LX

20 5.1 5.1 2.6 2.6 0.6 0.6 0.1 0.1 30 30 3.4 3.4 1.7 1.7 0.4 0.4 0.1 0.1 For transfer load of 3kg For transfer load of 1kg Positioning time (sec) Positioning time (sec) Positioning distance (mm) Positioning distance (mm) 100 100 50 50 10 10 1 1 10 10 10.1 10.1 5.1 5.1 1.1 1.1 0.2 0.2 Speed (mm/s) Speed (mm/s) 20 20 5.1 5.1 2.6 2.6 0.6 0.6 0.1 0.1 30 30 3.4 3.4 1.7 1.7 0.4 0.4 0.1 0.1 Refer

SYJ3000/5000/7000

For type R and U, DC voltage is only available.

CA2

to 600 20 to 600 35 32 85 27 64 20 40 10 17 11 M10 x 1.25 7 18 63 +0.084 0 0.1 0.3 20 31.5 102 13 up to 750 20 to 750 40 37 32 78 25 52 14 21 M12 x 1.75 10 22 80 +0.084 0 0.1 0.3 25 35.5 100 up to 750 20 to 750 40 37 116 41 92 30 52 14 21 16 M12 x 1.75 10 26 Without rod boot With rod boot P Bore size (mm) S H L MM N RR U l Z ZZ e f h Z ZZ 30 M14 x 1.5 27 1/4 10 84 16 51 165 175 43 11.2 59

Compact Manifold Regulator

L2 L2-10.5 L1=(28 x n)+56 18 20 28 52.5 81 28 5.3 5.5 SMC SMC SMC SMC 28 56 SMC SMC K K P P C C U U O O S S L L H H 8 3 5 11.5 L2 dimension DIN rail part no.

Floating Joint

: Up to 3.5 MPa JA20-8-100 JA25-10-150 JA32-10-100 JA40-12-125 JA40-12-150 JA40-12-175 JA50-16-150 JA63-16-200 JA80-20-250 JA100-24-300 JA100-27-150 JA125-27-200 JA160-33-200 20 25 32 32, 40 40 32, 40 50 50, 63 80 100 100 125 160 1100 2500 2500 4400 4400 4400 11000 11000 18000 28000 28000 28000 71000 13 17 17 22 22 22 27 27 32 41 41 41 55 7 8 8 11 11 11 13.5 13.5 16 20 20 20 24 7 8 8 11 11

CV/MVGQ

ZZ Z U S RR QY Q NN Bore size (mm) 20 25 32 40 142 133 14 62 9 14 19.8 M20 x 1.5 146 137 14 62 9 14 22 M26 x 1.5 148 139 14 64 9 16 25.8 M26 x 1.5 188 177 18 88 11 16 29.8 M32 x 2 Rod Side Trunnion Style (U) Bore size Stroke CVM5U Manual override Width across flats B2 Width across flats NA Width across flats B1 S + Stroke ZZ + Stroke Eh8 H1 NN H MM B1 F K AL I Q A B2 D HX Bore size (mm) 20

CV/MVGQ

Q QY RR S U Z ZZ NN Bore size (mm) 20 25 32 40 19.8 14 9 62 14 133 142 M20 x 1.5 22 14 9 62 14 137 146 M26 x 1.5 25.8 16 9 64 14 139 148 M26 x 1.5 29.8 16 11 88 18 177 188 M32 x 2 Rod Side Trunnion Style (U) Bore size Stroke CVM5U Manual override Width across flats B2 Width across flats NA Width across flats B1 S + Stroke ZZ + Stroke Eh8 AL B1 F H H1 I K MM NN Q A B2 D HX Bore size (mm) 20

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

(2 to 10 stations) 20 stations Nil L B D U B M Straight Elbow type (upward) U side (2 to 10 stations) Elbow type (downward) Both sides (2 to 20 stations) Special specifications In the case of special specifications, indicate separately on a manifold specification sheet.

Aluminum High Vacuum Angle Valve

U type: DC only.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

20 mA 90% 10% 80% 20% 70% 30% 60% 40% 40% 60% 0.05 to 3 L/min 0.15 to 3.15 L/min 5 V 20 mA 30% 70% PF2M705 92% 8% 0.1 to 10 L/min 0.5 to 10.5 L/min 5 V 20 mA 90% 10% 80% 20% 70% 30% 60% 40% 40% 60% 0.1 to 6 L/min 0.3 to 6.3 L/min 5 V 20 mA 30% 70% PF2M710 92% 8% 0.3 to 25 L/min 1.3 to 26.3 L/min 5 V 20 mA 90% 10% 80% 20% 70% 30% 60% 40% 40% 60% 0.3 to 15 L/min 0.8 to 15.8 L/min 5 V 20 mA

Air Cylinder

0 t u !4 q e o !3 r w i !2 y u 20 to 32 Component Parts Replacement Parts: Seal Kit Bore size (mm) Kit no. Contents 20 CG1KWN20Z-PS Set of the nos. !1, !2, !3, !4 No.

Vacuum

50 20 71 25 76 13.8 5.5 ZPRtSB 18 527 sB6.'52.! 734 78.5 8.7 1 9 7.5 ZPR168 1 8 20 29137.9 54 75 80 9.9 40 43 34 47.l5 U : 76.1 25 102 92 24.4 48 50 53 38 51 t 80.1 106 96 32.4 1 9 lP[ $enies Without Buflen luirens , Pad Diameters @2 . s4 .

Vacuum

50 20 71 25 76 13.8 5.5 ZPRtSB 18 527 sB6.'52.! 734 78.5 8.7 1 9 7.5 ZPR168 1 8 20 29137.9 54 75 80 9.9 40 43 34 47.l5 U : 76.1 25 102 92 24.4 48 50 53 38 51 t 80.1 106 96 32.4 1 9 lP[ $enies Without Buflen luirensio Pad Diameters @2 . s4 .

MY1

20 20 1.

2 Phase Stepper Motor/Without Motor Brake Series LXS

E-M5 thread depth 10 6 38 76 46 Motor wire (300mm) Photo micro sensor wire (300mm) 2-M2.5 thread depth 4 3 10 8 J 25 25 27 J x K Stroke + 220 10 Stroke + 127 13 15 (5) 0.5 46.5 3.5 2-M6 thread depth 13 58 52 27 19 [18] 15 Stroke + 127 (39) The dimension inside [ ] shows the location at which the home position switch operates. 58 (52) 28 36: T-slot pitch U N x P 20 5 N C 1 0.2 (5.1) 10 5.8

VQC

For example, changing from F Kit (D-sub connector) to S Kit (serial transmission) is achieved by simply changing the kit piece. 19 20 19 20 19 20 19 20 19 20 19 20 19 20 19 20 COM Station 1 Double wiring Station 2 Single wiring Station 3 Double wiring Station 4 Single wiring (Refer to the connector wiring diagram) Printed circuit board patterns between connectors are shifted at every station

MGG

11 12 115 200 50 M10 For long strokes Bore size (mm) Stroke range (mm) Bore size (mm) O Q R S T U V W X XA Z PG PL Y R Y 20 250 to 400 M6 x 1 depth 9 94 12 26 16 114 65 52 30 3 194 20 30.5 74 152 14 160 25 350 to 500 105 12 31 20 138 84 62 37 3 228 M8 x 1.25 depth 13 25 35.5 82 162 14 170 32 350 to 600 106 12 38 20 138 84 62 37 3 228 M8 x 1.25 depth 13 32 35.5 82 165 14 173 40 350 to 800

CRB2/CRBU2/CRB1

. 0.5m 31 63 R22.5 3 2. 5 46 Rotary Actuator Free-Mounting Type Series CDRBU2 Free-Mounting Type CRBU2 CRB2 CRB1 47 Rotary Actuator with Angle Adjuster Free-Mounting Type Series CRBU2WU Sizes: 10, 15, 20, 30, 40 How to Order CRBU2 W U 10 180 S Standard Size 10 15 20 30 40 Size 10 15 90 CDRBU2 W U 10 180 S With auto switch Sizes: 10, 15 With auto switch Sizes: 20, 30, 40 CDRBU2 W U 20 180

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

P Bore size (mm) W V U T S Z X Y Q Y R R Q HR HN 20 20 107 (115) 12 (14) 104 11 21 47.5 40 48 82 12 26 157 30 M6 x 1 depth 9 Rc 1/8 25 20 25 107 (115) 12 (14) 25.3 37 104 11 21 48 46 57 100 13 31 175 37 Rc 1/8 M6 x 1 depth 13 32 25 32 110 (118) 12 (14) 28.3 40 106 11 21 49 52 65 114 16 38 201 37 Rc 1/8 M6 x 1 depth 13 40 32 40 121 (130) 12 (15) 31.3 43 123 11 25 53 62 84 138 20 47 238 44

Environment

0 i o e r t q u !1 !2 !3 !