 
speed mm/s Piston speed mm/s 4 CY1F/m1 5 CY1F/m2 6 CY1F/m3 7 CY1F/m4 30 30 30 30 20 20 20 20 CY1F25 CY1F25 CY1F25 CY1F25 10 10 10 10 CY1F15 CY1F15 CY1F15 5 5 5 5 Load mass kg Load mass kg Load mass kg Load mass kg 4 4 4 4 3 3 3 3 CY1F15 CY1F10 CY1F10 CY1F10 2 2 2 2 CY1F10 1 1 1 1 0.5 500 300 100 50 0.5 500 300 100 50 0.5 500 300 100 50 0.5 500 300 100 50 Piston speed mm/s Piston speed mm
IN side, OUT side 4 10 22 20 22 30 30 50 30 75 39 75 39 Series ZFB Model ZFB100-04 ZFB100-06 ZFB200-06 ZFB200-08 ZFB300-08 ZFB300-10 6 6 8 8 10 Metric size 3/16" 20 22 20 22 30 30 75 40 100 62 ZFB101-05 ZFB101-07 ZFB201-07 ZFB301-11 ZFB401-13 1/4" 1/4" Inch size (2) 3/8" 1/2" Specifications Fluid Air/Nitrogen Negative pressure 0.5MPa 0 to 60C (Non-freezing) 30m 0.15MPa Nylon/Soft Nylon/Polyurethane
Connections 1/2 inch face seal 1/2 inch tube weld 0.21 30 3.
1 0 1 0 0 1 1 5 sec 1 0 0 1 sec 1 0 1 500 msec 1 1 0 200 msec 1 1 1 100 msec Bit 6 Zone M Output feedback 0 Disable 1 Enable Bit 7 55 No.EX##-OMY0006CN Table 10-9 Safety Mode (Module Passivation/xxx)Byte2Zone 1 Output feedback parameter Bit 2 Bit 1 Bit 0 OFF Table 10-8 Bit 5 Bit 4 Bit 3 ON Table 10-8 Bit 6 Zone1 Output feedback 0 Disable 1 Enable Bit 7 Table 10-10 Safety Mode (Module
8 10 0 1 2 3 4 5 Work load (W) kg Work load (W) kg Work load (W) kg 300 30 150 L2 200 20 M2 100 L2 mm L2 mm L2 mm W 100 10 50 L2 M2 0 10 30 20 0 1 2 3 4 5 0 2 4 6 8 10 Work load (W) kg Work load (W)kg Work load (W) kg 30 300 150 a=500 a=500 a=500 Horizontal/Lateral a=1000 a=1000 a=1000 20 200 100 a=2000 a=2000 L3 mm L3 mm L3 mm a=2000 L3 100 10 50 W M3 a 0 1 2 3 4 5 0 10 30 20 0 2 4 6 8 10
19 31 55 88 140 251 1 N 12 21 35 61 97 153 268 mm 4 4 6 8 8 12 16 g 66 110 154 300 390 590 1,095 1) 1625 L=20mm 3263 L=30mm 0.5MPa 4 MHSJ3 MHSJ316D MHSJ320D MHSJ325D MHSJ332D MHSJ340D MHSJ350D MHSJ363D MHSJ380D mm 16 20 25 32 40 50 63 80 MPa 0.20.6 0.10.6 -1060 mm 0.01 c.p.m. 120 60 30 9 21 36 62 97 155 280 400 1 N 16 28 47 82 130 204 359 525 mm 4 4 6 8 8 12 16 20 g 95 150 230 440
Note that M applies only to cup form: JT2. 16 16 Thin flat 20 20 Multistage bellows SF Silicone rubber (Blue) *1 25 25 T2 2.5-stage bellows *1 The silicone material is compliant with the FDA(U.S. Food and Drug Administration) regulation 21CFR177 B25 25 T5 5.5-stage bellows B30 30 32 32 1 Suction Cup Part Numbers and Weight See the table below for the suction cup part combination.
) 40 50 100 Larger than 50st 50st 25st 30 25, 50st 20 50 40 10 30 5 4 3 2 20 1 10 20 30 40 50 100 200 300 1 2 3 4 5 10 20 304050 100 200 300400 Eccentric distance l (mm) 10 400 Eccentric distance l (mm) Allowable side load F(N) 1 N: Approx. 0. 102 kgf F Stroke (mm) Bore size (mm) Model 25 50 75 100 125 150 175 200 MGTM 140 151 162 176 193 212 178 204 63 MGTL 199 212 226 243 170 186 127 143
error 3 warning (Flash-ROM) AL.E8 Cooling fan speed AL.1A 1 1 0 Motor combination error reduction warning AL.20 1 1 0 Encoder error 2 AL.E9 Main circuit off warning (during runtime) AL.EA ABS servo on warning AL.21 1 1 0 Encoder error 3 AL.EC Overload warning 2 (during runtime) AL.ED Output watt excess AL.24 1 0 0 Main circuit error warning AL.25 1 1 0 Absolute position erase AL.30 0 0 1
D-M9/M/9W/M9A Less than 20 stroke Note 2) Less than 55 stroke Note 2) D-A90/A93 Less than 50 stroke Note 2) Note 2) Minimum stroke for auto switch mounting in styles other than those mentioned in Note 1. 12 Auto Switch Mounting Series CJ2Y Operating Range Auto Switch Mounting Brackets/Part No.
/s (4) CY1F/m1 (5) CY1F/m2 (6) CY1F/m3 (7) CY1F/m4 30 30 30 30 20 20 20 20 CY3B CY3R CY1F25 CY1F25 CY1F25 CY1F25 CY1S 10 10 10 10 CY1L CY1H CY1F15 CY1F15 CY1F15 5 5 5 5 Load mass kg Load mass kg Load mass kg Load mass kg 4 4 4 4 CY1F CY1F 3 3 3 3 CYP CY1F15 CY1F10 CY1F10 CY1F10 2 2 2 2 CY1F10 1 1 1 1 D0.5 500 300 100 50 0.5 500 300 100 50 0.5 500 300 100 50 0.5 500 300 100 50 -X Piston speed
mm/s Piston speed mm/s Piston speed mm/s (4) CY1F/m1 (5) CY1F/m2 (6) CY1F/m3 (7) CY1F/m4 30 30 30 30 20 20 20 20 CY1F25 CY1F25 CY1F25 CY1F25 10 10 10 10 CY1F15 CY1F15 CY1F15 5 5 5 5 Load mass kg Load mass kg Load mass kg Load mass kg 4 4 4 4 3 3 3 3 CY1F15 CY1F10 CY1F10 CY1F10 2 2 2 2 CY1F10 1 1 1 1 0.5 500 300 100 50 0.5 500 300 100 50 0.5 500 300 100 50 0.5 500 300 100 50 Piston speed mm
Nm Moment Nm Moment Nm 4 4 4 CX CY1F15 3 3 3 DCY1F10 2 2 2 -X CY1F15 CY1F15 20CY1F10 CY1F10 1 1 1 Data 0.5 0.5 0.5 500 100 300 50 500 100 300 50 500 100 300 50 Piston speed mm/s Piston speed mm/s Piston speed mm/s (4) CY1F/m1 (5) CY1F/m2 (6) CY1F/m3 (7) CY1F/m4 30 30 30 30 20 20 20 20 CY1F25 CY1F25 CY1F25 CY1F25 10 10 10 10 CY1F15 CY1F15 CY1F15 5 5 5 5 Load mass kg Load mass kg Load mass
Internal C 13 38 57 83 161 267 gripping force Open/close stroke (Both sides (mm) 4 6 10 14 22 30 230 420 715 1,275 Note 2) Weight (g) D 55 115 SC 235 425 760 1,370 Note 1) Values based on pressure of 0.5 MPa, gripping point L=20 mm, at center of stroke. Note 2) Values excluding weight of auto switch. 4 - 2. Operating method or operation 2-1. Design precautions Warning 1.
() (1) (2) 1 () (3) -45No.PS-OMR0001CN-J 4 2 [F 0] [F] 2 2 [][] 2 F 0(Unit) [ PA] kPa 47 ISA3-F[ 20] ISA3-G[ 50] ISA3-H[ 50] F 1(oUt1) OUT1 48 ISA3-F[ 3] ISA3-G[ 20] ISA3-H[ 20] [ SoG] ON OFF F 2(oUt2) () [ ---] 50 F 6( FSt) [ 0.0] 0.0 51 F10( SUb) [ LEvEL] 52 F80( dSP) OFF [ on] () 53 F81( Pin) [ oFF] 54 F90( ALL) [ oFF] 55 F98(tESt) [normAL] 56 F99( ini)
Rack & Pinion Type Rotary Table Size: 1, 2, 3, 7, 10, 20, 30, 50 Series MSQ 1122How to Order Size: 1, 2, 3, 7 11 Vacuum suction type Clean series A High precision type B Basic type 1 Size Nil E Side ported Front ported 2 3 7 11 MSQ B 1 A M9B Number of auto switches A With adjustment bolt Nil S n 2 pcs. 1 pc. n pcs.
Vacuum port pressure range: 101 kPa to 0.6 MPa 
variable (Default: 20) Rated pressure range 0 to 200 kPa Setting pressure range -20 to 220 kPa Minimum display/ setting resolution 1 kPa OUT2 6 Repeatability 0.5%F.S. 1 digit Temperature characteristics (Reference: 25 oC) 2%F.S.
391 80 540.5 80 11B 450 550 650 850 22B 37B 75B 1 2 1 2 14-20-55 Water Separator, Oil Mist Separator, Deodorizer Made to Order Specifications: Please consult with SMC for detailed specifications, size and delivery. 3.