Clean Air Module

OFF n-1 n-2 Real-time flow rate Key lock Window comparator mode H : Hysteresis n This function prevents incorrect operations such as changing the set value accidentally. H H Note) ON NO OFF n-2 n-1 Error correction Real-time flow rate Note) Output mode is set to inverted output when shipped from factory. LED display Contents Solution Check the load and wiring for OUT1.

VXA21/22

8 1/4 1/8 1/4 VXA31m5-00 n X 100+50 VXA32m5-00 n X 160+70 Model/Valve Specifications Flow rate Orifice size (mm) Max. operating pressure differential (MPa) (1) Proof pressure (MPa) Weight (g) Max. system pressure (MPa) Cv Effective area (mm2) Model VXA3115-00 VXA3125-00 VXA3225-00 VXA3135-00 1.0 1.5 1.5 0.08 1.4 1.0 0.5 1.0 0.3 150 0.16 2.8 0.19 3.4 2.2 230 0.24 0.6 0.33 6 VXA3235-00 150

Cylinder with Lock Series CNG

(mounted on same side) 1 pc. 2 pcs. (mounted on different sides) 2 pcs. (mounted on same side) 1 pc.

RZQ

Caution 5 150 100 200 300 1.

MGC

Compact front plate and guide body Made to Order Refer to p.5.4-1 for Made to Order specifications of series MGC. 3.20-1 Compact Guide Cylinder Series MGC 20, 25, 32, 40, 50 How to Order MGC B S C73 32 100 L R Guide cylinder (Compact style) Number of auto switches Bearing M L Slide bearing Ball bushing bearing Auto switch 2 1 n S n Without auto switch (Built-in magnet) *Refer to following

3 Position Cylinder Series RZQ

(Refer to Table 1 .) Assume PB Pc.

IDX-OM-W094

//www.smcworld.com/ IDX-OM-W094 1 . 1-1 1.1 . 1-1 1.1.1 . 1-1 1.2 . 1-2 1.2.1 . 1-2 1.2.2 . 1-2 1.2.3 . 1-2 1.2.4 . 1-3 1.2.5 . 1-4 1.3 . 1-5 1.4 / . 1-6 2 . 2-1 2.1 . 2-1 3 . 3-1 3.1 . 3-1 3.2 . 3-2 3.2.1 . 3-2 3.2.2 . 3-2 3.2.3 . 3-3 3.2.4 . 3-4 3.2.5 . 3-5 3.3 . 3-7 4 / . 4-1 4.1 . 4-1 4.2 . 4-1 4.3 . 4-2 4.4 . 4-2 4.5 . 4-2 4.6 . 4-2 5 . 5-1 5.1 . 5

10-cy1l-e

Contents Bore size (mm) Set of left nos. #8, #9, $0, $1 #7 #8 #9 $0 $1 $2 Wear ring A Special resin 6, 10: Not available CY1S6-PS-N 6 CY1S6-PS-N Wear ring B Special resin Set of left nos. #8, #9, $0, $1, $2 CY1L10-PS-N 10 CY1L10-PS-N Cylinder tube gasket NBR Guide shaft gasket NBR CY1L15-PS-N CY1L20-PS-N CY1L25-PS-N CY1L32-PS-N CY1L40-PS-N 15 20 25 32 40 CY1L15-PS-N CY1L20-PS-N CY1L25-PS-N

PSxx-OMT0001CN

1 6 2 1 3 G1/8 G1/8 3 7 NPN2 PNP2 A B 4 L 7 5 SI N 1 2 3 1 2 3 4 5 6 S 6 7 8 4 5 6 6 7 8 T 1F 2GH 3ISO1179-1 4 5kPa 61 7 88 (10 ) 9DIN 101 1 2 2 -8No.PS-OMT0001CN-E 2 B 2 F 0.010.03mm 0.020.15mm 0.050.30mm G H DC24V AC100V AC110V 10 1 10 2 Rc1/8 4 1 C 2 6 10 N 3 10 0.4MPaMPa 0 G1/8 F G1/8 3 1 11 0.4MPaMPa 0.2MPaMPa 0.2MPaMPa 2 3 C Rc1/4 F 12 G1/4 4

PSxx-OMV0008CN

-2No.PS-OMV0008CN-E / *3) 1 1.5 3) 1 1 () [] -3No.PS-OMV0008CN-E () () () () -4No.PS-OMV0008CN-E () * UL UL1310 2 UL1585 2 30 Vrms(42.4 V ) (2 ) UL (1 20 ) (ISE7G-T-ZS-48-A) N G -5No.PS-OMV0008CN-E Al2O3(96)C3604+FKM () O 1 /min 16MPa () * FG (35 N () ,() *() 6 33 -6No.PS-OMV0008CN-E () () 20 m DC(-)() * () () CE -5~70-5~50(5 ) (FKM) Al2O3()C3604()( ) -7No.PS-OMV0008CN-E

PSxx-OMR0001CN

1 C 6 2 1 3 G1/8 F 3 G1/8 7 NPN1 PNP1 N P L 4 7 5 M SI N 1 2 3 4 5 6 1 2 S 6 7 8 3 4 5 6 6 7 8 T 1F 2GH 3ISO1179-1 4 5kPa 61 7 88 (10 ) 9DIN 101 1 2 2 -8No.PS-OMR0001CN-J 2 B 2 F 0.010.03mm 0.020.15mm 0.050.30mm G H DC24V AC100V AC110V 10 1 10 2 Rc1/8 4 1 C 2 10 N 6 10 3 0 G1/8 F G1/8 3 0.4MPaMPa 1 11 0.4MPaMPa 2 0.2MPaMPa C Rc1/4 3 F 12 G1/4 0.2MPaMPa 4

ML1

1 !2 !3 !4 !5 !6 !7 !8 !

Electro-Pneumatic Positioner Series IP8000/8100

Within 1%F.S. Within 2%F.S. Within 0.75%F.S. Within 1%F.S. Within 0.5%F.S.

Adsorption Plate

Adsorption surface size 9 SP2130 SP2230 50 x 50 80 80 20 50 65 65 55 5 100 x 100 130 130 20 100 115 115 80 A D Rc 1/8 (Suction port) C F F B D G E E 8 x 5.5 drill Element fixing nut N pcs. 9.5 depth of counter bore 7 (mounting hole) A B C D E F G N Part no.

1.63

(N) MGG Note 1) The guide rod and self-weight for the plate are not included in the above displacement values.

Series SY100 3 Port Solenoid Valve Rubber Seal

(Station n) (Station 1) (Station n) A A A A 13 13 8.7 7.7 n-M5 X 0.8 (A port) 12.6 P=10.5 (Pitch) n-M3 X 0.5 (A port) 12.6 P=10.5 (Pitch) In case of M3 In case of M5 L plug connector (L) M plug connector (M) 31.7 (In case of AC) 30.4 (In case of DC) 15.6 39.1 (In case of DC) 45.6 (In case of AC) 40 (Indicator light and surge voltage suppressor) (Indicator light and surge voltage suppressor

RLQ

T3 Cylinder with Bypass Piping Component Parts T2 63.4 73.8 80.3 T3 57.8 67.8 74.3 TH 47.9 57.3 57.3 TP Rc, NPT, G 1/8 Rc, NPT, G 1/4 Rc, NPT, G 1/4 T1 81.4 93.3 99.8 No. 1 2 3 4 Description Qty. 1 1 1 1 Part no.

Pressure Relief 3 Port Valve with Locking Holes

VH*-OMX0068-A PRODUCT NAME Pressure Relief 3 Port Valve with Locking Holes MODEL / Series / Product Number VHS20-(F,N)01~(F,N)02(-R,Z)-D VHS30-(F,N)02~(F,N)03(-R,Z)-D VHS40-(F,N)02~(F,N)04(-R,Z)-D Contents Page 1. Safety Instructions 1~5 2. Application 6 3. Specifications 6 4. How to Order 7~8 5. Construction / Parts List 9 6.

ZU

Matching the Ejector to the Vacuum Circuit Caution For precautions associated with matching the ejector to the vacuum circuit, refer to the technical data on page 13-1-10 to 13-1-19.

Series CE1

9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5@6 @1 #0 q !1 w #1 #0 @2 @9 #1 @1 RSH CE1 40 to 63 CE2 @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3#3 r !4 e !6 @6 ML2B ML1C #7 #6 !5 REA REC RHC !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 MTS CC Component Parts Component Parts Description Material Note Description Material No. No.