This is a legacy product, and replaced byZSE20AF-T-01-J-X531 ZSE30 VACUUM SWITCH. SWITCH. VACUUM SERIES. ZSE30 1/8 PORTED. .29868 lb. JC.

Table of Contents

[71.5] D side External pilot port Rc 1/8 4-Rc 1/8 Bottom ported: FD FU (PE port) 179 PE X PE VV5FR5-01 Station 2Bore size 114 91 81 EB EA P 67 50 31 Formula for manifold weight M = 0.916n + 1.633 (kg) n: Stations For wiring specifications, refer to page 3-5-8. 37 37 43 61 n: Station 6-Rc 3/4 (P , EA, EB port) Stations Formula L1 = 51 x n + 92 L2 = 51 x n + 110 2 194 212 3 245 263 4 296

Micro Mechanical Valve Series VM1000

F.O.F. 6 N 2.5mm[2mm] 4.8mm[2.5mm] 2.3mm[0.5mm] Roller lever VM1000-4N-01 VM1000-4NU-01 VM1100-4N-01 VM1100-4NU-01 Symbol/2 port 3 port (A) 2 (A) 2 12 12 10 10 1 (P) 1 (P) 3 (R) 0.5 MPa supply Applicable tubing VM1100-4N-01 VM1000-4N-01 T0425 TU0425, T0403, TS0425 Side ported 3 port 2 port VM1100-4NU-01 VM1000-4NU-01 T.T. O.T. P.T.

VM

VM1110-4NU-01 VM1010-4NU-01 VH 6 N F.O.F.

5 Port Solenoid Valve Series SY3000/5000/7000/9000

Thread piping A, B port size Thread type CE-compliant Rc Nil Symbol Port size SY3000 Applicable series G F Nil 1 8 SY5000 01 02 1 4 SY7000 02 1 4 N NPT Q CE-compliant NPTF T For DC only.

VFS

Cannot be used as a single unit. 3-8-9 10 Series VFS1000 How to Order VFS1 1 20 01 1 G Symbol Option 2 position single F: With foot bracket Thread type 1 Nil N Rc NPT NPTF G Port size 01 Rc 1 8 T 2 position double F Option 2 Mountable only for VFS1120.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

Valve Note) For common exhaust type for main and pilot valve, model number will be VF113c, VF123c. 3-4-5 6 Series VF1000 How to Order Port size (P, A, B) Thread type Only when 01 (1/8) M5 01 M5 x 0.8 Nil F N T Rc G NPT NPTF 1 8 EA, EB port: M5 x 0.8 Option F With bracket Body ported VF1 1 2 1 L 01 0 Not installed when delivered Manifold VF1 1 3 0 1 L 01 Port size (A, B) Body option Type

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

F Nil Rc G N T NPT NPTF Brackets are not installed.

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

Nil N PNP output ( COM.)

VFR

[71.5] D side External pilot port Rc 1/8 4-Rc 1/8 Bottom ported: FD FU (PE port) 179 PE X PE VV5FR5-01 Station 2Bore size 114 91 81 EB EA P 67 50 31 Formula for manifold weight M = 0.916n + 1.633 (kg) n: Stations For wiring specifications, refer to page 3-5-8. 37 37 43 61 n: Station 6-Rc 3/4 (P , EA, EB port) Stations Formula L1 = 51 x n + 92 L2 = 51 x n + 110 2 194 212 3 245 263 4 296

SYJ3000/5000/7000

Type 40 (5 Port/Base mounted) How to Order SS5YJ740 05 01 P port 1/4 Thread type Stations 01 1/8 A, B port size Nil F N T 02 Rc G NPT NPTF 2 stations : : R port 1/4 20 20 stations Applicable solenoid valve SYJ740SYJ743A, B port Note) For more than 10 stations, supply air to both sides of P port and exhaust air from both sides of R port.

VZS

M plug connector 2 position double: VZS2250-M(Z)-01 3 position closed center: VZS2350-M(Z)-01 3 position exhaust center: VZS2450-M(Z)-01 3 position pressure center: VZS2550-M(Z)-01 DIN terminal 2 position double: VZS2250-D(Z)-01 3 position closed center: VZS2350-D(Z)-01 3 position exhaust center: VZS2450-D(Z)-01 3 position pressure center: VZS2550-D(Z)-01 Applicable cable O.D.: 3.5 to 7 MAX

5 Port Air Operated Valve Series SYA3000/5000/7000 1

VZA4221-01 VZA4321-01 VZA4421-01 VZA4141-1-01 VZA4141-1-02 VZA4141-2-01 VZA4141-2-02 VZA4241-1-01 VZA4241-1-02 VZA4241-2-01 VZA4241-2-02 VZA4341-1-01 VZA4341-1-02 VZA4341-2-01 VZA4341-2-01 VZA4441-1-01 VZA4441-1-02 VZA4441-2-01 VZA4441-2-02 Single Double Closed center Exhaust center 0.44 0.44 0.44 0.44 0.25 0.25 0.25 0.25 1.7 1.7 1.7 1.7 0.49 0.49 0.47 0.47 0.14 0.14 0.15 0.15 2.0 2.0 1.9

SYJ300/500/700

(For manifold type 20, 21R) 1 SYJ7 2 5 M 01 Body ported SYJ7 4 5 M 01 1 Base mounted Manual override 3 port Thread type Nil: Non-locking push type D: Push-turn locking slotted type Coil specifications F Nil Rc Nil Standard G N T NPT NPTF With power saving circuit (24, 12 VDC only) T Power saving circuit is not available in the case of D, DO, W type.

ZP

2 F G H J K L M N P Vacuum inlet direction q Pad dia.

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

Power saving circuit is only available for the Z type. 5 01 SY 5 1 20 LO Z For DC: 10 CE-compliant 1 01 SY 5 1 20 LOZ For AC: 10 Nil Q CE-compliant Note) CE-compliant: For DC only.

3 Port Air Operated Valve Series SYJA300

M5 x 0.8 SYJA514-01 0.32 0.46 1.1 0.32 0.41 1.2 75 (Without subplate 45) Rc 1/8 N.C. Base mounted (with sub-plate) 0.34 0.48 1.2 0.33 0.37 1.3 N.O. SYJA524-01 SYJA712-01 SYJA722-01 SYJA714-01 SYJA714-02 0.76 0.69 0.69 0.66 0.63 0.64 0.51 0.42 0.34 0.33 0.45 0.48 2.5 2.4 2.7 2.6 2.3 2.3 0.77 0.72 0.71 0.74 0.70 0.68 0.43 0.38 0.32 0.31 0.21 0.31 2.8 2.7 2.9 3.0 2.8 2.7 N.C. N.O.

CV/MVGQ

n 2) n = 2, 4, 6, 8 80 + 30 (n 2) n = 2, 4, 6, 8 100 + 30 (n 2) n = 2, 4, 6, 8 90 + 50 (n 2) n = 2, 4, 6, 8 55 + 50 (n 2) n = 2, 3, 4 75 + 50 (n 2) n = 2, 4, 6, 8 80 + 50 (n 2) n = 2, 4, 6, 8 Different sides CE2 D-A44 n Same side ML2B 10 20 100 75 80 90 100 100 100 100 100 100 1 Different sides C J G5-S 2 Same side D-A3C D-G39C D-K39C 20 + 35 (n 2) n = 2, 3, 4 100 + 35 (n 2) n = 2

CV/MVGQ

2, 3, 4 75 + 35 (n 2) n = 2, 4, 6, 8 80 + 35 (n 2) n = 2, 4, 6, 8 90 + 35 (n 2) n = 2, 4, 6, 8 55 + 50 (n 2) n = 2, 3, 4 75 + 50 (n 2) n = 2, 4, 6, 8 80 + 50 (n 2) n = 2, 4, 6, 8 90 + 50 (n 2) n = 2, 4, 6, 8 Different sides RB D-A44C n Same side J 10 75 80 90 1 2 (Different sides, Same side), 1 D85 90 95 105 15 80 D-Z7/Z80 D-Y59/Y7P D-Y7W (n 2) 2 15 + 40 n = 2, 4, 6, 8 (n 4) 2 (

VZ100/300/500

Type 41R (Bottom ported) How to Order VV3Z5 41R 05 2 01 Applicable solenoid valve VZ514RVZ524RApplicable blanking plate assembly DXT201-15-4A R port Stations P/R port thread type 01 1/8 A port side X port 2 stations 02 Nil Rc G NPT NPTF P port 20 stations 20 F N T A port Note) For more than 9 stations, supply air to both sides of P port and exhaust air from both sides of R port.