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N o Key operat i on LED D i spl ay U nl ock keys ( ref er t o P11) ( current ) pressure di spl ay Press key f or 3 seconds or m ore. i s di spl ayed f or approx. 2 seconds and ( current ) pressure i s di spl ayed af t erw ards Press key Current Vol t age i nput t ype Preset i nput t ype i s di spl ayed i s di spl ayed Press key Press key i s di spl ayed i s di spl ayed r e f e r

N o Key operat i on LED D i spl ay U nl ock keys ( ref er t o P11) ( current ) pressure di spl ay Press key f or 3 seconds or m ore. i s di spl ayed f or approx. 2 seconds and ( current ) pressure i s di spl ayed af t erw ards Press key Current Vol t age i nput t ype Preset i nput t ype i s di spl ayed i s di spl ayed Press key Press key i s di spl ayed i s di spl ayed r e f e r

N o Key operat i on LED D i spl ay U nl ock keys ( ref er t o P11) ( current ) pressure di spl ay Press key f or 3 seconds or m ore. i s di spl ayed f or approx. 2 seconds and ( current ) pressure i s di spl ayed af t erw ards Press key Current Vol t age i nput t ype Preset i nput t ype i s di spl ayed i s di spl ayed Press key Press key i s di spl ayed i s di spl ayed r e f e r

7 w e r !8 Lead wire color Dot marking Terminal no. @1 @6 @5 Black None q !9 Brown None w y t @0 u Red None e Orange None r Yellow None t Pink None y Circular Connector Cable Assembly Terminal No. Blue None u Purple White i Gray Black o Lead wire color Dot marking Terminal no. White Black !0 Black None q White Red !1 Brown None w Yellow Red !2 Red None e Orange Red !

Key Position and Rotation Range Single vane type Double vane type 90 180 270 90 n o r a a ti r n n g n a o e g n o t ti r a ti o n a a 2 e g t r t o 7 e o 1 r y 0 r 9 8 y e 0 y +4 0 e 0 Key K e K +4 0 +4 0 K +4 0 Key Key 0 (45) 9 Key e Standard Optional g n a r n o ti a t o r (90) y e K (45) (45) A port B port A port A port A port B port B port B port 100 190 280 100 a r n n n r o a g

A D P A A M N R SMC R E O P 17 P T 21.5 27.5 A I R R G Y 7 R A I 8 17.5 32 8 42 Side A Side B Scale: 40% 12 Rotary Gripper Series MRHQ Construction Description Material Note Parts list No.

Description Material Body q Zinc alloy die-casted Pilot valve assembly w Adjusting piston e Aluminum alloy Spring r Stainless steel Valve guide t Stainless steel Valve y NBR Retainer u Aluminum alloy Rod i NBR 14-10-14 15 E-P HYREG Series VY1 VY1100 1, VY1200 1, VY1300 1, VY1400 1 (Pilot valve: VY1D00-00) VY1500 1, VY1700 1, VY1900 1 (Pilot valve: VY1B00-00) Working principle The pair

Body Body e Acrylic Piston Indicator window e Polyacetal Plug Piston A r Polyacetal Spring r Polyethelene Spring t Stainless steel NBR Packing t Stainless steel NBR O ring Dimensions Dimensions Panel mounted hole 3.5-64

I W h s i r l Black o-Y69A.Y6gB.O-Y7PV D-Y598.Y698/2 wire system l " ' . . r 6 7 7.5 I 8.5 1--&9p9!9q E!

Nvv3zs-4lc-)-aF) 2-o1r irw3zs4rR-o2-o Applicau Yalng .NW3Z5-41-O2-e) NVzsl4-OOO NVZ5l4M-OOO .NW3Z5-4rR-O2-O NVz5:4R-OOO r{w3zs-41-o2-o ; -*o** E]2 stations :r{29.1 20 stations BLnk p|.le.3ty DXT201-15-1A lfthere are more lhan I siations, supply air and exhaust lrom bolh sides ol manitold, @ W,:f;::W#ffinaidvqhre' Blank PlateAss'g DXT20-1s-1A Apelic*b b..e . NW3Z'2GOI . NWSZ+2l-e)l .

U N L H L H S R U N L H L H S R U N L H L H S R U N L H L H k Pa MO D E SET HYS k Pa MO D E SET HYS k Pa MO D E SET HYS k Pa MO D E SET HYS Misc. (72.4) Attached washer (63.6) (60.1) Attached washer SMC SMC SMC SMC 10.2 V V V V V 28.8 8.5 21 10 9 8.5 9 81 Vacuum port (V port) Note 4) 107 (M5 x 0.8) Dimensions Note 1) The above dimensions are for ZZQ1-BSB.

2 E 1 0 E E _ E 5 E E c r l 0 1 2 3 4 5 6 7 I I 101112131415 Distance from cylinder axis: Lo (cm) Example The required load, Fo =100(N) and the moment arm, L0 = Bcm refering to Data 1, draw a vertical line from the 8cm value of the horizontal axis.

VQ1000-FPG-C4M5-D: 6 sets Double check block 757 S0700 Series Construction Body Ported Construction 2(B) (A)4 S0716 2-Position Single r u e w q 3(R2) (R1)5 1 (P) t y i 2-Position Double S0726 2(B) (A)4 r u e w q 3(R2) (R1)5 1 (P) t y i 3-Position Closed Center S0736 r u e w q 2(B) (A)4 (R1)5 1 (P) 3(R2) t y i 4-Position Dual 3-Port Valve S07A6 r u e w q 2(B) 4(A) 5(R1) 3(R2) 1(P) N.C. + N.C

VQ VQ4 Note) R block valve is mounted in the blocking position when ordering an individual EXH spacer incorporated with a manifold. When separately ordering an individual EXH spacer, separately order a R block valve. VQZ P R PR 1 2 0 1 P R PR Block valve VQD VQ 4 --Valve No.

Nh9 RW L LA0.1 LB PD0.05 PB0.02 E PC0.05 PA0.02 GB GA C 2 x 2 x P H7 depth D 2 x 2 x MM depth J 2 x 2 x NPT 1/4 G Rc Hexagon socket head plug RD B [mm] Bore size B C D E GA GB J L LA LB MM N P Rubber cover Metal cover 50 92 48 12 13.7 95 166 12 376.6 155.5 78.4 78.4 M8 x 1.25 19 8 63 110 54 15 16.6 99 171.5 12 391.6 161 78 78.4 M10 x 1.5 22 10 Bore size PA PB PC PD R RA RB RC RD RR W XB XC

R LR DD E R F M FL Dimensions Part No.

2 E 1 0 E E _ E 5 E E c r l 0 1 2 3 4 5 6 7 I I 101112131415 Distance from cylinder axis: Lo (cm) Example The required load, Fo =100(N) and the moment arm, L0 = Bcm refering to Data 1, draw a vertical line from the 8cm value of the horizontal axis.

VZ (A) 2 (A) 2 VS 3 (R) 1 (P) 3 (R) 1 (P) r e w q r e w q N.O. N.O. (A) 2 (A) 2 3 (R) 1 (P) 3 (R) 1 (P) Component Parts Material Description Notes No.

N.O. 1 (P) 3 (R) 1 (P) 3 (R) q e t r q e t r SY SYJ VK A A VZ u u VT VT P R P R VP w w VG y y VP Component Parts Replacement Parts VQ Description Body Piston plate End cover Piston Spool valve ass'y Description Sub-plate Pilot valve Note White White White Note Zinc die cast Parts No.