Table of Contents

Mitsubishi Electric Corporation Yaskawa Electric Corporation Nil W F R L T B None Axial Right Left Top Bottom 100/115VAC (50/60Hz) G 1 N.C. (B contact) 2 pcs.

Table of Contents

0 t t r i w e r i u w y e q Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com q VQ7-8-FG-DVQ7-8-FG-D-R !0 !0 t t r i w y e q r i w e q VQ7-8-D-R FHG FJG FIG VQ7-8-DFHG FJG FIG !0 !0 t t r i w y e q r i w e q VQ7-8-FPG-D!

Table of Contents

S) LVN TI/ TIL L 49.5 PA A B (mm) Dimensions W PAX (mm) Dimensions W Model LVA20 LVA30 LVA40 LVA50 LVA60 67 2-2 Depth 4 S PB Model LVA2 LVA3 LVA4 LVA5 88.5 11.5 B A SMC 110.5 24 A B SMC 147 29 34.5 K Dimensions (mm) A B Q R P C D E G H J K L M N Model Rc 1/8, 1/4 NPT 1/8, 1/4 LVA1 20 33 49.5 10 27.5 11 4 11 27.5 4.2 M5 x 0.8 Rc 1/4 NPT 1/4 LVA2 57.5 30 36 44 11 31.5 13 4 20 37 3.5 26.5

Battery-less

R)EB 25 15 Work load: W [kg] Work load: W [kg] 20 Lead 12: LEFS25(L/R)EA 10 15 Lead 12: LEFS25(L/R)EA 10 Lead 20: LEFS25(L/R)EH 5 Lead 20: LEFS25(L/R)EH 5 0 0 0 100 200 300 400 500 600 0 200 400 600 800 1000 1200 Speed: V [mm/s] Speed: V [mm/s] LEFS32(L/R)/Ball Screw Drive Horizontal Vertical 30 50 Lead 8: LEFS32(L/R)EB Lead 8: LEFS32(L/R)EB 40 Work load: W [kg] Work load: W [kg] 20 30 Lead

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

Solenoid Specifications DIN terminal (D), (Y) M8 connector (W) Grommet (G), (H) L plug connector (L) M plug connector (M) G, H, L, M, W 24, 12, 6, 5, 3 D, Y 24, 12 Electrical entry Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors Coil rated voltage (V) Allowable voltage fluctuation DC AC Hz 50 60 100, 110, 200, 220 10% of rated

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(For F, L, S, T kit) VVQ4000 2A 1 Thread type Electrical entry VVQ4000 3A 1 Thread type Electrical entry Nil Rc N NPT T NPTF F G Nil Rc N NPT T NPTF F G L F , L, S, T kit F Note 1) F kit (Connector location on U side) C C kit (Plug lead type) L F, L, S, T kit F Note 1) F kit (Connector location on D side) C C kit (Plug lead type) SV SYJ Option Option Nil Standard W Note 2) IP65 enclosure

Smooth Cylinder/Low Speed Cylinder

0.3 135 119 147 T 0.5 101 89 111 0.7 84 74 91 REA Foot: L Rod flange: Head flange: 0.3 301 267 330 F G L, F 0.5 231 207 253 REB W W W 0.7 193 172 212 REC 0.3 144 126 156 CY CY G 0.5 109 94 118 0.7 90 78 97 CX Foot: L Rod flange: Head flange: 0.3 433 386 476 F G MQ L, F 0.5 334 297 367 W W W RHC 0.7 281 250 309 0.3 210 185 229 RZQ G 0.5 160 141 175 0.7 134 117 129 D-X 1231 Series CS2Y Construction

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

Table Displacement (Reference Value) L W 0.02 LEJ40 (L = 52.5 mm) LEJ63 (L = 64.5 mm) Displacement [mm] 0.01 0 0 100 200 300 400 500 Load W [N] Note) This displacement is measured when a 15 mm aluminum plate is mounted and fixed on the table.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

voltage suppressor Standard (2 W) Vacuum (2 W) For large flow (3.2 W) For large flow, vacuum (3.2 W) Nil V U W Note) LO: Plug lead type L plug connector, Without lead wire With light/surge voltage suppressor Note) Note) Energy saving type M: Plug lead type M plug connector, With lead wire With light/ surge voltage suppressor Rated voltage 24 VDC 12 VDC 5 6 MO: Plug lead type M plug connector

smcmaintenancepartslist

For 80 and 100, remove the seal retainer and lock piston seal. q i u r y w y L o t e !

Aluminum High Vacuum Angle Valve

Symbol Nil A B C D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// Solid state auto switch Reed auto switch (Not applicable to flange size 16) Without auto switch (with built-in magnet) Standard lead wire length is 0.5 m.

&snac

l e s p a n n e r l l f i t i s l n s t a l l e d 0 n i n l e t s i d e ' p e r f 0 r r n a n c e g o e s d o w n d u e t 0 p r e s s u r e d o w n . l t D 0 n o t C 0 v e r o u t l e t p 0 r t i o n o f p u r s i n s a i r w i t h o t h e r s . ( R e f e r t 0 P ' 9 ' M O d U I E C o v e r t l f t h i s P o r t i o n i s c o v e r e d ' l t l o w e r s P e r f o r m a n c e . l o K e e P

Air Cylinder

X Y Y X W M LZ LX C 2 x LC (Knock pin position) JCM K 4 x LD LS + Stroke ZZ + Stroke CM2 CM3 With air cushion 2 x P (Rc, NPT, G) Cushion valve, Width across flats WH GA WA GB WB W 10 CG1 CG1 CG3 JMB MB MB1 With rod boot 8 8 h + l 8 h + l CA2 CS1 IJ IJ e e CS2 JH f f l l JW ZZ + l + Stroke Z + l ZZ + l + Stroke Z + l 80, 100 (mm) Bore size Stroke range Rc, NPT port G port A AL B B1 C D H H1

V

V A C U U M S W I T C H S E R I E S ZSE1 ZSE1--55 ZSE1 L Switch Type 55L E L E C T R I C A L E N T R Y Grommet (24) L Grommet (120) C w/Plug Connector (24) CL w/Plug Connector (120) CN Plug Type (w/o Lead) C O N N E C T I O N 00 NZM Ejector Mounting 01 1 8 PT T1 1/8 NPTF ACCESSORIES V A C U U M S W I T C H S E R I E S ZS S W I T C H T Y P E Interface plate for ZM Ejector P31806-01 (blank

MY1

The spacing (l) of the support must be no more than the values shown in the graph on the right. W (kg) 500 l 400 (450) W l 300 Weight (m) Caution W 1. If the cylinder mounting surfaces are not measured accurately, using a side support may cause poor operation. Therefore, be sure to level the cylinder tube when mounting.

4-channel Flow Monitor ( compatible)

Y U8 0x02 (2) 3: 1Sor (OUT1 turns red at ON) 4: 2SoG (OUT2 turns green at ON) 5: 2Sor (OUT2 turns red at ON) Set the connection range of PF2A5. 0: 10 L 1: 50 L 2: 100 L 3: 200 L 4: 500 L rAnG (PF2A5, Selection of connection range) Y U8 0x00 1 R/W (0) Set the connection range of PF2W5. 0: 4 L 1: 16 L 2: 40 L 3: 100 L 4: 250 L rAnG (PF2W5, Selection of connection range) Y U8 0x00 2 R/W (0)

MY1

M F x L M F x L F F L L L 90 Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1MW/CW How to Order MY1 M W 25 300 A93 Number of auto switches Guide type 2 pcs. 1 pc.

ISO Cylinder

RD MM MM 30 DA MM 30 DB DB T A H A T C B A H A L K H W H Symbol: A27 Symbol: A26 Symbol: A25 Symbol: A24 DA 30 MM DA 30 MM MM MM AL H LB K A L A H AL H AL L K H Symbol: A30 Symbol: A29 Symbol: A28 DA 30 30 MM 30 MM L W W A L H A T AL A H Auto Switch Made to Order T MM H 118 C85/C75 Series Made to Order Please contact SMC for detailed dimensions, specifications, and lead times.

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Table Displacement (Reference Value) L W 0.02 LEJS40 (L = 52.5 mm) LEJS63 (L = 64.5 mm) Displacement [mm] 0.01 0 0 100 200 300 400 500 Load W [N] Note) This displacement is measured when a 15 mm aluminum plate is mounted and fixed on the table.

Compact 5-Port Solenoid Valve

0.1 W 1 Made to Order 0.4 W 2 The JSY1000 series is only available as the power-saving type.