ZFC Series

Metric size Type (recommended flow rate) Symbol Tubing size Applicable model 04 ZFC100 ZFC100 ZFC200 ZFC200 4 Flow rate l/min (ANR) (SCFM) Symbol Tubing size 100 200 101 201 Max. 20 (0.70) Max. 50 (1.75) Max. 20 (0.70) Max. 50 (1.75) Metric size (release button: light gray) 06 6 08 8 Inch size (release button: orange) Inch size Symbol 03 Applicable model ZFC101 ZFC101 ZFC201 ZFC201 Tubing

VT325

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Surge voltage suppressor Nil V Standard For vacuum Electrical entry Rated voltage VT Nil None 1 2 3 Option 100 VAC, 50/60 Hz G Grommet, Lead wire length 300 mm C Conduit D DIN terminal With surge voltage suppressor VP 200 VAC, 50/60 Hz Port size 110

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

Dimensions Formulae L1 = 11n + 15.5 L2 = 11n + 55 n: Stations (max. 16 stations) L n 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 191.5 231 262.5 273 16 L1 L2 (L3 ) (L4 ) 26.5 66 87.5 98 37.5 77 100 110.5 48.5 88 112.5 123 59.5 99 125 135.5 70.5 110 137.5 148 81.5 121 150 160.5 92.5 132 162.5 173 103.5 143 162.5 173 114.5 154 175 185.5 125.5 165 187.5 198 136.5 176 200 210.5 147.5 187 212.5 223 158.5

3 Port Solenoid Valve, VQ100 Series, Base Mounted Type

3 Port Solenoid Valve Base Mounted Type VQ100 Series Compact Design With Large Flow Rate High Speed Coil (ON: 3.5 ms) Long Service Life (200 million cycles) Innovative Manifold Construction Table of Contents Product Features .5 Specifications .6 How to Order .7-9 Plug-in Non plug-in Dimensional Drawings .10-14 Plug-in Non plug-in Construction .14 Operation Guide .15-18 The Preferred

Compatible motors (W): 100/200/400; Power supply voltage (VAC, 50/60Hz): 100~120V no longer available; 200~230 (LECSS-S); 200~240 (LECSS-T); Display and settings buttons for direct input and status monitoring; LEC-MRC2 Configuration software required (sold separately); C-UL-US listed (LECSS2-T only)

Compatible motors (W): 100/200/400; Power supply voltage (VAC, 50/60Hz): 100~120V no longer available; 200~230 (LECSS-S); 200~240 (LECSS-T); Display and settings buttons for direct input and status monitoring; LEC-MRC2 Configuration software required (sold separately); C-UL-US listed (LECSS2-T only)

① Standard strokes from 100 to 1000 mm are available in 100 mm increments, and 1200 to 2000 mm strokes are available in 200 mm increments.
② Intermediate strokes can be manufactured from 1 mm in 1 mm increments for the standard model.
③ Long strokes are available up to the max. available stroke length in 1 mm increments.

AS

[L/min (ANR)] 200 06 200 04 06 08 50 500 04 100 100 0 0 0 0 5 10 5 10 5 10 5 10 Number of needle rotations Number of needle rotations Number of needle rotations Number of needle rotations Note) The numbers above the flow rate characteristic curves in the charts show the tubing diameter as defined by the product number.

Speed Controller with One-touch Fittings In-line Type/Panel Mount Type AS  1F-3 Series

How to Order 1 F 06 3 200 AS Flow Direction Symbols on Body Hexagon lock nut Round lock nut J Nil Lock nut option Body size Indication symbol Panel mount type Symbol M5 standard 1/8 standard 1/4 standard 3/8 standard 1/2 standard 100 200 205 300 400 Made to Order Refer to page 622 for details. Applicable tubing O.D.

Series CJ2Y ø 10, ø 16 Smooth Cylinder Double Acting, Single Rod

Bore size (mm) Standard stroke (mm) Maximum manufacturable stroke (mm) 10 15, 30, 45, 60, 75, 100, 125, 150 400 16 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 400 Symbol Specifications -XAl Change of rod end shape -XC3 Special port location -XC9 Adjustable stroke cylinder/Adjustable retraction type Note 1) Manufacture of intermediate strokes at 1 mm intervals is possible.

Related Products: Heavy Duty Auto Drain Series ADH4000 1

AT Option: Reference Figure of Assembly ID Piping example of ball valve piping set AMG (45) (41) AFF (54) (100) AM Misc. 14-20-53

AMH

O 54 66 66 80 80 88 88 102 136 P 70 84 84 100 100 110 110 130 180 Q 26 28 28 34 34 50 50 60 76 R 4.5 5 5 5 5 9 9 10 12 S 1.6 2 2 2.3 2.3 3.2 3.2 4.5 4.5 T U 37 37 37 37 37 37 37 37 37 AMH150 1 8 1 4 3 8 166 187 187 218 218 241 241 277 334 24 27 27 32 32 37 37 39 55 159 172 178 204 210 225 232 259 311 13 13 16 16 19 19 22 22 32 100 113 119 145 151 166 173 200 253 63 76 76 90 90 106 106 122

Air Tank Series AT 1

1 Air Tank Series AT Model/Standard Specifications AT11C AT22C AT37C AT55C AT75C AT125C AT150C (1) AT220C (1) AT6C Model Fluid Tank capacity (l) 400 500 700 Compressed air 1000 1500 2000 3000 100 200 Max. operating pressure (MPa) Port size 0.97 Rc 1/2 Rc 3/4 Rc 11/2 2B flange 3B flange 4B flange Set pressure for safety valve (MPa) 0.97 1.46 0 to 100 Proof pressure (Under water pressure) (

MHx-OMM0057

/ mm mm mm c.p.m. mm(L1-L2) (L1) (L2) g MHL2-10D 60 20 56 76 280 MHL2-10D1 40 78 118 345 10 40 MHL2-10D2 60 96 156 425 MHL2-16D 60 30 68 98 585 MHL2-16D1 60 110 170 795 16 40 MHL2-16D2 80 130 210 935 MHL2-20D 60 40 82 122 1,025 MHL2-20D1 80 142 222 1,495 20 40 MHL2-20D2 100 162 262 1,690 MHL2-25D 60 50 100 150 1,690 MHL2-25D1 100 182 282 2,560 25 40 MHL2-25D2 120 200 320 2,775 MHL2-32D

CJ2Q

, 125, 150 Refer to p.0-39 to 0-46 before handling. 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 16 1.3-53 Series CJ2Q Mounting Accessories/Refer to p.1.3-12 for details.

Micro Mist Separator with Prefilter AMH Model Model AMH250 AMH350 AMH450 AMH550 AMH650 AMH850 AMH150 Series AMH can separate and (1) remove aerosol state oil mist in 500 1000 2000 3500 6000 12000 200 Rated flow (l/min(ANR)) compressed air and remove Po

Options J: With drain guide T: With element service indicator Element service indicator Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G H 10 10 10 10 10 10 10 10 10 I 56 66 66 80 80 90 90 100 150 J 15 20 17 22 19 25 21 30 40 K 5 8 8 8 8 10 10 10 15 L 9 12 12 14 14 14 14 16 20 M 5.5 6 6 7 7 9 9 9 11 N 35 O 54 66 66 80 80 88 88 102 136 P 70 84 84 100 100 110

AMPSeries

N101 Exhaust Cleaner for Clean Rooms AMPSeries Exhaust Air Cleanliness Equivalent to Class 100 Piping Labor Reduced Increased Space Savings Worry Free Two Stage Element Construction Series AMP Exhaust Cleaner for Clean Rooms An exhaust cleaner that can be used inside a clean room Exhaust air cleanliness: Equivalent to Class 100 (Consult SMC in advance, as this will differ depending on the

3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported/Base Mounted 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 150/50 (5) Grommet, DlN terminal VT Standard 100, 200 VAC, 50/60 Hz; 24 VDC 220, 110, 48, and 24 VAC (50/60 Hz) 100, 48, and 12 VDC Coil rated voltage VP Option 15 to 10% of rated voltage Allowable voltage fluctuation Coil insulation type VG Class B or

Microspeed Cylinder: Double Acting/Single Rod Series CJ2X ø 10, ø 16 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

How to Order Bore size 10 16 10mm 16mm Standard stroke (mm) 10 16 15, 30, 45, 60, 75, 100, 125, 150 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 Intermediate strokes other than the above are produced upon receipt of order.

AC Servo Motor Driver (MECHATROLINK-II type)

Example: Set 20 W (100 W 20%) for the 100-W external Regenerative resistor with natural convection cooling method: Pn600 = 2 (unit: 10 W) Note 1. If Pn600 is not set to the optimum value, alarm A.320 will occur. 2.