Guide Cylinder Series MGG

M N C D 4-O T Q 2-P E B S K L U W AA A I AP R X AB Y + Stroke J V Z + Stroke AC AD 8-AF AE For standard stroke (mm) Bore size (mm) Stroke range (mm) AC E D AF G AE AD AB AA N M F L K B J AP C H I A 20 25 32 40 50 75, 100, 125, 150, 200 M5 x 0.8 depth 10 16.5 92 60 9.5 depth 6 30 75 11 12 45 25 5.5 80 60 55 108 M8 x 1.25 depth 14 25 24 30 99 M6 x 1 depth 12 16.5 113 65 11 depth 8 30 85 13

High Vacuum L Type Valve

Dimensions Unit: mm Model A B C D E Fn Fd G H J K XLD-25 50 123 48 1 12 40 26 41 16 7.5 XLD-40 65 170 66 2 11 55 41 63 20 15 XLD-50 70 183 79 2 11 75 52 68 20 17.5 XLD-63 88 217 100 3 11 87 95 70 72 20 20 XLD-80 90 256 117 3 11 114 110 83 98 20 26.5 XLD-100 108 321 154 3 11 134 130 102 133 20 38 XLD-160 138 335 200 3 11 190 180 153 114 30 40 11 XL*-OMI0011-E 7.

Peltier-type Chiller Thermo-con/ Compact Type

Circulating fluid : Tap water Density : 1 x 103 kg/m3 Specific heat C : 4.2 x 103 J/(kgK) Refer to the information shown below for the typical physical property values by circulating fluid. Water bath Q = T x V x x C h x 60 x 1000 10 x 2 x 1 x 103 x 4.2 x 103 20C V = 15 x 60 x 1000 After 15 min, = 93.3 W cool 30C down to 20C.

VM

Only when output 1 and 2 are in the ON state, and C turns ON, will output 3 turn ON. If either A or B is turned OFF , output 3 will not be turned ON, even if C is turned ON.

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I Wear ring Plastic I C 1 A040-07-305 W Cushion packing A NSR f1j Cushion packing B NBR MC-20 CM-050-16-128 CM-063-16-129 C 1 AQ50-07 -306 C 1 A063-07-307 MC-25 MC-20 I MC-25 @) Gasket for cushion valve NSR CK40-1697 @I Gasket for speed controller NBR iii) Detecting rod packing NSR CK40-1697 DYR5K 14(1.

Digital Flow Switch (Integrated display type)

Bit offset Item Notes 0 OUT1 output 0: OFF 1: ON 1 OUT2 output 0: OFF 1: ON 8 Measurement diagnostics 0: Within range 1: Out of range (HHH/LLL) 14 Fixed output 0: Normal output 1: Fixed output 15 Error Diagnosis 0: Error not generated 1: Error generated 16 to 31 Flow measurement value With sign: 16 bit Bit offset 31 30 29 28 27 26 25 24 23 22 21 20 19 18 17 16 Item Flow measurement value

High Power Cylinder:

A 1-B 1-C 2-A 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 2-B CE2 6 1/8, 1/4 1.5 500 0 1,000 2,000 3,000 ML2B Max. speed Vmax (mm/s) 6 1/4, 3/8 3 1000 Graph 3:25 ML1C 10 1/4, 3/8 20 (1/4) 4.5 1500 20 10 1/4, 3/8 REA Composed effective area So (mm2) Composed effective

Compact Hydraulic Cylinder Double Acting/Single Rod Series CH
QB ø 20, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100

(mm) U H I J K L O Z M N P S A C D E F B Bore size (mm) 32 31.5 M10 x 1.5 60 4.5 14 8.5 9 depth 7 14 34 5.5 Rc 1/8 58.5 73.5 12 16 45 20 65 40 35 M10 x 1.5 69 5 14 8.5 9 depth 7 14 40 5.5 Rc 1/8 66 75.5 12 16 52 22 67 50 41 M12 x 1.75 86 7 18 11 11 depth 8 19 50 6.6 Rc 1/4 80 87 15 20 64 25 76 63 47.5 M12 x 1.75 103 7 18 11 14 depth 10.5 19 60 9 Rc 1/4 93 91 15 20 77 27 80 80 57.5 M16 x 2

Compact Electric Actuator Series LG1

.) 10mm A Feed screw type 20mm C (Refer to Table 1 below for applications.)

VSA4

dm3/(sbar)] 6.4 8.7 9.2 6.4 8.7 9.2 6.2 8.1 10 6.6 8.9 11 Port size Rc 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 Note) Weight (kg) A/B EA/EB Pilot port size SA C[dm3/(sbar)] 6.3 8.2 9.6 6.3 8.2 9.6 5.8 7.5 9.5 5.5 6.7 9.4 b 0.16 0.28 0.14 0.16 0.28 0.14 0.23 0.27 0.18 0.24 0.25 0.15 b 0.13 0.13 0.17 0.13 0.13 0.17 0.15 0.11 0.14 0.15 0.14 0.14 Cv 1.4 2.1 2.2 1.4 2.1 2.2 1.4 2.0 2.4

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

8 1 6.2 x 3 x 1.6 O-ring NBR C-14 10.5 x 8.5 x 1 C-5 @3 4 8-14-16 16 Mechanically Jointed Rodless Cylinder Series MY3A/3B Construction MY3B w e t u i @1 @6 @9 !3 !5 !6 !7 !8 MX MTS y q MY !0 @8 @7 !4 !9 r CY !

Fieldbus system (CC-Link compliant)

Terminal No. 2 4 6 8 10 12 14 16 18 20 Output No. 1 3 5 7 9 11 13 15 24 V Type +COM EX510-S102 Terminal No. 1 3 5 7 9 11 13 15 17 19 Output No. 0 2 4 6 8 10 12 14 0 V Type + + + + + + + + -COM Terminal No. 2 4 6 8 10 12 14 16 18 20 Output No. 1 3 5 7 9 11 13 15 0 V Type + + + + + + + + -COM : Only a flat cable type manifold (P kit) can be connected to EX510-S 02 .

EtherNet/IP TM Compatible Fieldbus System

Position code (Order #1 #4, Port A D) Message code #4 #3 #2 #1 D C B A 0 0 1 0 0 0 0 1 0 0 0 1 Message code 0x2 Product No.1 A port Ex.: Short-circuit or over current error with the first slave of COM A port. Message code and corrective action for diagnostic error are shown below.

I/O Configurator (NFC version)

When the wireless slave is not displayed in the Free slaves area, check that the communication status is Active. -106No.EX-OMV0017-B STEP 11 Select the wireless slave to be registered (1) Select the wireless slave to be registered (1) (PID:07914009) (2) Select the wireless channel (001) of the wireless slave(1) to be registered. (3) Click the "". (2) (1) (3) Slave unit registration window

I/O Configurator (NFC version)

When the wireless slave is not displayed in the Free slaves area, check that the communication status is Active. -106No.EX-OMV0017-A STEP 11 Select the wireless slave to be registered (1) Select the wireless slave to be registered (1) (PID:07914009) (2) Select the wireless channel (001) of the wireless slave(1) to be registered. (3) Click the "". (2) (1) (3) Slave unit registration window

Series AP3500

Select compatible materials of construction for the gas Vacuum to 125 psig (0.9 MPa) 1000 psig (6.9 MPa) 8000 psig (55.2 MPa) 14 to 212F (10 to 100 -C) (No freezing) 0.27 2 x 10-11 Pam3/sec 2 x 10-10 Pam3/sec 1) 1 x 10-7 Pam3/sec 1) Ra max 15 in. (0.4 m) Option: 10 in. (0.25 m), 7 in. (0.18 m), 5 in. (0.13 m) Face seal, Tube weld 70 to 110 psig (0.48 to 0.76 MPa) NPT 1/8 inch Top Bottom mount

Escapements Series MIW/MIS

D-F9WV D-F8 Model A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E 18.5 31 6.5 20.5 41 8.5 20.5 33 4.5 17 20.5 31 4.5 15 20.5 41 4.5 15 20.5 51 4.5 35 22.5 43 6.5 27 22.5 33 6.5 17 22.5 43 6.5 27 22.5 53 6.5 37 MIW12-12D MIW20-20D 6 4 4 2 18.5 29 6.5 20.5 31 8.5 MIS12-10D MIS20-10D 4 2 6 4 2.5 4 18.5 39 6.5 20.5 41 8.5 MIS12-20D MIS20-20D 6 4

Series KV2 Fittings

(g) Bag/Box Quantity MB D2 D3 D4 L1 L2 L3 5/32 5/32 5/32 1/4** 1/4** 1/4 1/4 1/4 3/8** 3/8** 3/8 3/8 3/8 3/8 1/2 1/2 1/2 5/8 5/8 5/32 5/32 5/32 3/8 3/8 1/4 1/4 1/4 1/2 1/2 3/8 3/8 3/8 3/8 1/2 1/2 1/2 5/8 5/8 1/16-27 1/8-27 1/4-18 1/4-18 3/8-18 1/8-27 1/4-18 3/8-18 3/8-14 1/2-14 1/8-27 1/4-18 3/8-18 1/2-14 1/4-18 3/8-18 1/2-14 3/8-18 1/2-14 KV2T03-33S KV2T03-34S KV2T03-35S KV2T07-11-35S KV2T07

MHR2/MDHR2, MHR3/MDHR3 Rotary Actuated Air Gripper (2 Finger) (3 Finger)

port M3 X 0.5 M3 X 0.5 Finger closing port C MHZ2 3-3 depth 6 +0.02 0 (A, B, C common view) 44 MHZJ2 29 9h9 0 -0.036 6-M3 X 0.5 thread depth 6 (A, B, C common view) MHQ 15 4.7 9.7 MHL2 1 2 5.8 3 4.7 MHR 2-3 (36.5) 33.5 MHK 19.5 2-4.2 MHS 2 10 3e8 -0.014 -0.028 Auto switch mounting groove Open: 11 Closed: 8 MHC2 MHT2 8 0 -0.05 MHY2 MHW2 12 4 4 Dimensional differences between MHR and MDHR MRHQ

MHF2

1 Note) There is no protrusion for sections of the table with no values entered. 6.5 6.5 6.5 6.5 0.5 0.5 3 3 1 1 4.5 4.5 4.5 4.5 1 1 6.5 6.5 6.5 6.5 0.5 0.5 3 3 1 1 Hysteresis MHF2-8D D-M9(V) D-M9W(V) MHK MHF2-8D1 Red ON Green ON MHF2-8D MHS 0.5 0.5 1 MHF2-8D2 MHF2-12D 0.5 0.5 1 MHC MHF2-16D 0.5 0.5 1 MHF2-12D MHF2-20D 0.5 0.5 1 MHT MHF2-12D1 MHY Mounting of Auto Switch MHF2-12D2 MHW Insert