An angled supply port facilitates the supply of circulating fluid, even when units are?stacked.? A?large digital display provides a clear view of the current and set values.? The dustproof filter is integrated with the grill of the front panel allowing mounting and removal of the HRS?

ZP

Pad Dimensions/Models With buffer 10 to 40 w r q ZPT 10 D N J 10 A10 B5 y Connection thread (Male thread) L Width across flats P Buffer specification e M A10 M10 x 1 A14 M14 x 1 E (Buffer body) J Rotating K Non-rotating t Vacuum inlet (Female thread) N Width across flats G H H F B5 M5 x 0.8 B01 Rc1/8 N01 NPT1/8 T01 NPTF1/8 K Width across flats J A Model A B C D2 E F G H J K Vacuum inlet

ZP3

Form w 1 Material e Buffer spec. r Buffer stroke t Vacuum inlet Flat Type with Groove A 3 30.5 11 1.2 11 04 6 37 14 14.5 10 47 18 20.5 J K Width across flats E 3 30.5 11 1.8 11 6 37 14 14.5 10 47 18 20.5 06 08 N S U F GN GS HS 7 15 55 36.5 1.2 10 20 62.5 44 06 08 15 55 36.5 1.8 20 62.5 44 04 JB K ZP3 T UM B5 C2 3 31.5 12 11 J K 10 6 38 15 14.5 10 48 19 20.5 JB K 15 56 37.5 10 20 63.5 45 10

JXCx-OMU0004

200 1200 10 130 1400 220 1400 11 150 1600 260 1600 12 170 1800 300 1800 13 200 2000 340 2000 14 230 2500 380 2500 15 280 3000 420 3000 59 No.JXC-OMU0004-A 10.6 LEP LEPLEPYLEPS LEP-J LEP-K [mm/s] 20 10 2] 1000 1000 [mm/s [mm/s] 20 10 2] 1000 1000 [mm/s [mm] 1 1 3 LEP6 LEP10L LEP10 J K J K J K 7 14 12 24 12.5 25 8.5 17 16 32 19 37.5 [N] 10 20 20 40 25 50 [mm/s] 20 10 20 10 20 10 *LEP6

Vacuum Pad: Ball Joint Type, Series ZPT/ZPR

Thread) ZPT 10/13/16 F J/K 10-0-A10 (With Buffer/One-Touch Fitting) Applicable tube O.D.

MHS

M40.7 2.1 8 MHSJ3-20D MHSH3-20D M40.7 2.1 8 MHSJ3-25D MHSH3-25D M40.7 2.1 8 M40.7 2.1 8 MHSJ3-32D MHSH(J)3-32D M50.8 3.2 10 M40.7 2.1 8 MHSJ3-40D MHSH(J)3-40D M50.8 3.2 10 M50.8 3.2 10 MHSJ3-50D MHSH(J)3-50D M61 7.3 12 M61 7.3 12 MHSJ3-63D MHSH(J)3-63D M81.25 18 16 M61 7.3 12 MHSJ3-80D MHSH(J)3-80D M81.25 18 16 MHSH(J)3-DAMHSH(J)3-DB Nm mm MHSH(J)3-32DA MHSH(J)3-32DB M50.8 3.2 10 MHSH(

.: None; Temperature Sensor: None), Lead Wire: N (w/o Lead Wire and M8 Connector), Return Unit Flow Switch Unit Specifications: J (Integrated Display: L/min; Accumulated Flow: L; Temp.: °F)

Stations: 2 Stations, Piping: U Side: Open; D Side: Open, Thread Type: NPT, Supply Unit Components: w/o Flow Adj. Valve; w/Stop Valve, Return Unit Flow Switch: Integrated Display, Return Unit Flow Range: 0.5 to 4 L/min, Return Unit Components: w/Flow Adj. Valve; Stop Valve: None, Supply/Return Port Size: 3/8, Return Unit Flow Switch Output Specifications: Out 1: NPN; Out 2: Flow Rate: NPN

PSxx-OMR0001CN

0.4MPapsi 0.4MPapsi 10 5 N 1 2 3 4 5 6 1 2 NPN1 PNP1 P 10 6 3 4 0.2MPapsi 0.2MPapsi 7 10 4 5 6 M 5 SI 10 8 1 7 L 7 L N S 6 7 8 R 6 7 8 T 2 9 B -9No.PS-OMR0001CN-J 2 1F 2GH 3ISO1179-1 4 5kPa 61 7 8M12 9 10 11 12ISO16030 -10No.PS-OMR0001CN-J 2 / (2 2 2 1 ) ((38)3 ) ISA-16 ISA-14 2 ISA-16-2 3 ISA-16-3 4 ISA-16-4 5 ISA-16-5 6 ISA-16-6 ZS-31-B ZS-31-C 4 6

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

16 20 20 25 30 32 40 40 52 52 10 10 10 14 14 15 17 17 21 21 51 58 58 71 72 8 11 11 13 16 M8 x 1.25 M8 x 1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 6 7 7 10 10 14 18 18 22 26 11 11 14 17 17 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 27 30 31 37 40 1/4 3/8 3/8 1/2 1/2 84 90 98 116 126 146 159 170 204 215 RZQ MI W S CEP1 CE1 CE2 ML2B C J G5-S CV MVGQ CC RB J D-X 20Data 10-4-17

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

x 1.5 M26 x 1.5 27 30 31 37 40 1/4 3/8 3/8 1/2 1/2 84 90 98 116 126 146 159 170 204 215 RZQ MI W S CEP1 CE1 CE2 ML2B C J G5-S CV MVGQ CC RB J D-X 20Data 10-4-17

JA/JAH/JB/JS

Flange style Foot style 1 MPa or less 3.5 MPa or less 10-19-2 C J G5-S CV Heavy load Series JAH 7 MPa or less 40, 50, 63 80, 100 MVGQ Basic style Flange style Foot style CC 10-19-7 RB J For compact cylinders Series JB 1 MPa or less D12, 16, 20, 25 32, 40, 50, 63 80, 100 Basic style (Female thread) -X 10-19-10 20Data Stainless steel type Series JS 10, 16, 20, 25 32, 40, 50, 63 Basic style

JA/JAH/JB/JS

Flange style Foot style 1 MPa or less 3.5 MPa or less 10-19-2 C J G5-S CV Heavy load Series JAH 7 MPa or less 40, 50, 63 80, 100 MVGQ Basic style Flange style Foot style CC 10-19-7 RB J For compact cylinders Series JB 1 MPa or less D12, 16, 20, 25 32, 40, 50, 63 80, 100 Basic style (Female thread) -X 10-19-10 20Data Stainless steel type Series JS 10, 16, 20, 25 32, 40, 50, 63 Basic style

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

B A 9.5 11 11 1.5 30 5.1 B A 11.5 29 11.5 29 H G (NN 1) x H Section AA Section BB (mm) Model F 50 50 50 60 35 60 70 70 80 ZZ 121 121 121 131 146 185 238 292 344 M 83 83 83 93 108 147 200 254 306 Z 81.5 81.5 81.5 91.5 106.5 145.5 198.5 252.5 304.5 K 31 41 51 61 71 96 121 146 171 J 44 44 44 54 69 108 113 155 190 I 10 10 10 10 10 10 58 70 87 NN 2 2 2 2 3 4 5 6 7 H 45 45 45 55 35 35 35 38 44

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA ø 40, ø 50, ø 63, ø 80, ø 100, ø 125, ø 160

W W FY B D E d MA M a NB C F A K NA B S + Stroke FT H FX ZZ + Stroke FZ With rod boot e 10 l f h + l ZZ + l + Stroke (mm) Bore size (mm) A a B C d F FD FT FX FY FZ G GA GB J K M MA MM NA NB P R D E 0 -0.062 0 -0.062 0 -0.074 0 -0.074 0 -0.074 0 -0.074 0 -0.087 0 -0.018 0 -0.021 0 -0.021 0 -0.021 0 -0.025 0 -0.025 0 -0.025 40 23 10 60 44 18 25 9 10 77 44 95 14 17.5 9.5 M8 x 1.25 18 16 20 M14

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

MXP 6-5 MXPJ6-5 MXP 6-10 MXPJ6-10 0.05 0.05 0.06 0.04 Table displacement mm Table displacement mm Table displacement mm 0.04 0.03 0.04 0.03 0.02 0.03 0.02 0.02 0.01 0.01 0.01 0 10 20 30 40 Load N 0 10 20 30 50 Load N 0 10 20 30 40 Load N 40 10 10 10 L = 100mm L = 100mm L = 100mm MXP10-10 MXP10-20 MXP10-10 MXP10-20 0.04 0.03 0.08 MXP10-10 MXP10-20 MXP10-10 MXP10-20 MXP10-10 MXP10-20 MXP10

Series 10-, 21- AW-B Filter Regulator

-06-B 10-/21-AW60K-B 142.1 174.1 176.1 261.1 93.9 122.1 154.1 156.1 241.1 91.4 Dimensions B B B B Optional specifications Standard specifications Model Round type pressure gauge Bracket mounting size Panel mount Q R S T U V W Y Z F J K BB CC H J M N 10-/21-AW20K-B 10-/21-AW30K-B 10-/21-AW40K-B 10-/21-AW40K-06-B 10-/21-AW60K-B P1 P2 A B C Note) D E 6 7 7 7 14 19 21 21 28.5 38.5 42.5 42.5

LEC-OM02704CN

10 .2 10.1 .2 10.2 .3 10.3 CC-Link .3 10.4 .4 10.4.1 .4 10.4.2 .5 10.4.3 .14 10.5 .16 10 1 10 10 10.1 MR Configurator 1 LED LED CN6CN2CN3 1. 2.

LEC-OM07605CN

) 10 [V] 10 [V] 10 [pulse] 10 [pulse] 0 0 10 [pulse] 10 [pulse] -10 [V] -10 [V] CW CW 21 CCW CCW 0A (123) (10V/1Mpulses) 0B (123) (10V/10Mpulses) 10 [V] 10 [V] 1 [Mpulse] 10 [Mpulse] 0 0 1 [Mpulse] 10 [Mpulse] -10 [V] -10 [V] CW CW CCW 0C (123) (10V/100Mpulses) 0D 8[V] 10 [V] 100 [Mpulse] 0 400[V] 0 100 [Mpulse] -10 [V] CW CCW CCW 0E 2(3) 15 (345) (10V/10 pulses) 8 [V] 10

Cylinder with Lock Series MNB

C 4FD A K BN F GF GB Width across flats B1 Cushion valve 4-J MM H1 Q D E B V FB FY FT N FX FZ Width across flats ZZ + Stroke (mm) Width across flats 10 Effective thread length (mm) Bore size (mm) Stroke range (mm) BP A B1 H1 BN C D Ee11 F FT FX FY FZ GA GB GC GD FB B FD 32 1/8 22 17 6 97 32.5 12 30 13 10 72 38 87 83 13 45.5 13 56 54 to 500 7 19.5 40 1/8 30 22 8 104 38 16 35 13 10 83 46