LJ1H

1 85 90 35 Stroke + 334 2-T-slot 2 90 62 3-8H 10 depth 20 Stroke + 32 92 Body mounting reference plane 90 (T-slot pitch) 3.3 20 67 5.8 1.7 5.3 62 T-slot 1 dimensions (Switch groove) 8-6.6 92 58 10 10 Stroke + 216 11.5 The body mounting reference plane should be used as a standard when mounting onto equipment.

ZP

ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3-T (10/13/16) UM:-A5 ZP3-T (10/13/16) B:-A5 ZP3-T (10/13/16) UM:-B5 ZP3-T (10/13/16) B:-B5 ZP3-T (10/13/16) UM:-A12-@ ZP3-T (10/13/16) B:-A12-@ ZP3-T (10/13/16) UM:-A12-04 ZP3-T (10/13/16) B:-A12-04 ZP3-T (10/13/16

Table of Contents

10 12 Applicable tubing O.D. d T L3 L2 H D1 D2 L1 Model Max.

Table of Contents

Applicable shaft types: J, K, T Applicable shaft types: J, K, T (mm) (mm) Q1 Q2 L2 + (3 x P) L2 = L2 + (3 x P) K axis (T axis) J axis Shaft type Shaft type J K T J K T Size Size Q1 = M L1 = L1 + (3 x P) L2 = 10 10 Not available Not available 15 15 M3 M3 20 20 M3, M4 M3, M4 30 30 M3, M4, M5 M3, M4, M5 Q2 = M Q2 = M 40 40 M3, M4, M5 M3, M4, M5 Symbol: A37 Symbol: A38 The long shaft can be

CRB2/CRBU2/CRB1

sizes 10 15 Applicable sizes 10 Shaft types Description Shaft types S, Y J, K, T J, K, T J, K, T J, K, T Symbol Symbol 20 30 40 15 20 30 40 XA39 Shaft through hole Shaft through hole Shaft through hole S, Y K, T J S, Y K, T J XA31 XA33 XA37 XA45 XA47 Shaft-end female threads Shaft-end female threads Stepped round shaft Middle-cut chamfer Machined keyway XA40 XA41 XA42 Shaft through hole

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

(Long shaft side) Description Applicable size 10 15 Applicable size 10 Symbol Symbol Description Shaft type Shaft type 20 30 40 15 20 30 40 XA39 Shaft through-hole Shaft through-hole Shaft through-hole Shaft-end female thread Shaft-end female thread Stepped round shaft Middle-cut chamfer Machined keyway XA31 XA33 XA37 XA45 XA47 S, Y J, K, T J, K, T J, K, T J, K, T S, Y K, T J S, Y K, T

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Applicable shaft types: J, K, T Applicable shaft types: J, K, T (mm) (mm) Q1 Q2 L2 + (3 x P) L2 = L2 + (3 x P) K axis (T axis) J axis Shaft type Shaft type J K T J K T Size Size Q1 = M L1 = L1 + (3 x P) L2 = 10 10 Not available Not available 15 15 M3 M3 20 20 M3, M4 M3, M4 30 30 M3, M4, M5 M3, M4, M5 Q2 = M Q2 = M 40 40 M3, M4, M5 M3, M4, M5 Symbol: A37 Symbol: A38 The long shaft can be

Table of Contents

10-10 0 5 10 t i o o n L DTime [min] Operation cycles -X e e a a l l k k a t e l u w w g a a c 2 e i o o g g 1 O-ring seals separate vacuum and atmosphere. t Employs a magnetically coupled rodless cylinder with no air leakage from moving parts. n 1 r a L L e e e Particulate generation from the linear guide unit has been reduced with the use of a stainless steel linear guide and low particulate

V100

Number No. r t y u i SS070A 01 1A O-ring FKM 10 SS070A-80A-1 VFN Port size Clip Stainless steel 10 SS070A-80A-2 With 3.18/2 barb fitting With 4/2.5 barb fitting 01 02 Metal joint Stainless steel SS070A-80A-3 10 Leaf spring Stainless steel 10 SS070A-80A-4 Mounting bracket Stainless steel 10 SS070A-80A-5 < U Side End Plate Assembly > w U side end plate assembly no.

Fluoropolymer Piping Equipment

-T-R10 LQ1E22-T-R11 LQ1E31-T-R1 LQ1E31-T-R2 LQ1E31-T-R8 LQ1E31-T-R9 LQ1E32-T-R1 LQ1E32-T-R8 LQ1E32-T-R9 LQ1E32-T-R10 LQ1E41-T-R1 LQ1E41-T-R2 LQ1E41-T-R3 LQ1E41-T-R8 LQ1E41-T-R9 LQ1E51-T-R8 LQ1E61-T-R1 8 x 6 10 x 8 12 x 10 6 x 4 8 x 6 10 x 8 12 x 10 8 x 6 6 x 4 12 x 10 19 x 16 6 x 4 10 x 8 12 x 10 19 x 16 10 x 8 8 x 6 6 x 4 19 x 16 25 x 22 25 x 22 19 x 16 Body size (according to the combination

5 Port Solenoid Valve Series SY3000/5000/7000/9000

(End plate) (End plate) t t Series Part no. SX3000-77-1A SX5000-77-1A 10-SY3000 10-SY5000 Series Part no. SX3000-77-1A SX5000-77-1A 10-SY3000 10-SY5000 port EXH port Plug (White) These are inserted in unused cylinder ports and SUP, EXH ports. Purchasing order is available in units of 10 pieces. t 11 15 t 11 15 Series Assembly part no.

ZP

-A22 ZPT125 50-(B/N/T)01-A22 ZPT125 75-(B/N/T)01-A22 ZPT125 100-(B/N/T)01-A22 ZPB-T1 25-(B/N/T)01 ZPB-T1 50-(B/N/T)01 ZPB-T1 75-(B/N/T)01 ZPB-T1 25-(B/N/T)01 ZPB-T1 50-(B/N/T)01 ZPB-T1 75-(B/N/T)01 ZPB-T2 25-(B/N/T)01 ZPB-T2 50-(B/N/T)01 ZPB-T2 75-(B/N/T)01 ZPB-T2 25-(B/N/T)01 ZPB-T2 50-(B/N/T)01 ZPB-T2 75-(B/N/T)01 ZPB-T3 25-(B/N/T)01 ZPB-T3 50-(B/N/T)01 ZPB-T3 75-(B/N/T)01 ZPB-T3 100-(B

KJ

Note) D: Max. diameter 7 8.4 12.7 15.3 13.2 15.2 15.4 M5 x 0.8 T 2.6 2.2 R 1 8 10 0.8 0.8 13 13.7 15.1 15.3 15.7 14.7 16.7 M3 x 0.5 M5 x 0.8 VMG 7 9.3 15.6 12.7 4 Applicable tubing 3.5 3.5 13.5 17.4 16.4 R 1 8 7 10 16.1 17.8 3.5 3.5 9 9 M5 x 0.8 11.6 6 18.5 R 1 8 10 Applicable tubing T (With seal) Union Elbow: KJL Applicable tubing O.D.

LEC-OM07605CN

(2) ()40 10(555) (10.1) P A = (10.1) K T 2] A: [m P: [W] T: [] K: [56] (10.1),P 10.1A 10.1 40() () () 10.2 10 4 10. 10.3 101 1000 EM1(1) EM1(1) LECSS2-T 400W [Pr. PF06][Pr.

Electric Actuator/Slider Type

V Servo motor power (V) W Servo motor power (W) U V W 22 Series LECSS-T Control Signal Wiring Example: LECSS2-T For sink I/O interface LECSS2-T 10 m or less Note 4) CN3 5 DICOM CN8 13 MBR RA1 Note 9) Short-circuit connector (Provided as an accessory) Electromagnetic brake interlock RA2 9 INP In position 15 ALM RA3 10 m or less Failure Note 3) Main circuit power supply Note 10) Note 4) CN3

LX

switch operates. 58 (52) 28 36: T-slot pitch N x P U 20 N 5 C (5.1) 10 5.8 4 5.5 36 1 0.2 6.5 6.5 1 3 39 28 10.5 3.3 T-slot A Body mounting reference plane +0.030 0 depth 4 +0.030 0 depth 4 L-M6 C 4H9 Refer to Cross section C-C.

V

www.stevenengineering.com I 6.12 VACUUM VACUUM PADS SERIES ZP H O W T O O R D E R ZPT P A D V E R T I C A L T Y P E W I T H B U F F E R ZPT N P A D D I A M E T E R M O U N T I N G T H R E A D 02 2 04 4 06 6 08 8 10 10 13 13 16 16 20 20 25 25 32 32 40 40 50 50 Symbol Thread dia. 2~8 10~32 40~50 A8 M8X1 Male thread A10 M10X1 A14 M14X1 V A C U U M E N T R Y Symbol Port size 2~8 10~32 40~50

Rotary Actuator/Vane Type

CRB2 CRB2 W1 = L3 = L1 = CRB1 L4 = Y = L2 = MSU X = Applicable shaft types: J, K, T Applicable shaft type: K W2 = CRJ [mm] CRA1 CRB2, CRBU2 X W1 L1 max L3 max J K T J K T J K T J K T 10 6.5 to 14 0.5 to 2 X-3 L1-1 15 8 to 18 0.5 to 2.5 X-4 L1-1 20 9 to 20 0.5 to 3 X-4.5 L1-1 30 11.5 to 22 0.5 to 4 X-5 L1-2 40 15.5 to 30 0.5 to 5 X-5.5 L1-2 [mm] Size CRB2, CRBU2 Y W2 L2 max L4 max 10 4.5

Battery-less

5 r t w q y !6 !

15

0 L = 100 mm Max. speed = 200 mm/s or less 11LEJS 10 10 LEYG32L LEYG32L 25ALEYG32L LEYG32L Load mass m [kg] Load mass m [kg] LEYG25L LEYG25L LEC LEYG25L LEYG25L 1 1 LEC S LEC SS-T 120 125 120 125 0.1 0.1 Stroke [mm] 100 1000 40 35 10 Stroke [mm] 100 1000 40 35 10 LEC Y !1 L = 50 mm Max. speed = Over 200 mm/s !