IDX-OM-W053

T 4-2-3 100 2 () 100 4 1 4 0 OFF 501015 OFF OFF IN/OUT ( ) 4 2 4 ) 30 () 30 O 4 3 4 AD48-A 1 ) 2019 3 2019 2 SERIAL No.XP AD48 SMC WEB IDF-S0002 1 C42FP-260S 1 IDF-S1933 1 2 4 4 5 5 5-1 3 ON OFF 600mm 1 10% () ( ) 60cm 1 10% 3 5 1 5 () 60cm 1 2 INOUT INOUT () 5 2 6 6 6 1 IDFA6E-2050Hz 0.75 m 3/h (ANR) 1 60Hz 0.82 0.7MPa 35 32 10 oC 550 0.15MPa 1.0MPa

How to Order Series ZM Vacuum Ejector With Valve and Switch For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

Maximum Ejector Stations (Max. operable nos. simultaneously) ZM053 ZM054 ZM073 ZM074 ZM103 ZM104 ZM133 ZM134 Ejector model Manifold model Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com R L 4 5 8 10 ZZM Stations 06 6 8 10 10 ZZM Stations 06B R L 4 5 8 10 ZZM Stations

3 Port Solenoid Valve Rubber Seal Series SY100 1

Other dimensions are same as grommet type. 2 20.5 3 31 4 41.5 5 52 6 62.5 7 73 8 83.5 9 94 10 104.5 Station L 4-3-12 13 Series SY100 Type 31 Manifold: Top Ported/SS3Y1-31Stations Grommet (G), (H) 11.5 P = 10.5 (Pitch) n-M3 x 0.5 (A port) 27.5 5 Manual override V100 3 5 G: 300 H: 600 9 R R SY 15.6 (Lead wire length) 28 (For DC) 21.5 10 25 34.5 (For AC) SYJ P P + + + + + VK 4-M5 x 0.8

Process Pump Series PA3000/5000/PAX1000 Series PB1000

10 0 0 10 30 40 50 20 60 10 20 Discharge rate l/min Discharge rate l/min Selection from flow rate characteristic graphs (PA3000) Required specification example: 3.

Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

FU) Size (mm) (mm) FU 10 20 30 50 HD HC HB HA DF DC DB DA 10 20 30 50 HE 5 6 6 7 Size HC 20H8 28H8 32H8 35H8 63 73 76 87 9.5 13.5 13.5 15.5 35h8 40h8 48h8 54h8 31.5 34.7 34.7 51.7 46h8 61h8 67h8 77h8 24 30 30 34 45h8 60h8 65h8 75h8 15.5 19.5 19.5 21.5 DF (mm) A 50 65 70 80 DF 5 6 6 7 DG HC JB JA J H AY FB FA CB AX DE DD D AW CA AV BE BD BC BB BA AU AA Size 10 20 30 50 15.5 16 18.5 22 4 5

1

size ZZ 20 5 37 (42.5) 78 (83.5) 20 63.5 (69) 25 5 37.5 (43) 81.5 (87) 25 64 (69.5) 32 5 38 (44) 82 (88) 32 64.5 (70.5) 40 5 44.5 (50.5) 95.5 (101.5) 40 72 (78) Bore size G S ZZ Bore size ZZ 20 7.5 49 (54.5) 90 (95.5) 20 75.5 (81) 25 7.5 49.5 (55) 93.5 (99) 25 76 (81.5) 32 7.5 50 (56) 94 (100) 32 76.5 (82.5) 40 7.5 54.5 (60.5) 105.5 (111.5) 40 82 (88) ( ): Dimensions of built-in magnet

3-Screen Display Multi-channel Digital Sensor Monitor Up to 4 pressure sensors can be connected!

MPa 10 MPa PSE531 PSE541 PSE561 101 kPa 0 PSE533 PSE543 PSE563 PSE573 100 kPa 100 kPa PSE532 0 100 kPa PSE564 PSE574 0 500 kPa PSE530 PSE540 PSE560 PSE570 0 1 MPa PSE575 0 2 MPa PSE576 0 5 MPa PSE577 0 10 MPa PSE550 0 2 kPa Internal Circuits and Wiring Examples PSE20 A Input/Output specifications 0 Brown DC(+) Analog voltage input DC() NPN open collector 5 outputs + Auto-shift 1

Lubrication Equipment

5 !6 NBR 1: 100V AC, 2: 200V AC, 4: 220V AC, 5: 24V DC, 9: Others 1.17-23 Booster Lube ALB900 Dimensions AC AV AU AF AR IR VEX AW AMR AWM AWD ITV VBA VE VY G By-pass Lubrication Adapter Related equipment/Strainer ALBA90-30 ALBA90-10, -20 AL At the terminal of an air pressure line in which a D.P.

MGC

D-G79/K79/K79C 10 8 10 9 10 D-H7/H7W, D-H7BAL, D-H7NF 6 4 4 4.5 5 MTS D-H7C 9.5 7 8.5 9 10 D-G5/K59 MY D-G5W/K59W 6 4 4 4.5 5 CY D-G5NTL/G5BAL D-G59F 7 5 5 5.5 6 MG D-G5NBL 45 35 40 40 45 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Since this is a guideline including

ISA2

The voltage variation must stay within the 10% to +10% range of the rated voltage. In case importance is attached to response characteristics due to use of a DC power source, keep the variation within the 5% to +5% range. The voltage drop is the value at the lead wire to which the coil is connected.

DOC1020530

Bit 7 Bit 2 Bit 0 Enable Enable Fault Reset Quick Stop Switch On Operation Voltage Shutdown 0 1 1 0 (2)/(6)/(8) Switch On 0 0 1 1 1 (3) Disable Voltage 0 0 (7)/(9)/(10)/(1 2) Quick Stop 0 0 1 (7)/(10)/(11) Disable Operation 0 0 1 1 1 (5) Enable Operation 0 1 1 1 1 (4)/(16) Fault Reset 0 1 (Note) (15) Note.

Series AP3100

65 C (No freezing) 2) 0.7 1.3 1.0 Inboard leakage Outboard leakage 2 x 10-11 Pam3/sec 2 x 10-10 Pam3/sec 4) 4 x 10-9 Pam3/sec 4) Ra max 15 in. (0.4 m) Option: 10 in. (0.25 m) Face seal , Tube weld Bottom mount 0.36 in3 (6.0 cm3) 1.27 kg 5) Leak rate Across the seat leak Surface finish Connections Installation Internal volume Weight 1/4 turn round knob with open/close indication window 7)

CRB1/Size: 10, 15, 20, 30

0 0.043 43 8 50 16 40 13 22 5 2 8 12 1.0 M5 1.1-10

3 Position Cylinder Series RZQ

Piston A Piston A C A A Piston B Piston B First-stage extension First-stage retraction Piston A Piston A B A C A C Piston B Piston B Second-stage extension Second-stage retraction 3 3 Position Cylinder Series RZQ Weight Weight Table Unit: kg Cylinder stroke Bore size (mm) 25-5 50-5 75-5 100-5 125-5 150-5 175-5 200-5 250-5 300-5 32 40 50 63 0.81 0.88 0.94 1.01 1.07 1.13 1.20 1.26 1.39 1.52

IDX-OM-M051

Remove the side panel and the plug 5 in the body, and open the stop valve 4. 4. Be sure to mount the plug 5 after draining the water, and close the stop valve 4 in the body. 5. Return the panel to the original position. 4. Stop valve in the body 5. Plug 4. Stop valve in the body Automatic fluid filling valve 5. Plug 2. 3.

Angle Seat Valve /

/N.O. 1/4 to 1 10 to 12 10, 15, 20, 25 Fluid / Orifice Diameter Applicable fluid Orifice diameter [mm] Series Air Air Medium vacuum Medium vacuum Oil Oil Water Water Steam Steam 1 5 10 20 50 Hightemperature oil Hightemperature oil Heated water Heated water Can be used with heated water Can be used with heated water VX Series1 Direct Operated Pilot Operated 10 2 1 Single Unit VDW Series

Check Valve Series AK 1

Inch size Metric size Port size 4 04 03 5/32 M5 M5 x 0.8 Thread type 6 06 07 1/4 U10/32 10-32 UNF 8 08 09 5/16 Metric thread (M5) 01 1/8 Nil 10 10 11 3/8 Unified thread (10-32 UNF) 02 1/4 12 12 13 1/2 R 03 3/8 N NPT 04 1/2 Check valve free flow direction Applicable Tubing O.D./Port Size Combinations From male thread to One-touch fitting A Metric size Inch size Applicable tubing O.D.

2 Finger, 3 Finger, 4 Finger Air Gripper Parallel Type Series MHS

6.5 5 3 24 5 3 24 6 3 5 4.5 24 4 4 4 33 33 33 (mm) I 4 5 5 Model MHS2-16D MHS2-20D MHS2-25D G 25 27 28 FZ 3 3 5 FY 11 13 14.5 FX 12.5 14.5 17 CB 11 13 15 EC 10 12 14 EO 14 16 20 NB 5h9 6h9 6h9 DC 30 36 42 NA 8 10 12 DO 34 40 48 K 4 5 6 B 30 36 42 Q 6 7 8 J 10 12 14 AA 35 38 40 AB 32 35 37 O 2 2.5 3 P M3 x 0.5 M5 x 0.8 M5 x 0.8 0 -0.030 0 -0.030 0 -0.030 Model MHS2-16D MHS2-20D MHS2-25D VA

ZL3-OM00801

No 1 2)3) 4) 5)6) 6) 5)6) 7) O 8) 9) 10) 11) 12) 13) 1 2)3) 4) 14) 15) 10) 11)16) 28 No.ZL3-OM00801-A No 1 ON 10 2) 3) 4) 5) 6) 7) 8) O O 9) 10) 11) 12) 13) 14) 15) ON/OFF 16) 29 No.ZL3-OM00801-A Revision history AUKCA marking added 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com

VCA

LVQ Rc G NPT NPTF Nil F N T Series LQ 3 4 Class 3 Class 4 LVN Port size (OUT) Valve type TI/ TIL Size 3/8 (10A) 1/2 (15A) Class 3 Symbol 03 04 06 Class 4 5 N.C. for manifold PA Fluid 3/4 (20A) General air Dry air Nil A PAX Orifice size Orifice size (mm) 4 5 7 10 Class 3 Class 4 Symbol 4 5 7 10 PB Voltage 1 2 3 4 5 6 36 100 VAC 200 VAC 110 VAC 220 VAC 24 VDC 12 VDC 230 VAC Manual override