Conforming to OSHA Standard Pressure Relief 3 Port Valve With Locking Holes Series VHS20/30/40/50

Parts cannot be shipped separately. 1937 Series VHS20/30/40/50 Dimensions VHS20/30 VHS40/40-06/50 10 I EXH. 10 G F H I SUP. E X H . F G H SMC P . U S C E Padlock mounting position D C Padlock mounting position D SUP. SUP A B A B IN OUT IN OUT 2 1 3 EXH. EXH.

Speed Controller with Indicator In-line Brass Stainless steel Electroless nickel plated In-line Type “Made to Order” “Made to Order” section has been added. Pages 3, 8 section has been added. ¡Lubricant: Vaseline -X12 The numerical indication of ¡Greas

Caution indicates a hazard with a low level of risk which, if not avoided, could result in minor or moderate injury. Caution: Warning indicates a hazard with a medium level of risk which, if not avoided, could result in death or serious injury. Warning: Danger : Danger indicates a hazard with a high level of risk which, if not avoided, will result in death or serious injury.

ISG

AC 110 12 2 12 3 q e w e t y 220 10 1 10 1.5 440 6 1 3 1 550 5 0.8 2 0.5 r b contact w a contact r q DC 24 3 2.5 3 2.5 C C 48 1.5 1.2 1.5 1.25 When rising pressure q w = ON e r = OFF When rising pressure q e r y = ON q w r t = OFF 110 0.5 0.25 0.5 0.2 220 0.25 0.1 0.25 0.1 Insulation resistance: 100 M or more at 500 VDC by megameter Voltage resistance: 2000 VAC/1 min. 16-9-5 2 Series

IDX-OM-U021

JIS 65A 10K 25 25 (10,0.7m) 78 9351 267 18 8x19 4x19 A A A 140 1130 140 1120 655 K 18 K 75 K16K (17) 64 (K16K) 17) JIS 65A 10K JIS 65A 10K 40 51 1276 1418) (14~18) 1375 (1) () (1) 1,3 1,3 () 7122 20 350 700 752 (3) (2) (2) IDF100150F 6-3 6 3 IDX-OM-U021 6 IDF150F-30K16K (10,2m) () ) JIS 80A 10K ( (10 () () (K16K) JIS 80A 10K 2m) 0.7m) ( ( (10, 20 18 t 268 217 9351

Hand Valve Series VH

VlA SlA 4-6.6 4-6.6 VlA 81 88 94 VM/VR 144 144 97 97 VH 125 123 107.5 105.5 1 (P) 3 (R) 1 (P) 3 (R) 17 25 19 2 4-Rc1/4, 3/8, 1/2 4-Rc3/4 VH42l-06 (Bottom piping) VH42l-02 to 04 (Bottom piping) 2 (A) 2 (A) 46 54 1 (P) 3 (R) 1 (P) 3 (R) 4 (B) 4 (B) 4-Rc3/4 4-Rc1/4, 3/8, 1/2 3.6-10 Series VH Body Mounted/Dimensions VH600-06/10 2 (A) 4 (B) 1 (P) l152 132 4-11 132 300 223 151 150 48 25

Speed Controller with Pilot Check Valve with One-touch Fitting Series ASP 1

Metric size Inch size 3 4 5 6 1/8 standard 1/4 standard 3/8 standard 1/2 standard 07 09 11 13 06 08 10 12 1/4" 5/16" 3/8" 1/2" 6 8 10 12 Type Port size 3 Universal Symbol 01 02 03 04 F02 F03 F04 N01 N02 N03 N04 Pilot port M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/4 G 1/8 G 1/8 G 1/4 10-32 UNF NPT 1/8 NPT 1/8 NPT 1/4 Cylinder side R 1/8 R 1/4 R 3/8 R 1/2 R 1/4 R 3/8 R 1/2 NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2

LEF-OM007xx

6 1000 20 5 100 30 4 10 50 6 1000 5 5 100 15 4 10 30 6 1000 20 5 100 50 4 10 60 6 1000 10 5 100 40 4 10 50 6 1000 50 5 100 80 4 10 100 LEFS16 500 500 LEFS25 900 500 Please aspirate it from the port on both sides when aspirating 50 /min(ANR).

VDW

M5 01 02 M5 1/8 (6A) 1/4 (8A) 10 10 stations Note) IN port sizes are as follows. 10: 1/8 (6A) 20: 1/4 (8A) 30: 3/8 (10A) How to Order Valves (For manifold) VDW 2 3 5 2 G Coil insulation type Material and insulation type Series Body material Seal material NBR FKM NBR FKM FKM Symbol Nil A G H L 1 2 3 10 20 30 C37 Class B Stainless steeel Note) Valve type Note) For pure water: The armature

Micro-Mist Separator with Prefilter Series AMH

AMH550 AMH150 I Air pressure 0.3MPa ",0.06 '" 0.06 a. ::;; Inlet air pressure 0.3MPa r-a. /;57o.7MPa ::;; ~ / // 0.5MPa ~ ./' 0.7MPa a. ~ 0.04 ~O.O4 VI ~ ~ a. 0.3MPa Q; V ~ 8 002 ~ V;.;.x.fIow Ii~::---X 0.7MPa 8 002 ax fIoW "l . . e ~ L . __ 0.5MPa --L ___ -. _ -'0.7M,a "" ---:=. . ~!"}.

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

2 w y r !0 e 1 New PFA Body 2 New PFA Sensor 3 Super PFA Tube 4 PPS Housing A 5 PPS Housing B 6 PPS Housing C 7 POM Bushing 8 PPS Cap 9 FKM Gasket 10 FKM O-ring 11 Stainless steel 304 Thread 12 PVC Lead wire !1 q t i PF2D540 o !0 u !0 !2ywr e !

VT317

(Values at the initial period) Note 3) At rated voltage Flow Characteristics/Weight Flow characteristics 1 2 (P A) 2 3 (A R) 3 2 (R A) 2 1 (A P) Weight Valve model Grommet C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv VT317 VT317V (Vacuum spec. type) VT317E (Continuous duty type) 0.29 kg 2.4 0.26 0.62 2.6 0.34 0.67 2.8 0.25 0.67 2.5 0.37 0.66

MQQ

A + Stroke 4-FD C J G5-S Rear flange style: MQQLG 10, 16, 20 25, 28 Bore size (mm) Stroke range (mm) A L 2-FD 4-FD CV 10 10 to 40 75 8 16 10 to 60 88.5 10 MVGQ 20 10 to 60 97 10 FV FV M 25 10 to 50, 75, 100 104.5 12 CC 28 10 to 50, 75, 100 124 12 L FT FX B + Stroke FZ FX (Dimensions except A and L are same as rod side flange style.)

MQQ

J G5-S FZ 25 65 22 34 A + Stroke 4-FD 28 72 22 40 CV MVGQ CC Head side flange style: MQQTG 10, 16, 20 25, 28 RB 2-FD 4-FD J Bore size (mm) Stroke range (mm) A L DM FV FV 10 10 to 40 45 8 B + Stroke -X L FT FX FZ FX FZ 16 10 to 60 52 10 A + Stroke 20 10 to 60 55.5 10 2025 10 to 50, 75, 100 62 12 28 10 to 50, 75, 100 68.5 12 Data (Dimensions except A and L are same as rod side flange style

AR Series Modular Type Regulator

AW-A Optional specifications Model AR10-A AR20-A AR25-A AR30-A AR40-A AR40-06-A Bracket assembly Note 1) AR12P-270AS AR22P-270AS AR27P-270AS AR32P-270AS AR42P-270AS AR42P-270AS Set nut AR12P-260S AR22P-260S AR22P-260S AR32P-260S AR42P-260S AR42P-260S AC-B AF-A Note 2) Round type Standard G27-10-R1 G36-10-l01 G46-10-l01 0.02 to 0.2 MPa setting G27-10-R1 Note 3) G36-4-l01 G46-4-l01 Pressure

Series AS Elbow Type/Universal Type Speed Controller with One-touch Fitting 1

Applicable cylinder bore size (mm) Elbow type Universal type Port size Metric size Inch size 3.2 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8"1/2" 2.5, 4, 6 AS121F-M3 AS131F-M3 M3 x 0.5 6, 10, 16, 20 AS121F-M5 AS131F-M5 M5 x 0.8 6, 10, 16, 20 AS121F-U10/32 AS131F-U10/32 10-32 UNF Tube swivels 360 Universal type permits 360 piping swivel. (1) 20, 25, 32 AS221F-01 AS231F-01 R 1/8 20, 25, 32,

Cylinder with Lock Series CNS

When using a single/double knuckle joint together with a rod end nut, the A and H dimensions should be extended.

Angle Seat Valve /

Step 4 Item Selected item Symbol r VXB2 1 5 A H B L L Yes r Indicator For special options, refer to page 5. Step 5 3 Angle Seat Valve / Air Operated Type VXB Series For Steam Can be used with air or water Flow Rate Characteristics N.C.

Stainless Steel Heat

x 3 x 60 = 2736g/h. 6 7 8 3 1 2 3 4 5 Dew point conversion chart 60 50 40 30 Pressure dew point C 20 10 1.5MPa 1.3MPa 1.1MPa 0.9MPa 0.7MPa 0.5MPa 0.3MPa 0.1MPa Atmospheric pressure 0 -40 -30 -20 -10 -60 -50 -60 -50 -40 -30 -20 -10 0 10 20 30 Atmospheric pressure dew point C 8 Series IDUS/IDFS Safety Instructions These safety instructions are intended to prevent a hazardous situation and/

Size: 1, Thread: M Thread, Rc(PT), Port Size: 1, Accessory: Bracket, Option 1: -, Option 2: -

Size: 1, Thread: G, Port Size: 1, Accessory: -, Option 1: -, Option 2: -