CNA

Part no. 0.1 0.3 +0.070 0 12 I-04 I-05 I-08 I-10 40 50, 63 80 100 NT-04 NT-05 NT-08 NT-10 40 50, 63 80 100 16 15.5 20 69 22 24 55 M14 x 1.5 M14 x 1.5 8 22 25.4 21 0.1 0.3 +0.070 0 12 74 27 28 15.5 20 11 60 M18 x 1.5 M18 x 1.5 27 31.2 26 16 0.1 0.3 +0.070 0 18 36 22.5 26 91 37 71 M22 x 1.5 M22 x 1.5 13 32 37.0 31 28 0.1 0.3 +0.084 0 20 28 37 40 24.5 105 83 M26 x 1.5 M26 x 1.5 16 41 47.3 39

Compact Cylinder with Air Cushion

28 56 18 40 16 20 20 40 16 20 44 50.6 Y-G05 14 22 50, 63 56 0.3 0.5 +0.5 +0.3 18 IY-G08 28 80 I-G08 M22 x 1.5 M22 x 1.5 38 38 71 21 50 21 27 23 50 21 27 56 64 +0.070 0 Y-G08 18 28 80 71 +0.5 +0.3 0.3 0.5 +0.084 0 +0.084 0 22 IY-G10 32 100 I-G10 M26 x 1.5 M26 x 1.5 44 44 79 21 55 24 31 24 55 24 31 64 72 Y-G10 22 32 100 79 Knuckle pin and snap ring are included.

MU

Part no. +0.058 0 +0.058 0 +0.058 0 +0.070 0 I-MU02 I-MU03 I-MU04 I-MU05 Y-MU02 Y-MU03 Y-MU04 Y-MU05 25 32 40 50, 63 25 32 40 50, 63 8 10 10 14 10.5 12 14 18 16 18 20 28 27 31 36 46 10.5 12 14 18 14 18 20 28 27 31 36 46 M10 x 1.25 M12 x 1.25 M14 x 1.5 M18 x 1.5 M10 x 1.25 M12 x 1.25 M14 x 1.5 M18 x 1.5 RQ MU DR1 U1 NZ NX NDH10 NL NL NO U1 NO NX R1 Part no. Applicable pin Part no.

RQ

28 56 18 40 16 20 20 40 16 20 44 50.6 14 22 56 0.3 0.5 +0.5 +0.3 +0.070 0 80 I-G08 Y-G08 80 18 IY-G08 28 M22 x 1.5 M22 x 1.5 38 38 71 21 50 21 27 23 50 21 27 56 64 18 28 71 +0.5 +0.3 0.3 0.5 +0.084 0 +0.084 0 100 I-G10 Y-G10 100 22 IY-G10 32 M26 x 1.5 M26 x 1.5 44 44 79 21 55 24 31 24 55 24 31 64 72 22 32 79 Knuckle pin and snap ring are included.

CNA

Material: Cast iron ND H10 d9 Cotter pin Applicable bore size (mm) E1 L1 MM RR1 U1 ND NX NZ L Cotter pin size Flat washer size Flat washer MM A1 Part no. 3 x 18l Y-04C 40 +0.3 +0.1 16 22 M14 x 1.5 24 55 13 25 12 38 55.5 Polished round 12 NX NZ E1 L 3 x 18l +0.3 +0.1 16 50, 63 Y-05C 27 M18 x 1.5 28 60 15 27 12 38 55.5 Polished round 12 4 x 25l +0.3 +0.1 28 80 Y-08C 37 M22 x 1.5 36 71 19 28

MTS

28 (43) 18 18 (33) 0 (15) 12 D-M9, D-M9V 10 (17) 0 0 28 33 (45) 18 28 (35) 5 (17) D-F9W, D-F9WV 10 (17) 0 0 28 33 (45) 18 28 (35) 5 (17) D-A9, D-A9V 0 (15) 0 0 32 32 (47) 22 22 (37) 0 (15) 16 D-M9, D-M9V 10 (17) 0 0 32 37 (49) 22 32 (39) 5 (17) D-F9W, D-F9WV 10 (17) 0 0 32 37 (49) 22 32 (39) 5 (17) D-A9, D-A9V 0 (15) 0 0 38 38 (53) 26 26 (41) 0 (15) 20 D-M9, D-M9V 10 (17) 0 0 38 38 (55)

HRX-OM-R005

Piping port size Table 3-5 Piping port size Name Port size1 Recommended Recommended proof tightening torque pressure for piping Circulating fluid supply Rc1/2 28 to 30Nm 0.8MPa more Circulating fluid return Rc1/2 28 to 30Nm 0.8MPa more Faiclity water inlet3 Rc1/2 28 to 30Nm 1.0MPa more (Facility water pressure 0.3 to 0.5 MPa) Faiclity water outlet3 Rc1/2 28 to 30Nm 1.0MPa more Automatic water-fill

HRX-OM-Q026

(Supply puressure: 0.3 to 0.5 MPa) Facility water outlet port *1 Rc1 36 to 38Nm 1.0 MPa or more Automatic fluid fill port Rc3/8 28 to 30Nm (Automatic fluid fill pressure: 0.2 to 0.5 MPa Overflow port Rc1 36 to 38Nm ID 25 mm or more Length 5m or less Tank drain port Rc3/4 28 to 30Nm ID 19 mm or more *1: Water cooled type only.

MU

Part no. +0.058 0 +0.058 0 +0.058 0 +0.070 0 I-MU02 I-MU03 I-MU04 I-MU05 Y-MU02 Y-MU03 Y-MU04 Y-MU05 25 32 40 50, 63 25 32 40 50, 63 8 10 10 14 10.5 12 14 18 16 18 20 28 27 31 36 46 10.5 12 14 18 14 18 20 28 27 31 36 46 M10 x 1.25 M12 x 1.25 M14 x 1.5 M18 x 1.5 M10 x 1.25 M12 x 1.25 M14 x 1.5 M18 x 1.5 RQ MU DU1 R1 NZ NX NDH10 NL NL NO U1 NO NX R1 Applicable pin Part no. Part no.

2–4

D-F9PW D-F9PWV D-F9BW D-F9BWV D-F9NW D-F9NWV Electrical entry direction Perpendicular In-line Perpendicular In-line Perpendicular In-line 2-wire Wiring type 3-wire Output type NPN PNP 24 VDC relay, PLC Applicable load IC circuit, Relay IC, PLC Power supply voltage 5, 12, 24 VDC (4.5 to 28 VDC) Current consumption 10 mA or less 24 VDC (10 to 28 VDC) Load voltage 28 VDC or less Caution

Compact Type

V) Power supply voltage 10 mA or less Current consumption 24 VDC (10 to 28 VDC) 28 VDC or less Load voltage 5 to 40 mA 40 mA or less 80 mA or less Load current 1.5 V or less (0.8 V or less at 10 mA load current) 4 V or less 0.8 V or less Internal voltage drop Leakage current 100 A or less at 24 VDC 0.8 mA or less Operating position Red LED lights up Optimum operating position Green LED

Clamp Cylinder with Lock Series CLK1

Ht 28 28 28 A B 3 4.5 4.5 26 27.5 27.5 D-P5 Approx. Hs 46 50 56 Approx. Ht 26 26 26 16 Series CLK1 Clamp Cylinder with Lock Auto Switch Specifications Lead wire colors inside [ ] are those prior to conformity with IEC standards.

Stainless Steel One-touch Fittings Series KG

17.2 10.0 5 17 10 21 27.5 3 8 KGS10-03 21 19 39.0 26.6 8 1 2 KGS10-04 28 22 20 35 23 18 1 4 3 8 KGS12-02 KGS12-03 8 27.5 22.5 33.5 29 28 46.0 19 12 22 44.5 1 2 KGS12-04 20 10 30 60.0 22 Reference dimensions after R(PT) thread installation. 122 Stainless Steel One-touch Fittings Series KG Female union: KGF Effective orifice(mm 2) Applicable tube O.D.

Series KG Stainless Steel One-touch Fittings

17.2 10.0 5 17 10 21 27.5 3 8 KGS10-03 21 19 39.0 26.6 8 1 2 KGS10-04 28 22 20 35 23 18 1 4 3 8 KGS12-02 KGS12-03 8 27.5 22.5 33.5 29 28 46.0 19 12 22 44.5 1 2 KGS12-04 20 10 30 60.0 22 Reference dimensions after R(PT) thread installation. 122 Stainless Steel One-touch Fittings Series KG Female union: KGF Effective orifice(mm 2) Applicable tube O.D.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

L3 394 432 413 451 470 ( ) L4 14.5 14 17.5 17 14 (L4) L3 G: Approx. 300 H: Approx. 600 lead wire length ( ) 2n1-Rc(PT) 1/4 (ports A,B) 73.7 <74.4> [75.3] 52.8 39.8 19 39.4 38.1 (5.4) A B A B A B B B B 1 P 28 28 1 R 20 35 60.7 <64.1> [62.3] 39.8 A A A DIN rail 43.1 51 [Rc(PT) 1/4 port] P = 19 22 32.5 (Voltage rating indication) (5.25) L2 (DIN rail mounting hole pitch 12.5) L1 2n2-One-touch

MU

E1 NDH10 Size A1 E1 MM Size L1 L1 MM A1 +0.058 0 +0.058 0 +0.058 0 +0.070 0 8 10 10 14 10.5 12 14 18 16 18 20 28 27 31 36 46 M10 X 1.25 M12 X 1.25 M14 X 1.5 M18 X 1.5 10.5 12 14 18 14 18 20 28 27 31 36 46 M10 X 1.25 25 32 40 50, 63 25 32 40 50, 63 I-MU02 I-MU03 I-MU04 I-MU05 Y-MU02 Y-MU03 Y-MU04 Y-MU05 M12 X 1.25 M14 X 1.5 M18 X 1.5 Applicable pin NDH10 NL U1 U1 Part No. NO Part No.

CHKD/CHKG

with SMC. 265 A CHKD Series Theoretical Output Unit: N Operating pressure (MPa) Bore size (mm) Rod size (mm) Operating direction Piston area (mm2) 10 3.5 7 314 3140 1099 2198 OUT 20 12 201 2010 704 1407 IN 490 4900 1715 3430 OUT 25 14 336 3360 1176 2352 IN 804 8040 2814 5628 OUT 32 18 549 5490 1922 3843 IN 1256 12560 4396 8792 OUT 40 22.4 862 8620 3017 6034 IN 1963 19630 6871 13741 OUT 50 28

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

30 20 28 23 28 G 9 12 13 15 20 27 N 4 4 4 4 6 6 HA 20 30 20 28 46 56 KA 82.5 132.5 GA 17 12 33 43 43 83 NA 2 2 2 2 4 4 13-/22-MXS8L-10 13-/22-MXS8L-20 13-/22-MXS8L-30 13-/22-MXS8L-40 13-/22-MXS8L-50 13-/22-MXS8L-75 785 MXS 1322Air Slide Table Dimensions: MXS12 1322Basic 2 x M4 x 0.7 thread depth 5 Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches

SMC

30 20 28 23 28 G 9 12 13 15 20 27 N 4 4 4 4 6 6 HA 20 30 20 28 46 56 KA 82.5 132.5 GA 17 12 33 43 43 83 NA 2 2 2 2 4 4 13-/22-MXS8L-10 13-/22-MXS8L-20 13-/22-MXS8L-30 13-/22-MXS8L-40 13-/22-MXS8L-50 13-/22-MXS8L-75 139 MXS Air slide table 1322Dimensions: MXS12 1322Basic style 2-M4 x 0.7 thread depth 5 Operating port 2-M5 x 0.8 9.5 2 Vacuum suction port M5 x 0.8 5.5 J 8 Max. 11 (With stroke

0.4

Note 2) Special wiring specifications are available as semi-standard to increase the maximum number of stations. 557 VQC Series S VQC1000 Series Kit (Serial transmission) For EX500 Gateway Decentralized System 2 (128 points) IP67 compliant VV5QC11 S kit (Serial transmission kit: EX500) L2 L1 42.5 (Pitch) P = 10.5 28 1.5 4 x M4 Mounting hole Indicator light 1.5 (12) 63.5 2 90.9 (8) B A B A