NCQ8

(M) NC(D)Q8WA-(C)(M) NC(D)Q8A-S(M) NC(D)Q8A-T(M) Both Ends Tapped (Inch) O1 R Bore size Remarks R R O1-Thread 056 (9/16") 075 (3/4") 106 (1-1/16") 150 (1-1/2") 200 (2") 250 (2-1/2") #4-40UNC 0.34 Through tap for NCQ8A056-012(C) #6-32UNC 0.34 Through tap for NCQ8A075-012(C) #6-32UNC 0.50 Through tap for NCQ8A106-012(C) #10-24UNC 0.50 Through tap for NCQ8A150-012(C) #10-24UNC 0.53 Through tap

LEC-OM07605CN

(1) LECSS2-T P+DP+CG3G4 G3G4 P+D P+D P P+ C C G3 D (3) (1) G4 5m 5 m (12) 1.

HEC_W-E

Therefore, if the target temp. is 23.0 C and 1.5 C is set in this item, the warning [WRN] arises when temp. lowers 21.5 C. H i g h T e m p . 8. High Temp. Cutoff Setting range : 11.0 to 70.0 C Min. increment : 0.1 C Indicated content : High temp. cutoff by internal temp. C u t o f f M O D E < 7 0 . 0 C sensor (Ex. : 70.0 C).

Air Cylinder

Clevis Pivot Bracket Pin (For CM2E(V)) Trunnion Nut/Material: Carbon steel (mm) (mm) H Material: Carbon steel B d D m m L2 C D t t L1 d Part no. Applicable bore size B C D d H TN-020B 20 26 28 25.5 M20 x 1.5 10 TN-032B 25, 32 32 34 31.5 M26 x 1.5 10 TN-040B 40 41 45 40.5 M32 x 2 10 Part no.

XL

(a) (b) (c) (b) (c) (a) (b) (c) (a) (b) (c) (b) (c) (a) (b) (c) (b) (c) (a) (b) (c) Note 1) The above (a), (b), (c) indicate heater mounting positions.

Auto Switch Guide

L D-A73 (Example) RS H A Lead wire length RZQ 5 m None Nil L 0.5 m 3 m Z N MI W S Applicable for the connector type (D-C) only.

High Vacuum Angle Valve

Add M to the end of the part number for 1 m, L for 3 m, and Z for 5 m. Example) -2M9NL !

VFS

Cable length 1.5 m 3 m VVFS2000-30A-3 5 m VVFS2000-30A-4 7 m Component parts Assembly part no. Cable length 1.5 m 3 m VVZS3000-21A-3 5 m VVZS3000-21A-4 8 m Component parts VVFS2000-30A-1 VVFS2000-30A-2 VVZS3000-21A-1 VVZS3000-21A-2 Plug 206837-1 1 pc. Cable clamp 206138-1 1 pc. Socket 66101-2 24 pcs.

•

Width across flats KA ~\, -t n I E ~ I='" "r\ f'iiI .J ... " UJ o o ) ~ L::: ~ ::;: "" ~E ~ ~ c Cl DC N f I-A _ K F _ L{ ~M [T D B " m :Jl Cl (mm) c.

Vacuum

C C t . : . !

Vacuum

C C t . : . !

Modular F.R.L. Unit

Note 3) Bowl assembly for AF30 to 60 models comes with a bowl guard (steel band material). 25 Air Filter AF10 to 60 Dimensions L AF10, 20 AF50, 60 A G D Bracket (accessory) L Bracket (accessory) F D M G K K F M J J B E E B OUT IN H C OUT IN H C Port size OUT OUT Port size o s Drain A P Min. clearance for maintenance 25 AF30, 40, 40-06 L Bracket (accessory) A D G F M K J 40 B E Drain Min.

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

(Initial value) Base mounted Solenoid specifications Grommet(G)/(H), L plug connector (L), M plug connector (M), DIN terminal (D), M8 connector (W) Electrical entry JIS Symbol G, H, L, M, W D Internal pilot Rated coil voltage V DC AC50/60Hz 24, 12, 6, 5, 3 24, 12 10-SYJ51 M 2 4 10-SYJ52 M 2 4 100, 110, 200, 220 10% of rated voltage Allowable voltage fluctuation (A) 2 (A) 2 Standard 0.35

EXxx-OMZ0016

EXW1 EXW1 Up to 100 m V.1.0/V.2.0 Available*1 EXW1 EXW1+EX600 *2 V.1.0 NA EXW1 EX600 Up to 10 m V.1.0 NA EX600 EXW1 Up to 10 m V.1.0 NA Available*3 EX600 EXW1+EX600 Up to 10 m V.1.0 NA Available*3 EX600 EX600 Up to 10 m V.1.0 NA Available *1: Available in protocol V.2.0. *2: Up to 100 m between an EXW1 series Base and Remote, and up to 10 m between an EXW1 series Base and an EX600-W series

IDG

Tubing size (O.D. x I.D.) mm: 12 x 9 IDG30 IDG50 0 m 20 1 m 19 3 m 17 5 m 16 Note) In cases other than above model numbers, if the tube length is 5 m or less, an increase of the outlet air at the atmospheric pressure dew point will be 1C or less. Refer to pages 14-19-28 to 29. Construction Refer to pages 14-19-30 to 31.

0.4

cable (3 m) With cable (5 m) With cable (1.5 m) With cable (3 m) With cable (5 m) 2 to 24 2 to 24 stations stations Note 1) Besides the above, F/P kit with different number of pins are available.

42

Note Conductor resistance W/km, 20C 65 or less 1.5 m AXT100-DS25-015 Cable 0.3 mm2 Approx. 10 x 25 cores 3 m AXT100-DS25-030 5 m AXT100-DS25-050 Voltage limit VAC, 1 min. 1000 L * For other commercial connectors, use a 25pin type female connector conforming to MIL-C-24308. * Cannot be used for transfer wiring.

High Vacuum Angle Valve, XL Series

) Max 10.5 (except connector) XLDV-40 to 80/With solenoid valve C M Fn (KF flange) Fd (K flange) C Port R (exhaust port) Solenoid valve for initial exhaust N Solenoid valve for main exhaust B 8.5 8.5 A G A Port P (pressure port) (mm) N M G Fn C B A Fd K Model XLDV-25 50 123 48 40 26 6.5 12 12 54.5 58.5 73.2 83.6 41 52 70 83 95 110 55 75 87 114 66 79 100 117 170 183 217 256 65 70 88 90

JIS Standard Hydraulic Cylinder

Keeper plate Rod end nut 30 d 2 x d L1 0.2 B D C m T H H B Material: Carbon steel Material: Rolled steel Rod series Bore size (mm) Bore size (mm) Cap bolt L1 d H T B m Part no.

Rotary Actuator/Vane Type

E E CRQ2X MSQX L L MRQ K K D B C G G D B C N N 1 M T T M 25.5 (34.5: Connector type) 2 x R Auto switch 2 x R Y Y Auto switch W W1 Size: 20, 30 Size: 40 W W 2 67 8 8 15 32.5 When D-M9m is used 65 4 *1.