Modular F.R.L. Unit

Recommended tightening torque Unit: Nm Connection thread Torque 1/8 1/4 3/8 1/2 3/4 1 12 to 14 M5 7 to 9 22 to 24 28 to 30 28 to 30 36 to 38 After tightening by hand, tighten further approximately 1/6 turn using a tightening tool. Adjustment Warning 1. Regulator and filter regulator 1. Set the regulator while verifying the displayed values of the inlet and outlet pressure gauges.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

Number of pages has been increased from 20 to 28. YU A flow adjustment valve (0.05 to 5 L/min) has been added. A 2 to 200 L/min flow range option has been added. A rear ported type has been added. Number of pages has been increased from 28 to 32.

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

-06-01 ZH10BL-06-01 ZH13BS-08-02 ZH13BL-08-02 57 12 3.2 24 Rc 5.8 2 38.5 57 12 3.2 24 5.8 2 38.5 57 12 3.2 24 5.8 2 38.5 57 12 3.2 24 5.8 2 38.5 60 12 3.2 26 5.8 2 39.5 60 12 3.2 26 5.8 2 39.5 75 17 4.2 28 7.5 3 50 75 17 4.2 28 7.5 3 50 Screw-in connection (Mounting hole) Model A 67.5 29.5 16 12 28 5 47 67.5 29.5 16 12 28 5 47 67.5 29.5 16 12 28 5 47 67.5 29.5 16 12 28 5 47 70.5 30.5 18 12

smcmaintenancepartslist

Contents Bore size (mm) @6 @7 28 @9 #0 31 #2 33 Lube type Piston seal Rod seal 40 50 63 80 100 CVS1-40-PS CVS1-50-PS CVS1-63-PS CVS1-80-PS CVS1-100-PS Cushion seal Set of left nos. @6, @7, @9, #0, #2, #5 Cylinder tube gasket 28, 31, 33 and 34 are non-replaceable parts, so they are not included in the seal kit.

Modular F.R.L. Unit

Page 23 Page 28 Mist Separator Page 29 Micro-Mist Separator Page 32 . Air Filter + Regulator . Filter Regulator . Made to Order Specifications . Modular Type Filter Regulator AFM20 to 40 .

Best Pneumatics Vol. 14

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com IR Recommended Tightening Torque (Nm) Connection thread Torque VEX 1/8 1/4 3/8 1/2 3/4 1 12 to 14 M5 7 to 9 22 to 24 28 to 30 28 to 30 36 to 38 AMR After tightening by hand, tighten further approximately 1/6 turn using a tightening tool.

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

34 45.1 [60.6] 21.6 28 34 [40.5] 31.1 31.1 15 21 21 25 25 10 10 97.6 18 18 97.6 [ ] for AC Other dimensions are the same as the grommet style

MGP

28 11 M12 X 1.75 80 100 28 48 52 72 75 90 128 148 300 320 92 85 178 171 MGPM(Slide Bearing)/Dimensions A, DB, E MGPL(Ball Bushing Bearing)/Demensions A, DB, E Bore (mm) Bore (mm) A E DB A E DB 200st< 50st< 200st 50st< 200st 200st< 25st< 50st 25st< 50st 200st< 50st< 200st 50st< 200st 50st 50st 200st< 25st 25st 160 180 63.5 64 80 100 115 137 142 162 18.5 21 45.5 46 30 36 80 100 109.5 121 130

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

4.5 80 ZPT80H-B10 82 16.5 28 M10 x 1.5 4.5 Y 3.5 80 ZPT80H-A16 82 16.5 28 4.5 Model A 63 ZPT63H-A16 B 65 C 14.5 D 26 E 56 58 80 ZPT80H-B12 82 16.5 28 M12 x 1.75 4.5 80 ZPT80H-B16 82 16.5 28 M16 x 1.5 4.5 1191 Series ZPT ZPT H-A16 (Male thread) 100 125 ZPT H-B (Female thread) 100 125 Width across flats 60 M16 x 1.5 70 Hexagon width across flats 22 4 x M5 x 0.8 1/8 (Rc, NPT, NPTF) Width across

Air Cylinder: Standard/Non-rotating Rod Double Acting/Single Acting, Single Rod/Double Rod Series NCM ø3/4", ø7/8", ø1 1/16", ø1 1/4", ø1 1/2", ø2" 1

Applicable bore A J L B C D E F G H 0.25 K 1/4-28 NY-075 0.51 1/4-28 0.94 1.18 0.69 0.25 0.51 0.71 0.16 3/4", 7/8" NY-106 0.51 0.25 5/16-24 5/16-24 0.94 1.18 0.69 0.25 0.51 0.71 0.19 1 1/16" NY-125 0.75 0.38 7/16-20 7/16-20 1.31 1.69 0.94 0.38 0.75 1.02 0.25 1 1/4", 1 1/2" NY-G050 0.75 0.38 1/220 1/2-20 1.32 1.69 0.94 0.38 0.75 1.02 0.31 2" Material: Carbon steel Jam nut (Rod thread) (in)

Micro Mechanical Valve Series VM1000

F.O.F. 6.5 mm 1.7 mm 4.8 mm 21 N VHK 25 28 2 x 3.2 mounting hole 5 x 1/8 VH Push button (Flush) VZM550-01-33 Panel mounting hole VHS 38 23 T.T. O.T. P.T. VHS 16.5 1.5 1.5 Max. 6 18.5 3 (Pilot exhaust port) M5 x 0.8 PE R2 P R1 (121.5) Symbol (105) 86.5 (B) 2 (A) 4 13.6 B A 14.7 13.6 12 14 3 (R2) 1 (P) 5 (R1) 35 10.8 17 19.8 35 10.8 0.5 MPa supply 1.6 18 28 25 21 3 13 T.T. O.T. P.T.

Integrated Controller

(Red Green Red) Electrical entry direction In-line Wiring type 3-wire 2-wire Output type NPN PNP Applicable load IC circuit, Relay, PLC 24 VDC relay, PLC Power supply voltage 5, 12, 24 VDC (4.5 to 28 V) Current consumption 10 mA or less Load voltage 28 VDC or less 24 VDC (10 to 28 VDC) Load current 40 mA or less 2.5 to 40 mA Internal voltage drop 0.8 V or less at 10 mA (2 V or less

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

28 NN 2 2 3 3 3 GA 13 13 29 39 49 HA 16 26 20 28 28 I 9 9 9 16 9 J 17 27 37 48 65 K 21.5 31.5 41.5 51.5 61.5 M 42 52 62 80 90 Z 41.5 51.5 61.5 79.5 89.5 ZZ 64 74 84 102 112 13-/22-MXQ6L-10 13-/22-MXQ6L-20 13-/22-MXQ6L-30 13-/22-MXQ6L-40 13-/22-MXQ6L-50 Note) Note) Note) Refer to the bottom view of MXQ6-30. 1322803 MXQ 1322Air Slide Table Dimensions: MXQ6L / Symmetric Type 1322Axial piping

CA2

Cotter pin size CJ1 Flat washer 16 M14 x 1.5 13 55.5 3 x 18l Polished round 12 22 25 24 12 55 38 40 Y-04D +0.3 +0.1 CJP CJ2 16 M18 x 1.5 15 55.5 3 x 18l Polished round 12 27 27 28 12 60 38 50, 63 Y-05D +0.3 +0.1 CM2 28 M22 x 1.5 19 76.5 4 x 25l Polished round 18 37 28 36 18 71 55 80 Y-08D +0.3 +0.1 CG1 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-

VFR

AXT625-4-1 AXT625-5 AXT625-17 AXT625-16 18 x 15 x 1.5 10.5 x 7.5 x 1.5 8 x 5 x 1.5 AXT625-28-1A Material Steel plate Steel plate NBR NBR NBR NBR NBR No. Description Material Part no. AXT625-28-3A For 01T For 01T1 For 01C For 01F For 01SU Junction cover assembly AXT625-28-7AStations o VVF2000-26-5AStations AZ738-10AStations For 01T For 01SU AXT623-22 NBR Rubber plug !

CL

CLG-020-24 CLG-025-24 CLG-032-24 CLG-040-24 20 25 32 40 13 15 17 21 3.2 3.2 4.5 4.5 21.2 21.3 25.6 26.3 47.8 54.8 57.4 65.4 42 42 48 56 26 28 28 36 28 28 28 30 50 57 61.4 71.4 CG-020-24A CG-025-24A CG-032-24A CG-040-24A 20 25 32 40 13 15 17 21 3.2 3.2 4.5 4.5 18.1 20.7 23.6 27.3 35.8 39.8 49.4 58.4 42 42 48 56 16 20 22 30 28 28 28 30 38.3 42.1 53.8 64.6 Rod End Nut Clevis Pin Knuckle Pin

Compact

27.3 25A(28) 27 20 Motor cable length 300 102 0.3 LEC 7.5 LEC S Note 1) [ ] for when the direction of return to origin has changed.

10

x 2 28.5 34 25 +0.084 0 32 0.10 0.30 Y-03MNote 1) 32 20 30 M10 x 1.25 10 16 10 +0.058 0 14 +0.30 +0.10 28 0.10 0.30 Y-04MNote 1) 40 22 40 M14 x 1.5 11 19 10 +0.058 0 14 +0.30 +0.10 28 0.10 0.30 Y-05MNote 1) 50, 63 28 50 M18 x 1.5 14 24 14 +0.070 0 20 +0.30 +0.10 40 0.10 0.30 Y-08MNote 1) 80 40 65 M22 x 1.5 20 34 22 +0.084 0 30 +0.30 +0.10 60 0.10 0.30 Y-10MNote 1) 100 40 65 M26 x 1.5 20

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

holes for manifold) 7 21.8 (Mounting holes for manifold) (Lead wire length) 39.1 [45.6] About 300 Bracket 23.2 equivalent (Mounting holes) 23.2 equivalent (Mounting holes) 18.5 18.5 28 [34.5] 28 [34.5] 20 20 15.6 18.5 18.5 13.5 13.5 9 9 69 69 98.6 79.4 [82] [ ]for AC Other dimensions are the same as the grommet type. [ ] for AC Other dimensions are the same as the grommet type. 24 Valve

CG1

TU TV TW TX TY TZ 8d9 10d9 12d9 14d9 16d9 18d9 18d9 22d9 18.1 20.7 23.6 27.3 29.7 34.3 35.8 39.8 49.4 58.4 72.4 90.4 42 42 48 56 64 74 72 93 16 20 22 30 36 46 85 100 28 28 28 30 36 46 45 60 38.3 42.1 53.8 64.6 79.2 97.2 110 130 CG-020-24A CG-025-24A CG-032-24A CG-040-24A CG-050-24A CG-063-24A CG-080-24A CG-100-24A 20 25 32 40 50 63 80 100 (mm) Part No.