5 Port Solenoid Valve Series SQ1000/2000

2.9 (0.16) SQ1530 20 or less 100 Metal seal 26 or less Dust proof Pressure Enclosure center 3.2 (0.18) SQ1531 25 or less 100 Rubber seal 33 or less Note 1) In case of low temperature, use dry air with no condensation.

Compact Manometer Series PPA 1

, Auto power OFF Zero clear, Units display switching Function Withstanding pressure 1.5 MPa 200 kPa 200 kPa Fluid Air, Non-corrosive gases Power supply 3 V (DC), Type AA dry cell x 2 pcs. 12 months continuous operation (Without backlighting, temperature conditions: at 25C) Battery life Response speed 250 ms 2% F .S. or less (Temperatue conditions: at 25C) Display accuracy 1% F .S. or less

Compact Manometer Series PPA 1

, Auto power OFF Zero clear, Units display switching Function Withstanding pressure 1.5 MPa 200 kPa 200 kPa Fluid Air, Non-corrosive gases Power supply 3 V (DC), Type AA dry cell x 2 pcs. 12 months continuous operation (Without backlighting, temperature conditions: at 25C) Battery life Response speed 250 ms 2% F .S. or less (Temperatue conditions: at 25C) Display accuracy 1% F .S. or less

Slit Valve

1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.

Information

200 3 400 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) 6 Effective area (mm2) Effective area (mm2) Effective area (mm2) 06, 08 08, 10 1.0 300 06 04 2 4 50 100 200 0.5 1 2 100 0.0 0 0 0 0 0 0 5 10 0 5 10 0 5 10 Number of needle rotations (turns) Number of needle rotations (turns) Number of needle rotations (turns) ASG520F-03 ASG521F-03 ASG620F-04 ASG621F-04 Inlet

Speed Controller for Low Speed Operation with One-touch Fitting Elbow Type/Universal Type (Resin Body) AS-FM Series

Made to Order (Refer to page 725 for details.) 724 AS-FM Series Speed Controller for Low Speed Operation with One-touch Fitting In-line Type How to Order 200 1 F M 06 AS Lock nut option AS-F Nil J Hexagon lock nut Round lock nut TMH Body size M5 standard 1/8 standard 1/4 standard ASD Made to Order Refer to the below for details. 100 200 205 AS Applicable tubing O.D.

Air Suction Filter / In-line Type With One-touch Fittings Series ZFC

Metric size Type (Recommended flow rate) ZL Symbol Tubing size Metric size (Release bushing: Light gray) Symbol Tubing size Applicable model Flow rate l/min (ANR) 04 100 200 Max. 20 Max. 50 4 ZFC100 ZFC100 ZFC200 ZFC200 ZY 06 6 ZF 08 8 ZP Specifications SP ZFC100-04X17 ZFC100-06X17 ZFC200-06X17 ZFC200-08X17 4 10 6 20 6 30 8 50 Model Connecting tube O.D.

AMD

O 54 66 66 80 80 88 88 102 136 P 70 84 84 100 100 110 110 130 180 Q 26 28 28 34 34 50 50 60 76 R 4.5 5 5 5 5 9 9 10 12 S 1.6 2.0 2.0 2.3 2.3 3.2 3.2 4.5 4.5 T U 37 37 37 37 37 37 37 37 37 AMD150 1 8 1 4 3 8 159 172 178 204 210 225 232 259 311 13 13 16 16 19 19 22 22 32 100 113 119 145 151 166 173 200 253 63 76 76 90 90 106 106 122 160 20 20 20 20 20 20 20 20 20 63 76 76 90 90 106 106 122

Floating Joint

, 125 140, 160, (180, 200) Basic, Foot, Flange Hydraulic cylinder 3.5 MPa or less 20, 25, 32, 40, 50, 63, 80, 100, 125 140, 160, (180, 200) JAH Series (Heavy load) Hydraulic cylinder 7 MPa or less 40, 50, 63, 80, 100 Basic, Foot, Flange Refer to the Web Catalog or Best Pneumatics.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

Made to Order (Refer to page 549 for details.) 548 Series AS-FG Speed Controller with One-touch Fitting Stainless Steel Series In-line Type How to Order AS 200 1 F G 06 Lock nut option Nil J Hexagon lock nut Round lock nut Body size 100 200 205 300 400 AS M5 standard 1/8 standard 1/4 standard 3/8 standard 1/2 standard Made to Order (Refer to the below for details.)

DOC1003626

Indication Item Output *1 Circulating fluid discharge temperature 0 to 100:010V (1) Analog Analog output Output 1 signal 1 *2 Circulating fluid 0.150.0S/cm: 0.0210.0V electric conductivity *1 Circulating fluid discharge temperature 0 to 100:010V (2) Analog Analog output Output 2 signal 2 *2 Circulating fluid 0.1 to 50.0S/cm: 0.0210.0V electric conductivity *1 By default *2 For option D With

Micro Mist Separator Series AMD Model Series AMD can separate and Model AMD450 AMD550 AMD650 AMD850 AMD150 AMD250 AMD350 remove aerosol state oil mist in Rated flow (l/min (ANR))(1) 2000 3500 6000 12000 200 500 1000 compressed air and remove Port size

Options J: With drain guide T: With element service indicator Element service indicator Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G H 10 10 10 10 10 10 10 10 10 I 56 66 66 80 80 90 90 100 150 J 15 20 17 22 19 25 21 30 40 K 5 8 8 8 8 10 10 10 15 L 9 12 12 14 14 14 14 16 20 M 5.5 6 6 7 7 9 9 9 11 N 35 O 54 66 66 80 80 88 88 102 136 P 70 84 84 100 100 110

Air Suction Filter, ZFC Series, In-line Type with One-touch Fittings

Metric size Type (recommended flow rate) Symbol Tubing size Applicable model 04 ZFC100 ZFC100 ZFC200 ZFC200 4 Flow rate l/min (ANR) (SCFM) Symbol Tubing size 100 200 101 201 Max. 20 (0.70) Max. 50 (1.75) Max. 20 (0.70) Max. 50 (1.75) Metric size (release button: light gray) 06 6 08 8 Inch size (release button: orange) Inch size Symbol 03 Applicable model ZFC101 ZFC101 ZFC201 ZFC201 Tubing

ZFC Series

Metric size Type (recommended flow rate) Symbol Tubing size Applicable model 04 ZFC100 ZFC100 ZFC200 ZFC200 4 Flow rate l/min (ANR) (SCFM) Symbol Tubing size 100 200 101 201 Max. 20 (0.70) Max. 50 (1.75) Max. 20 (0.70) Max. 50 (1.75) Metric size (release button: light gray) 06 6 08 8 Inch size (release button: orange) Inch size Symbol 03 Applicable model ZFC101 ZFC101 ZFC201 ZFC201 Tubing

VT325

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Surge voltage suppressor Nil V Standard For vacuum Electrical entry Rated voltage VT Nil None 1 2 3 Option 100 VAC, 50/60 Hz G Grommet, Lead wire length 300 mm C Conduit D DIN terminal With surge voltage suppressor VP 200 VAC, 50/60 Hz Port size 110

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

Dimensions Formulae L1 = 11n + 15.5 L2 = 11n + 55 n: Stations (max. 16 stations) L n 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 191.5 231 262.5 273 16 L1 L2 (L3 ) (L4 ) 26.5 66 87.5 98 37.5 77 100 110.5 48.5 88 112.5 123 59.5 99 125 135.5 70.5 110 137.5 148 81.5 121 150 160.5 92.5 132 162.5 173 103.5 143 162.5 173 114.5 154 175 185.5 125.5 165 187.5 198 136.5 176 200 210.5 147.5 187 212.5 223 158.5

3 Port Solenoid Valve, VQ100 Series, Base Mounted Type

3 Port Solenoid Valve Base Mounted Type VQ100 Series Compact Design With Large Flow Rate High Speed Coil (ON: 3.5 ms) Long Service Life (200 million cycles) Innovative Manifold Construction Table of Contents Product Features .5 Specifications .6 How to Order .7-9 Plug-in Non plug-in Dimensional Drawings .10-14 Plug-in Non plug-in Construction .14 Operation Guide .15-18 The Preferred

Compatible motors (W): 100/200/400; Power supply voltage (VAC, 50/60Hz): 100~120V no longer available; 200~230 (LECSS-S); 200~240 (LECSS-T); Display and settings buttons for direct input and status monitoring; LEC-MRC2 Configuration software required (sold separately); C-UL-US listed (LECSS2-T only)

Compatible motors (W): 100/200/400; Power supply voltage (VAC, 50/60Hz): 100~120V no longer available; 200~230 (LECSS-S); 200~240 (LECSS-T); Display and settings buttons for direct input and status monitoring; LEC-MRC2 Configuration software required (sold separately); C-UL-US listed (LECSS2-T only)

① Standard strokes from 100 to 1000 mm are available in 100 mm increments, and 1200 to 2000 mm strokes are available in 200 mm increments.
② Intermediate strokes can be manufactured from 1 mm in 1 mm increments for the standard model.
③ Long strokes are available up to the max. available stroke length in 1 mm increments.