INFORMATION Step Motor Controller 5 types of communication protocols New New

bytes Output 36 bytes Input 36 bytes Output 36 bytes Input 36 bytes Output 36 bytes Input 4, 10, 20 bytes Output 4, 12, 20, 36 bytes Input 14 bytes Output 22 bytes Terminating resistor Not included Memory EEPROM LED indicator PWR, RUN, ALM, ERR PWR, ALM, MS, NS PWR, ALM, SF, BF PWR, ALM, MS, NS PWR, ALM, COM Cable length [m] Actuator cable: 20 or less Cooling system Natural air cooling Operating

Thermo-chiller HRS offers convenient functions, self diagnosis and check display for easy maintenance.  An angled supply port facilitates the supply of circulating fluid, even when units are stacked.  A large digital display provides a clear view of the current and set values.  The dustproof filter is integrated with the grill of the front panel allowing mounting and removal of the HRS filter

IDX-OM-W094

(REFRIGERANT) IDFA60-23 W R 0001 (2018 4 ) W R 0001 o 1 Z 12 o P Q R A Z 1 2 3 4 W X y Z 2018 2019 2020 2021 IDFA60/70/80/90 Series 1-4 IDX-OM-W094 1.3 HFC 1-4 IDFA60/70/80/90 Series 1-5 IDX-OM-W094 1.4 / 1 1.5 () IDFA60/70/80/90 Series 1-6 IDX-OM-W094 2 2.1 IN OUT (ONOFF ) 6-4 6-4 L N PE 3-5 IDFA60/70/80/90 Series 2-1 IDX-OM-W094 () IDFA60/70/80/90 Series 2-2 IDX-OM-W094 3

VER2000/4000

0.04 s Hysteresis 3% F .S.

4 Port Direct Operated Poppet Solenoid Valve Series VQ D1000

02 2 stations 20 20 stations (Max.)

Vacuum Pad: Ball Joint Type, Series ZPT/ZPR

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad diameters: 10, 13, 16, 20 25, 32, 40, 50 rp ti on so ad on r sl fo a nt al e e d id w e or p ty k t s in u rf o j a ll c a e B s Series ZPT: Vertical vacuum entry type Series ZPR: Lateral vacuum entry type One-Touch fitting Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad diameters: 10, 13, 16, 20, 25, 32, 40, 50 Pad materials: NBR, Silicon rubber

Air Cylinder/Low Friction Series MB l Q ø32, ø40, ø50, ø63, ø80, ø100

7. * The seal kit includes 2 cushion seals, 1 rod seal, 1 piston seal, and 2 tube gaskets. 1.7-27 Series MBlQ Basic/(B) G G Cushion valve W V Port 2-Rc(PT)P MM D E MB Effective thread 2 X 4-J lC lB MA A K F N N S + Stroke H ZZ + Stroke (mm) Stroke range Width across flats Bore (mm) Effective thread length A D Ee11 F N G P MA S MB V J W K H ZZ MM lC lB 32 40 50 63 80 100 22 30 35 35 40 40

NAAMS Standards Compliant

XB XC Y Without switch cover With switch cover 50 45 45 5 40 46 88 20 20 46 48 78.4 134 136 92 132 63 55 45 10 55 52 104 25 25 52 54 78 146.5 148.5 104.5 138 With front mounting hole Metal cover type NA0.05 NC NB0.05 Release point Y VC0.1 VB0.1 K +0.1 0 Metal cover open 2 x V H7 depth I 4 x NN depth S VA0.02 [mm] Bore size I K NA NB NC NN S V VA VB VC 50 12 55 13 36.5 9.5 M8 x 1.25 11 8 30

With Factory Installed

S After setting needtes. remount the cover. Insert the cover nail into hole of case (\l mark), set the mark( DO ) of the cover to the case and rotate the cover ctockwise until it stops.

ZMA

13 13 13 13 20 0 60 40 20 0.6 0.3 0.5 0.4 0.2 0 0.1 0 60 40 20 0 0.6 0.5 0.4 0.3 0.2 0.1 Supply pressure (MPa) Flow rate (l/min (ANR)) Supply pressure (MPa) Flow rate (l/min (ANR)) 13-4-26 7 Series ZM Vacuum Ejector: With Solid State Timer Exhaust Characteristics/Flow Characteristics, Standard Supply Pressure: M0.35 MPa ZM07M ZM10M Exhaust Characteristics Flow Characteristics Exhaust Characteristics

ZSE1/ISE1

ZS-20-A 16 NPN open collector 2 output w/o analog output, 3 turns adjustment With lead wireZS-20-5A17 NPN open collector 2 output w/o analog output, 200 degrees adjustment Note) When ordering switch with 5 m long lead wire, indicate both part numbers. Lead wire length 18 NPN open collector 1 output w/analog output, 3 turns adjustment 0.6 m Nil Ex.) ZSE1-01-15CN1 pc.

AR20-B to AR60-B

r w AR30(K)-B/AR40(K)-B q t AR50(K)-B/AR60(K)-B e IN OUT q t r w e IN OUT r w Component Parts No.

ZPT/ZPX

Calculation ZX ZR : Lifting force (N) : Stable vacuum pressure (kPa) : Pad area (cm2) : Factor of safety: Horizontal pad contact : 4 (dynamic) Vertical pad contact : 8 (dynamic) W P S t Pad ZM W = P x S x 0.1 x 1 t W ZH W ZU Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com

Cylinder with Lock Series CNS

Graph 1 30 20 10 5 4 3 1600st 1400st 1200st 1000st 800st 600st 500st 400st 300st Load movement time: t(S) 2 1 Example) 200st 0.5 0.4 0.3 100st 0.2 280 V' 0.1 100 200 300 400 500 Maximum speed: V(mm/s) V W Step 2 Find the cylinder bore size.

•

zoo ~ ) 2 ~ i 100 E 12 z ,; 2 ~ E , E :; 100 V ~ " I ~ , , " , f< ' ~ 0 u: , ' l ~ ~ 0 w 0 5 10 ~ V " ~ 0 ] w 0 5 10 Needle revolullOOs (RevolutIOns) Needle revolutions (Revolutions) ASP530F ASP630F 12. 1500 'E 20 E 12 11~14:l~ z ~ ~ ~IOOO 15 . , g j " . 000 14 'E ' , ' h E cr z 12 ,; "'500 . l/ : 4 i 1,(" 0 to, 1~ OS, D9 10 ~ E ~ " , "' g 10 : ; ~.; 0 --:' 500 ~ ~ 5 :J" ~ -r ~ 0 w

ZL3-OM00801

No.ZL3-OM00801-A 9. 9.1 ZL3 ZL3M ZL3H [mm] 1.9 1.5 [MPa] 0.35 0.50 *1 -91 -93 [MPa] 280 [L/min(ANR)] + *2 300 [L/min(ANR)] 150 135 [MPa] 0.20.6 [] -550() 2] *2 20 [m/s 2] *3 100 [m /s *1 *22 2/V *310500Hz XYZ 2 *4XYZ 3 ZL6 ZL6M ZL6H [mm] 1.9x2 1.5x2 0.35 0.50 [MPa] 0.37 0.52 *1 -91 -93 [MPa] 580 [L/min(ANR)] + *2 600 [L/min(ANR)] 300 270 [MPa] 0.20.6 [] -550() 2] *3 20 [m/s

IDX-OM-V020

Front Structure of the product number W R 0001 (2018 April) W R 0001 Year Symbol Note Month Symbol Note Serial No. 2018 2019 2020 2021 W Repeated from A to Z in alphabetical order 1 2 3 4 o P Repeated from A to Z in alphabetical order, with o assigned for January and Z for December.

Pin Clamp Cylinder Series CKQ/CLKQ

A For 15 Port : Mounting tap : Pin diameter Mounting side C 70 Front side to port For 16 Port B Mounting hole: 6 points Number of auto switches Mounting side Mounting side Mounting side: 2 sides For 18 Round (R) Diamond (D) Pallarel side to port Mounting side Mounting tap: M10 x 1.5 Pin diameter: 8H7 Nil S 2 1 (Unclamp side) A Port For 20 Mounting side : Mounting tap : Pin diameter T 70 Front

2 Phase Stepper Motor/Without Motor Brake Series LXP

Positioning Time Guide (for Horizontal Mount) For transfer load of 0kg For transfer load of 6kg Positioning time (sec) Positioning time (sec) Positioning distance (mm) 200 100 50 10 1 Positioning distance (mm) 100 200 50 10 1 10 20.1 10.1 5.1 1.1 0.2 10 10.1 20.1 5.1 1.1 0.2 Speed (mm/s) Speed (mm/s) 20 10.1 5.1 2.6 0.6 0.1 20 5.1 10.1 2.6 0.6 0.1 30 6.7 3.4 1.7 0.4 0.1 30 3.4 6.7 1.7 0.4

Flow Control Equipment

2.5 to 6 6 to 20 20 to 40 40 to 63 63 to 100 AS13l1F AS13l1F AS23l1F AS33l1F AS43l1F / 1 8, / 1 4 / 1 4, / 3 8 / 1 2 Elbow (Metal Body) M5 6 to 20 20 to 32 20 to 40 40 to 63 63 to 100 AS12l1 AS22l1 AS22l1 AS32l1 AS42l1 / 1 8 4.1-7 / 1 4 / 3 8 / 1 2 In-line 6 to 20 20 to 32 20 to 40 40 to 63 63 to 100 AS1001F AS2001F AS2051F AS3001F AS4001F 4.1-9 Dual Speed Controller 6 to 20 20 to 32 20