NVKF

(M5) 01T r/ NPTF {A port onl ' Special order Notel) Indicale in parentheses al end of parl # Ex.

Precision Regulator Series IR1000/2000/3000

1 ARM Diaphragm (B) e w r y Exhaust Bleed w ARP Diaphragm (C) SUP(1) OUT(2) SUP(1) OUT(2) OUT(2) SUP(1) Exhaust Valve IR u !0 !0 !2 t r !

2–4

6 q e r t !5 w !4 !0 u y 32 to 50 With auto switch (built-in magnet) !6 q e r t !5 i o !1 !3 !2 !7 w !4 !0 u y Description No.

Process Pump

E 21 S LQ1 LQ1 fittings Nut (including insert bushing), 1 location removed Fitting type E Union elbow T Union tee Applicable tube size Metric Inch Applicable tube size (mm) Applicable tube (inch) Reducing Reducing Size No.

ZMA

Description q w e r t y Note Body Valve cover Adapter plate Cover Tension bolt Flow adjustment screw AMJ Misc. ZMA-HCB Electroless nickel plated Replacement Parts No. Description u i o !0 !1 !2 Part no.

ZB-OM00301

FA 3m 27 (M230) 2 O 1 No.ZB-OM00301 Assy ZB1ZS A M G A E 0.0~-101.0KPa G (2m) F -100.0~100KPa ZS-39-5G A NPN2 B PNP2 1) M SI2) P (psi)1) 1) (M230) 2 2)kPa O 1 V Assy 45 2 V Assy 45 (V Assy ) A ) 28 - No.ZB-OM00301 A R R Nm 0.0540.08 R R ON OFF R 29 - No.ZB-OM00301 3 P911 Nm 0.075~0.096 M2 / 3 Assy Assy / / O (/) O 30 - No.ZB-OM00301 [L/min(ANR)] V

Speed Controller with Pilot Check Valve with One-touch Fitting Series ASP 1

1/8 M5 x 0.8 10.9 42.4 48.7 15 36.7 41.7 18.5 12 17 R 1/4 1/8 ASN 14.4 50 56.2 19.8 41.9 46.9 23 12 19 R 3/8 1/8 AQ 18.3 61.8 70.3 26.5 57.3 64.8 28.6 17 24 R 1/2 1/4 25.9 ASV Reference dimensions of R thread after installation.

Plate Cylinder with Lock Series MLU

2 @6 t @4 w @8 r !1 @5 @3 @2 e !6 A A C B M(D)LUB25 y !9 i o !5 @0 Extension locking w q Section A-A !

High Precision Digital Pressure Switch, Series ZSE50F/ZSE60F, ISE50/ISE60

pressure ZSE50 02 M F L 22 For compound pressure Piping specifications Option 02 T2 G2 R 1/4 (M5 with female screw), Piping in backward direction Nil None NPT 1/4 (M5 with female screw), Piping in backward direction Bracket A G 1/4 (M5 with female screw), Piping in backward direction Optional A Input/output specifications 22 30 62 NPN open collector 2 output + Analog output Bracket D NPN

mlu

2 @6 t @4 w @8 r !1 @5 @3 @2 e !6 A A C B M(D)LUB25 y !9 i o !5 @0 Extension locking w q Section A-A !

Large Type Vacuum Unit Series ZR

E Vacuum switch ZSE2 + filter Air operated K3 Air operated F Filter C1 N.C. Manual operation C2 Air operated C3 N.O. Nil Non-locking push type C4 Double SOL.

HEC_W-E

Temp. upper/lower 4 Fig.9-3 limit alarm occurrence 9-1 Alarm 9.2 Alarm indication Blink E R R 1 4 T h e r m o s t a t A l a r m M O D E < S h u t o f f Fig.9-1 Alarm indication in the event ERR14 arises Blink E R R 1 4 P B R a n g e M O D E < 2 . 0 C Fig.9-2 Alarm indication in the event ERR14 arises during PB range setting input Light W R N P V < 2 6 . 6 C # 1 S V 2 5 . 0 C M O D E N

5 Port Solenoid Valve Series VQZ1000/2000/3000

Note 2) For one-touch fittings for P/R port and silencer part no., refer to page 978. 5 1 15 VQ5 3 P 4 1/8 [1(P) port] G1/16 [5(R1), 3(R2) port] VQC VQZ VQZ2 2 (R)-G1-M5 1 8 9 M-type plug connector (M): VQZ2 2 (R)-M1-C4, C6 0 1 1 8 9 0 1 SQ Approx. 300 (Lead wire length) VFS 83.7 [85.9] M5 x 0.8 4(A), 2(B) port 78.7 VFR 12 VQ7 25 40.1 [47.1] Unless otherwise indicated, dimensions are the

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

This time is characterized as =0 exp(E/RT) where R is the ideal gas constant and 0=(approx.) 10-13sec. Residence time of water at 20C is 5.5 x 10-6sec, whereas at 150C is 2.8 x 10-8 sec, or 200 times shorter.

-fl Seies

i,e, l 4s -s 1t^:!!-% , , ",",""" 1l-,:e!"6 ,tL--!9!!",qL+r |L-.!.S!"jqt+r , _^99!j,, r , .-i9!3r r-) tL--sq:L,d r+ ,_!t, r I 5.d"." 1l^:eqBi5, , lL--9s!L,. r+l ,.i9!4rr t I L_l-g!!",o r+l .-^AAr r L.^t9!3, , , ,..' ".' lt+e!',' L , .sL-.1f.:q%,1 , tL jq!"s L+, tLl9!"s L+l ,-;e!j., /..js!i2'L r . , , , , " " , 1 1 + n " , , r 6 * , . " , 1 f 4 : e ! 3 q , , t l ! g ! !

4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

i,e, l 4s -s 1t^:!!-% , , ",",""" 1l-,:e!"6 ,tL--!9!!",qL+r |L-.!.S!"jqt+r , _^99!j,, r , .-i9!3r r-) tL--sq:L,d r+ ,_!t, r I 5.d"." 1l^:eqBi5, , lL--9s!L,. r+l ,.i9!4rr t I L_l-g!!",o r+l .-^AAr r L.^t9!3, , , ,..' ".' lt+e!',' L , .sL-.1f.:q%,1 , tL jq!"s L+, tLl9!"s L+l ,-;e!j., /..js!i2'L r . , , , , " " , 1 1 + n " , , r 6 * , . " , 1 f 4 : e ! 3 q , , t l ! g ! !

51

70 82 100 5.5 5.5 6.6 6.6 9 11 11 14 6 7 7 8 9 9 11 14 12 12.5 11 10.5 15 15 17 20 6 7 7.5 7.5 12 12 16 16 20 23 23 29 35 35 44 44 4 4 4 5.5 8 8 9.5 9.5 26 31 38 47 58 72 89 110 M4 x 0.7 M8 x 1.25 24 29 35.5 44 55 69 80 100 M5 x 0.8 57 60 62 62 84 84 104 105 Width across flats 6 length 3.5 M5 x 0.8 M10 x 1.25 M5 x 0.8 Width across flats 8 length 3.5 M5 x 0.8 M10 x 1.25 Rc1/8 Width across

VFM300

Brass Brass Notes i Description Material Pilot body Body Metallic plated Valve seat (B) Valve seat (A) Metallic plated Black zinc chromate w e o !0 Head cover r Spool valve assembly Zinc alloy Brass, NBR Valve !1 Stainless steel Valve spring t Aluminum alloy End cover Metallic plated !2 Stainless steel Return spring y Polyacetal Piston !

SY3000/5000/7000/9000 Series (Pilot Valve:V100)

Manifold block assembly SX3000-50-1ASX5000-50-1AMetric size SY3000:P,R port with one-touch fitting for8 SY5000:P,R port with one-touch fitting for10 Inch size SY3000:with one-touch fitting for5/16 SY5000:with one-touch fitting for3/8 SX3000-51-1A (Metric size) SX3000-51-15A (Inch size) SX5000-51-1A (Metric size) SX5000-51-15A (Inch size) SUP/ EXH block assembly End block assembly R SX3000

W2M/4M

t signai VDC 1 2 3 Input signalVDC 1 2 3 Hysteresis r c 0.5 z o E ! 0 E E ,o5 5 E 1 2 3 4 lnplrl signal VDC lrpul signa VDC 1 2 3 lnput slgna!