PF2D

A quick recovery time indicates little liquid pool. 50 Ratio of resistance [k m] Particle ratio [number/cc] PFMC 100 2 or 3 particles/cc PFMV 10 00 10 20 30 40 50 60 70 PF2A 1 0 5 10 15 20 25 30 Duration of flow [min] Duration of flow [hour] PF3W The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16 Mcm of deionized water at class 10 clean room

PF2D

Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16 Mcm of deionized water at class 10 clean room (1 l/min flow rate).

ZPT/ZPX

width across flats 17 M22 x 1.5 Hexagon width across flats 30 9.5 10 50 9.5 Width across flats 19 H 70 Width across flats 60 4-M5 x 0.8 G 11 F E Y 4 40 C A B D Dimensions (mm) A B C D E F G H Y Model ZPT100HBJ25-B01-A22 104.5 178.5 50-B01-A22 140.5 214.5 100 103.1 68.6 106.7 47.5 60.5 35.5 75-B01-A22 180.5 254.5 100-B01-A22 215.5 289.5 ZPT125HBJ25-B01-A22 113 187 50-B01-A22 149 223 125 128.5

3 Port Solenoid Valve Series VQ100 1

/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Other 1 2 3 4 5 6 9 Note) Option Note) Except large flow type.

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

12 3.2 24 Rc 5.8 2 38.5 57 12 3.2 24 5.8 2 38.5 57 12 3.2 24 5.8 2 38.5 57 12 3.2 24 5.8 2 38.5 60 12 3.2 26 5.8 2 39.5 60 12 3.2 26 5.8 2 39.5 75 17 4.2 28 7.5 3 50 75 17 4.2 28 7.5 3 50 Screw-in connection (Mounting hole) Model A 67.5 29.5 16 12 28 5 47 67.5 29.5 16 12 28 5 47 67.5 29.5 16 12 28 5 47 67.5 29.5 16 12 28 5 47 70.5 30.5 18 12 29 5 50 70.5 30.5 18 12 29 5 50 86.5 39 23 14 35

Digital Gap Checker

Detection nozzle: 1.5 Detection nozzle piping: F type 4 x 2.5 tube 1 m, 3 m, 5 m/G, H type 6 x 4 tube 1 m, 3 m, 5 m Supply pressure: 200 kPa Test conditions ISA3-F ISA3-G 300 60 3 m 1 m 250 50 5 m 1 m 5 m Displayed value Displayed value 200 40 3 m 150 30 100 20 50 10 0 0 0.3 0.25 0.2 0.15 0.1 0.05 0 0.06 0.05 0.04 0.03 0.02 0.01 0 Actual distance [mm] Actual distance [mm] ISA3-H 500 450 3

PSxx-OMU0008CN

No.PS-OMU0008CN-D // ZSE20C(F) ISE20C(H) 2 9 11 12 16 16 19 21 [] 24 25 3 26 28 30 30 30 F0 32 F1 OUT1 33 F2 OUT2 36 F3 38 F4 39 F5 FUNC 41 F6 43 F10 44 F11 50 F80 51 F81 52 F82 54 F90 55 F96 57 F97 58 F98 60 F99 62 63 67 67 68 77 77 79 -1No.PS-OMU0008CN-D 1 (ISO/IEC)(JIS) *1) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems

ZCUK

20, 25, 32 5, 10, 15, 20, 25, 30, 40, 50 TN TF R Rod piping/ Pad direct mounting 32 32 mm Note) In the case of rod piping (Q, R), TF (G1/8) is not available.

PFxx-OMO0007CN

[n_2] 2 (OUT1) 50 [F_1] 22 [n_3] 3 (OUT2) 50 [n_4] 4 (OUT2) 50 [F_2] 22 () [1nL] 3 (OUT1) [ 0] [1nH] 3 (OUT1) [ 0] [F_3] 22 [2nL] 3 (OUT2) [ 0] [2nH] 3 (OUT2) [ 0] n P -25No.PF-OMO0007CN [F_1] <> [F_1](OUT1OUT2 [F_1]) 1 (OUT1) [n_1] (20 ) [P_1] 2 (OUT1) [n_2] (20 ) [P_2] 3 (OUT2) [n_3] (20 ) [P_3] 4 (OUT2) [n_4] (20 ) [P_4] [F_1] -26No.PF-OMO0007CN [F_2] () <> [F_2](OUT1OUT2

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

XMH-25 XMH-40 XMH-50 40 50 65 70 P.C.D 27 P.C.D 58.7 XYH/In-line type D C G C H B J E A Fn (KF flange) (mm) Model A 75.8 102.5 119 B 48 66 79 C 1 2 2 D 23.5 38 53 E 40 55 75 Fn 26 41 52 G 40.5 57 70 H 21.5 30 35 J XYH-25 XYH-40 XYH-50 100.2 130 178 13 Technical Data 1 Seal Materials Available 4 Molecular flow conductance FKM (fluoro rubber) With low outgassing, low permanent-set and low

INFORMATION For material handling and clamping of small workpieces 34 mm Power Clamp Cylinder Compact Type New New ø25, ø32 Lightweight Compact 53 mm High clamping force Lock function Lightweight Weight : 580 g (ø25) 192.4 mm Width : 34 mm Compact Heigh

63, 80 Aluminum (40) Iron (50, 63, 80) G, NPT 30, 45, 60, 75, 90 105, 120, 135 TURCK, P&F Aluminum body with reduced weight (40) Power Clamp Cylinder/CKZ2N Equivalent bore size [mm] Body material Port Arm opening angle Switch 50, 63, 80 Iron NPT, G 30, 45, 60, 75, 90 105, 120, 135 TURCK, P&F NAAMS Standards compliant Safety Instructions Be sure to read the Handling Precautions for SMC Products

Suction Guard (Produced upon receipt of order) FHG Series

L-type block (75) (50) W R P Q Port size Weight (kg) d K W Y AE (mm) (75) (50) W J W (mm) 1/2B (04) 3/4B (06) 1B (08) 1 1/4B (10) 1 1/2B (12) 2B (16) 2 1/2B (20) 3B (24) 22.2 27.7 34.5 43.9 49.1 61.1 77.1 90.0 47 47 47 50 50 50 50 50 70 70 70 85 85 85 105 105 9 9 9 9 9 9 9 9 62 62 62 65 65 65 65 65 3.5 3.5 3.5 6.2 6.2 6.1 11.9 11.9 Port size Weight (kg) E J P Q Port size Weight (kg) E 69

Magnetic Separator FHM Series

40 30 20 10 0 1 5 10 50 100 100 90 80 100 90 80 70 60 50 40 30 20 10 0 100 200 300 400 500 100 200 300 400 500 100 200 300 400 500 Elimination ratio (%) Elimination ratio (%) Elimination ratio (%) 75 70 60 50 40 30 20 10 0 1 5 10 50 30 100 1 5 10 50 100 Flow-back count Flow-back count Flow-back count Explanation of graph Explanation of graph Example: Elimination ratio and concentration after

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

S) (mm) Dimensions PB S Model LVD2-T LVD3-T LVD4-T LVD5-T PA 13 26 A B 26 29.5 Dimensions (mm) A B C D E F G H J K L M N P Q T U Model LVD2-T LVD3-T LVD4-T LVD5-T 30 30 61 56 14.5 104 35 13 4 20 44 7 30 6 31.5 17 M5 to 0.8 35 35 79.5 62 17.5 136 42.5 17.5 6 22 50 7 37 6 36 21 M5 to 0.8 35 35 82 62 20 137 45 17.5 6 22 50 7 39 6 36 21 M5 to 0.8 45 45 105.5 76 25 169.5 65 17.5 8 32 64 7 52 6

ML1C

Model M1 M2 M3 W1 W2 W3 W4 ML1C25 14.7 4.90 4.90 20 12 3 10 ML1C32 29.4 9.80 9.80 32 19 5 16 ML1C40 58.8 19.6 19.6 50 30 8 25 Caution on Design ML1C/M1 Allowable moment and Load Mass Maximum Allowable moment and Maximum load mass varies depending on mounting orientation, piston speed, etc.

Series VC, Series VCB, Direct Operated 2 Port Solenoid Valve for Heated Water

99 50 44 59 22 1/8 VCB21 M4 12.8 18 28 12.5 8.5 31 67.5 36 6 18 86 66 53 99 53 44 62 22 1/4 M5 19 20 32 15 11 36.5 81.5 40 8 22 99 68 66.5 101 66.5 46 76 24 1/4, 3/8 VCB31 M5 23 25 32 15 13.5 36.5 86 50 8 30 104 68 71 101 71 46 80 24 1/2 M5 23 22.5 36 17 11 41 90 45 8 22 107 70 74.5 103 74.5 48 84 26 1/4, 3/8 VCB41 M5 23 25 36 17 13.5 41 94 50 8 30 111.5 70 78.5 103 78.5 48 88 26 1/2 M5

PSxx-OMV0003CN

<> UPDOWN[F80] SET UP DOWN SET [F80] 30 () [ECo] (ON) ON OFF -46No.PS-OMV0003CN-G [F81] <> UPDOWN[F81] SET UP DOWN SET UP DOWN () [oFF]() SET (000) /(59) [FAL] 3[nG] SET1 -47No.PS-OMV0003CN-G UP DOWN /(59 ) SET 1 () UP DOWN SET [F81] 30 -48No.PS-OMV0003CN-G [F90] <> UPDOWN[F90] SET UP DOWN [on] [oFF]() SET [oFF]() SET [F90] SET 50 UP DOWN SET2 -49No.PS-OMV0003CN-G

MGZ Series

40 510 30 50 70 100 200 300 2 10 30 50 70 100 200 300 Eccentric distance L (mm) Eccentric distance L (mm) Continuous line: Operating pressure 0.4MPa or more Selection graph to 700mm/s Selection Example: Vertical Upward Mounting 100 50 Selection conditions Mounting: Vertical upward (lifter) Maximum speed: 500mm/s Load weight: 40kg Eccentric distance: 80mm Load weight m (kg) Refer to graph

Direct Operated Precision Regulator ARP20/30/40 Series  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

It can damage the pressure gauge. 768 ARP20/30/40 Series Specific Product Precautions 2 Be sure to read this before handling the products. Refer to back page 50 for Safety Instructions and pages 387 to 391 for Precautions on every series. Adjustment Caution Maintenance Warning ARJ 5. The product consumes a small amount of fluid from the bleed port.

Non-contact Gripper

workpiece (mm) 0 1 2 3 4 5 6 7 8 9 10 Distance from the workpiece (mm) Size: 80 Size: 100 30 50 0.4 (MPa) 0.4 (MPa) 25 40 0.3 (MPa) 0.3 (MPa) Lifting force (N) Lifting force (N) 20 30 0.2 (MPa) 15 0.2 (MPa) 20 10 0.1 (MPa) 0.1 (MPa) 10 5 0 0 0 1 2 3 4 5 6 7 8 9 10 Distance from the workpiece (mm) 0 1 2 3 4 5 6 7 8 9 10 Distance from the workpiece (mm) 738 Non-contact Gripper XT661 Series