HRX-OM-R028

.5-18 5.8.4 Command:LOC Key-lock setting (R) .5-19 5.8.5 Command:LOC Key-lock setting (W).5-20 5.8.6 Command:STR Saves data (W) .5-21 5.9 Negative response.5-22 Chapter 6 Communication alarm function . 6-1 6.1 Communication alarm occurs .6-1 6.2 Communication alarm reset.6-2 6.3 Setting and checking.6-2 6.3.1 Setting and checking items.6-2 6.3.2 Setting and checking.6-3 HRSH Series HRX-OM-R028

IR1000/2000/3000

85 80 75 70 65 60 100 0 20 40 60 80 100 120 140 160 VAC side pressure (kPa) Flow rate (l/min (ANR)) 14-5-20 20 Series IRV1000/2000/3000 Made to Order Specifications: Please contact SMC regarding detailed dimensions, specifications, and delivery times. 1.

Compact Electric Actuator Series LG1

mm Lead 150 Slide screw 20 mm Lead 500 10 mm Lead Ball screw Horizontal specification Maximum speed 1000 600 500 930 740 20 mm Lead 100W mm/s 500 Slide screw 20 mm Lead 180 10 mm Lead Ball screw 100W Nm Rated thrust 90 20 mm Lead 50 Slide screw 20 mm Lead Rolled 0.05 Repeatable positioning accuracy Ball screw Ground 0.02 mm 0.1 Rolled Slide screw Motor output Horizontal specification

3 Port Solenoid Valve Series SYJ300/500/700

valves, gasket, and optional parts. 8 Series SYJ300 Manifold for Internal Pilot Type Type 20 Applicable solenoid valve SYJ312--M3 SYJ312M--M3 SYJ322--M3 SYJ322M--M3 How to Order A port M3 x 0.5 SS3YJ3--20-05 -Stations Bracket Applicable blanking plate assembly SYJ300-10-1A 02 2 stations Nil Without bracket P R R port : : F With bracket M5 x 0.8 20 20 stations P port Note) For more than

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

DC (17 mA), 0.95 W DC (40 mA) Note 3) Power consumption (Current) 12 VDC 0.4 W DC (34 mA), 0.95 W DC (80 mA) Note 3) Note 1) Use dry air to prevent condensation when operating at low temperatures.

Vacuum Pad with Ejector ZHP Series Pad Diameter: ø63, ø80 ZK2 ZQ Ejector and pad are integrated. ZR Space saving and reduced piping labor! Bellows type with groove ZB ZA Two-stage ejector ZX More efficient ejector 30% reduced 50% increased ZM Air Suction

20 10 0 100 Suction flow [L/min(ANR)] Air consumption [L/min(ANR)] Vacuum pressure Vacuum pressure [kPa] Vacuum pressure [kPa] 80 60 Suction flow 40 20 Air consumption 0 0 10 20 30 40 Supply pressure [MPa] Suction flow [L/min(ANR)] ZHP-10 ZHP-10 (Supply pressure: 0.35 MPa) 100 90 80 70 60 50 40 30 20 10 0 0 0.1 0.2 0.3 0.4 0.5 0.6 100 90 80 70 60 50 40 30 20 10 0 100 Suction flow [L/min(

KP/KPQ/KPG

Burst Pressure Characteristics Curve and Operating Pressure How to Order TPS0604 B 20 5 4 Tubing designation Burst pressure MPa Burst pressure 3 Color Roll length Symbol W B R BU Y G Color White Black Red Blue Yellow Green Symbol 20 100 Length 20m bundle 100m bundle 2 1 Max. operating pressure -20 0 0 20 40 60 80 Operating temperature C 11 Related Equipment Clean Series Tubing Polyurethane

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

Construction Meter-out type Meter-in type AS1200M AS2200M AS1210M AS2210M u w u w t e r !

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type 1

2 i r i t y w w e !0 !0 !2 !5 o !0 !4 q q y u !1 !3 r t !1 M5 type U10/32 type M5 type U10/32 type !1 y !2 u !4 !3 i !5 u e r r t w e o !0 i o q q t y !0 !2 w !

V100

Lead wire length: 2000 mm V114-5LOZ-M5 SY100-68-A-20 Lead wire length: 300 mm (Standard) V114-5LPZ-M5 Standard With power saving circuit) 0.4 W 0.1 W 0 W 62 ms Grommet, L/M Plug Connector With indicator light (Z) Z N R Coil Symbol of connector assembly with protective cover Caution No part numbers of connector assembly with cover are needed to be indicated in this

Series 12-CY3B Magnetic rodless cylinder ø15, ø20, ø25, ø32, ø40

Special tool F Special tool part number list Applicable bore size (mm) 6, 10, 15, 20 25, 32, 40 50 63 Part no. CYRZ-V CYRZ-W CYRZ-X CYRZ-Y 12REA Warning 1. Do not disassemble the product because it may damage the air cushion mechanism.

One-touch Fittings Series KQ2

D1 D2 L M A Nylon Urethane M5, M6 KQ2S04 to 12 KQ2S16 M5 0.8 M6 1.0 KQ2S04-M5 KQ2S04-M6 KQ2S04-01S KQ2S06-M5 KQ2S06-M6 KQ2S06-01S KQ2S06-02S KQ2S08-01S KQ2S08-02S KQ2S08-03S KQ2S10-01S KQ2S10-02S KQ2S10-03S KQ2S10-04S KQ2S12-02S KQ2S12-03S KQ2S12-04S KQ2S16-03S KQ2S16-04S 2.7 2.8 8 3.3 3.4 9 15 12 11 24 18 12 19 35 23 18 30 42 34 15.6 14.1 19 16.4 15 20 20 24 19.5 21 26 21.5 21 20 27.5 22.5

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

10 to 16 20 to 50 Pad dia.

3

Hysteresis Note 4) Variable from 0 Protection Short circuit protection Switch output Output type Voltage output: 1 to 5 V, Current output: 4 to 20 mA Voltage output Output impedance: Approx. 1 kW Maximum load impedance at power supply voltage 24 V: 600 W, at power supply voltage 12 V: 300 W Minimum load impedance: 50 W Response time Note 6) Linked with the response time of the switch output

XL

Auto switch: (for main exhaust valve) Heater: 23 Series XLD, XLDV High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm (b) XLD/Air operated type E C D E Fn (KF flange) Fd (K flange) (a) C E (c) B A G H J K Heater (optional) A (mm) H Fd G 26 41 52 70 83 Fn 40 55 75 87 114 D 1 2 2 3 3 C 48 66 79 100 117 B 123 170 183 217 256 A 50 65 70 88 90 E J 16 20 20 20 20 K 6.5 14 16.5 18.5 26.5 Model XLD

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

(mm) D-A90V D-A96V D-A93V 22 Bore size D-M9V D-F9WV D-M9 D-F9W D-A90 D-A96 D-A93 (mm) 32 20 32 Mounting pattern q, w 35 Mounting pattern e 20 12 Mounting of Auto Switch As shown below, there are 3 ways to mount the auto switch according to 3 types of electrical entries. Insert the auto switch into the switch groove.

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

8 w $4 t e $2 !5 $3 y!7 @8 !4 !

FQ1

Filtration material: HEPO II (PP) w q e r w q er 0.1 0.1 0.05 0.05 Pressure drop MPa Pressure drop MPa Filtration accuracy (m) 2 4 6 13 Filtration accuracy (m) 0.5 1 5 10 20 50 75 100 No.

Filter for Cleaning Solvent Quick Change Filter Series FQ1

Filtration material: HEPO II (PP) w q e r w q er 0.1 0.1 0.05 0.05 Pressure drop MPa Pressure drop MPa Filtration accuracy (m) 2 4 6 13 Filtration accuracy (m) 0.5 1 5 10 20 50 75 100 No.

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

50 M10 x 1.25 76 52 15 40 19 43 35 1/2 46 155 13 31.5 20 20 230 45 25 16 55 15 15 25 to 1400 63 M12 x 1.5 90 63 15 42 19 43 35 1/2 52 163 15 40 31.5 31.5 261 63 40 20 65 15 20 25 to 1500 1/4 stroke 80 M16 x 1.5 110 80 17 40 22 44 44 3/4 65 184 18 40 31.5 31.5 291 72 40 20 80 17 20 25 to 1800 100 M18 x 1.5 135 102 19 42 22 44 44 3/4 75 192 20 50 40 40 316 84 50 25 100 19 15 25 to 1800 Rod