3 position cylinder series RZQ provides intermediate stop mechanism. 2 intermediate strokes are possible with only a small extension in total length. First stage stroke can be specified without changing the overall length. High accuracy is achieved by an intermediate stop method of pressing metallic components against each other. A tube rod with a large bore which is 70% the piston diameter

3 position cylinder series RZQ provides intermediate stop mechanism. 2 intermediate strokes are possible with only a small extension in total length. First stage stroke can be specified without changing the overall length. High accuracy is achieved by an intermediate stop method of pressing metallic components against each other. A tube rod with a large bore which is 70% the piston diameter

3 position cylinder series RZQ provides intermediate stop mechanism. 2 intermediate strokes are possible with only a small extension in total length. First stage stroke can be specified without changing the overall length. High accuracy is achieved by an intermediate stop method of pressing metallic components against each other. A tube rod with a large bore which is 70% the piston diameter

3 position cylinder series RZQ provides intermediate stop mechanism. 2 intermediate strokes are possible with only a small extension in total length. First stage stroke can be specified without changing the overall length. High accuracy is achieved by an intermediate stop method of pressing metallic components against each other. A tube rod with a large bore which is 70% the piston diameter

BP1000

80 100 Flow rate (slpm, N2) Hastelloy is a registered trademark of Haynes International.

Stainless Steel Cylinder Series CJ5-S/Series CG5-S

25 Tubing T, TU P. 26 Floating Joint/Stainless Steel Type JS P. 27 Features 2 Stainless Steel Cylinder Series CJ5-S 10, 16 How to Order Bore size Standard stroke (mm) 10 16 10 16 10mm 16mm 15, 30, 45, 60, 75, 100, 125, 150 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 Mounting B L F D Basic type Axial foot type Front flange type Double clevis type CJ5 L 16 S R 60 Without Auto Switch CDJ5 L

1.63

32 40 MGPWA20-100 0.2 0.2 MGPWA -50 32 40 MGPWA20-50 0.1 0.1 0 0 0 20 40 60 0 20 40 60 80 100 Load from lateral direction (N) Load from lateral direction (N) MGPWA25 MGPWA50, 63 0.5 0.5 Plate displacement amount (mm) Plate displacement amount (mm) MGJ 50 63 MGPWA -200 0.4 0.4 MGPWA25-200 JMGP 0.3 0.3 50 63 MGPWA -150 MGPWA25-150 0.2 0.2 MGP 50 63 MGPWA -100 50 63 MGPWA -50 MGPWA25-100 0.1

Auto Switch Guide

Applicable bore size (mm) Cylinder series 32 40 50 63 80 100 MDB1 BMP1-032 6-16-72

VCW

1 to 60 (No freezing) Fluid temperature (C) VC Dusttight/low jetproof (equivalent to IP65) Enclosure VDW Environment Location without corrosive or explosive gases (3) Valve leakage (cm3/min) 0 (With water pressure) VQ Mounting orientation Unrestricted (4) Vibration/Impact resistance (m/s2) 30/150 or less VX2 24 VDC,12 VDC,100 VAC,110 VAC, 200 VAC, 220 VAC (50/60 Hz) Rated voltage Allowable

JXCx-OMT0001CN

100 120 120 [mm/s] () 5 5 5 5 5 5 [mm/s] () 8 8 8 9 9 9 -110No.JXC-OMT0001CN-C LEHF10 LEHF20 LEHF32 LEHF40 K [mm] 40/15 50/15 70/16 70/16 (2.667) (3.333) (4.375) (4.375) mm/s 80 100 100 100 [mm/s] () 5 5 5 5 [mm/s] () 7 8 8 8 LEHS10 LEHS20 LEHS32 LEHS40 K [mm] 255/76 235/56 235/40 235/40 (3.355) (4.196) (5.875) (5.875) mm/s 70 80 100 120 [mm/s] () 5 5 5 5 [mm/s] () 8 8 9 9 TM -111No.JXC-OMT0001CN-C

Compact and

100 100 60 25 25 Vacuum pressure Vacuum pressure Vacuum pressure Vacuum pressure Air consumption [L/min(ANR)] Suction flow rate [L/min(ANR)] Air consumption [L/min(ANR)] Suction flow rate [L/min(ANR)] 50 80 80 80 20 20 Vacuum pressure [kPa] Vacuum pressure [kPa] Air consumption Vacuum pressure [kPa] Vacuum pressure [kPa] 40 60 60 60 15 15 Suction flow rate 30 Air consumption Suction flow

DOC1003626

This product Your system Broken AL34 Communication wire alarm is generated. o r 60 sec. coming off Communication alarm automatic restoration Normal connection 60 sec. Write or read Monitoring time 60 sec. Write or read Monitoring time 60 sec.

VM

(Total Travel) 60 Toggle lever VM430-01-08 Panel mounting hole Hexagon nut thick 6, across flats 27 JIS Symbol 4-4.5 mounting hole 7 N F.O.F. 60 T.T.

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

87 60 112 112 17-5-129 34 Series LQ 1 2 Fitting Assembly Procedure Assemble fittings following the procedure shown below.

SFOD-OMT0009CN

100 120 120 [mm/s] 5 5 5 5 5 5 () [mm/s] 8 8 8 9 9 9 () 110 No.SFOD-OMT0009CN-B LEHF10 LEHF20 LEHF32 LEHF40 K [mm] 40/15 50/15 70/16 70/16 (2.667) (3.333) (4.375) (4.375) [mm/s] 80 100 100 100 [mm/s] 5 5 5 5 () [mm/s] 7 8 8 8 () LEHS10 LEHS20 LEHS32 LEHS40 K [mm] 255/76 235/56 235/40 235/40 (3.355) (4.196) (5.875) (5.875) [mm/s] 70 80 100 120 [mm/s] 5 5 5 5 () [mm/s] 8 8 9 9 () 111

Air Preparation Equipment Degrees of quality Max. particle diameter ( µ m) Min. pressure dew point ( ° C) Max. oil density (mg/m 3 ) International Standard ISO 8573-1: 1991 Degrees of Quality Japanese Industrial Standard JIS B 8392-1: 2000 Degrees of Qual

Quality grade (3) as system Odor Application (2) Oil mist (1) density No.1 Solid Moisture No.1 Labor-saving equipment Jigs and tools General cleaning (Air blow gun) 5 m others 2, 10 20, 40 70, 100 Air Filter Series AF Series AF Traces of dust, moisture and oil can be tolerated 5 mg/m3 (ANR) Humidity 100% Oil odor Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco,

Fieldbus System

Absolute accuracy (77F) Current consumption 100 mA or less Enclosure IP67 (Manifold assembly) Standards CE marking, UL (CSA), RoHS recognition Weight 0.6 lbs (300 g) Note 1) M12 (4-pin) connector can be connected. Note 2) When input signal exceeds 22 mA, the protection function activates and the input signal is interrupted.

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

AC AC Note) SYJ300 LPush-locking slotted style LWith indicator light and surge voltage suppressor 50 60 50 L100V AC / Hz 110V AC / Hz 200V AC / Hz 220V AC / Hz 1.8 (0.1) 60 50 M5 X 0.8 60 50 60 SYJ500 4.5 (0.25) Rc(PT)1/8 SYJ700 9.0 (0.5) Rc(PT) 1 8 / 1 4 Note) All AC voltage models have built-in surge voltage suppressor. 2.2-2 Series SYJ300/500/700 Manifold Variations A port size With built-in

Nozzle Type Ionizer

8 mm, I.D. 5 mm, Length 100 mm to 500 mm O.D. 8 mm, I.D. 5 mm, Length 100 mm to 500 mm Supply pressure [MPa] 0.25 Flow meter 6 Union tee fitting 0.20 O.D. 6 mm, I.D. 4 mm, Length 500 mm O.D. 6 mm, I.D. 4 mm, Length 500 mm O.D. 6 mm, I.D. 4 mm tube (Length 10 mm) 0.15 0.10 O.D. 6 mm, I.D. 4 mm, Length 100 mm O.D. 6 mm, I.D. 4 mm, Length 100 mm 0.05 Ionizer 0.00 0 300 100 200 Flow rate [L/min

Compact Hydraulic Cylinder Double Acting/Double Rod Series CH
QWB ø 20, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100

Standard Strokes Standard strokes (mm) Bore size (mm) 20 32 40 50 63 80 100 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 JIS symbol 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Double acting/Double rod 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25,