125

5 VDC R 3 VDC * There is no S option for AC, since a rectifier prevents surge voltage generation.

IDX-OM-W093

R .11-1 11.1 . 11-1 11.2 . 11-1 11.3 . 11-2 12 T . 12-1 12.1 . 12-1 12.2 . 12-1 12.3 . 12-2 12.4 . 12-3 12.5 . 12-4 13 V . 12-5 13.1 . 13-1 13.2 . 13-1 13.3 . 13-2 14 . 14-1 14.1 . 14-1 IDF60/70/80/90 Series IDX-OM-W093 1 1.1 () 6.2 1.1.1 3 IDF60/70/80/90 Series 1-1 IDX-OM-W093 1.2 6 1.2.1 1.2.2 50 1.2.3 0 IDF60/70/80/90 Series 1-2 IDX-OM-W093 1.2.4 IDF60/70/80/90

Serial Network

(U, D)-SCS1 EX124 (U, D)-SCS2 EX140-SCS1 EX140-SCS2 EX120/121/122-STA1 EX123(U, D)-STA1 IN313-TA1 N N Y Y 16 8 16 8 16 8 16 16 16 16 8 16 8 0 0 0 0 0 0 0 0 0 0 0 0 0 VQ, SX, SY & SV VQ2000/4000/5000 CompoBus/S OMRON N N N Y SQ1000/2000, SZ3000/5000 VQ, SX, SY & SV VQ2000/4000/5000 (N)VFR/S, (N)VZS, ISO SYSBUS N EX120/121/122-SSL1 N VQ, SX, SY & SV EX120/121/122-SSL2 N S-Link SUNX EX123 (

Compact Cylinder with Solenoid Valve/

50 to 300 mm/s Piston speed 1.

Series VC, Direct Operated, 2 Port Solenoid Valve for Water, Series VCW

(mm) Electrical entry P Port size A B C D E F H K L M Model Grommet: G Conduit: C DIN connector: D Conduit terminal: T Q R Q R Q R S Q R S 13.5 28 64 31 6.5 12.5 28 14 12.8 M4 22 45 44 43 58 40.5 46.5 99 43 66 1/8 VCW21 18 36 67 31 8.5 12.5 28 18 12.8 M4 22 46 44 44 58 41.5 46.5 99 44 66 1/4 22 40 80.5 36.5 11 15 32 20 19 M5 24 56.5 46 54.5 60 52 48.5 101 54.5 68 1/4, 3/8 VCW31 30 50 85.5

Thermo-con/Rack Mount Type

Communication connector D-sub 9 pin (socket) Holding screw: M2.6 6 Contact a for output cutoff alarm (open when alarm occurs) 7 Common for output cutoff alarm 9 15 10 11 12 13 14 Pin no.

SL5200

Single Stage Compact Regulator for Ultra High Purity Series SL5200 Sub-atmospheric pressure delivery option Springless design (No poppet spring in the wetted area) For UHP gas delivery Flow capacity Standard: to 30 slpm HF (option): to 130 slpm Body material: 316L SS secondary remelt Hastelloy internals available for corrosion resistance How to Order Port Number q w e SL52 S M FV4 FV4 02

ML1

W: Weight (kg) F: Load (N) FE: Load equivalent to impact (N) a: Average speed (mm/s) M: Static moment (Nm) : Collision speed (mm/s) L1: Distance to center of load gravity (m) ME: Dynamic moment (Nm) g: Gravitational acceleration (9.8m/s2) 1.4 100 =1.4 a(mm/s) FE= agW (4) 1 3 ME= FEL1=0.05aWL1(Nm) Note 4) Average load ratio (This is for averaging Max. load moment when stopper collides in case

Series 12-CY3B ø6, ø10, ø15, ø20, ø25, ø32, ø40 ø50, ø63 Magnetically Coupled Rodless Cylinder

flats C G E H B NN Effective thread length T (R) NA Q N F NA I F N CC 0.1 + 12-CY3B50, 63 12-CY3B6 to 15 (mm) B 17 25 35 36 46 60 70 86 100 0.007 0.043 30 32 CC 32 38 D 7.6 12 16.6 21.6 26.4 33.6 41.6 52.4 65.4 E 4 1.5 2 2 2 2 3 8 8 F 8 9 10 13 13 16 16 2 2 G 5 5 5.5 7.5 7.5 8 11 14 14 H 13.5 12.5 13 20 20.5 22 29 33 33 I 28 34 40 50 58 72 J 4.5 4.5 6 6 8 8 10 12 12 N 9.5 11 11 18 18.5 20

Clean Regulator/Fluororesin Type

SRF 1 07 11 0 S S 1 With nut Body size 1 3 5 Fitting type Pilot port thread type Made to Order (Refer to page 887 for details.)

Compact Cylinder

100 Allowable lateral load at rod end [N] 80 Mass of Cylinder Moving Parts: Without Magnet for Auto Switch [g] 63 50 10.0 Bore size [mm] Cylinder stroke [mm] 40 32 5 10 15 20 25 30 35 40 45 50 12 5 6 7 8 9 10 25 16 5 6 7 9 10 11 20 9 11 13 15 17 19 21 23 25 27 20 16 1.0 25 15 18 21 24 27 30 33 37 40 43 32 27 32 36 41 45 50 54 59 63 67 12 0.4 40 42 48 54 60 66 73 79 85 91 97 0 10 20 30 40

IDX-OM-W094

R . 11-1 11.1 . 11-1 11.2 . 11-1 11.3 . 11-2 12 T . 12-1 12.1 . 12-1 12.2 . 12-1 12.3 . 12-2 12.4 . 12-3 12.5 . 12-4 13 V . 13-1 13.1 . 13-1 13.2 . 13-1 13.3 . 13-2 14 . 14-1 14.1 . 14-1 IDFA60/70/80/90 Series IDX-OM-W094 1 1.1 z z z z z z z z z () 6.2 z 1.1.1 3 IDFA60/70/80/90 Series 1-1 IDX-OM-W094 1.2 6 1.2.1 1.2.2 50 1.2.3 0 IDFA60/70/80/90 Series 1-

10

Grease pack part number: GR-S-010 (10 g)/GR-S-020 (20 g) 7 Wide Type Parallel Style Air Gripper MHL2 Series Dimensions MHL2-10DmZ 6 6 9 2 x M4 x 0.7 thread depth 5 (Mounting thread) D Closed J View K (Fingers closed) The above figure shows the MHL2-10D1Z/10D2Z.

2 Finger, 3 Finger Rotary Actuated Air Gripper Series MHR2/MHR3 1

Nil S Number of fingers 2 fingers Nominal size 2 10 15 20 30 Auto switch Nil Without auto switch (Built-in magnet) Connecting port For the applicable auto switch model, refer to the table below. R: Body side E: Axial side Port Port Applicable Auto Switch/Refer to page 12-13-1 for further information on auto switches.

Compact Guide Cylinder End Lock Type SeriesMGP

B + Stroke A + Stroke FA FB S HR E b a With front lock XAH7 c d e MO XB T-slot dimensions (mm) DM HN XAH7 XC XL Bore size (m) a b c d e End lock mechanism (locking type manual release ) 6.5 10.5 5.5 3.5 9.5 32 Section XX detailed diagram 6.5 10.5 5.5 4 11 40 8.5 13.5 7.5 4.5 13.5 50 11 17.8 10 7 18.5 63 LL With rear lock (mm) Standard strokes (mm) Bore size (mm) ML NN OA B C DA FA FB G GA

3 Port Solenoid Valve, VQ100 Series, Base Mounted Type

. 4 stations 4 1 SOL. 5 stations 5 SOL. 6 stations 6 (b) SOL. 7 stations 7 2 SOL. 8 stations 8 SOL. 9 stations 9 Black White SOL. 10 stations 10 SOL. 11 stations 11 SOL. 12 stations 12 SOL. 13 stations 13 SOL. 14 stations 14 SOL. 15 stations 15 SOL. 16 stations 16 SOL. 17 stations 17 SOL. 18 stations 18 COM 19 COM 20 Electrical wiring specifications 18

Paddle Style Flow Switch Series IF3 For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

For pipe fitting 4B through 6B Applicable fittings For pipe fitting 3/4B through 3B Welding Welding Piping B Reducing tees B 1 1 x 1 x 1 24 or more 11/4 11/2 11/4 x 11/4 x 1 1B socket 11/2 x 11/2 x 1 cut in half 2 x 2 x 1 2 21/2 x 21/2 x 1 21/2 3 x 3 x 1 3 Pipe 4B through 6B Reducing tees B Socket Pipe : JIS B 2301 : JIS B 2302 : JIS B 3452 Without flash 16-12-8 4 Paddle Style Flow Switch

JXCx-OMT0034CN

/s 14h 10%100%1016 0Ah 0Ah 14h RWwn+7 15bi 8bit 7bit 0bit 16 16 (WORD) ) (RWwn+1)100mm/s 16 100mm/s 0064h 00 64 h 32 32 ) (RWwn+2,3)700.00mm 0.01mm 700.00mm 7016 00011170h 00 01 11 70 h 64h 00h RWwn+1 15bit 8bit 7bit 0bit 01h 00h RWwn+2 15bi 8bit 7bit 0bit 70h 11h RWwn+3 15bi 8bit 7bit 0bit 39 - 12.2 IF ( ) IF ID ID=1 bit 7 6 5 4 3 2 1 0 I_Address RWrn+8 bit F E D C B A 9 8 I_Address

ncq8mp

NCQ8B056-S-PS NCQ8B056-S-PS 056 (9/16") NCQ8B075-S-PS NCQ8B075-S-PS 075 (3/4") NCQ8B106-S-PS NCQ8B106-S-PS 106 (1 1/16") Piston seal is included. NCQ8B150-S-PS NCQ8B150-S-PS 150 (1 1/2") NCQ8B200-S-PS NCQ8B200-S-PS 200 (2") NCQ8B250-S-PS NCQ8B250-S-PS 250 (2 1/2") Construction Single Acting Spring Extend 11 12 10 Seal Kit Parts List No.

SYJA3000

) 2-P1.8 2-M3 X 0.5 (Pilot port) A B 11 1.5 (Mounting holes) 2-3.2 17.5 18.5 A B (Non-locking) Manual override (Non-locking) Manual override 14 36 18.5 21 41.6 13.5 15 41.6 28.5 R2 P R1 21 R P R 13 11 0.5 10 5 5 1 (Bleed port) 210 10 7 7 1 (Bleed port) 228 5-M3 X 0.5 (Piping port) 5-M5 X 0.8 (Piping port) 3 position closed center/exhaust center/pressure center: SYJA3 20-M3(-F) 3 position