LEC-OM08003 // LEC-T1 Series LEC6 LECPA TB Ver2.1 .5 .7 1. .9 1.1 .9 1.9 2.10 1.2 .11 1.11 2. .12 3. .13 3.1 .13 (1).13 (2)Tree .13 3. .14 (1).14 (2)Tree .15 4.16 5. .17 5.1 .18 5.2 .19 (1).19 (2).19 5.3 .20 (1).21 (1-1) LECPLECA 22 (2) .23 (2-1) LECPLECA 23 (2-1-a) TB Ver1.**. 23 (2-1-b) TB Ver2.**. 25 (2-2) LECPLECA 27 (2-2-a) TB Ver1.**. 27 (2-2-b) TB Ver2.**. 29 (2-3) LECPLECA .32 1
Rotate the pressure gauge cover 15 degree counterclockwise to pull out the pressure gauge cover. AW20(K) AW30(K) AW40(K) AW60(K) 2) Remove the pressure gauge. Rotate two mounting screws counterclockwise with Phillips head screw driver to remove the pressure gauge and two mounting screws.
, 20, 25, 30 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 Replacement Parts: Seal Kits Theoretical Output Table OUT IN Unit: N Bore size (mm) Contents Kit No.
34.5 26.5 25.5 (34.5: Connector type) Angle adjustment bolt 2-M5 x 0.8 (Port position: Side port type only) A port B port 31 25 20.5 (26.5: Connector type) 50 65 Connector type 8 4 Connector type 10 Series MSUA Rotary Table High Precision Type Construction Single vane 180 (Indicates intermediate position) 90 (Indicates A port pressurized) Parts list No. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
16 17 18 19 20 21 22 23 24 /01FD COMA B AXT100-DS25-015 1.5m AXT100-DS25-030 3m AXT100-DS25-050 5m MIL D AXT100-DS25-080 8m 25 AXT100-DS25-100 10m 25 0.3mm 2 AXT100-DS25-150 15m AXT100-DS25-200 20m AXT100-DS25-300 30m 11 No.VFS4000-OMY0001 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 6 3 5G 7 1) 2)()() 3)3 , 12 12 12 12 2 Nm M5 1.52 Rc 1/8 79 Rc 1/4 1214 Rc
Rotate the pressure gauge cover 15 degree counterclockwise to pull out the pressure gauge cover. AW20(K) AW30(K) AW40(K) AW60(K) 2) Remove the pressure gauge. Rotate two mounting screws counterclockwise with Phillips head screw driver to remove the pressure gauge and two mounting screws.
20 25 Flow rate L/min VY1 SRH4110-03 VBA VBAT 0.5 AP100 0.4 0.3 0.2 0.1 10 5 0 15 20 25 Flow rate L/min 859 SRH Series Construction Component parts Material No.
To booster lube From booster lube To booster lube From booster lube A B 63 63 80 85 90 100 C Port size Rc INA-11-402 INA-11-403 INA-11-404 INA-11-405 INA-11-406 INA-11-407 Model 1 4 3 8 15 15 15 20 22 22 141 164.5 170 180 230 251 , , 1 4 3 8 1 2 B C D E F Port size Rc Part no. A 3 4 , 1 2 150 165 42.7 76.3 45 65 40 60 35 40 80 80 1 1 3 4 ALBA90-10 ALBA90-20 14-13-19
(Newark) 3434 US Hwy.22 West, Ste. 110 Somerville, NJ 08876 Tel: (908) 253-3241 FAX: (908) 253-3452 SMC Pneumatics lnc. (Detroit) 2990 Technology Drive Rochester Hills, Ml 48309 Tel: (248) 299-O2O2 FAX: (2a8) 293-3 SMC Pneumatics Inc. (St. Louis) 4130 Rider Trail North Earth City, MO 63045 Tel: (314) 209-0080 FAX: (314) 209-0085 SMC Pneumatics lnc. (Charlotte) 5029-8 West W.T.
8 22 8 15 80 18 M6 x 1 20 40 36 M26 x 1.5 124 13 10 70 41 41.6 3 16 11 29 10 16 92 23 M6 x 1 26 50 46 M32 x 2 150 13 TF TN Nil P (Piping port) ZZ X W TT Model 12-REA25 12-REA32 12-REA40 50 Rc1/8 30 NPT1/8 137 G1/8 17 50 Rc1/8 40 NPT1/8 156 G1/8 19 60 Rc1/4 40 NPT1/4 182 G1/4 22 12-REA50/63 0 L0.2 33 B 2 x 4 x V Effective thread depth 16 2 x P (Piping port) 14 14 8 (R) D X Q Q 14.5 22 I 2
Contents Safety Instructions. 2 Outline of clean room specification. 4 Grease used. 4 2 Recommended tube diameter. 4 Raising dust characteristic. 4 21 Recommended tube diameter. 4 22 Amount of vacuum aspiration . 6 How to Order. 7 Construction. 8 1 11-LEF Series / Slider type Safety Instructions These safety instructions are intended to prevent hazardous situations and /or equipment damage
CRB1BW635 0.030 0 5 0.030 25 0 83 60 PORT 4-R7.5 Top ports (port position): CRB1BW63-SE, CRB1BW63-DE 75 0 0.052 28h9 17 0.006 0.017 15g6 5 B port B port 25 45 80 21 When the B port of body (B) is threaded, it is closed with a Rc 1/8 plug. 3 14 3 14 29 22 Body (B) 15 Body (A) 2-Rc 1/8 A port 14 14.9h9 0 0.043 12 15g6 0.006 0.017 28h9 0 0.052 25 A port B port 75 2-Rc 1/8 8 (8) 82 27
V oltage: 30 VDC Current: 5 to 50 mA DC Note: The connection example in 2.3 shows sink circuits. 15 - (2) Line Driver Output Circuit CN1 connector terminals, 17-18 (phase-A signal), 19-20 (phase-B signal), and 21-22 (phase-Z signal) are explained below. These terminals output the following signals via the line-driver output circuits.
Auto switch .15 5.Operating method or operation .16 5-1Precautions for Design .16 5-2. Installation .17 5-3. Air supply .22 5-4. Piping .22 5-5. Operating environment .23 5-6. Lubrication .23 6. Maintenance or inspection .23 6-1. Maintenance or inspection .23 6-2. Replacement part .24 6-3.
Delivery Pressure: 15 [5 to 150 psig (0.034 to 1.0 MPa)], Material: SH (Body: 316L SS Secondary Remelt; Poppet: Hastelloy® C-22; Diaphragm: Hastelloy® C-22; Nozzle: Hastelloy® C-22), Surface Finish: 15 μin. (0.4 μm), Standard, Ports: 2PW [2 Ports (1-In; 2-Out)], Connections, Inlet: FV4 (1/4 Inch Face Seal, Female), Connections, Outlet: FV4 (1/4 Inch Face Seal, Female), Gauge Port, Inlet
Delivery Pressure: 15 [5 to 150 psig (0.034 to 1.0 MPa)], Material: SH (Body: 316L SS Secondary Remelt; Poppet: Hastelloy® C-22; Diaphragm: Hastelloy® C-22; Nozzle: Hastelloy® C-22), Surface Finish: 15 μin. (0.4 μm), Standard, Ports: 2PW [2 Ports (1-In; 2-Out)], Connections, Inlet: FV4 (1/4 Inch Face Seal, Female), Connections, Outlet: FV4 (1/4 Inch Face Seal, Female), Gauge Port, Inlet
Delivery Pressure: 15 [5 to 150 psig (0.034 to 1.0 MPa)], Material: SH (Body: 316L SS Secondary Remelt; Poppet: Hastelloy® C-22; Diaphragm: Hastelloy® C-22; Nozzle: Hastelloy® C-22), Surface Finish: 15 μin. (0.4 μm), Standard, Ports: 2PW [2 Ports (1-In; 2-Out)], Connections, Inlet: MV8 (1/2 Inch Face Seal, Male), Connections, Outlet: MV8 (1/2 Inch Face Seal, Male), Gauge Port, Inlet:
Delivery Pressure: 15 [5 to 150 psig (0.034 to 1.0 MPa)], Material: SH (Body: 316L SS Secondary Remelt; Poppet: Hastelloy® C-22; Diaphragm: Hastelloy® C-22; Nozzle: Hastelloy® C-22), Surface Finish: 15 μin. (0.4 μm), Standard, Ports: 2PW [2 Ports (1-In; 2-Out)], Connections, Inlet: FV4 (1/4 Inch Face Seal, Female), Connections, Outlet: FV4 (1/4 Inch Face Seal, Female), Gauge Port, Inlet
Delivery Pressure: 15 [5 to 150 psig (0.034 to 1.0 MPa)], Material: SH (Body: 316L SS Secondary Remelt; Poppet: Hastelloy® C-22; Diaphragm: Hastelloy® C-22; Nozzle: Hastelloy® C-22), Surface Finish: 15 μin. (0.4 μm), Standard, Range Options: Standard, Ports: 2PW [2 Ports (1-In; 2-Out)], Connections, Inlet: FV4 (1/4 Inch Face Seal, Female), Connections, Outlet: FV4 (1/4 Inch Face Seal
2 KRY10-04S 56.5 68.6 34 44 22 1 4 3 8 KRY12-02S KRY12-03S 55.5 57 17 24 45.4 17 30.5 1 2 KRY12-04S 25.7 59.5 71 12 22 Reference dimensions after R(PT) thread installation.