Electro-Pneumatic Regulator IT1000/2000/4000

I Linearity =1cro or less I Hysteresis 0.5olo or less I Shock and vibration resistant (At fullspan) I Monitor signal output Repeatability i0.5% ElectroPneumatic Regulator ITI 02000.4000 I o r4'7 {0.01 -o.5 M5, PT,PF, NPT,I/8 .71 -14 {0.05-1 O} PT, PF, NPT 'v4,3t4,12 4-wi(e 0-5VDC, 0-10vDC Max. 12VDC Max. current Input signal svmbor Voltage InFlt lmpedan K <{-_-l -f], Cor|duit, DIN connector

Series VQ1000 10- Base Mounted 21- Plug-in Unit

Note 4) M5 fittings for M5 thread are attached without being incorporated.

Series VQ1000 10- Base Mounted 21- Plug-in Unit

Note 4) M5 fittings for M5 thread are attached without being incorporated.

AS

Dimensions Meter-out type Meter-in type F E D B A C J G K H L B Model A MIN. MAX. MIN. MAX.

HEC-OM-U015

D Level gauge K Circulating fluid OUT Set the Communication protocol.

FILTER REGULATOR

G46-10-01-L Rc G36-4-01-L G46-4-01-L 1 0.2MPa setting Round type pressure gauge (with colour zone) G36-10-N01-L G46-10-N01-L G36-4-N01-L NPT G46-4-N01-L 1 0.2MPa setting G36-10-01-L G46-10-01-L G G36-4-01-L G46-4-01-L 1 0.2MPa setting ARP20P-310AS-01 Rc Pressure gauge adaptor assembly Aluminium die ARP20P-310AS-N01 G cast ARP20P-310AS-F01 NPT ARP20P-320AS-01 Rc Plug assembly

LEKF-OMZ0035

E K F S 32 R S3 B 200 N S 2 A2 Motor type Size Motor mounting Symbol Type Output(W) Size Compatible driver Nil In-line 25 32 40 S2 100 25 LECSA-S1 R Right side parallel AC servo motor S3 200 32 LECSA-S3 Incremental L Left side parallel S4 400 40 LECSA2-S4 encoder Lead[mm] LECSB2-T5 Symbol LEKFS25 LEKFS32 LEKFS40 LECSC2-T5 T6 100 25 LECSN2-T5H 20 24 30 LECSS2-T5 A 12 16 20 LECSB2-T7 B 6 8

HEC-OM-R008

Keep the fluid level between H and L of the level indicator.

ZM

Electrical entry G H L LN LO Nil Grommet type, with 0.3 m lead wire (applicable to DC) Grommet type, with 0.6 m lead wire (applicable to DC) L plug connector, with 0.3 m lead wire L plug connector, without lead wire (applicable to DC) L plug connector, without connector (applicable to DC) Air operated/Without valve Pilot valve DC: 1 W (With indicator light: 1.05 W) DC: 0.45 W (With indicator

High Vacuum L Type Valve

H 4 S y m b o l Initial power/ Power 100 VAC 600/150 800/220 1200/350 200 VAC 2400/150 3200/220 4800/350 consumption (W) Heater assembly number XLA25-60S-2 XLA25-60S-2 XLA25-60S-2 No. of heater assemblies 2 pcs. 3 pcs. 4 pcs.

Exhaust Cleaner for Clean Rooms AMP Series

hole F Applicable screw M5 hexagon socket head cap screw M6 hexagon socket head cap screw M8 hexagon socket head cap screw Model AMP220 AMP320 AMP420 E OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90

Series MLGP

M5 types After tightening the fitting by hand, use a wrench to tighten the fitting an additional 1/6 to 1/4 turn. Tapered thread Tighten with the proper torque shown below. Use the seal tape on the plug.

Series VF1000/3000/5000 Pilot Operated 5 Port Solenoid Valve Single Unit Note) Only DIN and conduit terminal types are available with AC mode. Refer to the electrical entry for details.

M5 is available with Nil only.

M-E05-1-LQ1

Dimensions Type R Installation type 372 4 x M5 mounting hole 342 58 34 12 6 72 50 149 2 492 Type J Handy type LQ-GJ 36 76 117 30 49 127 37.5 43 63 Type K Handy type 45 LQ-GK 36 SET POS.

2/3 Port Valve for Various

Series VXA31/32 Dimensions P port Bracket Pilot port J (Spanner flat) Port size P Port size Rc With bracket K 6 7.5 Symbol Model A B C D E F G H J L 29 32 M 14.5 17 1 8 1 4 VXA31 VXA32 19 25 20 20 18 21 20 20 22.5 27.5 42.5 47.5 71 80 81 90 21 27 , , 1 4 3 8 17-3-104 The VX series will be revised shortly.

XMC/XYC Series

XYC Exterior dimensions D G C C B J Fd (K Flange) 45 H Fn (KF Flange) A E Unit:mm Model A B C D E Fn Fd G H J XYC-25 100.2 85 48 1 23.5 40 26 64 28 XYC-40 130 115 66 2 38 55 41 84 36 C D G C B J Fd (K Flange) 45 K H Fn (KF Flange) A E Unit:mm Model A B C D E Fn Fd G H J K XYC-50 178 121 80 31 53 75 52 104 29 10.5 XYC-63 209 148 100 39 61 87 95 70 126 36 9 XYC-80 268 177 117 45.5 80 114 110

XLA Series

H 4 S y m b o l Initial power/ Power 100 VAC 600/150 800/220 1200/350 200 VAC 2400/150 3200/220 4800/350 consumption (W) Heater assembly number XLA25-60S-2 XLA25-60S-2 XLA25-60S-2 No. of heater assemblies 2 pcs. 3 pcs. 4 pcs.

XLA- ∗ -F7NJ ∗ - ∗ Series

consumption cm3 Note 2 for 0.5MPa 19 46 200 360 660 1350 3000 5150 Port size M5 Rc 1/8 Rc 1/4 Weight kg 0.25 0.45 1.1 1.6 2.9 5.0 10.6 18.5 7 XL*-OML0013-B 3-2.

XLF Series

H 4 S y m b o l Initial power/ Power consumption (W) 100 VAC 600/150 800/220 1200/350 200 VAC 2400/150 3200/220 4800/350 Heater assembly number XLA25-60S-2 XLA25-60S-2 XLA25-60S-2 No. of heater assemblies 2 pcs. 3 pcs. 4 pcs.

Series 10-MGF Guide table ø40, ø63, ø100

L L 3. Do not allow hands or fingers near the cylinder during its operation. Your fingers may be caught between the body and the plate. If you need to come near the cylinder during its operation, install a cover on the cylinder. Maximum tightening torque Nm L(mm) Model Bolt M6 x 1 MGF40 10 7.5 M8 x 1.25 MGF63 25 9 M10 x 1.5 MGF100 51 9 Mounting from bottom side 4.