AMF

NBR JIS B2401G35 1 pc. u 4.6-30 Series AMF Dimensions: AMF150 to AMF350 M Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G H 146 167 167 198 198 I 56 66 66 80 80 J 15 20 17 22 19 K 5 8 8 8 8 L 9 12 12 14 14 N 35 40 40 50 50 O 54 66 66 80 80 P 70 84 84 100 100 Q 26 28 28 34 34 R 4.5 5 5 5 5 S 1.6 2.0 2.0 2.3 2.3 1/8, 1/4,3/8 1/4, 3/8 5.5 6 6 7 7 139 152 158 184

AMP

10 8 8 10 10 12 15 40 50 55 66 80 88 84 100 110 28 34 50 5 5 9 26 32 37 37 37 37 13 16 19 20 22 25 108 155 221 1/4, 3/8 3/8, 1/2 1/2, 3/4 3 Series AMP Model Selection Selection Caution Caution 1.

AMPSeries

Exhaust into clean room Silencing effect: 40dB (A) or more Series variations Thread type Port size Optional Model 1/4 3/8 1/2 3/4 Double packaging Shipped in double packaging using antistatic bags.

AME

AME150 AME250 AME350 AME450 AME550 AME650 AME850 Model Note) 200 500 1000 2000 3500 6000 12000 Rated flow (l/min (ANR)) Port size (Nominal size B) 1 8 1 4 3 8 1 4 3 8 1 2 3 8 1 2 3 4 1 1 2 3 4 1 3 4 1 1 1 2 1 2 1 2 , , , , , , , , , , , Weight (kg) 0.38 0.55 0.9 1.4 2.1 4.2 10.5 Note) Max. flow capacity at a pressure of 0.7 MPa. Max. flow varies depending on operating pressure.

IDX-OM-W014

K 8 K 8-1 ( ) 8-2 1.6Mpa AD48-8-A-X2112 10 KQ2H10-02AS IDU3E/6E/8E-*-K N.O. () 0.151.6MPa IDU Series 8-1 8 1 IDX-OM-W014 8 K IDF-S1926 () 1 AD48-8-A-X2112 1 1) 2019 3 2019 2 SERIAL No.XP AD48-8-X2110 IDF-S0086() SMC WEB IDF-S0002 1 C42FP-260S 1 IDF-S0529 1 IDU Series 8-2 8 2 IDX-OM-W014 9 L 9 L 9-1 ( ) 9-2 1.6MPaADH4000-04 IDU3E-**-L IDU6E-**-L IDU8E-**-L N.O. (

IDX-OM-W023

K 8 K 8-1 ( ) 8-2 1.6Mpa AD48-8-A-X2112 10 KQ2H10-02AS IDU8E/11E/15E1-*-K N.O. () 0.151.6MPa IDU Series 8-1 8 1 IDX-OM-W023 8 K IDF-S1926 () 1 AD48-8-A-X2112 1 1) 2019 3 2019 2 SERIAL No.XP AD48-8-X2110 IDF-S0086() SMC WEB IDF-S0002 1 C42FP-260S 1 IDF-S0529 1 IDU Series 8-2 8 2 IDX-OM-W023 9 L 9 L 9-1 ( ) 9-2 1.6MPaADH4000-04 IDU8E-**-L IDU11E-**-L IDU15E1-**-L

AMF

AMF250 AMF350 AMF450 AMF550 AMF650 AMF850 AMF150 Model Note) 500 1000 2000 3500 6000 12000 200 Rated flow (l/min (ANR)) Port size (Nominal size B) , , , , , , , , , 1 8 1 4 3 8 1 4 3 8 1 2 3 8 1 2 3 4 1 1 2 3 4 1 3 4 1 1 1 2 1 2 1 2 , , 0.38 0.55 0.9 1.4 2.1 4.2 10.5 Weight (kg) Note) Max. flow capacity at a pressure of 0.7 MPa. Max. flow varies depending on operating pressure.

AFF

Option J: With drain guide Bracket (Option) 1/4B female thread T: With element service indicator Maintenance space HA Drain AT ID AMG AFF Element service indicator Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G H 10 10 10 10 10 10 10 10 10 I 56 66 66 80 80 90 90 100 150 J 15 20 17 22 19 25 21 30 40 K 5 8 8 8 8 10 10 10 15 L 9 12 12 14 14 14 14 16 20 M 5.5

Flame Resistant

Caution indicates a hazard with a low level of risk which, if not avoided, could result in minor or moderate injury. Caution: Warning indicates a hazard with a medium level of risk which, if not avoided, could result in death or serious injury. Warning: Danger : Danger indicates a hazard with a high level of risk which, if not avoided, will result in death or serious injury.

AME

It cannot be used if connected in the opposite direction. 4.6-24 Series AME Dimensions: AME150 to AME350 M Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G H 146 167 167 198 198 I 56 66 66 80 80 J 15 20 17 22 19 K 5 8 8 8 8 L 9 12 12 14 14 N 35 40 40 50 50 O 54 66 66 80 80 P 70 84 84 100 100 Q 26 28 28 34 34 R 4.5 5 5 5 5 S 1.6 2.0 2.0 2.3 2.3 1/8, 1/4, 3/8

Water Separator Series AMG Please refer to page 14-20-62 for specific product precautions. 1

Model AMG150 AMG250 AMG350 AMG450 AMG550 AMG650 AMG850 Model Note) Rated flow (l /min (ANR)) 300 750 1500 2200 3500 6000 12000 Port size (Nominal size B) , , , , , , , , , , , 1 8 1 4 3 8 1 4 3 8 1 2 3 8 1 2 3 4 1 1 2 3 4 1 3 4 1 1 1 2 1 2 1 2 Weight (kg) 0.38 0.55 0.9 1.4 2.1 4.2 10.5 Note) Max. flow capacity at a pressure of 0.7 MPa. Max. flow varies depending on operating pressure.

AMH

Option J: With drain guide Bracket (Option) female thread T: With element service indicator Maintenance space Drain Element service indicator Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G H 10 10 10 10 10 10 10 10 10 I 56 66 66 80 80 90 90 100 150 J 15 20 17 22 19 25 21 30 40 K 5 8 8 8 8 10 10 10 15 L 9 12 12 14 14 14 14 16 20 M 5.5 6 6 7 7 9 9 9 11 N 35

tTV2000/3000

Rc(PT) 12 04 o Bracket B o o Bracket o o @ L-bracket Connection NPTl/4 N02 a o Connection NPT3/8 N03 a o o tr 6 . 9 o u t = ^ O v o EL o Connection NPTl/2 N04 o Connection G(PD 1/4 F02 o o Connection G(PR 3/8 F03 o o Connection G(PR 1/2 F04 o O: Standard specifications O: Combination possible Blank: Combination not possible Modular Connection Part Numbers muxm : Air filter NAF3OOO NAF4OOO

Safety Speed Control Valve (SSC Valve) Series ASS 1

1 Safety Speed Control Valve (SSC Valve) Series ASS Model Meter-out control type: A control valve with cylinder speed control function, fixed throttle, and rapid air supply function Port size Effective area (mm2) Weight (g) Free flow Controlled flow Style Model ASS100 2.4 1/8 9.5 97 ASS300 14.5 1/4, 3/8 22.0 220 Meter-in control type: A control valve with cylinder speed control function and

Pressure Relief 3 Port Valve with Locking Holes VHS20/30/40/50

Port size Body size Thread size Port thread Symbol N F Rc NPT G 01 02 03 04 06 10 1/8 1/4 3/8 1/2 3/4 1 An interface part is required if a spacer or spacer with bracket shown in the table below is attached to a modular FRL.

Digital Flow Switch for Deionized Water and Chemicals Series PF2D

0 6.4 OUT2 NC Sensor 8 Load 4 OUT1 Black 1 2 3 4 7 3 Load +0.5 0 Brown + 6 2 19.4 Blue 5 1 12 to 24VDC 5 6 7 8 Series PF2D5 PF2D301-A(-M) The applicable panel thickness is 1 to 3.2mm.

α PneuAlpha HARDWARE MANUAL

Hardware Specication 2.1 Available Models PneuAlpha Hardware Specification 2 ECC-PNAL-20MT-D 12 TRANSISTOR 8 ECC-PNAL-10MT-D 6 TRANSISTOR 4 (0.70)* ECC-PNAL-20MR-D ECC-PNAL-20MR-A 100 240V AC~ 100 240V AC~ 12 RELAY 8 124.6 x 90 x 55 ECC-PNAL-10MR-D ECC-PNAL-10MR-A 6 RELAY 4 ECC-PNAL-6MR-A 100 240V AC~ 100 240V AC~ 4 RELAY 2 71.2 x 90 x 55 Model Power Supply * Without Special Connection Modules

AMG

Options J: With drain guide M Mounting Dimensions Model Port Size (Nominal size B) A G F E D C B S 1.6 2.0 2.0 2.3 2.3 3.2 3.2 4.5 4.5 R 4.5 5 5 5 5 9 9 10 12 Q 26 28 28 34 34 50 50 60 76 P 70 84 84 100 100 110 110 130 180 O 54 66 66 80 80 88 88 102 136 N 35 40 40 50 50 55 55 65 85 L 9 12 12 14 14 14 14 16 20 K 5 8 8 8 8 10 10 10 15 J 15 20 17 22 19 25 21 30 40 I 56 66 66 80 80 90 90 100

Vacuum Pad with Ejector ZHP Series Pad Diameter: ø63, ø80 ZK2 ZQ Ejector and pad are integrated. ZR Space saving and reduced piping labor! Bellows type with groove ZB ZA Two-stage ejector ZX More efficient ejector 30% reduced 50% increased ZM Air Suction

Note 8 Pad ZP3E-mmm Flat/Bellows type with groove r 9 Plate ZHP1-PLm-A 10 Holder ZM u e 11 Plug TB00148 Included for metric size ZL TB00055 Included for inch size q w 12 One-touch fitting KJHm-C2 ZH 13 Ejector assembly ZK2-EJmW-A A A 14 Silencer assembly ZHP1-SA1-A ZH 15 Lock screw CA00284 Included ZH -X267 3 pieces are included in one product. (The part numbers are for 1 piece.) !

VH Series, 4 Way Hand Valve

12 4-1/4,3/8NPT 12 4-1/4NPT VH33 -N02/N03 (Bottom porting) 2 (A) Panel cut dimension 44 2A +0.3 0 1 (P) 3 (R) C +0.5 0 B0.1 4-1/4,3/8NPT 4 (B) Max. panel thickness D (mm) A 3.2 3.2 3.2 B 40 51 64 C 35 41 51 D 3.5 6 8 VH200 type VH300 type VH400 type 8 Panel Mount/Dimensions Series VH (mm) / Panel mount type Dimensions VH41 -N02/N03/N04 VH41 -N06 Scale: 35% 2 (A) 4 (B) 4 (B) 2 (A) 25 25 3