(Value in the initial stage) Base mounted Body ported Model Flow characteristics Pilot port piping location 14/2(PA/B) 4/25/3(A/BEA/EB) Pilot port size Valve model Function Port size b Cv b Cv Single Double Closed center Exhaust center VZA2121-M5 VZA2221-M5 VZA2321-M5 VZA2421-M5 VZA2141-1-01 VZA2141-2-01 VZA2241-1-01 VZA2241-2-01 VZA2341-1-01 VZA2341-2-01 VZA2441-1-01 VZA2441-2-01 0.60 0.60
220-01-F 220-02 220-02-F 320-03 (02) 320-03-F (02) 420-04 420-04-F 121F-M3 131F-M3 121F-M5 (U10, 32) 131F-M5 (U10, 32) 221F-01 231F-01 2211F-01-06 221F-02 231F-02 321F-03 (02) 331F-03 (02) 421F-04 431F-04 1000F 2000F 2050F 3000F 4000F 1001F 2001F 2051F 3001F 4001F 230F 330F 430F 530F 630F 330F 430F 530F 630F Manifold regulator 4-, 5-port solenoid valve VQ Directional control valves 0 1000
Table of contents P 1 2. How to order P 2 3. Specifications P 2 4. External dimensions drawing P 3,4 5. How to mount a nozzle P 5,6 6. Safety Instructions P 710 -1- 2. How to Order IBG1 0 02 Adjuster Symbol Type 0 Without adjuster 1 With adjuster Supply port Nozzle (Refer to page 4 for details.)
Valve power PWR(V) supervision Enable Disable Enable WARNING: If safe PWR(V) monitoring is required for the application or if PWR(V) diagnostic is disabled on the device PWR(V) failures must be managed externally by other means.
U C S O H L 1 Series IRV Dimensions IRV1000 IRV2000 53 55 41 30 50 SMC 35 P K U C SMC S O H L P K U C S O H L 40 34 8 x 6.5 15.4 x 5.4 Approx. 106 Approx. 50.6 18 Approx. 79 Atmosphere Atmosphere 45.5 13 SET VAC SET G SET G 30 SET VAC 43 Pad side Vacuum pump side Pad side Vacuum pump side Approx. 43 35 2-Rc 1/8 Connection port 2-Rc 1/8 Vacuum gauge port 2-Rc 1/4 Connection port Approx. 60
PVQ10 /%IR # # P = 0.2 MPa P = 0.1 MPa IRV ! ! P = 0.08 MPa P = 0.15 MPa l1 l1 & & VEX1 P = 0.1 MPa P = 0.05 MPa 0 0 P = 0.05 MPa P = 0.02 MPa SRH ( ( SRP " " SRF % % % "% (% (% 0% % !% 0% -% &% "%% !% "(% #% "0% -% "!% .% "-% "%% (%% % % % "% (% (% 0% % !% 0% -% &% "%% !% "(% #% "0% -% "!
fitting for 1(P) port Silencer AN120-M5-S INA-25-46 AN101-01 Series One-touch fitting KJSO4-M5 VQZ100 VQZ200 VQZ300 KQH06-M5 KQH06-01S KQH08-02S IN-457-32 (for 6) Screw KQH08-01S The diameter of the above fitting and silencer is the maximum diameter to in the EXH port.
socket head universal male elbow Universal female elbow Female elbow Double universal male elbow Triple universal male elbow Branch universal male elbow Double branch universal male elbow Triple branch universal male elbow Extended male elbow Male branch tee Male run tee Branch Y Different diameter plug-in Y Bulkhead union Bulkhead connector Bulkhead union elbow Adaptor H S F L K V VS VF
Accessory Porting specifications T With terminal Symbol P 0 1 9 EA, EB A, B Side Bottom Other With stop valve S R Side Side Side Side Dissimilar pressure Individual With throttle valve 5 Common 6 Dissimilar pressure Type SC only.
P1 P1 within 0.5 s P2 Output Output stops if either of the inputs are applied or neither are applied.
(UL standard V-0) Applicable model: ASV310F, ASV410F, ASV510F Inch size Note) Elbow: M3, M5 only Port size AS 04 06 08 10 12 03 07 09 11 13 4 6 8 10 12 5/32" 1/4" 5/16" 3/8" 1/2" M3 M5 U10/32 01 02 03 04 M3 x 0.5 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 With One-touch fitting Thread type ASP Brass parts are all electroless nickel plated.
PF-OMK0003CN-E PFMV505 PFMV510 PFMV530 PFMV505F PFMV510F PFMV530F N2 (JIS B8392-1 1.1.21.6.2ISO8573-1 1.1.21.6.2) 2 2 2 () 00.5 01 03 -0.50.5 -11 -33 1 L/min L/min L/min L/min L/min L/min 2F.S. 3 2F.S.(1535 ) (25) 5F.S.(050 ) 2F.S.(0300 kPa) 5F.S.(-700 kPa) (0kPa 4) -70300 kPa -100400 kPa 500 kPa 5 15 V 5 ms 1 k DC1224 V10(p-p) 10() 16 mA IP40 050 () 050 -1060 () 3585R.H
PSE532 PSE533 01 MPa 0-101 kPa 0101 kPa -101101 kPa -0.10 MPa 10.10 kPa -10.10 kPa 1.5 MPa 500 kPa DC1224 V10%(p-p)10%() 15 mA () DC15 V() DC0.61 V() 1 k (25 ) 2%F.S.(),5%F.S.() 1%F.S. 1%F.S.
P . 15-11-3 15-9-2 2 Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS How to Order 2 2 0 01 06 S AS 1F Nil Option Body size 1 2 3 4 M3, M5 standard 1/8, 1/4 standard 3/8 standard 1/2 standard None With seal Hexagonal lock nut Electroless nickel plated S K N If more than one option is required, write option part numbers in the order of S, K, N.
For low speed control Port size 0 1 Port size Symbol M5 U10/32 01 02 Applicable series AS120M-M5 AS120M-U10/32 AS220M-01 AS220M-02 M5 x 0.8 10-32 UNF 1/8 1/4 Thread type Cylinder side R Tube side Rc Symbol Nil Metric thread (M5) Unified thread (10-32 UNF) NPT P . 15-11-3 N Needle Valve/Flow Characteristics AS120M AS220M-01 AS220M-02 0.8 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet
Error Indication 4 White (IN: 1 to 5 V) approx. 1 s This function is to display error location and content when a problem or an error occurs. Mounting Mount the optional bracket or panel mount adapter to the monitor. Measurement mode Check that the above preparation has been performed correctly, then part A shown should be pressed in by hand to make temporary connection.
Hook Switch ON Switch OFF Time [s] NOTE The direct current power supply to be used should be UL approved as follows. Circuit (of class 2) which is of maximum 30 Vrms (42.4 V peak), with UL 1310 class 2 power supply unit or UL 1585 class 2 transformer. The product is a approved product only if it has a mark on the body.