Body Size: 1 (M5 X 0.8, 10-32UNF), Type: 3 (Universal), Control Type: 1 (Meter-in), Thread Type: R, Port Size: M5 (M5 X 0.8), Dimension, Across Flat [H]: E (8mm), Applicable Tubing O.D.: 01 (Ø1/8), Seal Method: None

Body Size: 1 (M5 X 0.8, 10-32UNF), Type: 3 (Universal), Control Type: 1 (Meter-in), Thread Type: R, Port Size: M5 (M5 X 0.8), Dimension, Across Flat [H]: E (8mm), Applicable Tubing O.D.: 03 (Ø5/32), Seal Method: None

Body Size: 1 (M5 X 0.8, 10-32UNF), Type: 2 (Elbow), Control Type: 1 (Meter-in), Thread Type: R, Port Size: M5 (M5 X 0.8), Dimension, Across Flat [H]: E (8mm), Applicable Tubing O.D.: 23 (Ø3.2), Seal Method: None

Body Size: 1 (M5 X 0.8, 10-32UNF), Type: 3 (Universal), Control Type: 1 (Meter-in), Thread Type: R, Port Size: M5 (M5 X 0.8), Dimension, Across Flat [H]: E (8mm), Applicable Tubing O.D.: 07 (Ø1/4), Seal Method: None

Body Size: 1 (M5 X 0.8, 10-32UNF), Type: 2 (Elbow), Control Type: 1 (Meter-in), Thread Type: R, Port Size: M5 (M5 X 0.8), Dimension, Across Flat [H]: E (8mm), Applicable Tubing O.D.: 03 (Ø5/32), Seal Method: None

Body Size: 1 (M5 x 0.8, 10-32UNF), Type: 2 (Elbow), Control Type: 0 (Meter-out), Indicator Direction: None (0°), Thread: R, Port Size: M5 (M5 x 0.8), Width Across Flats: E (8mm), Tubing: 04 (ø4)

Body Size: 1 (M5 x 0.8, 10-32UNF), Type: 2 (Elbow), Control Type: 0 (Meter-out), Indicator Direction: None (0°), Thread: R, Port Size: M5 (M5 x 0.8), Width Across Flats: E (8mm), Tubing: 06 (ø6)

Body Size: 1 (M5 x 0.8, 10-32UNF), Type: 2 (Elbow), Control Type: 0 (Meter-out), Indicator Direction: 1 (180°), Thread: R, Port Size: M5 (M5 x 0.8), Width Across Flats: E (8mm), Tubing: 06 (ø6)

Body Size: 1 (M5 x 0.8, 10-32UNF), Type: 3 (Universal), Control Type: 0 (Meter-out), Indicator Direction: 1 (180°), Thread: R, Port Size: M5 (M5 x 0.8), Width Across Flats: E (8mm), Tubing: 04 (ø4)

Body Size: 1 (M5 x 0.8, 10-32UNF), Type: 2 (Elbow), Control Type: 0 (Meter-out), Control Range: FSM (1 to 50 mm/s), Indicator Window Direction: 0° , or None for FC, FM, Thread: R, Port Size: M5 (M5 x 0.8), Width Across Flats [H]: E (8mm), Tube Size: 02 (ø2)

Body Size: 1 (M5 x 0.8, 10-32UNF), Type: 2 (Elbow), Control Type: 1 (Meter-in), Control Range: FC (50 to 150 mm/s), Indicator Window Direction: 0° , or None for FC, FM, Thread: R, Port Size: M5 (M5 x 0.8), Width Across Flats [H]: E (8mm), Tube Size: 06 (ø6), Sealant: without Sealant, Push lock: A (Push-lock)

Body Size: 1 (M5 x 0.8, 10-32UNF), Type: 2 (Elbow), Control Type: 1 (Meter-in), Control Range: FM (1 to 50 mm/s), Indicator Window Direction: 0° , or None for FC, FM, Thread: R, Port Size: M5 (M5 x 0.8), Width Across Flats [H]: E (8mm), Tube Size: 06 (ø6), Sealant: without Sealant, Push lock: A (Push-lock)

Body Size: 1 (M5 x 0.8, 10-32UNF), Type: 2 (Elbow), Control Type: 0 (Meter-out), Model: 1FS, Thread: R (or None), Port Size: M5 (M5 x 0.8), Width Across Flats: E (8mm), Applicable Tubing: 06 (ø6), Seal: without Sealant

CJ2-Z 10-/11- Series 21-/22- ø10, ø16 Air Cylinder

CJ2-Z Series 10, 16 Air Cylinder 10-/1121-/22RoHS How to Order Cushion Clean series 10 11 Relief type Vacuum suction type Rubber bumper (Standard) Air cushion Nil A 10 D L 16 60 A R C J 2 M9BW Z B 21 D L 16 60 R C J 2 M9BW Z B Number of auto switches Nil Built-in magnet Head cover port location 2 pcs. 1 pc. n pcs.

Slit Valve

0 y r !1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.

Manifold Regulator Modular Type ARM2500/3000 Series

Bonnet Common IN Individual IN Common IN Individual IN Polyacetal 2 Regulator Regulator ARM2500-A-02 ARM2500-B-02 ARM3000-A-03 ARM3000-B-03 9 1 Replacement Parts End plate R 10 1 Description Material Part no. End plate L 11 1 No.

Pressure Range: F (-100.0 to 100kPa), Piping Specifications: M5 (M5 Female Thread/Side Piping Port), Output Specifications: E (PNP Open Collector 1 Output+Analog Voltage), Unit Specifications: M (Fixed SI Unit, kPa), Lead Wire: G [Lead Wire w/Connector (2m Lead Wire Length)+Connector Cover], Adapter: R [DIN Rail Adapter (DIN Rail to be Prepared by Customer)]

Pressure Range: 0.0 to -101.0kPa, Piping Specifications: M5 (M5 Female Thread/Side Piping Port), Output Specifications: E (PNP Open Collector 1 Output+Analog Voltage), Unit Specifications: M (Fixed SI Unit, kPa), Lead Wire: G [Lead Wire w/Connector (2m Lead Wire Length)+Connector Cover], Adapter: R [DIN Rail Adapter (DIN Rail to be Prepared by Customer)]

Pressure Range: 0.0 to -101.0kPa, Piping Specifications: M5 (M5 Female Thread/Side Piping Port), Output Specifications: E (PNP Open Collector 1 Output+Analog Voltage), Unit Specifications: Unit Switching Function (Not Allowed for Use in Japan), Lead Wire: G [Lead Wire w/Connector (2m Lead Wire Length)+Connector Cover], Adapter: R [DIN Rail Adapter (DIN Rail to be Prepared by Customer)]

Pressure Range: 0.0 to -101.0kPa, Piping Specifications: M5 (M5 Female Thread/Side Piping Port), Output Specifications: E (PNP Open Collector 1 Output+Analog Voltage), Unit Specifications: P (Unit Switching Function, Initial Value psi, Not Allowed for Use in Japan), Lead Wire: G [Lead Wire w/Connector (2m Lead Wire Length)+Connector Cover], Adapter: R [DIN Rail Adapter (DIN Rail to be Prepared