CV/MVGQ

15-10 RS Q G RS H A RZQ Series CVM5/CVM5K 20 25 32 40 Standard MI W S 10-15-16 10-15-26 Double acting Nonrotating rod CEP1 CE1 Series CVM3/CVM3K Single acting (Spring return) (Spring extend) CE2 20 25 32 40 Standard 10-15-31 10-15-44 ML2B Nonrotating rod C J G5-S CV Series CV3/CV3K 40, 50 63, 80 100 Standard 10-15-50 MVGQ Double acting Nonrotating rod 40, 50 63 CC 10-15-63 RB Series CVS1/

SMC Pneumatic Clean Series

: 10 or more The mean q Non-unidirectional airflow: at least two locations NL = A x 64/(10M) 0.5 q Number of sampling locations: 2 to 9 95% UCL of the mean and the mean of the averages w Number of sampling locations: 1, or 10 or more The mean Derive it from the area of the cleanroom or clean air controlled space.

3-Screen Display Multi-channel Digital Sensor Monitor Up to 4 pressure sensors can be connected!

Terminal q DC (+) w N.C e DC () r IN (1 to 5 V) e w q Power supply/Output connection cable (Accessory) Power supply/Output connector (8P) Pin no. 7 Green 8 Yellow 6 Red 5 Gray 4 White 3 Black 2 Blue 1 Brown i u y t r e w q Pin no.

With Factory Installed

Q) ~ 0.3 1 '"' l' Q. Q) Q. Cautions on Use o ~ ~ 0 0.2 I:". When the primary pressure has been released, the residual pressure (secondary pressure) cannot be removed. If removal of residual pressure is needed, please contact SMC. ---... 0.1 O.l SiHI---t-t---t--t--t--+--t,., . 7 . r" " 1 I':.

Sine Rodless Cylinder Series REBR Direct Mount Type

Model determination 61 Series REBR Model Selection 2 Design Parameters 1 Selection Method REBR25 REBR32 REBR15 500 400 300 200 300 200 Allowable driving force Fn (N) Load weight W (kg) Allowable driving force Fn (N) Allowable driving force Fn (N) 50 100 100 40 30 40 50 20 30 40 50 30 20 20 Usable range 10 10 10 Usable

AR Series Modular Type Regulator

IN OUT IN OUT r r q w w Component Parts No.

Air Cylinder/Low Friction Series MB l Q ø32, ø40, ø50, ø63, ø80, ø100

20 25 30 30 35 40 45 45 55 13 13 14 14 20 20 27 27 31.5 31.5 38 38 13 14 15.5 16.5 19 19 1/8 1/4 1/4 3/8 3/8 1/2 16 16 16 16 16 16 84 84 94 94 114 114 4 4 5 5 5 5 4 4 5 9 11.5 17 M6 X 1.0 M6 X 1.0 M8 X 1.25 M8 X 1.25 M10 X 1.5 M10 X 1.5 6.5 9 10.5 12 14 15 6 6 7 7 10 10 47 51 58 58 72 72 M10 X 1.25 M14 X 1.5 M18 X 1.5 M18 X 1.5 M22 X 1.5 M26 X 1.5 135 139 156 156 190 190 up to 500 up to

CV/MVGQ

15-10 RS Q G RS H A RZQ Series CVM5/CVM5K 20 25 32 40 Standard MI W S 10-15-16 10-15-26 Double acting Nonrotating rod CEP1 CE1 Series CVM3/CVM3K Single acting (Spring return) (Spring extend) CE2 20 25 32 40 Standard 10-15-31 10-15-44 ML2B Nonrotating rod C J G5-S CV Series CV3/CV3K 40, 50 63, 80 100 Standard 10-15-50 MVGQ Double acting Nonrotating rod 40, 50 63 CC 10-15-63 RB Series CVS1/

AWG

1 e w w y y q q !2 !2 IN OUT IN OUT u r t i u r t i Component Parts Material AWG20K AWG30K AWG40K Note No. Description Body 1 ZDC ADC Platinum silver Bonnet 2 PBT Black Handle 3 POM Black Replacement Parts Part no. AWG20K No.

Series VQ4000 Base Mounted Plug-in/Plug Lead Single Unit For details about certified products conforming to international standards, visit us at www.smcworld.com.

Note) Purchasing order is available in units of 10 pieces. SI Unit Part No. Type Description Note Model symbol O A B BB C D F1 G H J1 J2 K Q R1 R2 U V QW NW SI unit part no.

ISG

AC 110 12 2 12 3 q e w e t y 220 10 1 10 1.5 440 6 1 3 1 550 5 0.8 2 0.5 r b contact w a contact r q DC 24 3 2.5 3 2.5 C C 48 1.5 1.2 1.5 1.25 When rising pressure q w = ON e r = OFF When rising pressure q e r y = ON q w r t = OFF 110 0.5 0.25 0.5 0.2 220 0.25 0.1 0.25 0.1 Insulation resistance: 100 M or more at 500 VDC by megameter Voltage resistance: 2000 VAC/1 min. 16-9-5 Series

4 Port Solenoid Valve Series VQD1000

n L 11 12 13 14 15 16 17 18 19 20 28 20 39 31 50 42 61 53 72 64 83 75 94 86 105 97 116 108 127 119 138 130 149 141 160 152 171 163 182 174 193 185 204 196 215 207 237 229 2 3 4 5 6 7 8 9 10 L1 L2 1 226 218 636 4 port direct operated poppet solenoid valve 10-VQD1000 Dimensions Plug lead unit manifold: 10-VV4QD15Air cylinder Rotary actuator Air gripper Directional control valve Fittings & Tubing

Booster Regulator Series VBA1110 to 4200 1

Accessory (Option) /Part No. 0.2 to 1.0 MPa VEX Model VBA2200 Ambient and fluid temperature 2 to 50C (No freezing) VBA1110-1 VBA4100 VBA2100 VBA4200 Description AMR G27-20-R1 2 pcs. G46-10-01 2 pcs. G27-10-R1-X209 2 pcs. G27-10-R1-X209 2 pcs. G46-10-01 2 pcs.

ZP

(mm) 02 04 2 4 Nil -X19 With lock ring Without lock ring (10 or larger) 1 2 10 to 16 20 to 32 ZX 06 6 3 40, 50 ZR 08 8 Material 10 10 ZM N S NBR Silicon rubber 13 13 16 16 Pad type U Urethane rubber 20 20 ZH F Fluoro rubber 25 25 U C Flat Flat with ribs GN Conductive NBR (2 to 16) 32 32 ZU GS Conductive silicon rubber (2 to 16) 40 40 D Deep 20 or large are manufactured upon receipt of order

Series AP3500

thread (2 each) Sides (2 each) Bottom mount 0.06 in3 (1.07 cm3) Leak rate Across the seat leak Surface finish Connections Actuation pressure Actuation port connection Actuation port location Installation Internal volume Adjustable range of metered flow 2) 10 to 200 slpm 10 to 350 slpm 6 slpm 10 slpm 15 slpm 20 slpm 10 to 20 slpm 21 to 50 slpm 51 to 100 slpm 101 to 200 slpm 201 to 350 slpm

Gun Type Ionizer

and replacement of emitters 5 q Removal of nozzle w Removal of emitter q Turn counterclockwise. w Pull forward to remove. q Turn counterclockwise. w Pull forward to remove. 6 Bypass nozzle (Option) OSHA1910.242b compliant Even if the nozzle is obstructed, the main orifice pressure cannot exceed 30 psi (210 kPa). * Supply pressure: 0.5 MPa or less 180 Gun Type Ionizer IZG10 Series Application

Digital Flow Switch (Integrated display type) ( compatible)

^-2 1: 10^-1 2: 10^0 3: 10^1 4: 10^2 5: 10^3 6: 10^4 7: 10^5 8: 10^6 AC_E_L (Setting L of the accumulated flow value conversion factor) Setting of the accumuated flow value conversion factor Unit specification (Unit): When "L" is selected. 1071 0x042F 0 R/W U8 2 Y 0: 10^-2 1: 10^-1 2: 10^0 3: 10^1 4: 10^2 5: 10^3 6: 10^4 7: 10^5 8: 10^6 Accumulated value setting AC_E_G (Setting G of the accumulated

Applicable Auto Switch Model

D-F9N(V)/D-F9P(V)/D-F9B(V) Applicable Actuator Series Grommet Series Bore size (mm) Series Bore size (mm) CDU MXS, MXQ 6, 10, 16, 20, 25, 32 6, 8, 12, 16, 20, 25 MXP CDQ2 32, 40, 50, 63, 80, 100 10, 12, 16 * MTS CDQS 12, 16, 20, 25 20, 25, 32, 40 CY1R MY1 16, 20 6, 10, 15, 20 ; MK MXW 8, 12, 16, 20, 25 12, 16 MK2 MXF 8, 12, 16, 20 32, 40, 50, 63 6, 10, 16 *Not available for series CDQP2

Series 10-VQD1000 4 Port Direct Operated Poppet Solenoid Valve

How to Order [Option] 10 V V 4 Q D 1 5 CE-compliant Nil None Q CE-compliant Clean series Manifold type 2 Body ported 5 Base mounted Valve stations 02 2 stations Port size Nil Body ported M5 thread M5 Base mounted M5 thread C4 Base mounted 4 One-touch fitting 20 20 stations (Maximum) How to Order Valve [Option] 10 V Q D 1 1 5 1 5 L M5 Clean series Body type 3 Body ported 5

Series 10-, 21- AF-A Air Filter

10-/21-AF20-A 10-/21-AF30-A 10-/21-AF40-A 10-/21-AF40-06-A 10-/21-AF50-A 10-/21-AF60-A 142.1 174.1 176.1 247.1 261.1 93.9 122.1 154.1 156.1 227.1 241.1 91.4 28 30 35 34 47 47 2.3 2.3 2.3 2.3 3.2 3.2 40 53 70 70 90 90 8.4 13 12.5 12.5 13 13 5.4 6.5 8.5 8.5 11 11 22 23 26 25 35 35 27 35 52 52 66 66 30 41 50 50 70 70 20 26.7 35.5 35.5 45 47.5 25 35 40 40 30 30 30 38.4 38.4 20 26.7 35.5 35.5