Stations: 2 Stations, Piping: U Side: Open; D Side: Open, Thread Type: NPT, Supply Unit Components: w/o Flow Adj. Valve; w/Stop Valve, Return Unit Flow Switch: Integrated Display, Return Unit Flow Range: 0.5 to 4 L/min, Return Unit Components: w/Flow Adj. Valve; Stop Valve: None, Supply/Return Port Size: 3/8, Return Unit Flow Switch Output Specifications: Out 1: NPN; Out 2: Flow Rate: NPN

VHK

C D E F G J K VHK R-01S-01S 13 1 8 1 4 3 8 1 2 1 8 1 4 3 8 1 2 13 17 19 22 VHK R-02S-02S 17 VHK R-03S-03S 19 VHK R-04S-04S 22 5-8-5

VHK

Design Warning e Re-use of fittings: (1) Ordinarily, the fitting can be reused 2 to 3 times. (2) Using an air blower, remove the sealing agent that is peeling from the removed pipe fitting before reusing the fitting.

ZP3

Form w 1 Material e Buffer spec. r Buffer stroke t Vacuum inlet M5 x 0.8 Effective thread depth 4 3 40 22.5 1.2 11 6 46 25 14.5 10 56 29 20.5 04 A J K 3 40 22.5 1.8 11 6 46 25 14.5 10 56 29 20.5 06 08 N S U F GN GS HS 18 11 15 59 42.5 1.2 10 20 66.5 50 06 08 15 59 42.5 1.8 20 66.5 50 04 JB K ZP3 Y UM B5 3 41 23.5 11 6 47 26 14.5 10 57 30 20.5 JB K 15 60 43.5 10 20 67.5 57 J K 4 10 13 16 D

JXCx-OMU0004

[mm/s] 20 2] 100 [mm/s [mm/s] 20 2] 500 [mm/s [mm] 1 3 LESH**J 20mm/s LESH**K 10mm/s LESH8R LESH16R LESH25R J K J K J K 4 6 15 23.5 43 77 7 10.5 25 39 71.5 128.5 [N] 10 15 35 55 100 180 *20%F.S.

Vacuum Pad: Ball Joint Type, Series ZPT/ZPR

/10mm stroke A (mm) B C D F H I J Y Model ZPT40F10-B01-A14 40 43 12.5 18.5 39 51.5 118 5 50 ZPT50F10-B01-A14 50 53 13.5 19.5 40 52.5 119 6 Additional dimensions by stroke(mm) H I J Stroke 20 +10 +5.5 0 30 +20 +15.5 50 +25 +40 +60.5 8 Series ZPT ZPT 20/25/32 F J/K 10-0-A14 (With Buffer/One-Touch Fitting) ZPT 40/50 F J/K 10-0-A14 (With Buffer/One-Touch Fitting) Applicable tube O.D.

An angled supply port facilitates the supply of circulating fluid, even when units are stacked.  A large digital display provides a clear view of the current and set values. 

An angled supply port facilitates the supply of circulating fluid, even when units are stacked.  A large digital display provides a clear view of the current and set values. 

PSxx-OMR0001CN

DCVX2 (2 )VX2 -37No.PS-OMR0001CN-J 3 ISA-19ISA-12ZS-31-B ISA-16ZS-31-C ISA-15 ISA-20 2.6 ISA-14 -38No.PS-OMR0001CN-J 3 () ISA-19ISA-12ZS-31-B ISA-16ZS-31-C ISA-15 ISA-20 ISA-20 E210-U01 2 ISA-17 2.6 2.6 Y200T-A -39No.PS-OMR0001CN-J 3 () 2 2 E210-U01 ZS-31-C ZS-31-C ZS-31-B Y200T-A Y200T-A ISA-18 2.6 ISA-15 ISA-16ISA-17 ISA-12-40No.PS-OMR0001CN-J 4 80 kPa220 kPa

MHS

4 1J J 5 2 C C 6 3 mm Nm 16 M2.50.45 2 0.3 20 M30.5 2.5 0.6 25 M30.5 2.5 0.6 32 M40.7 3 1.4 40 M40.7 3 1.4 50 M50.8 4 2.8 63 M50.8 4 2.8 80 M61 5 4.8 20 MHSH3 4 1.

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

RB J Method Standard stroke Stroke range (mm) 1 to 29 1 to 49 Bore size (mm) 12, 16 20, 25 DStroke range -X Part no.: CQSYB25-47DC CQSYB25-50DC with 3 mm width spacer inside.

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

RB J Method Standard stroke Stroke range (mm) 1 to 29 1 to 49 Bore size (mm) 12, 16 20, 25 DStroke range -X Part no.: CQSYB25-47DC CQSYB25-50DC with 3 mm width spacer inside.

JA/JAH/JB/JS

Flange style Foot style 1 MPa or less 3.5 MPa or less 10-19-2 C J G5-S CV Heavy load Series JAH 7 MPa or less 40, 50, 63 80, 100 MVGQ Basic style Flange style Foot style CC 10-19-7 RB J For compact cylinders Series JB 1 MPa or less D12, 16, 20, 25 32, 40, 50, 63 80, 100 Basic style (Female thread) -X 10-19-10 20Data Stainless steel type Series JS 10, 16, 20, 25 32, 40, 50, 63 Basic style

JA/JAH/JB/JS

Flange style Foot style 1 MPa or less 3.5 MPa or less 10-19-2 C J G5-S CV Heavy load Series JAH 7 MPa or less 40, 50, 63 80, 100 MVGQ Basic style Flange style Foot style CC 10-19-7 RB J For compact cylinders Series JB 1 MPa or less D12, 16, 20, 25 32, 40, 50, 63 80, 100 Basic style (Female thread) -X 10-19-10 20Data Stainless steel type Series JS 10, 16, 20, 25 32, 40, 50, 63 Basic style

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

+0.025 0 3H9 ( ) depth 2.5 +0.025 0 HA GA Section AA Section BB (mm) Model F 20 30 20 28 38 ZZ 64 74 84 106 122 M 42 52 62 84 100 Z 41.5 51.5 61.5 83.5 99.5 K 22.5 32.5 42.5 52.5 62.5 J 17 27 40 50 60 I 10 10 7 19 25 NN 2 2 3 3 4 H 25 35 20 30 24 G 6 6 11 13 17 HA 20 20 20 30 48 N 4 4 6 6 6 GA 11 21 31 43 41 13-/22-MXS6-10 13-/22-MXS6-20 13-/22-MXS6-30 13-/22-MXS6-40 13-/22-MXS6-50 780 MXS

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA ø 40, ø 50, ø 63, ø 80, ø 100, ø 125, ø 160

127 11 16 13 90 243 80 32 116 269 100 66 137 12 20 16 100 263 100 35 123 286 1/5 stroke 125 77 137 12 20 16 100 267 100 35 123 290 160 94 155 12 24 20 108 297 120 38 131 320 94 Series CHA Dimensions Rear flange type: CHAG V T 2-Rc P 4-J 4-FD Cushion adjustment screw Width across flats G GA 4-J Air release GB MM R (max.)

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

dia. 5.1 19 6.5 W 32 0.05 46 0.5 0.05 8 B D Piping port 2-M5 x 0.8 47 13 J Mounting reference planes B D 16.5 14.5 Section AA MXP16-30 Without magnet and switch rail 2-M3 x 0.5 depth 3.5 For rail mounting 8 2-M2 x 0.4 depth 3 For magnet mounting 8.5 10.7 6-M5 x 0.8 depth 7 20 20 L (mm) MXP16-20 MXP16-30 SMXP16, #1(#1 + #3) SMXP16, #2(#2 + #4) L K J V H S Z G M W Model 36 40 93 82 58 20

LEC-OM07605CN

0.01 0.02 0.02 1 [J] 5.6 22 64 [J] 56 220 640 (5) [] 2.5 1.2 0.9 (3) [] 20 1 [J] 5.6 22 64 145V TND20V-680KB (135[V]) (78) 370V TND10V-221KB (360[V]) 1.

Cylinder with Lock Series CNS

180 290 1/2 3/8 144 144 40 90 63 43 14 19 20 236 118 275 18.5 215 to 1200 (mm) Bore size (mm) GB GL GR K KA M N P Q R S T V VA H ZZ J MA MM 125 140 160 23 25 30 15 31 19 35 1/2 85.5 25 303 87.5 20 23 110 427 M14 x 1.5 M12 x 1.75 M30 x 1.5 28 30 30 15 31 19 35 1/2 93.5 25 343 95 20 28 110 473 M14 x 1.5 M12 x 1.75 M30 x 1.5 35 35 35 17 36 22 39 3/4 104 25 396 109 25 35 120 536 M16 x 1.5 M12

LEC-OM02704CN

[] 2.5 1.2 (3) [] 20 1 [J] 5.6 22 145V TND20V-680KB (135[V]) (78) 370V TND10V-221KB (360[V]) 1.