50 kPa to 0.5 MPa1.0 MPa0 to 999999 lNPN open collector Maximum load current: 80 mA; Internal voltage drop: 1 V or less (with load current of 80 mA) Maximum applied voltage: 30 V; 2 outputsPNP open collector Maximum load current: 80 mAInternal voltage drop: 1.5 V or less (with load current of 80 mA); 2 outputsNPN or PNP open collector (same as switch output)Illuminates up when output is

50 kPa to 0.5 MPa1.0 MPa0 to 999999 lNPN open collector Maximum load current: 80 mA; Internal voltage drop: 1 V or less (with load current of 80 mA) Maximum applied voltage: 30 V; 2 outputsPNP open collector Maximum load current: 80 mAInternal voltage drop: 1.5 V or less (with load current of 80 mA); 2 outputsNPN or PNP open collector (same as switch output)Illuminates up when output is

2.0% F.S. or less (0 to 50C, based on 25C)NPN open collector Max. load current: 80 mA; Max. applied voltage: 30 V; Internal voltage drop: 1 V or less (with load current of 80 mA)PNP open collector Max. load current: 80 mA; Internal voltage drop: 1.5 V or less (with load current of 80 mA)NPN or PNP open collector Flow rate per pulse: 100 l/pulse, 10.0 ft3/pulseON time per pulse

2.0% F.S. or less (0 to 50C, based on 25C)NPN open collector Max. load current: 80 mA; Max. applied voltage: 30 V; Internal voltage drop: 1 V or less (with load current of 80 mA)PNP open collector Max. load current: 80 mA; Internal voltage drop: 1.5 V or less (with load current of 80 mA)NPN or PNP open collector Flow rate per pulse: 100 l/pulse, 10.0 ft3/pulseON time per pulse

2.0% F.S. or less (0 to 50C, based on 25C)NPN open collector Max. load current: 80 mA; Max. applied voltage: 30 V; Internal voltage drop: 1 V or less (with load current of 80 mA)PNP open collector Max. load current: 80 mA; Internal voltage drop: 1.5 V or less (with load current of 80 mA)NPN or PNP open collector Flow rate per pulse: 100 l/pulse, 10.0 ft3/pulseON time per pulse

2.0% F.S. or less (0 to 50C, based on 25C)NPN open collector Max. load current: 80 mA; Max. applied voltage: 30 V; Internal voltage drop: 1 V or less (with load current of 80 mA)PNP open collector Max. load current: 80 mA; Internal voltage drop: 1.5 V or less (with load current of 80 mA)NPN or PNP open collector Flow rate per pulse: 100 l/pulse, 10.0 ft3/pulseON time per pulse

2.0% F.S. or less (0 to 50C, based on 25C)NPN open collector Max. load current: 80 mA; Max. applied voltage: 30 V; Internal voltage drop: 1 V or less (with load current of 80 mA)PNP open collector Max. load current: 80 mA; Internal voltage drop: 1.5 V or less (with load current of 80 mA)NPN or PNP open collector Flow rate per pulse: 100 l/pulse, 10.0 ft3/pulseON time per pulse

2.0% F.S. or less (0 to 50C, based on 25C)NPN open collector Max. load current: 80 mA; Max. applied voltage: 30 V; Internal voltage drop: 1 V or less (with load current of 80 mA)PNP open collector Max. load current: 80 mA; Internal voltage drop: 1.5 V or less (with load current of 80 mA)NPN or PNP open collector Flow rate per pulse: 100 l/pulse, 10.0 ft3/pulseON time per pulse

2.0% F.S. or less (0 to 50C, based on 25C)NPN open collector Max. load current: 80 mA; Max. applied voltage: 30 V; Internal voltage drop: 1 V or less (with load current of 80 mA)PNP open collector Max. load current: 80 mA; Internal voltage drop: 1.5 V or less (with load current of 80 mA)NPN or PNP open collector Flow rate per pulse: 100 l/pulse, 10.0 ft3/pulseON time per pulse

2.0% F.S. or less (0 to 50C, based on 25C)NPN open collector Max. load current: 80 mA; Max. applied voltage: 30 V; Internal voltage drop: 1 V or less (with load current of 80 mA)PNP open collector Max. load current: 80 mA; Internal voltage drop: 1.5 V or less (with load current of 80 mA)NPN or PNP open collector Flow rate per pulse: 100 l/pulse, 10.0 ft3/pulseON time per pulse

2.0% F.S. or less (0 to 50C, based on 25C)NPN open collector Max. load current: 80 mA; Max. applied voltage: 30 V; Internal voltage drop: 1 V or less (with load current of 80 mA)PNP open collector Max. load current: 80 mA; Internal voltage drop: 1.5 V or less (with load current of 80 mA)NPN or PNP open collector Flow rate per pulse: 100 l/pulse, 10.0 ft3/pulseON time per pulse

42

Bore size CS1, CS2 series Pressure 0.5 MPa Load ratio 50% Stroke 1000 mm MB, CA2 series Pressure 0.5 MPa Load ratio 50% Stroke 500 mm Average speed [mm/s] Series 40 50 63 80 100 125 140 160 180 200 250 1100 1000 900 800 700 600 500 400 300 200 100 0 Vertically upward Horizontal VQ4100--03 VQ4101--03 1100 1000 900 800 700 600 500 400 300 200 100 0 VQ5100--04 VQ5101--04 Values at extension

3

200 10 50 100 150 200 250 15 600 500 400 300 200 100 20 200 400 600 800 1000 25 200 400 600 800 1000 1200 1400 Flow rate Q [kg/h] ( ): Saturated steam holding heat (kcal/kg) ( ): Saturation temperature (C) For Water How to read the graph The pressure differential to generate a flow rate of 25 L/min water is as follows.

Air Tank Series AT 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 45 95 150 170 250 350 450 770 960 Surface: Munsell N-5.5, Inner surface: Non coated Safety valve (1 pc.) R 1/2 R 3/4 R 11/4 R 2 R 1 Accessory (2) Rc 1/2 Valve for drainage (1 pc.) Pressure gauge (1 pc.)

CNG

, 200 201 to 350 301 to 400 301 to 450 301 to 800 D-C7/C8 D-B5/B6 D-H7 D-G5NTL 1500 10 mm 15 mm 25, 50, 75, 100, 125, 150, 200, 250, 300 D-B59W 15 mm 20 mm Note 1) Intermediate strokes other than the above are produced upon receipt of order.

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

Standard stroke -X Bore size (mm) Standard stroke (mm) Piping port location 15, 32 100, 150, 200, 250, 300, 350 400, 450, 500, 600, 700 Operating direction: Right Operating direction: Left Operating direction: Right Operating direction: Left Operating direction: Right Operating direction: Left Operating direction: Right Operating direction: Left a b c d e f g h 20Nil Note 1) Please consult

2.0

Rated voltage 24/12 VDC Allowable voltage fluctuation2 10% of the rated voltage Type of coil insulation Class B Ambient temperature2 0 to 50C Fluid temperature2 0 to 50C (No freezing) Mounting orientation Free Enclosure IP40 equivalent Impact/Vibration resistance3 150/30 Tube effective area4 70% or more Coil switching noise5 80 dB T3(A), T4(A) Starting 8 W Holding 2.0 W [Built-in power saving

1

Standard Strokes Bore size [mm] Standard stroke [mm] *1 20 25, 50, 75, 100, 125, 150, 200, 250, 300 25 32 40 *1 Intermediate strokes not listed above are produced upon receipt of order. The minimum stroke is 25 mm. Mounting Brackets/Part No.

CRB1/Size: 10, 15, 20, 30

30 47 90 150 1.1-4 Copper Free Precautions Size Rotation Vane style Port position 20 CRB1BW Be sure to read before handling.

CYPSeries

Standard stroke Bore size (mm) Standard stroke (mm) Piping port position 15, 32 100, 150, 200, 250, 300, 350 400, 450, 500, 600, 700 Operating direction: Right Operating direction: Left Operating direction: Right Operating direction: Left Operating direction: Right Operating direction: Left Operating direction: Right Operating direction: Left a b c d e f g h Nil Note 1) Consult SMC if the