Environment

Note 13) With lock only Note 14) For an actuator with lock, add the power consumption for the lock.

Thermo-chiller/Rack Mount Type

, Ion exchange resin*13 Power supply Single-phase 200 to 230 VAC, 50/60 Hz, Allowable voltage range 10%*15 Circuit protector [A] 10 Applicable earth leakage breaker capacity8 Rated current: 10 A Sensitivity current: 30 mA Electrical system Cable quantity x Size (Including grounding cable)16 3 cores x 14 AWG (3 cores x 2.0 mm2) Rated operating current (50/60 Hz)17 [A] 2.5/3.0 For Option T1

SFOD-OMT0005CN

(P.12) PLC (PLC) 2 11.4 (P.49) () () 3.2 (P.13) USB 10.(P.41) 5 10.(P.41) 10.(P.41) 3.(P.12) ( EMG ) 3.

Air Cylinder Series MB

M12 X 1.75 6 20 19 27 60 32 110 136 54 46 52 65 75 95 114 32.5 38 46.5 56.5 72 89 12 16 20 20 25 30 30 35 40 45 45 55 13 13 14 14 20 20 13 14 15.5 16.5 19 19 47 51 58 58 72 72 16 16 16 16 16 16 4 4 5 5 5 5 M6 X 1 M6 X 1 M8 X 1.25 M8 X 1.25 M10 X 1.5 M10 X 1.5 6 6 7 7 10 10 M10 X 1.25 M14 X 1.5 M18 X 1.5 M18 X 1.5 M22 X 1.5 M26 X 1.5 27 27 31.5 31.5 38 38 1/8 1/4 1/4 3/8 3/8 1/2 84 84 94

ZMA

Refer to pages 13-15-3 to 13-15-4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to page 13-1-5 for Precautions on every series. Mounting Warning 1. Do not drop or bump. Do not drop, bump or apply excessive impact (1,000 m/s2) when handling.

Steam Valve

N.C. 6A 8A 10A 10A 15A 20A 25A 32A 32F 40A 40F 50A 50F 1 8 1 4 3 8 3 8 1 2 3 4 7 1 15 2 20 3 25 4 1 1 1 4 32 5 11 4 B Flange 11 2 40 6 11 2 B Flange 2 50 7 2B Flange 634 Steam Valve: 2 Port Valve For SteamVND Series Model Port size Flow rate characteristics Weight (kg) Orifice dia.

VND

N.C. 6A 8A 10A 10A 15A 20A 25A 32A 32F 40A 40F 50A 50F 1 8 1 4 3 8 3 8 1 2 3 4 7 1 15 2 20 25 3 4 1 1 1 4 32 5 11 4 B Flange 11 2 40 6 11 2 B Flange 2 7 50 2 B Flange 17-4-38 3 Series VND Steam Valve: 2 Port Valve For Steam Model Port size Flow characteristics Weight (kg) Av x 10-5 Orifice size (mm) Model Rc Flange Note) VND10D-6A VND10D-8A VND10D-10A VND20D-10A VND20D-15A VND30D-20A VND40D

Vacuum Pad

A B D Weight [g] ZP3P-T25PTSFK10-B5 33 69 23 28.5 ZP3P-T25PTSFK20-B5 43 107 51 42.2 ZP3P-T35PTSFJM-B01 ZP3P-T35PTSFKM-B01 ZP3P-T35PTSFJ10-B01 ZP3P-T35PTSFK10-B01 ZP3P-T35PTSFK20-B01 ZP3P-T35PTSFJ20-B01 Width across flats 13 Rc1/8 Width across flats 13 Width across flats 13 Rc1/8 Width across flats 13 K: Non-rotating D-D J: Rotating D-D B B Width across flats 19 Width across flats 19 D D D

Compact Cylinder with Air Cushion

16 11.5 15 9 13 13 13 14 14 9.5 9.5 9.5 17 11.5 D-A79W D-A9, A9V D-F7, F7V D-J79, J79C, J79W D-F7W, F7WV D-F79F, F7BAL D-F7BAVL 5.5 5 6 6 6 6.5 6.5 7 7 7 8 7 8 8.5 8 9 D-F7LF D-F9, F9V D-F9W, F9WV D-F9BAL 5.5 5.5 5.5 6.5 5.5 6.5 Hysteresis specifications are given as a guide, it is not a guaranteed range.

C95

54 19.5 22 G 1/8 7.5 46 97 45.5 12 32.5 83 13 13 30 NCM 40 13 16 13 63 21 24 G 1/8 10 52 104 52.5 12 38 91 14 16.5 35 50 16 20 14 75 29 32 G 1/4 11.5 65 120.5 58.5 15 46.5 104.5 15.5 19 40 NCA 63 16 20 14 90 29 32 G 1/4 17.5 75 134.5 68 12 56.5 119.5 16.5 23 45 80 21 25 20 102 37 40 G 1/4 22 95 169 81 18 72 150 19 33 45 D100 21 30 20 116 37 40 G 1/4 25 114 189 96 20 89 170 19 37.5 55 T ZZ

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

1) 11 (Pitch) P=10.5 4.5 12.5 41.5 [48.5] + + + + + (Station 1) (Station n) 26.1 A A 13 10 41.5 [48.5] (Pitch) P=10.5 M3 x 0.5 (A port) 13.5 A A 13 10 (Pitch) P=10.5 11.5 M3 x 0.5 (A port) L plug connector (L) M plug connector (M) M8 connector (WO) Approx. 300 (Lead wire length) 41.5 [48.5] 26.1 46 28.5 52.6 [59.6] Approx. 300 (Lead wire length) 58.7 [60.9] 48.9 [51.1] 57.8 50.4 43.9 Refer

HRX-OM-R028

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 3 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Low level in tank 1 High circulating fluid discharge temp. 2 Circulating fluid discharge temp. rise 3 Circulating fluid discharge temp. drop 4 High circulating fluid return temp. 5 High circulating

CLK1

33 13 33 Hs D-A3 D-G3, D-K3 B A 49 B Hs A 49 34 56 18 36 18 36 B D-A4 Hs A 34.5 56 18 36 Minimum Strokes for Auto Switch Mounting Minimum strokes are as follows based on the space required for mounting auto switches.

Clamp Cylinder with Lock Series CLK1

33 13 33 Hs D-A3 D-G3, D-K3 B A 49 B Hs A 49 34 56 18 36 18 36 B D-A4 Hs A 34.5 56 18 36 Minimum Strokes for Auto Switch Mounting (mm) 1in = 25.4mm Minimum strokes are as follows based on the space required for mounting auto switches.

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Double Rod Series CHAW

(mm) Y ZZ P R S T V W X 40 8 246 1/4 37 114 11 7.5 8 27 50 10 262 3/8 43 116 11 10 9 30 63 10 280 3/8 47 120 11 12 10 37 80 13 312 1/2 57 132 11 16 13 40 100 13 340 1/2 66 140 12 20 16 47 125 15 340 1/2 77 140 12 20 16 55 160 20 375 3/4 94 159 12 24 20 60 109 Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Double Rod Series CHAW Front flange type: CHAWF Width across flats G 4-

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

1r sr {3ool vJ3000 + 13 I Lead wn lenqlh 4.23 {5 al I 95r19!

AC Servo Motor Driver (SSCNET /H Type)

Axis No. settings 13 5. Parameter list (Driver side) 15 6.

ZPT/ZPX

Series ZPX Female thread Female thread 13-11-77 to 13-11-80 Lateral vacuum entry Buffer body (Male thread) Female thread Pad dia.

o

1r sr {3ool vJ3000 + 13 I Lead wn lenqlh 4.23 {5 al I 95r19!

o

1r sr {3ool vJ3000 + 13 I Lead wn lenqlh 4.23 {5 al I 95r19!