Table of Contents

Model A B C D E Y Y B C D A E Flat Model ZPY10D--A10 10 12 15 25 41 6 Flat with ribs U C ZPY16D--A10 ZPY10 -A10 16 18 16 26 42 7 15 12 22 1.7 10 12 1.8 3 38 ZPY13 -A10 U C 13 Dimensions by Stroke ZPY16 -A10 U C 38.5 16 18 12.5 22.5 1.2 3.5 10 16 H Model Dimensions by Stroke F G F G 10, 13 16 ZPYD10--A10 52 23 86 53 87 H Model F G F G ZPYD20--A10 62 124 63 125 51 U C U C U C U C U C ZPYD30

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10-10 0 5 10 t i o o n L DTime [min] Operation cycles -X e e a a l l k k a t e l u w w g a a c 2 e i o o g g 1 O-ring seals separate vacuum and atmosphere. t Employs a magnetically coupled rodless cylinder with no air leakage from moving parts. n 1 r a L L e e e Particulate generation from the linear guide unit has been reduced with the use of a stainless steel linear guide and low particulate

Electric Actuators

10 5.8 4 5.5 36 1 0.2 6.5 6.5 1 3 39 28 10.5 3.3 T-slot A +0.030 0 depth 4 +0.030 0 depth 4 L-M6 C 4H9 Body mounting reference plane Refer to Cross section C-C.

5 Port Solenoid Valve Series SY3000/5000/7000/9000

Series 10-SY9000 Series 10-SY5000 Port size Flow characteristics Weight (g) Port size Flow characteristics Weight (g) 14/2(PA/B) 4/25/3(A/BEA/EB) Grommet Cv b C [dm 3/ (sbar)] Cv b C [dm 3/ (sbar)] 14/2(PA/B) 4/25/3(A/BEA/EB) Grommet Cv b C [dm 3/ (sbar)] Cv b C [dm 3/ (sbar)] Valve model Type of actuation 1, 5, 3 Valve model Type of actuation 1, 5, 3 W M8 W M8 L, M plug L, M plug (P, EA,

Table of Contents

Pressure 0.6 MPa Pressure 0.6 MPa 0.5 MPa 20 20 0.5 MPa MHY 0.4 MPa L L 0.4 MPa 0.3 MPa 10 10 MHW 0.3 MPa 0 0 MRHQ 10 20 30 40 50 10 20 30 40 50 60 60 Gripping point L (mm) Gripping point L (mm) Misc.

V100

M5 x 0.8 (P, R port) 10 8.6 7.5 VQ 17.5 23 VKF VQZ L plug connector (L): SYJ34-L-M5 M plug connector (M): SYJ34-M-M5 M8 connector (WO): SYJ34-WO-M5 VZ VS VFN Approx. 300 (Lead wire length) 41.5 [48.5] 26.1 46 M8 x 1 28.5 52.6 [59.6] Approx. 300 (Lead wire length) 58.5 [60.7] 48.7 [50.9] 57.6 50.2 43.7 R P R P R P 10 8.6 10 8.6 10 8.6 23 23 23 5 5 5 28.5 28.5 28.5 35.6 35.6 35.6 Refer to

CQ2

l X 75 l X 80 l X 85 l X 90 l M5 X 45 l X 50 l X 55 l X 60 l X 65 l X 70 l X 75 l X 80 l X 85 l X 90 l M5 X 50 l X 55 l X 60 l X 65 l X 70 l X 75 l X 80 l 10 8.5 5.5 5.5 8 8 7.5 7.5 7.5 10.5 12.5 12.5 6.5 9.5 CU CQS 14.5 14.5 CQ2 10 8.5 MU Auto Switch Mounting Bracket Part No.

Table of Contents

U N x P 20 5 N C 1 0.2 (5.1) 10 5.8 4 5.5 36 6.5 6.5 1 3 39 28 10.5 3.3 T-slot A 4H9 +0.030 0 depth 4 Body mounting reference plane L-M6 C Work piece mounting reference plane Refer to Cross section C-C.

Table of Contents

R C R C (44) G1/2 E A H 2-P Port size B (S) E G1/2 2-M Thread depth N D A H B 2-P Port size 2-M Thread depth N D L L K K N.O.

F

M3 & M5 ported C o m p a c t O n e To u c h C o l l e t D e s i g n a l l o w s e a s y d i s a s s e m b l y w i t h strong tube gripping For use from 10 Torr vacuum to 1MPa pressure Electroless Nickel Plated as standard T E C H N I C A L SPECIFICATIONS Fluid Air Max Operating Pressure 1MPa / 145PSI Operating Vacuum Pressure 10 Torr~ (0.2PSI) Ambient and Fluid Temperature 0~60C / 32~140F

Table of Contents

40 50 40 DMGF63 Load weight m0 (kg) Load weight m0 (kg) Load weight m (kg) Load weight m (kg) 30 30 20 -X 20 20 MGF40 MGF40 20MGF40 MGF40 10 10 10 MGF40 Data MGF40 10 5 4 3 5 4 3 2 2 5 5 1 10 20 30 40 50 100 200 300 400 1 5 4 10 20 30 40 50 100 200 300 400 5 10 50 100 10 50 100 Eccentric distance l (mm) Eccentric distance l (mm) Stroke (mm) Stroke (mm) l = 200 mm l = 300 mm Graph (3) Graph

Smooth Cylinder/Low Speed Cylinder

L IY-G02 IY-G03 IY-G04 IY-G05 IY-G08 IY-G10 8 10 10 14 18 22 16.2 20.2 36.2 44.2 56.2 64.2 Type C 8 for axis Type C 10 for axis Type C 10 for axis Type C 14 for axis Type C 18 for axis Type C 22 for axis 1.5 1.55 1.55 2.05 2.55 2.55 0.9 1.15 1.15 1.15 1.35 1.35 7.6 9.6 9.6 13.4 17 21 21 25.6 41.6 50.6 64 72 20 to 63 0.040 0.076 0.040 0.076 0.040 0.076 0.050 0.093 0.050 0.093 0.065 0.117 Material

High Vacuum Angle Valve

0 Body Valve side exhaust Refer to the back of page 465 for Maintenance Parts. 457 A XLS Series Dimensions XLS/Without control power supply D Lead wire AWG20, O.D.: 2.63 mm E D F L J K 2 J K L 270 10 290 10 M J K J 33 25 C B 39 G G1/2 G1/2 C B B C A B C 6 to 9 G1/2 A DIN terminal (D) Terminal (T) Conduit (C) Grommet (G) XLS/With control power supply 41 26 J K 530 10 72 OPERATION V INPUT

Made to Order

Plug) FAFB C + Stroke S A + Stroke x 2 (RA) MC E + Stroke B + Stroke Common Dimensions (mm) Slide DB Bore size (mm) Standard stroke (mm) B C DA FA FB G GA GB H J L MA MM ML NN HA E MT K MB A MC Ball bushing 12 16 20 25 32 40 50 63 6 6 8 8 8 8 9 9 8 8 10 10 12 12 16 16 26 30 36 42 48 54 64 78 19 19 30 30 38 38 60 60 5 5 6 6 10 10 12 12 51 58 68 82 100 108 139 153 8 8 10 10 12 12 16 16 18 22

Air Slide Table

A B C D1 E F G M (Fine pitch) P2 MXQ6(L, A) MXQA-AS8-X2202 41.5 2.5 3 M3 x 12 18 5.8 8.3 M6 x 0.75 M3 x 6 MXQ8(L, A, C, CL) MXQ6B(L) MXQ12(L, A, C, CL) MXQ8B(L) MXQA-AS12-X2202 46.5 2.5 4 M3 x 12 24 7.1 10.4 M8 x 1 M4 x 8 MXQ16(A) MXQ12B(L) MXQA-AS16-X2202 51.5 3 5 M4 x 12 29.4 9.2 12.6 M10 x 1 M5 x 10 MXQ20(A) MXQ16B MXQA-AS20-X2202 58.5 4 6 M5 x 12 36 11.2 16.2 M12 x 1 M6 x 12 MXQ25(A)

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

25 50, 75, 100 X L1 With head end lock With rod end lock Bore size (mm) C D E H I K M N OA OB Q RA RB Standard stroke A B L B F L A 65.5 61 4.5 59 54.5 5.5 4.5 10, 15, 20, 25 20 7 10 36 M5 x 0.8 47 8 25.5 5.4 M6 x 1.0 9 9 10 7 80.5 66 14.5 80.5 66 9 14.5 50, 75, 100 69 64 5 62.5 57.5 5.5 5 10, 15, 20, 25 25 12 12 40 M6 x 1.0 52 10 28 5.4 M6 x 1.0 9 11 10 7 84 69 15 84 69 11 15 50, 75, 100

This is a legacy product. Please contact us for the latest version.sales@ocaire.com, GAUGE, AIRLINE EQUIPMENT, AR REGULATOR, 22, AR NO SIZE RATKIT/ACCESSORY, .24200 lb

ZP

( ( Thin flat with rib CT C C Note) Note) ( C C C ( C B Note) Note) J ( ( ( ( ( Bellows Note) Note) Note) Note) Note) MB ( ( ( ( ( ZJ ( ( ( ( Deep D C Nozzle pad AN ( ( Note) Note) Flat pad MT ( ( 4 x 10 4 x 20 4 x 30 ( 5 x 10 5 x 20 5 x 30 ( 6 x 10 6 x 20 6 x 30 ( 8 x 20 8 x 30 ( 3.5 x 7 ( W Oval 2 x4 C 3.5 x 7 C 4 x 10 C U H Flat HT Heavy-duty pad HB Bellows HW Oval U ( ( ( ( Mark-free

Please contact us for the latest version.sales@ocaire.com, GAUGE, AIRLINE EQUIPMENT, AR REGULATOR, 22, AR NO SIZE RATKIT/ACCESSORY, .15400 lb, ModelPressure range (1)Indication unitConnection threadNote MPaG46-10-01/020 to 1.0MPaR 1 8, 1 4?

(full span), GAUGE, AIRLINE EQUIPMENT, AR REGULATOR, 22, AR NO SIZE RATKIT/ACCESSORY, .18298 lb, ModelPressure range (1)Indication unitConnection threadNote MPaG46-10-01/020 to 1.0MPaR 1 8, 1 4?