CL

For stopping accuracy, refer to Series CLJ (P. 9-2-12), Series CLM2 (P. 9-2-20), Series CLG1 (P . 9-2-30), and Series CL1 (P . 9-3-2) respectively. 7. In order to further improve stopping accuracy, the time from the stop signal to the operation of the lock should be shortened as much as possible.

NCQ8

Model 025 (1/4") 037 (3/8") 050 (1/2") 062 (5/8") 075 (3/4") 087 (7/8") 100 (1") 125 (1 1/4") 150 (1 1/2") 175 (1 3/4") 200 (2") 012 (1/8") 2.35 3.75 7.11 11.5 16.5 25.7 NCDQ8Z056-T NCDQ8Z075-T NCDQ8Z106-T NCDQ8Z150-T NCDQ8Z200-T NCDQ8Z250-T 4.84 5.44 13.9 21.8 26.9 36.3 4.55 6.40 13.2 20.7 25.3 34.6 4.27 5.98 12.4 19.6 23.7 33.0 3.99 5.56 11.7 18.5 22.1 31.4 3.06 4.79 8.96 14.2 20.5 29.8

CG1

Cushion N Rubber bumper Single acting/Spring return Single acting/Spring extend S T Cylinder stroke (mm) Bore size 20mm 25mm 32mm 40mm Refer to p.1.7-21 for Standard Stroke Table. 20 25 32 40 Applicable Auto Switches/Refer to p.5.3-2 for further information on auto switch.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

(Example) For M3: L2 = 6 mm Applicable shaft types: J, K, T 2. Q1 = M L2 = L2 + (3 x P) 3. L1 + (3 x P) L2 + (3 x P) 4. L2 = Q2 = M L1 = 5. Q2 = M 6.

Cylinder with Lock

Lock unit Rod 3 C O N T E N T S MWB MWBW MWB-UT Model Selection Double Acting, Single Rod Double Acting, Double Rod Lock Unit Made to Order Auto Switch Cylinder with Lock MWB Series Model Selection p. 5 MWB Series/Single Rod How to Order p. 7 Specifications p. 8 Working Principle p. 10 Construction p. 11 Dimensions p. 12 MWBW Series/Double Rod How to Order p. 17 Specifications p.

CNS

2 %5r CNA CNS Description Material Note Component Parts No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

Valve Single Unit

Clean appearance P N SS5X3-42 SX340(R) P N SS5X5-41 SX540 P N SS5X5-42 SX540(R) P N SS5X7-42 SX740(R) P N SS5X3-41 SX340 Single base/B mount Common SUP/Common EXH 4 to 12 stations 3 to 12 stations Base Side Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 Model Applicable valve Manifold type P (SUP)/R (EXH) Valve stations (1) In case of a flat cable style, each valve is wired on the print board of manifold

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

(Example) For M3: L2 = 6 mm Applicable shaft types: J, K, T 2. Q1 = M L2 = L2 + (3 x P) 3. L1 + (3 x P) L2 + (3 x P) 4. L2 = Q2 = M Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com L1 = 5. Q2 = M 6.

90

Note 16) Select C, L, L1, Y when the pressure sensor (P, T) is selected for t Pressure Sensor/Digital Pressure Switch for Vacuum Specifications. Since only grommet type is available for the pressure sensor, sensor without lead wire cannot be selected.

VEX1

Refer to p.5.3-1 for details. 5.1-36

Rubber seal 5 Port Solenoid Valve Series SYJ5000

For connector cable of M8 connector, refer to page 90. 25 Series SYJ5000 Construction 2 position single 2 position double (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) e w q t r q y t rw (A) 4 (B) 2 (A) 4 (B) 2 i 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) i u 3 position closed center/Exhaust center/Pressure center 3 position closed center (A) 4 (B) 2 q t rw 5 (R1) 3 (R2) 1

High Purity Fluoropolymer

Metric size Inch size 1/4" 3/8" 1/8" 1/2" 3/4" 6 8 10 12 19 3/16" 1/8" 1/4" 3/8" 1/2" 3/4" 4 None 2 3 Male 4 P.21 Connector LQ2H 5 2 3 Female 4 P.22 5 2 3 Male 4 P.23 Elbow LQ2L 5 2 3 Female 4 P.24 5 2 3 Male 4 P.25 Run tee LQ2R 5 2 3 Female 4 P.26 5 2 3 Male 4 P.27 Branch tee LQ2B 5 2 3 Female 4 P.28 5 2 3 Union elbow LQ2E 4 P.29 5 2 Union tee LQ2T 3 4 P.29 5 Features 4 Series LQ1 ,TL/TIL

CLS

9 w %7 $1 $2 $3 $6 $8 $9 $0 #3 #0 @5 #2 $5 $4 %0 %1 t y !2 !1 !3 CL u !4 !6 CL1 !7 !5 MLGC CNG e ^0 ^2 !

Vacuum Regulator

IRV10A P P P P IRV20A P P P P P P Symbol Output specifications Part no.

VQ5000

Note 1) Note 2) Note 3) 2-6-15 Base Mounted 16 Series VQ5000 Kit (Terminal block box kit) T 83 29.5 29.5 2-Rc 1/8 (Pilot EXH port) 12 21 47.5 36 PE R1 5 R2 3 P 1 SMC 6-Rc 3/4 (P), 5(R1), 3(R2) port Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 2-G3/4 Conduit port

Cylinder with Lock Series CNS

across flats KA BP (Rc, NPT, G) Unlocking port 2 x P (Rc, NPT, G) Cylinder port GL GR G G MM Q D EA E BF FY C V FT VA AL A K F BN N N M C B FX FZ H S + Stroke ZZ + Stroke With rod boot 75 40 l h + l ZZ1 + l + Stroke Long stroke Rc BQ plug with breathing hole BC element M GA T 4 x J Width across flats KA 2 x P (Rc, NPT, G) Cylinder port G G BP (Rc, NPT, G) Unlocking port GL GR GB 4 x FD FA

[Option] 3 Port Solenoid Valve Direct Operated Poppet Type VT317 Series Rubber Seal

Operation principles Spool valve w is pushed upward by the return spring e, port P is closed, and port A and port R are opened. When an electric current is applied to the molded coil r, the armature t is attracted to the core y, and through the push rod u, it pushes down the spool valve w. Then, port P and port A are connected.

30

5 P. 12 Metric Inch P. 6 P. 13 Metric R thread G thread P. 3 P. 16 P. 10 Inch Hexagon Socket Head Male Connector KQB2S Union Tee KQB2T Bulkhead Connector KQB2E Metric Inch P. 5 P. 12 Metric R thread G thread Metric Rc thread G thread P. 7 P. 18 P. 3 P. 16 P. 13 P. 10 Inch Inch Straight Union KQB2H Union Y KQB2U Extended Male Elbow KQB2W Metric Inch P. 3 P. 10 Metric Inch P. 5 P. 12 Metric

Hygienic Design Cylinder Series HY

(Rc, NPT, G) Width across flats KA 2 x 4 x J G G MM HA D E E T H1 MB Width across flats B1 K C MA FA AL B N A F N H S + Stroke FB ZZ + Stroke CJ5 CG5 (mm) Bore size A Stroke range AL B B1 C D Ee11 F FA FB G H H1 MA MB J K KA MM N P S T U V W HA ZZ HY 32 40 50 63 500 or less 22 24 32 32 18 20 27 27 50 58 70 84 17 19 24 24 32.5 38 46.5 56.5 12 16 20 20 30 35 40 45 16 18.5 23 23 5 4.5 5 5 4

Refrigerated Thermo-chiller

Regarding the water quality standards for cooling water, refer to Temperature Control Equipment Precautions. 102 Technical Data C O N T E N T S M Magnet pump P. 195 Mechanical seal pump P. 194 N Non-return valve P. 195 NRTL (National Recognized Test Laboratories) P. 199 O Offset function P. 197 ON/OFF temperature control P. 197 Overload relay P. 198 P Particle filter P. 195 Peltier element