Electric Actuators

300 146 LJ1S202SC 90 130 118 96 to 300 LJ1H101SC to 500 6 48 LJ1H101PB 122 2 110 44 to 600 104 145 LJ1H101NB 4 46 to 600 LJ1H202SC 124 112 16 58 to 500 LJ1S303SC 146 132 120 92 98 to 300 to 300 to 300 LJ1H202PA 8 50 to 500 124 112 106 LJ1H202NA 12 54 to 500 LJ1H303SE 126 114 22 64 to 500 to 500 to 500 LJ1H202PC 10 52 to 1000 to 740 to 930 to 600 to 500 145 124 112 106 LJ1H202NC 14 56

Series LQ3 High Purity Fluororesin Fitting

Thread Size RNPT A E H L M W LQ3H1A-M LQ3H2A-M LQ3H2B-M LQ3H3A-M LQ3H3B-M LQ3H3C-M LQ3H4A-M LQ3H4B-M LQ3H4C-M LQ3H5A-M LQ3H5B-M LQ3H5C-M LQ3H6A-M LQ3H6B-M LQ3H6C-M 29.5 10 11 33.5 14 10 1/8" 1/8" 1/4" 1/8" 1/4" 3/8" 1/4" 3/8" 1/2" 3/8" 1/2" 3/4" 1/2" 3/4" 1" 1/8" L 37.5 17 16 43.5 20 14 1/4" H (A) W 48.5 21 55 25 18 22.5 3/8" M 1/2" 56 24 64 29 22 24.5 1/4 (E) Thread Size R(NPT) 66.5 32 76

Electric Actuator with Integrated Guide Series LTF

Deflection 100 200 300 400 500 600 700 800 900 1000 36 LTF6EPH 4 to 500 to 390 40 LTF6ENH 8 to 500 to 390 44 LTF8FPL 12 to 1000 to 890 to 710 to 580 to 480 48 LTF8FNL 16 to 890 to 710 to 580 to 480 to 1000 71 34 LTF6EPF 2 to 300 to 230 38 LTF6ENF 6 to 300 to 230 42 LTF8FPH 10 to 500 to 440 to 350 to 290 to 240 46 LTF8FNH 14 to 500 to 440 to 350 to 290 to 240 52 LTF6EPH-K 20 to 500 to 390 56

5 Port Solenoid Valve Series SQ1000/2000

216.5 234 262.5 273 15 228 245.5 275 285.5 16 239.5 257 287.5 298 L1 L2 L3 L4 21 5 Port Solenoid Valve Series SQ1000/2000 SQ2000/Flat Cable Kit Stations SS5Q23JD0 L2 L3 L4 5.25 Indicator light M5: External pilot port 58 25 L1 28.8 Release for switching connector direction 1 47.8 P = 17.5 18 (mounting hole dimension) Manual override 131.5 (single, double, dual 3 port valve) 5.5 5.5 35 47.5 56

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

(Initial value) Note 3) Value for high pressure type (1.5W) specification Note 4) Value for the low power consumption (0.5W) specification 56 Series VQ1000 VQ1000/Flat Cable Kit Stations VV5Q13J 0(D) U S Applicable connector: Flat cable connector (20P) (conforms to MIL-C-83503) L2 23.5 P = 11 13.2 L1 6.2 41 35 Indicator light 1.5 1.5 (11) 19.5 (Mounting hole dimension) Manual override 2-

VH Series, 4 Way Hand Valve

Body Mount/Dinensions Series VH (mm) / Body mount type Dimensions Scale: 35% VH600-N06/N10 2 (A) 4 (B) 1 (P) 132 152 411 132 300 223 150 151 48 25 4-3/4,1NPT 3 (R) 40 7 Series VH Panel mount/Dimensions (mm) / Panel mount type Dimensions VH21 -N02 VH31 -N02/N03 Scale: 40% 4 (B) 2 (A) 25 25 25 4 (B) 1 (P) 3 (R) 1 (P) 74 62 62 49 2 (A) 49 45.5 46.6 62 134 97 125 94 1.5 45 1.5 106 88.5 92 73 56

3 Port Direct Operated Poppet, Solenoid Valve, Series VKF300

type only) 24.5 (mounting holes) 67.5 59 P R P R mPm 4Rc(PT) 1/8 (ports P, R) 8 23 39 2.3 Pg.7 1 20.5 P = 19 13.5 5 1.5 20.5 25 30 53.5 Approx. 300 (lead wire length) L2 L1 31 10.5 8 39 23 49.5 1.5 10.5 49.5 4-M3 x 0.5 depth 6 (bracket mounting screws) 4-4.5 (bracket mounting holes) 7 7 5 L3 P = 19 16 nRc(PT) 1/8 (port A) 23 8 19.5 L: Dimension table n: Stations n L L1 L2 L3 1 37 27 13 2 56

Compact Vacuum Ejector Series ZQ

Please refer to the catalogue to confirm the sizes of the fittings to be used. n: Number of stations (mm) Dimensions 5 6 1 26 52 2 36 52 3 46 62 4 56 72 5 66 82 6 76 92 7 86 102 8 96 112 n L1 L2 EXH EXH P PE P PE V V V V Circuit ZQ13M-K1-D ZQ13M-K2-DK ZQ13M-J1-F ZQ13M-Q1-FK 9 Series ZQ Manifold Exploded View 6 3 6 4 6 b b view 4 6 2 a 5 a 5 5 Component Parts No.

AC Servo Motor Driver (Pulse input type)

the accuracy of one revolution. 16pulse 13 ABS counter The move distance from the home position in the absolute position detection system is displayed in the multiple-revolution counter value of the absolute position encoder. 1rev 14 Load inertia moment ratio The estimated ratio of the servo motor axis converted load inertia moment to the servo motor inertia moment is displayed. 0.1times 56

ZQ-OM01401

(43) 68 0.5 67 (64) 61 (59) 54 (51) 81 1) ( ) 2) ZQ05A0.35MPaZQ07AZQ10A0.43MPaZQ000A0.4MPa 3) (PD) V PD [MPa] ZQ05A ZQ07A ZQ10A ZQ000A 0.05 11 10 8 16 0.15 22 20 17 32 3.2 0.25 31 29 24 46 0.35 44 39 31 60 0.45 54 48 38 74 0.05 11 11 9 16 0.15 24 22 18 33 4 0.25 34 32 27 48 0.35 46 42 35 62 0.45 57 52 44 76 0.05 12 11 9 16 0.15 25 24 20 33 6 0.25 37 34 30 47 0.35 49 45 39 63 0.45 61 56

Suction cups with flange

Lifting force = Theoretical lifting force / t Theoretical lifting force (Theoretical lifting force = P x S x 0.1) Cup diameter (8 to 32) [N] Cup diameter [mm] 8 10 13 16 20 25 32 S: Cup area [cm2] 0.50 0.79 1.33 2.01 3.14 4.91 8.04 -85 4.2 6.6 11 17 26 41 68 -80 4.0 6.2 10 16 25 39 64 -75 3.7 5.8 10 15 23 36 60 -70 3.5 5.5 9.3 14 22 34 56 Vacuum -65 3.2 5.1 8.6 13 20 31 52 pressure -60 3.0

IDX-OM-U021

IDX-OM-U021 2 2-2-4 60 60 IN OUT 2-2-5 10mm ( 2-2 IDF100150F 2 5 IDX-OM-U021 2 2-2-6 2-2 IDF100150F 2 6 IDX-OM-U021 2 2-2-7 6-1 IEC ) [30mA 30A (IDF100F, IDF125F, IDF150F)] 3.5mm 2 (12AWG) 1418mm4 () 0.6m 30m (1.3 ) M4 : 9.5mm R 1 M5 : 9.5mm M4 1.42.0Nm R M5 2.6Nm 2-9 2-2 IDF100150F 2 7 IDX-OM-U021 2 0.5mm 2 (20AWG)17mm 6 0.9m 30m (1.3 ) M3 : 6.5mm M3 0.631Nm OFF 56

IDX-OM-Z004

IDX-OM-Z004 2 () () Y () 2.2.5 10mm ( IDF100150F-W 2.2 2 5 IDX-OM-Z004 2 2.2.6 IDF100150F-W 2.2 2 6 IDX-OM-Z004 2 2.2.7 6-1 IEC ) [30mA 30A (IDF100F, IDF125F, IDF150F)] 2 (12AWG) 1418mm4 () 3.5mm 0.6m 30m (1.3 ) M4 : 9.5mm R 1 M5 : 9.5mm M4 1.42.0Nm R M5 2.6Nm 2-9 IDF100150F-W 2.2 2 7 IDX-OM-Z004 2 2 (20AWG)17mm 6 0.5mm 0.9m 30m (1.3 ) M3 : 6.5mm M3 0.631Nm OFF 56

IDX-OM-U022

( IDFA100F150F 2 4 2.2 IDX-OM-U022 2. 2.2.5 IDFA100F150F 2 5 2.2 IDX-OM-U022 2. 2.2.6 6-1 IEC [] ) [30mA 15A] [] [IDFA100F, 125F] 3.5mm 2 (12AWG) 1418mm4 () [IDFA150F] 3.5mm 2 (12AWG) 1823mm4 () 0.6m [] 30m (1.3 ) M4 : 9.5mm R 1 M5 : 9.5mm M4 1.42.0Nm R M5 2.6Nm 2-9 IDFA100F150F 2 6 2.2 IDX-OM-U022 2. 0.5mm 2 (20AWG)17mm 6 0.9m 30m (1.3 ) M3 : 6.5mm M3 0.631Nm OFF 56

IDX-OM-W038

(17) (17) IDH4,IDHA4 Rc3/8 1.25 6.5 N.C N.O M3 (N.C:) (N.O:) 2 Rc3/8 6.5 :1.25m m :M3 24 2 (N.O) (N O 244 80 2 184 35 320 56 2 1 15 275 1 80 207 284 455 70 389 498 ( ?10) ( 10) 15 240 2 1 297 270 62 IDH Series 6.2.

PSxx-OMU0008CN

[F80] 30 ( ) [ECo] (ON) ON OFF -51No.PS-OMU0008CN-D [F81] <> [F81] [on]() [oFF]() () (000 ) /(66 ) [FAL] 3[nG] -52No.PS-OMU0008CN-D /(66 ) 1 () 1 [F81] , 30 -53No.PS-OMU0008CN-D [F82] [F10][dUAL][LinE] <> [F82] () ( ,) AbY(Z)019 (1 3 ) /() 1 () [F82] (3) QXZ((/)(*) () (1) AZ3 <3 > () -54No.PS-OMU0008CN-D [F90] <> [F90] [on]() [oFF]() [oFF]() 2 [F90] 56

PSxx-OMR0001CN

kPa200 kPa) (2) () (1) (2) 1 () (3) -45No.PS-OMR0001CN-J 4 2 [F 0] [F] 2 2 [][] 2 F 0(Unit) [ PA] kPa 47 ISA3-F[ 20] ISA3-G[ 50] ISA3-H[ 50] F 1(oUt1) OUT1 48 ISA3-F[ 3] ISA3-G[ 20] ISA3-H[ 20] [ SoG] ON OFF F 2(oUt2) () [ ---] 50 F 6( FSt) [ 0.0] 0.0 51 F10( SUb) [ LEvEL] 52 F80( dSP) OFF [ on] () 53 F81( Pin) [ oFF] 54 F90( ALL) [ oFF] 55 F98(tESt) [normAL] 56

VT307N-OMV0001

VT307N-OMV0001 3 / / VT/O 307 VT/O 307-**1-** 23 / 4 5 5 5 5 56 6 6 78 9 10 -1No.VT307N-OMV0001 1) 2) (ISO/IEC) (JIS) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery -Electrical equipment of machines (Part 1: General requirements) ISO 10218

EXxx-OMZ0016

Configurator (NFC Version) 35 Monitoring and setting up 37 Setting/Adjustment of the Wireless Unit 38 Parameter settings of a Remote (optional) 38 Remote setting 38 Parameter settings of the Base 40 CC-Link setting 40 System setting 42 Frequency channel select function (F.C.S.) 45 Event 47 Wireless 49 Pairing and Unpairing Procedures 51 Pairing Procedure 51 Unpairing Procedure 56

EXxx-OMV0017-D

Refer to the "Diagnostic allocation" section in the Operation Manual (page 56) for details. None: No diagnostic data Simple: System diagnostics Advanced: System diagnostics + Wireless Remote connection / diagnostics / registration information Max.