Exhaust Cleaner for Vacuum Pump AMV Series

AMV15 SP ZCUK 0.015 Inlet pressure (MPa) AMJ AFJ 0.01 AMV AMV AMV15 AMV160 AMV75 AMV37 AMV6 AMV3 ZH -X185 0.005 Related Products 0 100 200 500 1,000 2,000 5,000 10,000 20,000 Flow rate (L/min [ANR]) Dimensions AMV3, 6, 15, 37 AMV 75, 160 B Exhaust Exhaust A A B Port size IN IN C E 8 x d Flange part Model Port size A 231 305 410 710 562 860 B 123 153 210 210 500 500 C 80.7 105.3 d 19 19 E

Exhaust Cleaner for Clean Rooms AMP Series

hole F Applicable screw M5 hexagon socket head cap screw M6 hexagon socket head cap screw M8 hexagon socket head cap screw Model AMP220 AMP320 AMP420 E OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90

AP10PA

(Top view) r r e Pressure gauge unit 2) Code Unit psig/bar MPa w q w q w q 1) Refer to gauge guide (P.1058) for gauge specifications.

Air Suction Filter In-line Type with One-touch Fittings Series ZFC 1

L O L ZX G H F K ZR J ZM ZH E D I A ZU B C Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZL 2-4.5 ZY ZQ A B C D E F G H I J K L Model 4 ZFC100-04 ZF 6 ZFC100-06 53.2 9.1 30 14.1 10 18 11.6 19.5 23 20 29 5/32" ZFC101-03 ZP 1/4" ZFC101-07 6 ZFC200-06 ZCU 8 ZFC200-

Siiiil"Tivrc

C N.C. dauto drain (dd AMG 150 sso) D N.O. daulo drain (dd. AMG 650 s5o) AMG 250 N I Body Size.

AS-FPQ/AS-FPG

ASS ASR ASF Male thread Proper tightening torque Nm Width across flats mm Nominal size of adjustable angle wrench mm M5 1/6 turn after hand tightening 8 100 12 17 19 24 7 to 9 12 to 14 22 to 24 28 to 30 1/8 1/4 3/8 1/2 150 200 200 200 Lock Nut Tightening Torque Caution 1. The proper tightening torque for the hexagon lock nut is as shown in the table.

3 Port Solenoid Valve SYJ300/500/700 Series

Common exhaust(pilot and main valve)type Pilot exhaust Not required Lubrication Free Mounting position 150/30 Impact / Vibration resistance m/s2 Dust proof Protection structure Base mounted type Solenoid Specifications Grommet (G), E(H), L type plug connector (L), M type plug connector (M) Electrical entry Coil rated voltage V DC 24, 12, 6, 5, 3 Internal pilot AC 50/60Hz 100, 110, 200, 220

PFxx-OMO0007CN

10 100 PF2A721 D 20 200 PF2A751 E 50 500 -37No.PF-OMO0007CN PF2A710/750 PF2A711/721/751 -38No.PF-OMO0007CN ()ZS-37-A (L )ZS-37-B ZS-29-T -39No.PF-OMO0007CN NPN(1 ) + (15 V) NPN(1 ) + (420 mA) PNP(1 ) + (15 V) PNP(1 ) + (420 mA) 10 PF2A7 NPN(1) + (15 V) PF2A7--28--X560 PNP(1) + (15 V) PF2A7--68--X560 NPN(1) + (420 mA) PF2A7--29--X560 PNP(1) + (420 mA) PF2A7--69--X560 DC(+) DC(+)

Magnet: None, Mounting: E (Front screw clearance hole), Overall Length: Standard, Bore Size: 200 (2"), Stroke: 200 (2"), Body Option: C (Rubber Bumper)

Magnet: D (Built-in), Mounting: E (Front screw clearance hole), Overall Length: Standard, Bore Size: 200 (2"), Stroke: 200 (2"), Body Option: C (Rubber Bumper)

Magnet: D (Built-in), Mounting: E (Front screw clearance hole), Overall Length: Standard, Bore Size: 200 (2"), Stroke: 200 (2"), Body Option: C (Rubber Bumper), Auto Switch: No Switch, Lead Wire or Prewired Connector: M (1m)

Magnet: D (Built-in), Mounting: E (Front screw clearance hole), Bore Size: 200 (2"), Stroke: 200 (2"), Body Option: C (Rubber Bumper)

Magnet: D (Built-in), Mounting: E (Front screw clearance hole), Bore Size: 200 (2"), Stroke: 200 (2"), Body Option: C (Rubber Bumper), Auto Switch: No Switch, Lead Wire or Prewired Connector: M (1m)

Magnet: None, Mounting: E (Front screw clearance hole), Bore Size: 200 (2"), Stroke: 200 (2"), Body Option: C (Rubber Bumper)

Magnet: None, Mounting: E (Front screw clearance hole), Bore Size: 200 (2"), Stroke: 200 (2"), Body Option: C (Rubber Bumper), Auto Switch: No Switch, Lead Wire or Prewired Connector: M (1m)

Magnet: None, Mounting: E (Front screw clearance hole), Overall Length: Standard, Bore Size: 200 (2"), Stroke: 200 (2"), Body Option: C (Rubber Bumper), Auto Switch: No Switch, Lead Wire or Prewired Connector: M (1m)

Precision Clean Regulator

size 41 IN OUT A B C D Model Port size SRP111-M5 M5 x 0.8 14 23.5 30 30 C D SRP111-01 Rc 1/8 15 22.5 40 40 873 SRP Series Made to Order Specifications: Please contact SMC for detailed dimensions, specifications and lead times.

Non-Standard Motor Compatible Drivers Matsushita Electric Industrial Co., Ltd. Drivers for LJ1, LG1, LX

Power supply Single phase 200VAC (A type) or Single phase 100VAC (A1 type) MC NFB Servomotor HC-PQ C P U V W L1 U V Servo amp MR-CA or SM L2 E W MR-CA1 The cable length between the controller and servo amp is 2m or less. 24VDC Z CN1 EMG Note 7) Shuts off with alarm signal when servo ON is turned OFF.

Mounting: Axial Foot, Bore Size: 80mm, Port Thread: TN [NPT (25~80)], Coil Scraper: Without, Stroke: 200mm, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: 0.5m Cord Length, M8-3 Pin Connector, Number: 3 pcs.

Magnet: Built-in, Model: Stainless Steel, 14MPa, Mounting: FY [Front Rectangular Flange (for 14MPa)], Bore Size: 40mm, Rod Dimension: Series B Rod Size, Stroke: 200mm, Rod End Nut: None, Rod Boot: None, Cushion: w/Double Side Cushion, Port Location: Port: Top/Cushion Valve: Right, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: 0.5m Cord