Magnet: None, Mounting: T (Center Trunnion), Style: Aluminum Tube, Bore Size: 80mm, Thread: Rc, Stroke: 500mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: D (Spring/Air Pressure Lock)
Magnet: None, Mounting: T (Center Trunnion), Style: Aluminum Tube, Bore Size: 80mm, Thread: Rc, Stroke: 1200mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: D (Spring/Air Pressure Lock)
Magnet: None, Mounting: T (Center Trunnion), Style: Aluminum Tube, Bore Size: 80mm, Thread: Rc, Stroke: 250mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: D (Spring/Air Pressure Lock)
Magnet: None, Mounting: T (Center Trunnion), Style: Aluminum Tube, Bore Size: 80mm, Thread: Rc, Stroke: 800mm, Option: K [Heat Resistant Tarpaulin, Cushion: Both Sides (Air-hydro has No Cushion)], Lock Operation: P (Air Pressure Lock-up)
Cylinder (Tube) Inner Diameter(φ): 80, Stroke(mm): 1200, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: With fall prevention function / With Brake / With Intermediate Stop Function, Environment, Applications: Standard, Cushion: None, Operating Pressure(MPa): -, Specification: -, Port thread type:
Cylinder (Tube) Inner Diameter(φ): 80, Stroke(mm): 250, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: With fall prevention function / With Brake / With Intermediate Stop Function, Environment, Applications: Standard, Cushion: With cushions on both sides, Operating Pressure(MPa): 0.08 to 1.0, Specification
Cylinder (Tube) Inner Diameter(φ): 80, Stroke(mm): 800, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Standard, Additional Function: With fall prevention function / With Brake / With Intermediate Stop Function, Environment, Applications: Standard, Cushion: With cushions on both sides, Operating Pressure(MPa): 0.08 to 1.0, Specification
Magnet: None, Mounting: Center Trunnion, Style: Aluminum Tube, Bore Size: 80mm, Thread: Rc, Stroke: 100mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: Spring/Air Pressure Lock, Auto Switch: -, Lead Wire or Prewied Connector: -, Number: -
Magnet: None, Mounting: Center Trunnion, Style: Aluminum Tube, Bore Size: 80mm, Thread: Rc, Stroke: 175mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: Spring/Air Pressure Lock, Auto Switch: -, Lead Wire or Prewied Connector: -, Number: -
Magnet: None, Mounting: Center Trunnion, Style: Aluminum Tube, Bore Size: 80mm, Thread: Rc, Stroke: 400mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: Spring/Air Pressure Lock, Auto Switch: -, Lead Wire or Prewied Connector: -, Number: -
Magnet: None, Mounting: Center Trunnion, Style: Aluminum Tube, Bore Size: 80mm, Thread: Rc, Stroke: 1400mm, Option: J [Nylon Tarpaulin, Cushion: Both Sides (Air-hydro has No Cushion)], Lock Operation: Spring/Air Pressure Lock, Auto Switch: -, Lead Wire or Prewied Connector: -, Number: -
Magnet: None, Mounting: Center Trunnion, Style: Aluminum Tube, Bore Size: 80mm, Thread: Rc, Stroke: 500mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: Spring/Air Pressure Lock, Auto Switch: -, Lead Wire or Prewied Connector: -, Number: -
Cylinder (Tube) Inner Diameter(φ): 80, Stroke(mm): 1200, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: With fall prevention function / With Brake / With Intermediate Stop Function, Environment, Applications: Standard, Cushion: None, Operating Pressure(MPa): -, Specification: -, Port thread type:
Cylinder (Tube) Inner Diameter(φ): 80, Stroke(mm): 250, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: With fall prevention function / With Brake / With Intermediate Stop Function, Environment, Applications: Standard, Cushion: With cushions on both sides, Operating Pressure(MPa): 0.08 to 1.0, Specification
Cylinder (Tube) Inner Diameter(φ): 80, Stroke(mm): 800, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Standard, Additional Function: With fall prevention function / With Brake / With Intermediate Stop Function, Environment, Applications: Standard, Cushion: With cushions on both sides, Operating Pressure(MPa): 0.08 to 1.0, Specification
Slit Valve 1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.
150 175 AMV3-10 AMV6-14 AMV15-20 AMV37-20 AMV75-30 AMV160-40 R1 R1 1/2 R2 R2 80 (3B) JIS 10K FF flange 100 (4B) JIS 10K FF flange 789
E Electric conductivity This means "full span" or "full scale", and indicates maximum variation width at rated value. For example, when analogue output is 1 to 5 V, F.S.=5[V] 1[V]=4[V]. (Reference: 1%F.S. = 4[V] 1% = 0.04[V]) F F.S. (full span / full scale) Fluid contact part A part that comes into physical contact with the fluid.
MHT Pressure 0.6 MPa 0.4 MPa MHY 0.2 MPa MHW Opening/Closing angle (Both sides) MRHQ MHT2-50D L = 150 mm Misc. D20Pressure 0.6 MPa 0.4 MPa Precautions 0.2 MPa Opening/Closing angle (Both sides) Be sure to read before handling.
Material Note Description Body Needle Bottom cover Handle Component Parts Chromated Aluminum alloy Brass Aluminum alloy Zinc alloy q w e r No. Description Material Note Body Valve guide Check valve Needle Handle Chromated Chromated Rubber lining Chromated Black painted Aluminum alloy Aluminum alloy Brass Brass Carbon steel q w e r t AS Replacement Parts ASP No. Description Part no.