AS-FPQ/AS-FPG

Note) Metric sizes 04 06 08 10 12 4 6 8 10 12 Elbow Control type 0 1 Meter-out Meter-in Note) For applicable tubing O.D. selection, refer to the Model on page 711.

AS-FPQ/AS-FPG

Note) Metric sizes 04 06 08 10 12 4 6 8 10 12 Elbow Control type 0 1 Meter-out Meter-in Note) For applicable tubing O.D. selection, refer to the Model on page 711.

Speed Controller with One-touch Fittings

2 w y r u e ASN !2 t AQ ASV AK VCHC ASR ASQ i q o !0 !1 i q o !0 !

CEx-OMQ0011

LCD 4.DIN 30mm 30mm 10 - 2-2 30mm No. 2-3 (1), (Err6), 1 ML2B25 15 ML2B32 19 ML2B40 24 2-4 5mm 5-10-15 5mm Err5 4.2 5 10 15 20 1.0 1.0 1.0 1.0 5.8 5mm30mm Err6: 20 30 100mm/sec :50cm :0.5MPa 11 - 3 3 3 3 ML2B+CEU2 NO 1 () () YES NO () YES NO YES YES NO YES NO YES YES NO NO NO YES A 12 - A 1.

Air Cylinder NCY2 Series Magnetically Coupled Rodless Cylinder

aT 24VDC Relay, a Sequence ,DrfTAV 4V or less 4V or less inCcatcn 0.8V or ess ai u u ru!

NCY2 series

aT 24VDC Relay, a Sequence ,DrfTAV 4V or less 4V or less inCcatcn 0.8V or ess ai u u ru!

Bag Filter

Flow rate (L/min) 50 A Bag Filter FGF Series Construction FGF1 FGF3-40 FGF5-60 Air release Nut Air release valve Pin q FGD Davit for cover Spring washer t u !0 y u o q Air release Fluid release FGE Retainer Handle FGG Guide slit Center bolt Bracket for V-band Air release valve FGA !1 t Inlet i FGC i Inlet Drain port FGF FGF r Pressure gauge !

PF2D

Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16 Mcm of deionized water at class 10 clean room (1 l/min flow rate).

3M/SMseries

' spaold order Elgctrical Entry//lndicator llght and surge voltage Series NVFSOOO Manifold Manifold Manifold B mount (Barstock Type) Manifold type 10 stations Maximum stations x lf thero sre more than 5 stiations supply both sides of supply (P) porl and exhatlsl bottl sides ol xhaust (R) pod.

Speed Controller with One-touch Fittings Panel Mount Type Series AS



1F-3 In-line Type 1

Flow Rate and Effective Area AS1001F AS2001F AS3001F AS2051F AS4001F Model 3.2, 4, 6 4 6 6 8 6 8 10, 12 10 12 Metric size Tubing O.D. 1/8" 5/32" 3/16", 1/4" 3/16" 1/4" 1/4" 5/16" 3/16" Inch size 1/4" 5/16" 3/8" 3/8" 1/2" 5/32" Flow rate (l/min(ANR) 290 460 230 100 130 420 660 920 1050 1390 Controlled flow (Free flow) 4.5 7 3.5 1.5 2 6.5 10 14 16 21 Effective area (mm2) Note) Flow rate values

Speed Controller with One-touch Fittings Panel Mount Type Series AS



1F-3 In-line Type 1

ASV AK ASS ASR ASF 15-9-73 3 Construction w r y t u !2 e !1 No. q w e r t y u i o !0 !1 !

V100

V100-31-1A V100-74-1 Material FKM, Steel Aluminum die-casted Number 10 11 Note Gasket, 2 screws Gasket assembly Sub-plate VFN R A P 2 4 8 6 11 10 1 How to Order Connector Assembly For DC: SY100 30 4A For 100 VAC: SY100 30 1A For 200 VAC: SY100 30 2A For other voltages of AC: SY100 30 3A SY100 30 A Lead wire length Without lead wire: (With connector and 2 sockets) Nil 6 10 15 20 25 30 50

High Purity Fluoropolymer Needle Valve Series LVN 1

2 1 P0.01MPa P0.01MPa P0.01MPa 2 1 0.5 0 2 4 6 8 10 0 0 0 2 4 6 8 10 0 0 2 4 6 8 10 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Number of needle rotations Number of needle rotations Number of needle rotations Construction t r w e With reducer q i A y u y u Part

Step Motor Controller With Step data Teaching Function (Servo / 24VDC)

Electric actuators / Common precautions 19 9.1 Design and selection 19 9.2 Mounting 20 9.3 Precautions for Use 20 9.4 Operating environment 21 9.5 Maintenance 22 9.6 Precautions for electric actuator with lock 23 10.

SYJ300-OMU0003

1000mm 3.23.7mm 15 1500mm () 20 2000mm 25 2500mm 30 3000mm Assy {}2000mm 50 5000mm 0.2-0.33mm 2 1.7mm DC AC SYJ312-5LO-M3 SYJ312-1LO-M3 SY100-30-4A-20 SY100-30-1A-20 (+-) (1mm) 10 No.SYJ300-OMU0003 DIN (DS) DZ DIN M8 SYJ Series LM S + Z S Z + 4WA 4WA R U +3WA 3WA R U 4(WA ) 4(WA ) 3(WA ) 3(WA ) () DC24V,12V +1/4 DC24V W WA + ,W13WA 43 DC24V,12V 62ms i1:i2

Compact Guide Cylinder with One-way Lock Series MLGP ø40, ø50, ø63

Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB GC H HA IA IB IC ID IE 14 11 100 44 16 12 44 54 10 120 M6 34 52 14 4 14 40 25, 50, 75 100, 125, 150, 175 200, 250, 300, 350 12 13 107 44 20 16 47 64 148 M8 35 64 19 50 11 7 14 115 49 20 16 50 78 162 M10 38 77 19 63 16.5 16.5 13.5 6.5 16.5 Bore size (mm) J K L MM ML NN OA OB OL P PA PB PW Q R S T U VA 18 M8 x 1.25 7.5 M8 x 1.25 27 27

Auto Drain Valve Longer life & Higher resistance to foreign matter

(Normally closed) q Bowl r Valve e Lever t Valve seat w Float i Tube y Spring u Diaphragm o Chamber !0 Main valve !1 Drain cock Drain Drain When pressure inside the bowl is released: Even when pressure inside the bowl q is released, the spring y keeps the diaphragm u in its upward position. This keeps the seal created by the main valve !

MR Unit (Regulator with Mist Separator) AMR3000 to 6000 Series

ITVH N Bracket dimensions With auto drain Model Port size A M L K J H G F E D C B L 178 211 277 321 B 260 298 366 436 T 9 9 11 11 S 8 16 21 26 R 78 97 98 115 P 50 35 45 46.5 U (Body) V (Adapter) 1 4, 3 8 1 4, 3 8 AMR3000 AMR4000 AMR5000 AMR6000 144 166 188 230 182 215 281 325 21.5 18 16 18.5 37 37 42 42 3.2 3.2 4.5 4.5 32 40 48 56 28 37 37 44 51 61 66 81 101 121 131 161 10 10 45 70 260 302

ML1C

15 5 10 1 pc. 2 pcs.

ITV0000

Note: Due to the common supply/exhaust feature, different pressure range combinations are not available. 10 stations 10 The asterisk () specifies mounting. Add an astarisk () at the beginning of electro-pneumatic regulator part numbers to be mounted. Note) A DIN rail with the length specified by the number of stations is attached to the manifold.