60

SUP. 3 1 2 3 1 2 3 1 2 E Padlock mounting position D C SUP J 2 2 x K A T IN OUT AA 3 L 2 x P1 (Port size) B V BB U Built-in silencer (Option) M (Width across flats) 3 N P2 (Port size) Q EXH Y Bracket (Option) R S X W Dimensions (mm) Standard specifications Model P1 P2 A B C D E F G H I J K L M 1/8, 1/4 1/4, 3/8 1/8 1/4 3/8 1/2 1/2 66.4 80.3 104.9 110.4 134.3 22.3 29.4 38.5 42 53 40 53 70

Electro-Pneumatic Proportional Valve Series VEF/VEP

99.7 VEX 21.5 SRH 28 SRP 25 13 50 SRF 122 3 x 1/4, 3/8 VCHR ITV Flow type: VEF2131 Flow type: VEF2141, VEF3141 Pressure type: VEP3141 IC 3 x 3/8, 1/2, 3/4 45 45 2 x 1/4, 3/8, 1/2 ITVX PVQ VEF VEP VEF VEP 129 Port 1 (P) VER 154.5 Port 1 (P) Port 2(A) Port 2 (A) Port 3 (R) P 95 120.5 Plug A VEA 65 P 36 35 51 35 VY1 9 53 12 R 64 64 VBA VBAT G1/2 Applicable cable O.D. 6 to 12 82 81 AP100 2 port

VER2000/4000

2 !3 !4 !5 !6 q w e r t y u i Block packing !

Rodless Cylinder for Vacuum Series CYV ø15, ø32

4 #6 !5 !1 !9 #4 #8 E @7 o !0 i @8 !8 !6 $2 #2 !3 #3 !7 !2 @5 @4 r @3 e @6 @1 @2 #1 t y $1 u w q E' Section E-E' CYV32 t !9 $0 @1 @2 y @4 @3 u @6 #9 @5 Description Material Note Parts list Description Material Note No. No.

AMR3000 to 6000

Applicable model 02 03 04 06 10 1/4 3/8 1/2 3/4 1 8 3 Pressure gauge 3 4 5 6 1 AMR300-02/03 AMR400-02 to 04 AMR500-04 to 06 AMR600-10 3 4 5 6 1 2 Nil E2 E3 E4 E6 E10 None None With pressure switch S Nil 4 3 1/4 3/8 1/2 3/4 1 Port size Adapter assembly Thread type Symbol Port size Nil N F Rc NPT G Thread type 02 03 04 06 10 1/4 3/8 1/2 3/4 1 The port size of adapter assembly is same as the

3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported 1

(at 0.5 MPa, without surge voltage suppressor) Note 2) Min. operating frequency is once in 30 days. (Based on JIS B 8375.) Note 3) Note 1) and Note 2) are with controlled clean air. How to Order VS31 3 02 1 5 Thread type Caution Nil Rc N NPT Standard 3 Body size For Safety Instructions and Solenoid Valve Precautions, refer to pages 4-18-2 to 4-18-6.

Centering Unit

PE Q S T U W MACM2 X114 68 74 76 10 27.4 12 34 X115 52 6 62 X116 50 4 30 46 60 64 22.5 MACM4 X114 86 90 90 72 78 32.5 50 19 32 20 33 X115 56 6 78 40 X116 54 4 40 6.6 12 19 17 18 M5 7 MACM6 X114 118 125 125 97 113 33.8 53 28 33.3 30 43 X115 59 6 98 60 X116 57 4 60 MACM10 X114 185 197 198 11 152 182 18 53.8 77 31 24 13 0 53.3 50 70 X115 83 6 108 X116 81 4 5 Centering Unit MACM Series

Peltier-type Chiller Thermo-con/ Compact Type

Water bath Q = T x V x x C h x 60 x 1000 10 x 2 x 1 x 103 x 4.2 x 103 20C V = 15 x 60 x 1000 After 15 min, = 93.3 W cool 30C down to 20C.

Desktop Duster Box

2 !1 !0 !5 !6 !4 !7 !8 Component Parts No. Description Note 1 Ionizer ZVB20: 1 unit, ZVB40: 2 units, With diffusion nozzle 2 Additional air blow nozzle ZVB20: 2 pcs., ZVB40: 4 pcs., Nozzle diameter: 1.0 No.

Low Profile

SX90/090 Series CAT.ES70-59A Low Profile 2/3-Port Solenoid Valve SX90/090 Series How to Order SX9 1 5 G 2-port valve q SX090 5 G 3-port valve w e r q Type of actuation w Power-saving circuit e Rated voltage r Electrical entry 1 Normally closed 2 Universal Nil Without power-saving circuit Y1 With power-saving circuit 5 24 VDC 6 12 VDC G Grommet (Lead wire length: 300 mm) Specifications Model

•

-~/ _ H _ O _ '"_ ' _ ' 2 -.< ",, ' +"."g',,'-___ : ','(); Pin:t12"",: g= WL idth across fl~tsl 4.7 ./ ClevIS wld!h CK 1A :1 6.s=+P 40 80+ Stroke ZZ+ StJoke 2 CK1B : 195!

AMR3000 to 6000

3/4 1 Applicable model AMR3l00-02 to 03 AMR4l00-02 to 04 AMR5l00-04 to 06 AMR6l00-10 R 3 4 5 6 Body size 3 4 5 6 Adapter ass'y port size (2 pcs.)

INFORMATION Step Motor Controller 5 types of communication protocols New New

Terminal name Details 1 L+ +24 V 2 NC N/A 3 L 0 V 4 C/Q IO-Link signal * For , enter a number from the No. line in the table on page 6. Refer to the dimension drawings on page 6 for the mounting dimensions.

Micro Mist Separator with Prefilter AMH Model Model AMH250 AMH350 AMH450 AMH550 AMH650 AMH850 AMH150 Series AMH can separate and (1) remove aerosol state oil mist in 500 1000 2000 3500 6000 12000 200 Rated flow (l/min(ANR)) compressed air and remove Po

110 130 180 Q 26 28 28 34 34 50 50 60 76 R 4.5 5 5 5 5 9 9 10 12 S 1.6 2 2 2.3 2.3 3.2 3.2 4.5 4.5 T U 37 37 37 37 37 37 37 37 37 1/8, 1/4, 3/8 1/4, 3/8 1/2 3/8, 1/2 3/4 1/2, 3/4 1 3/4, 1 1, 11/2 159 172 178 204 210 225 232 259 311 13 13 16 16 19 19 22 22 32 100 113 119 145 151 166 173 200 253 63 76 76 90 90 106 106 122 160 20 20 20 20 20 20 20 20 20 63 76 76 90 90 106 106 122 160 24 27 27

ITVH

Note 2) 2-wire type 4 to 20 mA is not available. Power supply voltage 24 VDC is required. Note 3) Select either analog output or switch output. Further, when switch output is selected, select either NPN output or PNP output. When measuring analog output of 1 to 5 VDC with a load impedance less than 100 k, the analog output may not obtain the output accuracy of 6% F.S. or less.

Water Separator Series AMG Please refer to page 14-20-62 for specific product precautions. 1

M Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G S 6.0 , 2 H 463.5 I 180 J 30 K 15 L 24 N 120 O 184 P 220 Q 110 R 18 460.5 AMG850 1 2 13 42 348 220 57.5 220 10 14-20-7

Series DXT474

When using sealing tape, leave 1.5~2 threads exposed on the end of pipe/fitting.

ISO Cylinder

45 + 15 (n 2) (n = 2, 4, 6) (n 2) 2 15 + 45 Band mounting Band mounting (n 2) 2 15 + 40 D-C7l D-C80 10 15 50 50 + 45 (n 2) (n = 2, 4, 6) D-C7l D-C80 10 15 50 50 + 20 (n 2) (n = 2, 4, 6) (n = 2, 4, 6) (n = 2, 4, 6) D-H7l D-H7lW D-H7BA D-H7NF D-H7l D-H7lW D-H7BA D-H7NF (n 2) 2 15 + 45 10 15 60 60 + 45 (n 2) (n = 2, 4, 6) 10 15 60 60 + 22.5 (n 2) (n = 2, 4, 6) (n=2, 4, 6) (n 2) 2 15

LEC-OM07605CN

PA09]) 6 2 6 (2) Yes 2 1 () 2 No Yes No Yes No No 1 Yes Yes OK? No 2 Yes OK? No No OK? 2 2 Yes Yes OK?

LEC-OM02904

LECSS63 6. 1. 2. 3. 4. 5. 17 CPU 19 3 ROM (Flash-ROM) 1A 8 5 8 (2) 20 2 1. CN2 47 () 2. 3. 1. 2. 8 4. 5. 1. 2. 3. 4. 5. 21 3 () 8 6 8 (2) 24 (UV W) 1. (TE1) 2. 3. (UVW) 4. (UVW) 5. 1. 2. (UVW) 6. 1. 2. 25 1. 23 2. 3. 4. 5. 6. 23 8 7 8 (2) 30 1. No.PA02 1 2. 1. 2.