Single vane type Double vane type , , 0 -5 Chamfer 0 +4 0 9 a 0 a r r n n e n n g g g o o e e n i i 0 t t 1 a a 2 a 8 r t 1 t 7 +4 0 o o 0 0 n R R +4 0 +4 0 e o 0 i g t a 9 n t a o e r R g n n o a ti r a n t o o ti R a t o R Chamfer Chamfer Chamfer A port B port A port B port A port B port A port B port For size 40 actuators, a parallel keyway will be used instead of chamfer. +5 0 +
Single vane type Double vane type 0 -5 +4 0 a r n n R e o 9 g o g t 0 0 n a i e 9 +4 0 a t t 0 i a o r 0 1 e t 1 n n o 8 g o R 0 e n r i a g a +4 0 t a n n r t g a n o e r o R n i 2 t o a 7 t i 0 t o a R t o +4 0 R For size 40 actuators, a parallel keyway will be used instead of chamfer.
0 !0 !2 !5 o !0 !4 q q y u !1 !3 r t !1 M5 type U10/32 type M5 type U10/32 type !1 y !2 u !4 !3 i !5 u e r r t w e o !0 i o q q t y !0 !2 w !
See example on page 14. 0 1 ^ oo7 J 005 fl o.oe E ,* c', 001 .F o.ooz d0.005 _a z I z 0.003 0.002 I it E 0 001 0.0007 0.0005 0 . 2 0 . 3 0 5 0 . 7 I 2 3 5 7 1 0 Length of Tube L (m) 0 5 1 0 1 5 m 0 1 2 3 4 5 6 Suclion Flow Rals \ !
(mm) 0 2 o 2 0 4 a 4 0 6 0 6 0 8 0 8 1 0 0 1 0 13 s13 1 6 s 1 6 20 s2O 25 o25 92 o32 40 s4O 50 o50 S Silicone rubber U Urethane rubber F Fluorine rubber GN Conductive NBF (o2-o16) GS Qonductive Silicone (o2-o 16) Vacuum thread dia.)
, 3: 0..10V (default) , 4: 0..5V, 5: 1..5V, 6: 0..20mA, 7: 4..20mA 01h Channel 0 .. .. .. 300Bh Slot0_AnalogRange 0: -10..+10V, 1: -5..+5V, 2: -20..+20mA, 3: 0..10V (default) , 4: 0..5V, 5: 1..5V, 6: 0..20mA, 7: 4..20mA 04h Channel 3 00h NumberOfEntries 4 01h Channel 0 0: None, 1: 2 value (default) , 2: 4 value, 3: 8 value .. .. .. 300Ch Slot0_AnalogFilter 04h Channel 3 0: None, 1: 2 value
] L3 [mm] L3 [mm] L3 [mm] 300 300 300 300 L3 Z 200 200 200 200 100 100 100 100 0 0 0 0 0 2 4 6 8 10 0 2 4 6 8 10 0 2 4 6 8 10 0 2 4 6 8 10 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 300 300 300 300 200 200 200 200 L4 L4 [mm] L4 [mm] L4 [mm] L4 [mm] m X 100 100 100 100 0 0 2 4 6 8 10 0 0 2 4 6 8 10 0 0 2 4 6 8 10 0 0 2 4 6 8 10 Work load [kg] Work load [kg] Work load [kg]
Single vane Double vane 90, 100D 270S 180S 90S 0 5 g e n a 2 0 Note 1) r 7 +4 0 0 n Note 1) +4 0 o g n e 0 a ti r 1 0 Note 1) 8 n a 9 0 o 1 +4 0 t ti e o a e g Note 1) t R +4 0 n o g a R r n n ra 0 o 9 ti n a e t io o g R at n a ot r R n (90) (90) o ti a t o R Chamfer Chamfer (45) Chamfer (45) B port Chamfer Note 2) A port B port A port B port (40) B port A port A port * For size 40 actuators
x @ 0 1 N V : Capacity 2 0 : T ube I.D cm L : Tube length em V= 1000X4D2X L .Burst'prdof 0 x @ 0 Wat"'-o..wt(Wat..) 0 0 x @ 1 = 1 000 X"4 (O.6) 2X100 =O.02BR @ . llnte or no Influence o .
500 200.00 3000 3000 0 85.0 50 100.0 0 0 0.5 Axis 2 INC 500 200.00 3000 3000 0 85.0 50 100.0 0 0 0.5 1 Axis 3 INC 500 200.00 3000 3000 0 85.0 50 100.0 0 0 0.5 > > > > > > > > > > > > > > Axis 1 SYN-I 500 100.00 3000 3000 0 0 0 100.0 0 0 0.5 Axis 2 SYN-I 0 0.00 0 0 0 0 0 100.0 0 0 0.5 2046 Axis 3 SYN-I 0 0.00 0 0 0 0 0 100.0 0 0 0.5 Axis 1 CIR-R 500 0.00 3000 3000 0 0 0 100.0 0 0 0.5 Axis
O e b u t ) h c n i ( . n i M e l o h . a i D . t W ) f g ( . o N t r a P D L Q M 4 / 1 0 0 7 0 L R K 8 6 . 0 ) 2 . 7 1 ( 9 8 . 0 ) 5 . 2 2 ( 1 2 . 0 ) 3 . 5 ( 5 7 . 0 ) 9 1 ( 8 1 . 0 ) 6 . 4 ( 8 8 / 3 0 0 1 1 L R K 9 8 . 0 ) 7 . 2 2 ( 0 1 . 1 ) 8 2 ( 6 2 . 0 ) 6 . 6 ( 1 9 . 0 ) 3 2 ( 8 2 . 0 ) 7 ( 6 1 2 / 1 0 0 3 1 L R K 4 0 . 1 ) 5 . 6 2 ( 2 2 . 1 ) 1 3 ( 1 3 . 0 ) 8 . 7 ( 4 9 . 0 ) 4
/Program No. selection 2 DI1 CN1-23 DI2 DI1 DI0 Program method DI-1 0 0 0 Program No. 1 0 0 1 Program No. 2 0 1 0 Program No. 3 0 1 1 Program No. 4 1 0 0 Program No. 5 Point table No.
2.625 10.5 0072 114 1 4 0 0 0 0 0 0 0 0.75 3 Byte0 Byte1 CH0 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 0 0 0 0 MSB AD LSB Byte2 Byte3 CH1 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 0 0 0 0 MSB AD LSB -22No.EX-OMN0037CN-A -1010 V-55 V-2020 mA AD (ab) [V] [mA] 16 16 (2 ) 10 (2 ) -1010 V -55 V -2020 mA 7FFF 7FFF 32767 10.5 5.25 21 79E8 79E8 31208 10 5 20 3CF4 3CF4 15604 5 2.5 10 0 0 0 0 0 0
100 200 300 400 500 0 100 200 300 400 500 L1 Mep Stroke (mm) Stroke (mm) 0 2 4 6 8 10 When an actuator is operated under conditions that exceed the lines in the graphs above, be sure to use a regenerative absorption unit.
3.5 +0.013 +0.001 3.5 2.8 0.5 6 16 0.1 4 M3 x 0.5 4 3.5 1 3 5.5 M2.5 x 0.45 4.5 3.5 4.75 C0.5 2.75 +0.1 0 +0.2 0 0.05 0.15 0 0.2 +0.2 0 6 6 5.5 1.25 4.5 6.5 8 5 6.5 5 CXS10 5 3.2 1 C0.5 3.5 20 0.1 +0.016 +0.001 M5 x 0.8 M3 x 0.5 4 +0.2 0 +0.2 0 0 0.2 0.05 0.15 +0.3 0 8 8 7.5 2 5 9.5 8 7 8 6 CXS15 +0.016 +0.001 6 5.2 1.5 C0.5 5.5 25 0.1 M6 x 1.0 M5 x 0.8 5 3 +0.3 0 0 0.2 +0.2 0 +0.2 0 CXS20
AL.9F Battery warning AL.10 0 1 0 Undervoltage AL.E0 Excessive regeneration AL.12 0 0 0 Memory error 1 (RAM) warning AL.13 0 0 0 Clock error AL.E1 Overload warning 1 Warnings AL.15 0 0 0 Memory error 2 (EEP-ROM) AL.E3 Absolute position counter AL.16 1 1 0 Encoder error 1 warning (At power on) AL.E5 ABS time-out warning AL.17 0 0 0 Board error AL.E6 Servo emergency stop AL.19 0 0 0 Memory
0 0 1 1 3 5 8 16 27 53 84 1 0 0 1 1 0 ZCU AMJ Misc.
H J K u 1 5 7 {40) 1 1 8 1 0 0 0 8 ( 3 0 1 0 2 ) 1 8510008 (47 lO 2t 1 3 2 {33 5) ) 7 1 I t a t 0 9 6 t24 E\ r 1 8 t30l 1 3 0 7 5 ) 0 7 5 fi9 0 008 o2l , 2 C (s) 224 157) Millimeters in Parentheses Millimeters in Parentheses NVM830-N01-13 Nylon Roller Loosen hex socket screw and adjust NVM830-N01-14 Rod may b6 bent: bending is 0 39" {1 omm) I I J F O F 0 5 1 l b s ( 0 2 3 k q ) F O F ' 4
Output pressure (kPa) G 20 0.5 0.5 Return PPA 40 0 0 Out AL 60 0.5 0.5 80 1.0 1 0 2 4 6 8 10 0 25 50 75 100 0 25 50 75 100 Input signal (% F.S.) Input signal (% F.S.)
H J K u 1 5 7 {40) 1 1 8 1 0 0 0 8 ( 3 0 1 0 2 ) 1 8510008 (47 lO 2t 1 3 2 {33 5) ) 7 1 I t a t 0 9 6 t24 E\ r 1 8 t30l 1 3 0 7 5 ) 0 7 5 fi9 0 008 o2l , 2 C (s) 224 157) Millimeters in Parentheses Millimeters in Parentheses NVM830-N01-13 Nylon Roller Loosen hex socket screw and adjust NVM830-N01-14 Rod may b6 bent: bending is 0 39" {1 omm) I I J F O F 0 5 1 l b s ( 0 2 3 k q ) F O F ' 4