Slit Valve

Applicable wafer size 200 mm 300 mm XM XY Non-cassette type DXSA Auto switch and connector XVD Symbol Auto switch Connector Nil A None Lead wire: 0.5 m (without connector) XGT XGT For 200 mm wafer For 300 mm wafer CYV With multiple connector Note 1) C Cassette type D-A93 (With 2 pcs. for opening and closing) (T3106 000: Made by AMP) With D-sub connector Note 2) F (CDE-9PF05: Made by HIROSE

Smooth Cylinder Series CQSY

How to Order Standard B 20 30 D C CQSY B 20 30 D C F9BW S CDQSY With auto switch Number of auto switches With auto switch (Built-in magnet) 2 pcs. 1 pc. n pcs.

Precision Cylinder Series MTS

freezing) Bearing type Ball spline Rubber bumper Cushion Air cushion Effective cushion length (mm) 11 12 9 10 17 17 Lubrication Non-lube Reed switch: D-A9 Solid state switch: D-F9 D-F8 Reed switch: D-A9 Solid state switch: D-F9 Auto switches +1.0 0 Stroke tolerance mm 0.1 or less (within allowable torque values) 0.2 or less (within allowable torque values) Non-rotating accuracy Port size

Compact End Lock Cylinder Series CBQ2

C 32 H L CBQ2 Standard A93 S B 50 D C CDBQ2 With Auto Switch 32 H L Number of auto switches With auto switch (built-in magnet) 2 pcs. 1 pc.

XG_-OMV0028

XGT 3 1 2 50336 1 C O 1:FKM 2:Kalrez R 4079 Kalrez R DuPont Performance Elastomers 50336 50mm 336mm 2: 3: 1:1 3:300mm A :0.5m D-A93 C 6 (C016 30C006 100 12:AMP ) (2 ) F 9 D CDE-9PF05 5 - 3. 6 - 3-1 1AB 23 2 3 19 2A 21 23 2B 1B 2C 2 2 3 19 3-2 1A 1B 26 8 9 22 13 12 18 9 27 12 13 18 9 18 , 21O 5 6 7 ASSY O 4 3-3 2A2B CLOSEOPEN 8 9 9 13 12 18

Microspeed Cylinder: Double Acting/Single Rod Series CUX ø 10, ø 16, ø 20, ø 25, ø 32 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

Port thread type (for 32) Nil TN TF Rc NPT G Action D Double acting M5 for 15 to 25.

This is a legacy product. Please contact us for the latest version.sales@ocaire.com, CYL, TIE ROD, LOCKING, ACTUATOR, CNA/CNA2 POWER LOCK CYLINDER, NE, 50MM CNA DBL ACTING, AUTO-SW, 8.45878 lb

The CNA2 series cylinder with lock is suitable for mid-stroke stops, emergency stops, and drop prevention. An equal holding force in extending and retracting directions make it possible to lock at either end of the stroke. High reliability and stable holding force are maintained by using a substantially lengthened brake shoe with superior wear resistance. The locking mechanism is isolated

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

Adjuster Option: Stroke Adjustment Range Extension end (AS) Bore size Suction flow rate L/min (ANR) Stroke adjustment range 0 to 5 mm Retraction end (AT) 6, 8, 12 1 Rubber stopper Both ends (A) 16 2 Extension end (CS) 20 3 Stroke adjustment range 0 to 5 mm Retraction end (CT) 25 5 Metal stopper Both ends (C) Proper Auto Switch Mounting Position (Detection at Stroke End) E A B Reed auto switch: D-A93

(Or None in the Case of No Switch), Lock Unit Built-in Magnet: D (Built-in), Lock Unit Switch Type: A93--Reed, DC Volt, AC Volt, LED, Horizontal, 0.5M

10-cls-e

CLS 125 A93 TN D UA Bore size (mm) Lock unit auto switch Nil Without auto switch Refer to the table below for applicable auto switch models Port thread type Lock unit built-in magnet Nil TN NPT TF G Rc Nil D Built-in magnet Without magnet (Without auto switch) Cylinder Unit/Applicable Auto Switches Load voltage Lead wire length (m) Applicable load Indicator light Auto switch model Special

(Or None in the Case of No Switch), Lock Unit Built-in Magnet: D (Built-in), Lock Unit Switch Type: A93--Reed, DC Volt, AC Volt, LED, Horizontal, 0.5M

(Or None in the Case of No Switch), Lock Unit Built-in Magnet: D (Built-in), Lock Unit Switch Type: A93--Reed, DC Volt, AC Volt, LED, Horizontal, 0.5M

(Or None in the Case of No Switch), Lock Unit Built-in Magnet: D (Built-in), Lock Unit Switch Type: A93--Reed, DC Volt, AC Volt, LED, Horizontal, 0.5M

(Or None in the Case of No Switch), Lock Unit Built-in Magnet: D (Built-in), Lock Unit Switch Type: A93--Reed, DC Volt, AC Volt, LED, Horizontal, 0.5M

This is a legacy product. Please contact us for the latest version.sales@ocaire.com, CYL, TIE ROD, LOCKING, ACTUATOR, CNA/CNA2 POWER LOCK CYLINDER, NE, 50MM CNA DBL ACTING, AUTO-SW, 8.45878 lb

IIIIIIIIII

Part Number Description SDU-5000/SDR-800/10 SDU-5000/SDR-800/30 SDU-5000/SDR-800/60 SDU-5000/SDR-800/90 SDU-5000/SDR-900/10 SDU-5000/SDR-900/30 SDU-5000/SDR-900/60 SDU-5000/SDR-900/90 SDU-5000/SDV-800/10 SDU-5000/SDV-800/30 SDU-5000/SDV-900/10 SDU-5000/SDV-900/30 Stepper Driven Regulator, 0.7-10 PSI, 1/8"NPT Ports Stepper Driven Regulator, 0.7-30 PSI, 1/8"NPT Ports Stepper Driven Regulator

(Or None in the Case of No Switch), Lock Unit Built-in Magnet: D (Built-in)

Cylinder (Tube) Inner Diameter(φ): 80, Stroke(mm): 900, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: With fall prevention function / With Brake / With Intermediate Stop Function, Environment, Applications: Standard, Cushion: Air cushion on both sides, Operating Pressure(MPa): 0.08 to 1.0, Specification

Cylinder (Tube) Inner Diameter(φ): 63, Stroke(mm): 900, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: With fall prevention function / With Brake / With Intermediate Stop Function, Environment, Applications: Standard, Cushion: Air cushion on both sides, Operating Pressure(MPa): 0.08 to 1.0, Specification