Output Specification: R (NPN Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: N7H (ø1/4" One-touch Fitting, Straight Type)

Output Specification: R (NPN Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: C4L (ø4 One-touch Fitting, Elbow Type)

Output Specification: R (NPN Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: C6L (ø6 One-touch Fitting, Elbow Type)

Output Specification: R (NPN Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: N7L (ø1/4" One-touch Fitting, Elbow Type)

Output Specification: R (NPN Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: N01 (NPT 1/8)

High Vacuum L Type Valve

XL1A16-2-101-XN1 Suffix for seal materials Seal material EPDM Barrel Perfluoro R Kalrez R Chemraz R VMQ FKM for PLASMA Combination No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 Symbol -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 Note 1) Barrel Perfluoro R is a registered trademark of MATSUMURA OIL Co.,Ltd. Kalrez R is a registered trademark of E.

Sine Rodless Cylinder Series REA

Operating pressure (MPa) U: Maximum speed (mm/s) Stroke (mm) Mode of operation Inclined operation Vertical operation Horizontal operation Review of load weight and operating pressure Lo Fn W Guide First tentative bore size determination F3 D1.6 x P First tentative bore size determination F2 D1.6 x P First tentative bore size determination F1 D1.6 x P WB Inclined operation W+WBWV PPV

2/3 Port Solenoid Valve for Chemicals

3 PBT Return spring 9 Stainless steel o Board assembly 10 Casing 11 PBT r e Plug 12 NBR w O-ring 13 NBR O-ring 14 EPDM/FKM/Kalrez !4 q 4 Series LVM10/100 Dimensions/Body Pored Type LVM11-(N.C.) (2 x R3.2) 9 25.4 19 2 x 3.2 Mounting hole (Lead wire length) 300 UL1007 AWG22 52.5 M5 x 0.8 IN port M5 x 0.8 OUT port 2 5 5 16 13 The broken lines indicate the bracket type. LVM11R-(N.C.)

VFA3000

3 x , 18 14 VZA (P , A, B port) VFA VFRA 2 x 4.3 VA (Mounting hole for manifold) 2 x 4.2 (Mounting hole) 2 x 18 (Pilot port) 2 x M5 x 0.8 (Breathing port) 2 x 18 (R1, R2 port) 1765 Series VFA3000 Dimensions: Base Mounted 2 position single: VFA3140-02 03 2 position double: VFA3240-02 03 2 x 4.3 2 x 4.3 (Mounting hole) (Mounting hole) 2 x 18 (Pilot port) (Pilot port) Max. 3 Max. 3 3 (Breathing

SMC Pneumatic Clean Series

Bore size NTJ-010A NTJ-006A 8 6 M3 x 0.5 2.4 5.5 6.4 5.5 6.5 M3 x 0.5 6 12.5 M4 x 0.7 3.2 7 8.1 7 8.5 M4 x 0.7 8 14.5 NTJ-015A 10 M5 x 0.8 4 8 9.2 10.5 M5 x 0.8 16.5 10 9 (mm) Standard C D E F B A J K L M N O P G H I Bore size 8 6 M2.5 x 0.45 13 7 7 10 9 19 3 5 4 9 3.5 8 7 5.3 24 M3 x 0.5 13 7 8 11 10 21 3 6 5 11 4.5 10 8 5.3 25 10 13.5 M3 x 0.5 7 8.5 11.5 10.5 22 3.2 6 6 12 5 11 8.5 5.6

Precision Clean Regulator

ARM Nil Standard Machined bleed port M5 thread Set pressure ARP X201 0 1 0.005 to 0.2 MPa 0.01 to 0.4 MPa X206 With bleed port fittings (Applicable tube O.D.: 4) IR-A Gauge port orientation IR Nil: Standard Port size IRV OUT IN Piping port size M5 x 0.8 Rc 1/8 Symbol M5 01 VEX Knob Gauge port SRH R: R specifications Symbol Gauge port SRP SRP OUT IN SRF Gauge port positions are indicated

5-M5 individual sup spacer, vqz1000, VQZ1000 VALVE, SOL 4/5-PORT*** $13.40 + Add to Quote Add To Cart Add to Cart SMC VVQZ1000-R-5-M5 individual exh spacer, vqz1000, VQZ1000 VALVE, SOL 4/5-PORT***

5-M5 individual sup spacer, vqz1000, VQZ1000 VALVE, SOL 4/5-PORT*** $13.40 + Add to Quote Add To Cart Add to Cart SMC VVQZ1000-R-5-M5 individual exh spacer, vqz1000, VQZ1000 VALVE, SOL 4/5-PORT***

5-M5 individual sup spacer, vqz1000, VQZ1000 VALVE, SOL 4/5-PORT*** $13.40 + Add to Quote Add To Cart Add to Cart SMC VVQZ1000-R-5-M5 individual exh spacer, vqz1000, VQZ1000 VALVE, SOL 4/5-PORT***

5-M5 individual sup spacer, vqz1000, VQZ1000 VALVE, SOL 4/5-PORT*** $13.40 + Add to Quote Add To Cart Add to Cart SMC VVQZ1000-R-5-M5 individual exh spacer, vqz1000, VQZ1000 VALVE, SOL 4/5-PORT***

Air Cylinder/End Lock Series MBB ø32, ø40, ø50, ø63, ø80, ø100

-100-HN P Basic weight 0.74 P Additional weight 0.11/50 stroke P Cylinder stroke 100 stroke P Locking weight 0.08 (Locking at head end, manual release non-locking style) 0.74+0.11X100/50+0.08=1.04kg All mounting bracket 0.11 0.16 0.26 0.27 0.42 0.56 Additional weight per 50 stroke Single knuckle 0.15 0.23 0.26 0.26 0.60 0.83 Accessories Double knuckle (with pin) 0.22 0.37 0.43 0.43 0.87

Compact Cylinder with Solenoid Valve/

C Example) Bolt M5 x 45L: 4 pcs.

Rotary Actuated Air Gripper/3-Finger Type MHR3/MDHR3 Series Size: 10, 15

Rotary Actuated Air Gripper/3-Finger Type MHR3/MDHR3 Series Size: 10, 15 How to Order Connecting port Body side R MHR 3 10 R Without auto switch R: Body side Port With auto switch (Built-in magnet) MDHR 3 10 R M9N S With magnet (For auto switch) Made to Order Refer to page 531 for details. Number of fingers Number of auto switches 3 3 fingers 2 pcs. 1 pc.

HRX-OM-X071

For the function, refer to P.5-29,P.5-30 [Temperature range monitoring function setting example]. Temperature range monitor start time HRR Series 5.5 Advanced setting mode 5-31 HRX-OM-X071 Chapter 5 Display and Setting of Various Functions 24. Press the [] key.

7

P p p 2-wire 12 V M9BW P P P p p Diagnostic indication (2-color indicator) Relay, PLC 24 V Grommet Yes 3-wire (NPN) 5 V, 12 V M9NA p p P p p IC circuit 3-wire (PNP) M9PA p p P p p 2-wire 12 V M9BA p p P p p Water resistant (2-color indicator) Grommet Yes 3-wire (NPN equivalent) 5 V A96 P P IC circuit Reed auto switch 2-wire 24 V 12 V 100 V A93 P P P P Relay, PLC No 5 V, 12 V 100