3

VXS VXS Model/Valve Specifications, Fluid and Ambient Temperature, VXB Valve Leakage Rate P. 219 VXE How to Order P. 220 VXP Other Special Options P. 221 VXR Construction P. 223 VXH Dimensions VXF Body material: C37, Stainless steel P. 224 VX3 Replacement Parts P. 225 VXA Glossary of Terms P. 226 Solenoid Valve Flow Rate Characteristics P. 227 Flow Rate Characteristics P. 232 Specific

Centering Unit

This is not a clean room series product. 4 MACM Series Dimensions W (Workpiece loadable range) 4 x D At maximum offset (A + 2 x S) S F DB DA C X114 X115, X116 U B W A H T H Q PB E PA PD P (Unlocking port) PE P (Locking port) P (Relief port) (Option V only) MACM4, MACM6 MACM2, MACM10 PC PC PC PC PE P (Relief port) (Option V only) PD [mm] Dimensions Model A B C D DA DB E F H P PA PB PC PD

MHx-OMZ0003

M8 8 P .18 M8 8 () NPN PIN 1 +24V DC24V 2 3 4 5 ON/OFF 6 ON/OFF 7 8 GND DC0V M8 2 M8 1 11 - 3-7. Z Y Y X Z Z X X Y Z -0.4 -0.8 48.4 12 - 4 (www.smcworld.com) 4-1.

VFN2000N

A 24 VK M5 thread 8 deep, with or without insert depending on base material. VZ 32 VF A' VFR Coding stud.

NAMUR

A 24 VK M5 thread 8 deep, with or without insert depending on base material. VZ 32 VF A' VFR Coding stud. M5 x 10 DIN913-45H VP4 12 2 8 VZS G 1/4 DIN/ISO228/1 M5 Drive flange face VFS VS4 19.5 5.5 Solenoid valve flange face O-ring 16 x 2 VQ7 1.5 3 EVS VFN The solenoid valve can be attached with 2 mounting bolts.

Rated Vacuum Range: -100 to 100 kPa, Output Specification: PNP Open Collector 2 Outputs + Analog Current Output, Unit Specification: Unit Selection Function, Initial value psi, Piping Specification: Female Thread, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Bracket: Bracket B, Horizontal Mounting, Operation Manual: -

Rated Vacuum Range: -101 to 0 kPa, Output Specification: NPN Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: Unit Selection Function, Initial value psi, Piping Specification: Female Thread, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Bracket: Bracket B, Horizontal Mounting, Operation Manual: -

Rated Vacuum Range: -101 to 0 kPa, Output Specification: PNP Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: Unit Selection Function, Initial value psi, Piping Specification: Female Thread, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Bracket: Bracket B, Horizontal Mounting, Operation Manual: -

Rated Vacuum Range: -101 to 0 kPa, Output Specification: NPN Open Collector 2 Outputs + Analog Current Output, Unit Specification: Unit Selection Function, Initial value psi, Piping Specification: Female Thread, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Bracket: Bracket B, Horizontal Mounting, Operation Manual: -

Rated Vacuum Range: -100 to 100 kPa, Output Specification: PNP Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: Unit Selection Function, Initial value psi, Piping Specification: Female Thread, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Bracket: Bracket B, Horizontal Mounting, Operation Manual: -

Rated Vacuum Range: F (-100 to 100 kPa), Output Specification: V (PNP Open Collector 2 Outputs + Analog Current Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: M5 (Female Thread), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire), Bracket: A2 (Bracket B, Horizontal Mounting)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: R (NPN Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: M5 (Female Thread), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire), Bracket: A2 (Bracket B, Horizontal Mounting)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: M5 (Female Thread), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire), Bracket: A2 (Bracket B, Horizontal Mounting)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: S (NPN Open Collector 2 Outputs + Analog Current Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: M5 (Female Thread), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire), Bracket: A2 (Bracket B, Horizontal Mounting)

Rated Vacuum Range: F (-100 to 100 kPa), Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: M5 (Female Thread), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire), Bracket: A2 (Bracket B, Horizontal Mounting)

Rated Vacuum Range: F (-100 to 100 kPa), Output Specification: R (NPN Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: M5 (Female Thread), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire), Bracket: A2 (Bracket B, Horizontal Mounting)

MGQ

Bore size Standard stroke (mm) MM YY L X K W J V H GA GB TA TB U G T F S DA R C Z NN Q B ML P PW YL (mm) 12 16 20 25 18 50 13 5 16 40 58 5 7.5 5 36 29 56 8 22 6 48 29 12 14 39 7 10, 20, 30, 40, 50, 75, 100 M4 x 0.7 10 M4 x 0.7 M5 x 0.8 7 M4 x 0.7 11 22 54 15 7 18 42 64 2.5 8 5.5 38 33 62 8 25 8 52 33 13 16 43 8 10, 20, 30, 40, 50, 75, 100 M5 x 0.8 13 M5 x 0.8 M5 x 0.8 5 M5 x 0.8 11 20, 30

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I"P.1/4, .. . , ASP530F-N03-11 S 3/S' ~ 25.9 1 51Jtr 11 / 16" 28.6 ~6~5 ~ 61 ;a.: ~:B-.9 :2D.S 220 tU6' /36,3 . 34:7 .26~ 21.7 . . ~ A efertlllCe dll'l'lerlSlons 1 01 NPT Ihmads aller installalion 3 Speed Controller 5 . ASP w"" P;lo' Ch.,k V,'v. efles Construction Parts list .QesCr;plian ' ''' fi1t~lal , . . .

Rotary Actuated Air Gripper/3-Finger Type MHR3/MDHR3 Series Size: 10, 15

5 y !9 u t MDHR3 !4 !3 q !1 @0 @1 w o e i !5 MHZ MHF r !7 !6 t !8 !0 !2 i !9 y u MHL Component Parts MHR MHR Description Material Description Material Note No. Note No.

KPQ/KPG

5G3 (Stainless steel 316, Special FKM) Note 2) KM With release bushing, Guide color: Natural Model Note 1) KPG series: Compatible with products with threads only Note 2) M5 thread Plug KF H L T Y U R Male connector, Straight union Union elbow, Male elbow Male branch tee, Union tee Male run tee Male branch, Union "Y" Plug-in reducer Clean One-touch fittings Port size/Applicable tubing O.D.