Pin Cylinder, Double Acting, Sgl Rod. 130 lb.

Size/Port: 5C [Plug-in Type, Port Size: ø8, Flow: 130 L/min (ANR)]

Size/Port: 5H [One-touch Fitting Type, Applicable Tube OD: ø8, Flow: 130 L/min (ANR)]

Size/Port: 53 [Male Thread Type, Port Size: R1/4, Flow: 130 L/min (ANR)]

Size/Port: 52 [Male Thread Type, Port Size: R1/8, Flow: 130 L/min (ANR)]

accuracy [mm] Note 5)Finger backlash/ both sides [mm] Note 6)Impact/Vibration resistance [m/s2] Note 7)Max. operating frequency [C.P.M]Operating temperature range [C]Operating humidity range [%RH]Weight [g]Motor sizeMotor typeEncoderRated voltage [V]Power consumption/ Standby power consumption when operating [W] Note 8)Max. instantaneous power consumption [W] Note 9)BasicCompactLEHZ322252 to 130

Deionized water, Hydrofluoric acid, Ammonia hydrogen peroxide solution, etc.PFA0 (atmospheric pressure) to 0.35 MPa1/2andquot; x 3/8andquot;50 to 95 F (10 to 35C) (no condensation)FEP, Stainless steel 304, Stainless steel 31673 psi (0.5 MPa)IN/OUT: FEP tube 3/8andquot; x 1/4andquot;1.3 to 2.6 gpm (5 to 10 L/min)Temperature: 50 to 95F (10 to 35C), Humidity: 35 to 80%RH (no condensation)W5.1 (130

Rubber seal 5 Port Solenoid Valve Series SYJ7000

Station n L1 L2 Station 2 78 50 Station 20 438 410 3 98 70 4 118 90 5 138 110 6 158 130 7 178 150 8 198 170 9 218 190 10 238 210 11 258 230 12 278 250 13 298 270 14 318 290 15 338 310 16 358 330 17 378 350 18 398 370 19 418 390 65 Series SYJ7000 Type 42: Side Ported/SS5YJ7-42Stations C6,N7 C8,N9 [ ]: AC Grommet (G) 122 [126.4] Approx. 300 (Lead wire length) Manual override L1 14 L2 4-4.5

Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2

JB BC BD BU CA CB F H Size Rotation 20 30 90, 180 90, 180 40 90, 180 16 16 5.2 10 12 15 8.3 32 30 32 36 6.5 8.5 8.6 2.5 3 3 63 (11) 50 14 34 69 (11) 68 14 39 14.5 16.5 49 30.4 34.7 4.7 4.9 7 8.1 25 30 11 14 14 M8 x 1.25 M10 x 1.5 M10 x 1.5 78 (13) 76 16 47 18.5 55 40.4 Size Rotation K Q S W Key dimensions TF (H9) TG (H9) TL JJ US TA TD G L UW TB TC M N b l 90 180 90 180 90 180 3 29 104 130

Escapements Series MIW/MIS

Outputs Operating pressure MPa Unit: N Operating direction Piston area (mm2) Rod size (mm) Bore size (mm) 0.3 0.2 0.4 0.5 0.6 0.7 34 23 OUT 45 57 68 79 113 12 6 26 17 IN 34 43 51 60 85 94 63 OUT 126 157 188 220 314 20 10 71 47 IN 94 118 142 165 236 Weights Unit: g Increase by stroke adjuster Stroke mm Weight g Increase by scraper Model Model 12 240 10 5 MIW12-12D MIW 20 650 30 10 MIW20-20D 10 130

Ambient Dryer Series AMG

1 I.{ 50 114 139 13 100 10 t 15 5 9 5.5 v 74 4.5 AMG25O 3/8 '152 13 1 1 3 6 10 '| 69 n '12 4 84 a 5 2 n Ai/lc350 1/2 144 16 145 s s '10 198 m 2 14 7 80 100 g 2.3 ANtG450 314 205 19 147 106 106 JO s 10 14 88 1 1 0 3.2 AMG55O 239 200 10 257 100 s 10 't6 102 130 m 10 4.5 AIVG&5O 1 112 291 c 253 r60 160 10 364 150 .10 20 1 1 s 136 180 4.5 2 48 a 348 220 ?

Series LX Dedicated Stepper Motor Driver and Positioning Driver Series LC6D/LC6C

unit Key switches Cable length 2m Basic performance Performance/Specifications LC6C-220AD Applicable controller Operating temperature range 5 to 40C Communication method Conforming to RS485 Parameter change, JOG operation, alarm reset, teaching, test Functions Protective function indication Alarm code Dimensions POWER ALM PARA AL-RES JOG MON TEACH I/O TEST STOP SMC LC5-1-T1 TEACHING BOX 130

Positioning Driver Series LC6C

LED for power supply, LED for alarm 5 to 40C (41 to 104F) Dimensions (mm) 1in=25.4mm LC6C220AD Dedicated teaching box LC51T1 02 TEACH 42 97 POWER ALM PARA AL-RES JOG MON I/O TEST 38 130 STOP SMC LC5-1-T1 TEACHING BOX 96 35 RET ESC/ $MODE 50 21

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

, D-A9V (mm) D-F9, D-F9V (mm) D-F9W, D-F9WV A A A B B B Bore size 16 25 32 Operating range Bore size 16 25 40 Operating range Bore size 16 25 40 Operating range 54 106 58 102 57 103 54 156 58 152 57 153 11 8.5 8.5 85 245 89 241 88 242 (mm) (mm) (mm) C C C D D D Bore size 16 25 32 Operating range Bore size 16 25 32 Operating range Bore size 16 25 32 Operating range 27 133 6.5 31 129 4 30 130

3 Way Direct Acting NVKF 300 Series

Vacuum) 1 Torr"100 PSI (-100 KPa-0.7 MPa) NVKF333W ilow wattaoe + Vacuuml 2 position srngre solenoid (for maniiold) 0r5 NVKF334 0 ' 1 0 0 P S I (0-0.7 MPa) o.25 n 1 < 1/8 NPTF u.zt ir5 0.271 lbs (120 sf) NVKF334Y lLow waltaoe: 2WDC) NVKF334V lVacuum) '1 Torr-100 PSI (-100 KPa-0.7 [,lPa) NVKF334W ilow waltaoe + Vacuuml Basg mounted 1 1 0V 50/60 HZ, 220v 51 er,t1z, 1 00v 50/6o HZ, 2o0v 59 @lz 130

Air Pilot Operated Series NVSA

NXT 333-17-5 B D lt J K tl 5.12 {130) 1.95 (4e.5) 1.99 (50.s) '|.52 (38.5) 1.44 (37.5) 1 . 1 0 (2Bl 1.06 l27l 0,63 (16) 1.42 (36) 0,91 (23) 0.61 irs.5) 1.26 (32) 13 Gasket Subplate Buna N AxT 33$ 12.2 l 4 Cushion . "8" End AXT 334.5 Millltute.s in Parenlheos r0 DIRECTIONAL AIR VALVE DIMENSIONS PARTS LIST nrr.*.t.*,. SERIES NVSA 4&14 DETAIL REF, OESCBIPTION TMTERIAL PAFT NO. Body Alum.

3 Way,3 Port Solenoid Valve NVZ Series

A A , $TJ-b SZI;TF P R P B Model '.6NPTF 0.26 (130) 0 4 8 .,6. ].;NPTF with 0.26 (1 Air and inert 20-100 PSI (15/cm'1 pressure vAc-1 l0Torr External pilot pressure 20-'100PSl(15 "7ks{/cm'?) Max. 120"F (50'C) 20ms or less (7OPS|) 600 cpm Nonlocking push type, (std-) Slotted locking type, Knob type (opt.)

Silencers NAN, NAMC Series Compact Mufflers, Exhaust Cleaners

2.44 (621 1.18 (30) N2505-N003 45.9 (2.5) .23 (106) 2.52 {Ml 1.18 (30) N2s06-N004 U2 50.0 {2.7) .25 (113) 2.68 (68) 1.18 (30) 2507-N006 3/. 105.6 (5.8) .68 (310) 3.48 (88.5) 1.89 (48) it2508.tit01 0 129.6 17 .21 1.13 (514) 3.84 (97.5) 2.36 (60) t{2510.N002 th 17.2 (0.95) (s7) 2.13 (54) 0.87 (22) t{2511-N003 % 17.2 (0.95) (5s) 2.20 (56) 0.87 (22) Nclise L.evel Construction/Dimensions (mm) 130

Compact Cylinder with Air Cushion Series RQ

Mounting bolt Model C Mounting bolt M5 x 65l x 70l x 75l x 85l x 95l x 120l x 145l M6 x 85l x 95l x 105l x 130l x 155l Model C Mounting bolt M5 x 50l x 55l x 60l x 65l x 75l x 85l M5 x 55l x 60l x 65l x 70l x 80l x 90l M5 x 60l x 65l x 70l x 80l x 90l x 115l x 140l D 65 70 75 85 95 120 145 85 95 105 130 155 D 50 55 60 65 75 85 55 60 65 70 80 90 60 65 70 80 90 115 140 R(D)QB20-15 -20 -25 -

Stopper Cylinder Adjustable Mounting Height Type Series RSG

RSG-R Bore size: 40, 50 Direction of work piece conveyance (51 + Stroke) M45 x 1.5 24 Stroke 60 25 A 4-9 through Stroke 130 + 2 Strokes 67 + Stroke Approx. B Integrated One-touch fitting type QB Piping tube O.D. QA Stroke Approx. QV mm Note 1) Body dimensions when not equipped with auto switches are the same as in the drawings above.