PSxx-OMV0008CN

* 1015 10 1% 2162 LCD * -8No.PS-OMV0008CN-E ISE70G 02 L2 M 3 Y K T ISE70G 0~1 MPa ISE75G 0~2 MPa ISE76G 0~5 MPa ISE77G 0~10 MPa ISE78G 0~16 MPa 2 A A B B 02 Rc1/4 N02 NPT1/4 F02 G1/4 :ISO1179-1 1 M12 5m M12 5m T S : L IO-Link/1+2 NPNorPNP L2 1 M SI2 1 2kPaMPa / A ZS-50-A M46 2 B ZS-50-B M46 2 ZS-48-A ZS-31-B 5 m M12 ZS-31-C 5 m -9No.PS-OMV0008CN-E M12 4 24 OUT1 IO-Link

CG5-S

B 100 31.8 29.3 27.8 69.9 10.7 3/4-16 208.9 80 and 100mm-X165US are a future release.

Process Valve

size: 32A, 40A, 50A Applicable cable O.D. 6 to 8 (D, DL) Pg9 Pilot port 12 (P1), 10 (P2) Port size: refer to table below Manual override (Non-locking push type) G (Air operated) H (Grommet: G) I (DIN terminal: D, DZ) P1 P2 F E D A B B C A J Main port 1 (A) (Back side 2 (B)) Port size: refer to table below Main port 1(A), 2(B) Pilot port 12(P1), 10(P2) A B C D E F G H I J Model VNA5-32A VNA6

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

Description Material Note 1 Body A PBT 2 Elbow body PBT 3 Body B Stainless steel 4 Knob POM 5 Needle PBT 6 Needle guide Stainless steel 7 U-seal HNBR 8 O-ring NBR 9 O-ring NBR 10 O-ring NBR 11 Cassette 12 Seal NBR 13 Spacer PBT 3.2 and 1/8" only 14 Bonnet A POM 15 Bonnet B POM 16 Gear POM 17 Indicator gear POM 18 Clip Stainless steel 19 Gasket NBR/Stainless steel 20 Seal NBR 691 AS-FSG Series

AC Servo Motor Driver (MECHATROLINK-III type)

B C L A B C Series Lead 5(2.86) (Including pulley 20 10 5 20 10 5 (Pulley ratio 4/7) ratio) Parameter *1,*2 Para.

Series VCL

H A H B B 2-P Port size 2-P Port size 2-M, thread depth N 2-M, thread depth N L L K K DIN terminal: D Conduit terminal: T Cable 6.8 to 10 F S Q 27.5 (Q) D F 25 C R C (44) R R E G 1/2 E G 1/2 A H D (S) B B A H 2-P Port size 2-P Port size 2-M, thread depth N 2-M L L K K N.C. dimensions (mm) Grommet: G Conduit: C DIN terminal: D Conduit terminal: T P Port size Rc A B C D E F H K L M N Model

CYV

Note 3) A particulate generation test has been conducted in a vacuum environment of 10-Pa. a t e l u g c 2 Stainless steel linear guide & low particulate generation vacuum grease e i t n r a e p r a 0.0 10 0 20 10 w t i o o n L Operation cycles a t e l u g c e 1 i t n r a e Particulate generation from the linear guide unit has been reduced with the use of a stainless steel linear guide and

AS-FG/ASD-FG

(ANR) Flow rate l/min (ANR) Effective area mm Effective area mm 12 10, 11 1000 10, 11, 12 08, 09 10 15 8 500 06, 07 10 6 500 4 5 2 0 0 5 10 0 5 10 0 Number of needle revolutions Number of needle revolutions 11 Series ASD-FG Construction ASD230FG ASD330FG/430FG ASD530FG/630FG ASD530FG-02 Parts list Material Note Description Note Description No. 12 Material No. 1 Body A Elbow body Knob Body

Compact Electric Actuator Series LG1

thread depth 10 20 0.02 8H10 depth 10 Encoder signal line Motor power line 8H10 depth 8 85 130 A (Table movement range) 77.3 (77) 107 10 95 Work mounting reference plane 55 Body mounting reference plane 52.5 D 1 125 8(4)-M6 x 1 thread depth 10 3(2)-8H10 depth 10 30 95 C 100 95 8(4)-6.2 (160) () () 110 95 20 95 B (140) () () Dimensions A Stroke Model B C D Note) LG1H202100-F LG1H202200-

-fl Seies

A P B E B ,rt1 0f $ [,r PEEAA P B EAPE +q--dz 3 position Closed centr/Exhaust centet/Presute cenler .1&t*080 PEEA A P B EBPE Main Parts No.

Power Valve: Economy Valve Series VEX5

Load proportion is ((load weight x 9.8)/theoretical force) x 100% Conditions of Speed Chart System A B C D E F G Solenoid valve Speed controller AS420-04 AS500-06 AS600-10 AS600-10 AS800-12 AS900-14 AS900-20 Tubing diameter x Length SGP15A x 1 m SGP20A x 1 m SGP25A x 1 m SGP25A x 1 m SGP32A x 1 m SGP40A x 1 m SGP50A x 1 m Silencer AN40-04 AN500-06 AN600-10 AN600-10 AN700-12 AN800-14 AN900

4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

A P B E B ,rt1 0f $ [,r PEEAA P B EAPE +q--dz 3 position Closed centr/Exhaust centet/Presute cenler .1&t*080 PEEA A P B EBPE Main Parts No.

Vacuum Pad

K: Non-rotating D-D B B Width across flats 19 Width across flats 19 D D D D 22 28 A B 50 5 5 22 28 A B 50 5 5 M14 x 1 M8 x 1.25 Gasket M8 x 1.25 Gasket M14 x 1 Width across flats 21 Width across flats 21 50 4 50 4 4.5 4.5 Dimensions Dimensions Part no.

PSxx-OMV0003CN

(A-B)/4 n_1(n_2)=B+(A-B)/4 A= H_1(H_2)=(A-B)/2 H_1(H_2)=(A-B)/2 B= UPDOWN1 -36No.PS-OMV0003CN-G [F 6] 5R.D. <> UPDOWN[F 6] SET UP DOWN SET [F 6] -37No.PS-OMV0003CN-G [F10] 39 <> UPDOWN[F10] SET UP DOWN 2 OFF (OUT1) (OUT2) [dUAL]2 SET () [LinE] SET () () 40 () UP DOWN () SET , (SET ) SET () [dUAL]2 SET () AbY(Z) 40 () 019 ( ) UP DOWN / () SET 1 () SET SET [F10

Series CXS 10-/11-/12- Dual rod cylinder 21-/22- ø6, ø10, ø15, ø20, ø25, ø32

Auto switches / Proper mounting position for stroke end detection Electrical entry direction: Inward Electrical entry direction: Outward B D C A (mm) D-Z73 D-Y59A,D-Y59B A B C D Bore size D 0.5 4 0.5 3 5 5 C 16.5 23 34 46 46.5 56 6 20.5 27 38 50 50.5 60 -1 2.5 -1 1.5 3.5 3.5 32 15 21.5 32.5 44.5 45 54.5 4.5 8 4.5 7 8.5 9 10 15 20 25 Note 1) The above mentioned values are indicated as a guide

Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

10-10 0 5 10 t i o o n L DTime [min] Operation cycles -X e e a a l l k k a t e l u w w g a a c 2 e i o o g g 1 O-ring seals separate vacuum and atmosphere. t Employs a magnetically coupled rodless cylinder with no air leakage from moving parts. n 1 r a L L e e e Particulate generation from the linear guide unit has been reduced with the use of a stainless steel linear guide and low particulate

70pvvna

(P2) PB Power consumption DC Holding Inrush Apparent power AC Air operated 2 (B) 1 (A) 2 (B) 1 (A) 2 (B) 1 (A) 10 (P2) Manual override VNA11 VNA12 12 (P1) 12 (P1) External pilot solenoid 1 (A) 2 (B) 2 (B) 1 (A) 17-4-7 4 Series VNA Port size 6A, 8A, 10A Applicable cable O.D. 6 to 8 (D.T) 125 (Conduit terminal: T DIN terminal: D) 108.2 (Grommet terminal: E) 106.7 (Grommet: G) 63 (Air operated

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

Loosen the clamp screw on the (a) side of both ends of the manifold. 2. Lift the (a) side of the manifold off the DIN rail and slide it in the direction of the (b) side. (a) Mounting 1. Catch the hook of the DIN rail bracket on the (b) side of the DIN rail. 2. Push side (a) onto the DIN rail and tighten the clamp screw. The proper tightening torque for screws 0.3 to 0.4 Nm.

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

10(S)A 10 15.9 17.4 23 41.2 26.1 62.5 15.6 46 (46) AS33l1FG-02-12(S)A 12 18.5 42.5 28.3 64.7 17 48 (48) AS33l1FG-03-06(S)A 6 11.2 12.9 16.6 20.2 36 21.4 57.8 AK 1/4 19 50 48.4 44.5 42.9 VCHC 13.3 32 (33) AS33l1FG-03-08(S)A 8 13.2 37.1 23.5 52.2 14.2 33 (34) AS33l1FG-03-10(S)A 10 15.9 17.4 23 41.2 26.1 54.8 15.6 37 (38) AS33l1FG-03-12(S)A 12 18.5 42.5 28.3 57 17 38 (39) AS43l1FG-04-10(S)A

VCA

D U 25 Approx. 44 R C C R G1/2 E E G1/2 B B 2-P Port size A A D 2-P Port size (S) Port size G1/2 Compatible heavy duty cord Cable O.D. 6.8 to 10 L L K 2-M Thread depth 6 K 2-M Thread depth 6 (mm) Electrical entry P Port size B C Model A D E F K L M Grommet: G Conduit: C DIN connector: D Conduit terminal: T U 81 91.5 101 103.5 Q 98 101 104 104 R 36 44 53 55.5 S 68 71 74 74 Q 46 50 52 52 R