D

Note) Type 01 02 03 04 Inch size Metric size Elbow Universal 2 3 1/8" AS 23 01 3.2 03 05 07 09 11 13 04 06 08 10 12 4 5/32" 6 3/16" Control AS-FE U10/32 N01 N02 N03 N04 8 1/4" Meter-out Meter-in 0 1 10 5/16" Made to Order Refer to the below for details. KE 12 3/8" 1/2" With One-touch fitting AS-FG Note) For applicable tubing O.D. selection, refer to the Model on page 734.

Speed Controller: Standard Type Large Flow In-line Type AS Series

04 06 10 12 14 20 Caution L (2) Note 1) AS800 is available as special.

Blow Gun Series VMG

Without nozzle KN-R02-100 KN-R02-150 KN-R02-200 KN-R02-250 VMG1-R02-300 VMG1-R02-350 VMG1-R02-400 KNH-R02-100 KNH-R02-150 KNH-R02-200 KNS-R02-075-4 KNS-R02-090-8 KNS-R02-100-4 KNS-R02-110-8 01 02 03 04 05 06 07 11 12 13 21 22 23 24 1 1.5 2 2.5 3 3.5 4 1 1.5 2 0.75 x 4 0.9 x 8 1 x 4 1.1 x 8 Connection size Piping connection method Symbol Size and model no.

Blow Gun Series VMG

Without nozzle KN-R02-100 KN-R02-150 KN-R02-200 KN-R02-250 VMG1-R02-300 VMG1-R02-350 VMG1-R02-400 KNH-R02-100 KNH-R02-150 KNH-R02-200 KNS-R02-075-4 KNS-R02-090-8 KNS-R02-100-4 KNS-R02-110-8 Nozzle size Nil 01 02 03 04 05 06 07 11 12 13 21 22 23 24 1 1.5 2 2.5 3 3.5 4 1 1.5 2 0.75 x 4 0.9 x 8 1 x 4 1.1 x 8 Connection size Piping connection method Symbol Size and model no.

VEX1

entry Port 1(P), 2(A) 3(R) 1 8 1 8 01 1 02 G Grommet (Lead wire length 300 mm) 1 4 1 4 H Grommet (Lead wire length 600 mm) 1 4 1 4 02 3 03 D DIN terminal 3 8 3 8 DO DIN terminal (Without connector) 04 1 2 1 2 1 2 3 4 1 2 3 4 1 04 5 06 Body ported G Grommet (Lead wire length 300 mm) 10 1 1 1 H Grommet (Lead wire length 600 mm) 10 7 12 14 9 20 2 E Grommet terminal 1 4 1 T Conduit terminal

VXE21/22/23

Table (3) Rated Voltage Electrical Option Rated voltage Solenoid valve model (Port size) Orifice symbol (diameter) 1 (2 mm) 2 (3 mm) 3 (4.5 mm) 4 (6 mm) 5 (8 mm) 6 (10 mm) Voltage L (With light) Voltage symbol 5 6 24 VDC 12 VDC VXE21 Model VXE22 VXE23 01 (1/8) Port symbol (Port size) 02 (1/4) 03 (3/8) 04 (1/2) 02 (1/4) 03 (3/8) 04 (1/2) 02 (1/4) Table (4) Bracket Part No.

E-P HYREG ® VY1 Series

V 7 4 to 20 mA 120 8 0 to 20 mA Symbol Symbol B (Bracket) F (Foot) G (Pressure gauge) N (Silencer) Body size Port size Rc Option Mounting Port 1(P), 2(A) Port 3(R) Applicable pilot valve (4) 00 M5 00 M5 01 00 01 02 00 02 03 04 M5 01 02 02 03 04 04 06 10 10 12 14 20 Without sub-plate M5 Without sub-plate M5 D B 1 8 Without sub-plate Base mounted Symbol 2 1 8 1 4 Internal pilot VY1D0 (5)

Exhaust Cleaner for Clean Rooms AMP Series

Recommended proper torque Nm Connection threads 1/2 M5 1/8 1/4 3/8 3/4 1 28 to 30 1.5 to 2 7 to 9 12 to 14 22 to 24 28 to 30 36 to 38 Torque 2. Twisting moment or bending moment other than the dead weight of the equipment should not be applied. To avoid damage, external piping should be supported separately from the product. 3.

Process Pump <Fluororesin Type> Series PA3000

Suction port 2 Series PA3000 How to Order PA 3 3 1 0 03 Assembly environment Standard Clean room Nil P Option Body material Nil Body only With foot With silencer (for automatic operation type only) 3 Fluororesin B N* Diaphragm material 1 PTFE * With silencer AN200-02 for AIR EXH. AN200-N02 for NPT.

AR20-B to AR60-B

Example 1) When the pressure in the rear and the front of the cylinder differs: Example 2) When the air supply is cut off and releasing the inlet pressure to the atmosphere, the residual pressure release of the outlet side can be ensured for a safety purpose. 12 1 1 2 2 1 2 1 3 1 2 1 L 14 2 4 12 10 5 1 3 Refertopage65forsize10.

Directional Control Driver for Electric Cylinder

Ltd. 1-16-4 Shimbashi, Minato-ku, Tokyo 105-8659 JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 URL http://www.smcworld.com 2005 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 1st printing JX printing JX 120DN Printed in Japan.

AR20-B to AR60-B

Example 1) When the pressure in the rear and the front of the cylinder differs: Example 2) When the air supply is cut off and releasing the inlet pressure to the atmosphere, the residual pressure release of the outlet side can be ensured for a safety purpose. 12 1 1 2 2 1 2 1 3 1 2 1 L 14 2 4 12 10 5 1 3 How to Order Refer to page 63 for size 10.

Miniature Regulator

pressure Maximum operating pressure Regulating pressure range Rc 1/8, NPT 1/8 (Female thread) Air 1.2 MPa 0.8 MPa Standard: 0.2 to 0.7 MPa, Low pressure use (0.2 MPa setting): 0.05 to 0.2 MPa 5 to 60C (No freezing) Relieving type 0.065 Ambient and operating temperature range Construction Weight (kg) Model Port size IN Model OUT ARJ310-01 ARJ310-N01 ARJ310F-01-04 ARJ310F-01-06 ARJ310F-N01-03

Speed Controller: Standard Type Large Flow In-line Type AS Series

04 06 10 12 14 20 Caution L (2) Note 1) AS800 is available as special.

ZSE5/ISE5

-3502-2740 Fax:03-52517240 l si printing January 1995.0-036,P-46(M) Augusl 1996, 49(RP) Specifications are subject 10 change without prior notice Printed In Smgapore and any obligation on the part of the manufacture,

AME

size 01 B 1 8 B 1 4 B 3 8 04 B 1 2 06 B AFF 1 Standard 11 2 Standard Nil Rc Thread type 02 03 JIS Symbol AME AM F G N NPT P . 14-20-57 3 4 1B Misc. 10 14 1 B 1 2 20 2B Caution Note) Refer to How to Order Bowl Assembly on page 14-20-59.

AMF

P . 14-20-57 14-20-42 2 Odor Removal Filter Series AMF How to Order AMF150 to AMF850 AMF 250 03 R B Option R IN-OUT reversal direction Body size Bracket Accessory (Option) 150 Standard 1 8 250 Standard 1 4 350 Standard 3 8 450 Standard 1 2 550 Standard 3 4 650 850 B 1 4 B 3 8 04 B 1 2 06 B Nil Nil B Piping port (B dimension) 1 Standard 11 2 Standard 01 B 1 8 02 03 Thread type Nil Rc F G N

FILTER REGULATOR

HOW TO ORDER AW 30 03 BE 1 B 1 3 4 5 2 1 Symbol Description Body size 20 30 40 60 Nil Rc N NPT Thread type 2 F G 01 1/8 02 1/4 03 3/8 Port size 3 04 1/2 06 3/4 10 1 Nil Without mounting option B With bracket a Mounting H With set nut for panel mounting Nil Without auto drain b Float type auto Option C With float type auto drain (N.C.) drain 4 D With float type auto drain (N.O.)

3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported/Base Mounted 1

Stainless steel Aluminum die-casted Material Note Spool/Sleeve Body Platinum silver w e Sub-plate 02 03 Aluminum die-casted Platinum silver Sub-plate Assembly Part No.: VS3110-SReplacement Parts Mounting bolts and gaskets are not attached. Part no. VS3115-G Description Material No.

FILTER REGULATOR

HOW TO ORDER AW 30 03 BE 1N B K 1 4 5 6 3 2 1 Symbol Description Body size 20 30 40 60 With backflow function K With backflow function 2 Nil Rc N NPT Thread type 3 F G 01 1/8 02 1/4 03 3/8 Port size 4 04 1/2 06 3/4 10 1 Nil Without mounting option B With bracket a Mounting H With set nut for panel mounting Nil Without auto drain b Float type auto Option C With float type auto drain (N.C