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Note) At pressure 0.5 MPa 2.7-1 Series MHT2 Effective Holding Force Work holding point should be within the range indicated in the graph.

VZA2241-23 pcs. VVZ2000-31A-2 1 pc. VVZ2000-31A-31 pc. Base mounted 2 position double 2 position single Sub-plate Assembly Part No.: VZA2000-S-01 Thread type Mounting bolt and gasket are not included.

Use in low temperature environments The valve can be used at a temperature down to 5C. Take appropriate measures to avoid freezing of drainage, moisture, etc. 2. Operation method The valve must be switched to each position instantly and securely. Stopping the handle halfway between the extreme positions may cause malfunction. VHS 5-8-15

1 2 5x.2B \71 1.57 140) M18r1 5 1.22 (31) 0 6 3 (16) 3.86 {981 1.91 (23) Q5 .3: ?

A sine cushion is used at the stroke end. Capable of smooth acceleration/deceleration of 0.5G or less. Non-contact construction Sine cushion Particles are not generated by sliding, because the construction does not allow contact between the outside surface of the cylinder and the inside surface of the slide table.

bearing CXSL/Ball bushing CXSM/Slide bearing CXSL/Ball bushing 3.5 Maximum load mass (kg) Maximum load mass (kg) 3.0 1.0 2.5 2.0 1.5 0.5 CXS32 CXS25 1.0 CXS20 0.5 CXS6 CXS10 CXS15 0.0 0.0 0 20 40 60 80 100 120 0 20 40 60 80 100 120 Stroke (mm) Stroke (mm) Allowable kinetic energy (XB19) Plate end inclination The values in the graph below provide a guide for the inclination "X" occurring at

Angle adjustment screws Table unit Auto switch capable Since switches can be moved anywhere on the circumference, they can be mounted at positions which accommodate the specifications.

Power supply voltage Current consumption Auto switch mounting bracket part numbers (band mount type) Load voltage 24VDC (10 to 28VDC) Load current 5 to 40mA Bore size (mm) Auto switch mounting bracket number Note Internal voltage drop 4V or less Leakage current 0.8mA or less at 24VDC BJ2-016S 10 16 Includes stainless steel mounting screws BJ2-010S Actuated position ..

Drivers for LJ1, LG1, LX Dimensions 5.2 Driver 150 168 160 5.2 20 A 105 3 Driver dimensions For LJ1, LG1 Driver input/output signal list (CN-1/F connector) Signal description Control signal power supply Servo ON input Alarm clear input Counter clear input Gain switching input Pin no. 12 13 14 19 20 21 22 23 24 25 26 Symbol IM COM GND OZ+ OZ CZ CW+ CW CCW+ CCW FG Signal description Torque

At this time, the condensed moisture is separated from the air by the drain separator and automatically discharged. (IDU3D uses hot refrigerant vapor for reheating.) The dried clean air is heated by the hot air that has entered the dryer. It is then discharged from air dryer outlet.

Shipping Indicates clean booth/class10,000 Shipping Laboratory Indicates clean room and clean booth/class10,000 Indicates processes at clean bench/class100, class10 Note) Consult with P/A if a grade other than the above standard process is desired.

PWR P P 1 1 A A Terminating resistors It is necessary to attach bus terminating resistance to the units located at the ends of transmission line. End plate SI unit Valve manifold LED indication Safety Instructions Exchange of SI unit Remove screws from End Plate and release connection of each unit. Replace old SI unit with new one. (Tie-rod does not need to be removed.)

1 For details about certified products conforming to international standards, visit us at www.smcworld.com.

10 14.5 4.5 U40 40 43 7 18 13.7 18.5 6.5 U50 50 53 7 18 14.7 19.5 7.5 Model Nom.size D10 A 10 ZP10Dl B 12 C 4 D 13 E 10.7 F 15 Y 6 Put in the symbol for material at the end of model no.

VlA Selection Caution Environment Warning VM/VR VH q Use in low temperature environments The valve can be used at a temperature down to 5C. Take appropriate measures to avoid freezing of drainage, moisture, etc. q When the valve is installed in an atmosphere where there is a lot of dust, install a silencer into the port "3(R)".

1 2 5x.2B \71 1.57 140) M18r1 5 1.22 (31) 0 6 3 (16) 3.86 {981 1.91 (23) Q5 .3: ?

Lock nut A Figure 1 Guide rod Stopper Cushion ring holder Adjusting screw Backward Forward Backward Note) Forward Wrench Note) Do not move it backward, as it is set to a full stroke at the time of shipment.

BQP1-050 40, 50 16 7-5-3 4 Series CQM Plate Non-rotating Accuracy Non-rotating accuracy without load is designed to be same or less than the figures shown in the table below at the retracted cylinder end (plate).

When determining particle generation grades, the 95% upper condence limit of the average particle concentration (average value), when each specimen is operated at a specied number of cycles Note 2) is considered. The plots in the graphs indicate the 95% upper condence limit of the average particle concentration of particles with a diameter within the horizontal axis range.