Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

200 400 1.5 3 6 Effective area (mm2) Effective area (mm2) Effective area (mm2) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) 07, 08, 09, 10, 11 300 06 1.0 2 4 200 50 100 0.5 1 2 100 0 0 0 0 5 10 0 5 10 0 5 10 Number of needle rotations Number of needle rotations Number of needle rotations ASD530FG ASD630FG 1500 1000 Effective area (mm2) Effective area (mm2) 14 Flow

Smooth Cylinder Series CG1Y ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the low friction, double acting, single rod type of Series CG1  Q .

Smooth Cylinder Series CG1Y 20, 25, 32, 40, 50, 63, 80, 100 Specifications and auto switch information not provided below are the same as those of the low friction, double acting, single rod type of Series CG1Q. How to Order Standard L 25 100 CG1Y L H7BW S 25 100 CDG1Y With auto switch Number of auto switches With auto switch (Built-in magnet) 2 pcs. 1 pc. n pcs.

3 Port Solenoid Valve SYJ300/500/700 Series

Common exhaust(pilot and main valve)type Pilot exhaust Not required Lubrication Free Mounting position 150/30 Impact / Vibration resistance m/s2 Dust proof Protection structure Base mounted type Solenoid Specifications Grommet (G), E(H), L type plug connector (L), M type plug connector (M) Electrical entry Coil rated voltage V DC 24, 12, 6, 5, 3 Internal pilot AC 50/60Hz 100, 110, 200, 220

Mini-Rotary Actuator Series CRJ Rack-and-Pinion Type/Size: 05, 1

L (Example) F9NL 5m .

MRQ

Rotatary Motion Part Angle of rotation: 90, 180 Unit: l/min (ANR) Operating pressure (MPa) Angle of rotation (Degree) Inner volume (cm3) 0.15 Size 0.2 0.3 0.4 0.5 0.6 0.7 0.029 4.88 80 to 100 0.024 0.039 0.048 0.058 0.068 0.077 32 0.05 8.46 170 to 190 0.042 0.067 0.084 0.1 0.117 0.134 9.22 80 to 100 0.046 0.073 0.091 0.109 0.128 0.146 0.055 40 15.90 170 to 190 0.079 0.126 0.157 0.189 0.22

Fieldbus System

End Plate EX600-ED2-l EX600-ED3-l Power connector Model specification M12 (5-pin) plug 7/8 inch (5-pin) plug 24 VDC 10%, Class 2, 2 A 24 VDC 10%, 8 A Power supply (for Control/Input) Power supply (for Output) 24 VDC +10/5%, Class 2, 2 A 24 VDC +10/5%, 8 A Enclosure IP67 (Manifold assembly) Standards CE marking, UL (CSA), RoHS recognition Weight 0.4 lbs (170 g) 0.4 lbs (175 g) EX600-ED3-l

MHF2

Hmm 0.3MPa 0.7MPa 0.3MPa 60 0.7MPa 0.4MPa 60 0.4MPa 40 40 20 20 100 80 60 40 20 0 100 0 80 60 40 20 Gripping point L mm Gripping point L mm 12-3-6 7 Model Selection Series MHF2 Confirmation of External Force on Fingers: Series MHF2 Step 3 MHZ L L MHF MHL Mr Mp Fv My MHR MHK MHS L MHC MHT MHY L: Distance to the point at which the load is applied (mm) MHW Maximum allowable moment Allowable

MHF2

60 40 20 0 0 50 30 10 Gripping point L mm Gripping point L mm MHF2-16D MHF2-20D 100 0.5MPa 100 Pressure 0.2MPa Pressure 0.2MPa 80 0.5MPa 0.6MPa 80 0.6MPa Overhang Hmm Overhang Hmm 0.3MPa 0.7MPa 0.3MPa 60 0.7MPa 0.4MPa 60 0.4MPa 40 40 20 20 100 80 60 40 20 0 100 80 60 40 20 0 Gripping point L mm Gripping point L mm 12-3-6 7 Model Selection Series MHF2 Confirmation of External Force on Fingers

XM, XY

(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) Nil XL H0 Solid state auto switch y Number of auto switches/Detecting position XLQ Quantity Without auto switch 2 pcs. 1 pc. 1 pc.

2–4

/8 NPT1/8 75, 100 56.5 39.5 10 to 50 50.5 30.5 50 10.5 10.5 G1/4 60.5 40.5 10.5 10.5 64 62 53.4 Rc1/4 NPT1/4 NPT1/4 Rc1/4 NPT1/4 NPT1/4 G1/4 75, 100 60.5 40.5 HA NN NN OA Bore size (mm) 32 40 50 V W HB IA IB J KA KB L M N OB RA RB S U Z , TN, TF , TN, TF 38 10 5 60 58.5 4.5 28 19.8 7 34 5.5 9 7 58.5 31.5 10 M5 x 0.8 10-32UNF M6 x 1.0 1/4-20UNC 14 46 10 5 69 67.5 5 33 23.3 7 40 5.5 9 7 66

Hydraulic Cylinder 7MPa Nominal Pressure Series CHN

Series CHN 20, 25, 32, 40 7MPa How to Order CHN 25 100 C73 L Number of auto switches Nil S n 2 pcs. 1 pc.

HRX-OM-W002

Table 8-1 Quality criteria for clean water (tap water) Item Unit Criterion Circulating fluid Facility water pH (at 25 oC) 6.0 to 8.0 6.5 to 8.2 Electric conductance (at 25 oC) [S/cm] 100 to 300 100 to 800 Chloride ion [mg/L] 50 or less 200 or less Standard Sulfuric acid ion [mg/L] 50 or less 200 or less item Acid consumption (at pH 4.8) [mg/L] 50 or less 100 or less Total hardness [mg/L]

Stainless Steel Cylinder Series CJ5-S/Series CG5-S

25 Tubing T, TU P. 26 Floating Joint/Stainless Steel Type JS P. 27 Features 2 Stainless Steel Cylinder Series CJ5-S 10, 16 How to Order Bore size Standard stroke (mm) 10 16 10 16 10mm 16mm 15, 30, 45, 60, 75, 100, 125, 150 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 Mounting B L F D Basic type Axial foot type Front flange type Double clevis type CJ5 L 16 S R 60 Without Auto Switch CDJ5 L

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

L M L CXTM L Series Action Double acting/Single rod Double acting CY1B: 6 10, 15, 20 25, 32 40, 50, 63 CY1S, CY1L: 6 to 40 12, 16, 20 25, 32, 40 50, 63, 80 100 12, 16, 20 25, 32, 40 50, 63, 80 100 20, 25 32, 40 50, 63 32, 40 50, 63 80, 100 6, 10 16, 20 25, 32 10, 16 20 25, 32 12, 16 20, 25 32, 40 6, 10 15, 20 25, 32 6, 10 16 20, 25 32, 45 6, 10 16 20, 25, 32 40, 50 10, 15 25 12, 16 20, 25

PFxx-OMO0007CN

min 550 L/min 10100 L/min 20200 L/min 50500 L/min / 12 0.510.5 L/min 2.552.5 L/min 5105 L/min 10210 L/min 25525 L/min / 0.1 L/min 0.5 L/min 1.0 L/min 2.0 L/min 5.0 L/min / 09 L / 1 L 3 4 -50 kPa0.5 MPa -50 kPa0.75 MPa 1.0 MPa NPN PNP 3 () 3 80 mA DC30 V(NPN ) NPN1 V (80 mA ) PNP1.5 V (80 mA ) 1 s 1F.S. 2F.S. 5F.S. 0 3 (3 digits) 50 ms 0.1 L/pulse 0.5 L/pulse 1 L/pulse 2

How to Order Series ZM Vacuum Ejector With Valve and Switch For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

VAC) Manual override Nil B Non-locking push type Vacuum port location Locking slotted type Nil A Side entry Side/Bottom entry Electrical entry G L Grommet type, with 0.3 m lead wire (applicable to DC) L plug connector, with 0.3 m lead wire LZ L plug connector, with 0.3 m lead wire, with light/surge voltage suppressor LN L plug connector, without lead wire (applicable to DC) LO L plug connector

Wireless System

EX600-ZT1 y Communication Cable with Connector/Communication Connector Cable with M12 RJ-45 connector EX9-AC 020 EN-PSRJ (Plug/RJ-45 connector) 14.8 Cable length (L) M12 RJ-45 6.4 010 1000 mm 020 2000 mm 030 3000 mm 050 5000 mm 100 10 mm (47.3) (44) L Cable core wire colors 1 2 1 2 3 4 5 6 7 8 Terminal no. Terminal no.

ML1

CE2 ML2B ML1C Mounting Position (Stroke End)/Reed Switch Mounting Position (Stroke End)/Solid State Switch D-E73A (L), D-E76A (L), D-E80A (L) D-M5B (L), D-M5N (L), D-M5P (L) D-M5BW (L), D-M5NW (L), D-M5PW (L) D-M5NTL, D-M5PTL REA REC RHC MTS CC Lead wire clamp/Lead wire cap (option) Series Lead wire clamp Lead wire cap ML1C LC-01 LP-01 Unit: mm Lead wire clamp/Lead wire cap (option) 25 32

MU

Additional weight 0.23/50 stroke Stroke 100 stroke 0.46 + 100 / 50 X 0.23 = 0.92kg Standard Stroke (mm) Size Standard stroke Max. stroke(mm) 25, 32, 40 50, 63 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 75, 100, 125, 150, 175, 200, 250, 300 300 Contact SMC for any intermediate strokes that are not indicated above, as they will be produced upon receipt of order.

AC Servo Motor Driver (CC-Link Type)

The guideline is 80% or less. 0 to 100 % 12 Effective load ratio The continuous effective load current is displayed. The effective value is displayed relative to the rated current of 100%. 0 to 300 % 13 Peak load ratio The maximum torque is displayed.