51 Metal seal Rubber seal VQ1100-5 VQ1100-51 VQ1100-5 VQ1100-51

0.4

5 !4 w !3 !0 r e u t 426 B Exploded View of Manifold Housing assembly and SI unit no. No. Manifold Part no.

SQ1000/2000

): SQ1241 Double (latching): SQ1240 t e q w t e q w SQ1241 SQ1240 (A)(B) (A)(B) 4 2 4 2 5 1 3 5 1 3 (R1) (P)(R2) (R1)(P)(R2) Double (double solenoid): SQ1241D Double (double solenoid): SQ1240D y e e q w y e q w e SQ1240D SQ1241D (A)(B) (A)(B) 4 2 4 2 5 1 3 u 5 1 3 u (R1)(P)(R2) (R1)(P)(R2) 3 position: SQ1 41 3 4 5 3 position: SQ1 40 3 4 5 y e e q y w e e q w u u SQ1540 SQ1440 SQ1340 SQ1541

air-filter-e

(Nominal) e AMD800 AMD810 AMD801 AMD811 AMD900 AMD910 AMD901 AMD9111 AMD1000 AMD1010 AL-61S 1 1 1 1 AL-61S 1 OD112XID90XT3 t AL-60S 1 1 1 AL-60S 1 KA00061 63174 63148 u 3 3 3 3 AL-63S 1 AL-63S OD112XID90XT3 (1A-G35) Element r 3 3 3 AL-62S 1 AL-62S e 5 5 5 5 AL-31S 1 AL-31S OD112XID90XT3 Drain 248 Micro Mist Separator with Pre-filter Series AMH Construction AMH150C to AMH550C, AMH650 AMH850

Air Preparation Equipment

(Nominal) e AMD800 AMD810 AMD801 AMD811 AMD900 AMD910 AMD901 AMD9111 AMD1000 AMD1010 AL-61S 1 1 1 1 AL-61S 1 OD112XID90XT3 t AL-60S 1 1 1 AL-60S 1 KA00061 63174 63148 u 3 3 3 3 AL-63S 1 AL-63S OD112XID90XT3 (1A-G35) Element r 3 3 3 AL-62S 1 AL-62S e 5 5 5 5 AL-31S 1 AL-31S OD112XID90XT3 Drain 248 Micro Mist Separator with Pre-filter Series AMH Construction AMH150C to AMH550C, AMH650 AMH850

33

1) C 10 to 30 Cooling capacity Note 3), 11) (50/60 Hz) W 1000/1200 For option -T: 900/1100 1400/1600 For option -T: 1300/1500 Temperature stability Note 4) C 2 Circulating fluid system Pump capacity (50/60 Hz) Note 5) MPa 0.08 (at 7 L/min)/0.11 (at 7 L/min) For option -T: 0.13 (at 7 L/min)/0.18 (at 7 L/min) Rated flow (50/60 Hz) Note 6) L/min 7/7 Tank capacity L Approx. 5 Port size Rc1/2