10

How to Order 50 L Q 32 F MB With auto switch MDB L Q 32 50 F M9BW With auto switch (Built-in magnet) Made to Order Number of auto switches Mounting type B Basic L Axial foot F Rod flange G Head flange C Single clevis D Double clevis T Center trunnion Nil 2 pcs. S 1 pc. 3 3 pcs. n n pcs.

CLK1

Unit: kg Series CLK1A Series CLK1B Description Bore size (mm) 40 32 50 63 32 40 50, 63 50, 63 F: 0.53, B: 0.51 F: 1.04, B: 0.98 F: 1.48, B: 1.42 F: 2.13, B: 2.07 Basic weight Single knuckle joint Additional weight per 25mm of stroke Cylinder CL1K32-17-R5004 CL1K40-17-R5006 CKA40-17-101B CKB40-17-102B 0.05 0.08 0.11 0.13 Double knuckle joint CL1K32-18-R5004 CL1K40-18-R5006 CKA40-18-206C

IDU/IDF

22 Accessories (Options) Base Integrated with Transformer Dryer Transformer E F D C A Part No.

VM

Port size Body size Thread size Thread type Symbol N F Rc NPT G 01 02 03 04 06 10 1/8 1/4 3/8 1/2 3/4 1 An interface part is required if a spacer or spacer with bracket shown in the table below is attached to a modular FRL.

High Vacuum Angle Valve

Bellows seal C Double acting Bellows seal F Single acting (N.C.)

ZSE40/ISE40

Note 2) For ZSE40 (F)/ISE40--22 62 Note 3) For ZSE40 (F)/ISE40--30 70 Note 4) For ZSE40F (compound pressure) with psi indication, this is 0.03 to 0.04 psi. Note 5) For ZSE40F (compound pressure) with psi indication, zero clear is in the range of 0.01 psi.

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

Basic style: CM2YB Width across flats B2 2-P (Port size) (Rc, NPT, G) 2-NN H1 H2 G G RE A B Width across flats B1 I REC 2-Eh8 D CX MM AL A F F NA 1.5 1.5 CY N N K H S + Stroke ZZ + Stroke MQQ M RHC Boss-cut MK(2) RS Q G RS H A RZQ ZZ + Stroke MI W S CEP1 CE1 (mm) CE2 AL B1 B2 D E F G H H1 H2 I K MM N NA NN P S ZZ A Bore size (mm) 20 25 32 40 0 0.033 0 0.033 0 0.033 0 0.039 18 15.5 13 26 8

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

Basic style: CM2YB Width across flats B2 2-P (Port size) (Rc, NPT, G) 2-NN H1 H2 G G RE A B Width across flats B1 I REC 2-Eh8 D CX MM AL A F F NA 1.5 1.5 CY N N K H S + Stroke ZZ + Stroke MQQ M Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com RHC Boss-cut MK(2) RS

Thermo-chiller/Rack Mount Type

For pipe thread type F , a G thread conversion fitting set is included.

CXWM/CXWL

A B C D E F A B C D E F G H Pressure port Pressure port Right Left Left Right Left Right Right Left Left Right Right Left Left Right Operating direction Operating direction There are 9 possible reciprocating piping methods. There are 16 possible reciprocating piping methods.

Rubber seal 5 Port Solenoid Valve Series SYJ5000

O.D.: 4, 5/32" : 6, 1/4" (2.3) L plug connector (L): SYJ5120-L-M5(-F) M plug connector (M): SYJ5120-M-M5(-F) DIN terminal (D): SYJ5120-D-M5(-F) M8 connector (W0): SYJ5120-W0-M5(-F) Approx. 300 (Lead wire length) Applicable cable O.D. 3.5 to 7 82.1 Max. 10 60.9 28.1 [35.1] 53.4 12.7 42.1 32.6 M8 x 1 15.1 39.2 [46.2] Approx. 300 (Lead wire length) Pg7 73 [75.2] (2.3) 63.2 [65.4] 83 72.1 3

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

(For details, refer to catalog on page 22.) 17 Series SYJ500 Construction c f a e b d c f a e b d N.C. N.O.

Integrated Controller

Rubber back of the belt is softened and sticky f . Cracks on the back of the belt are visible The traveling parallelism is the reference plane for the body mounting reference plane. If the traveling parallelism for a table is required, set the reference plane against parallel pins, etc.

PFM7.eng

Press this button to change to the peak display mode. button (UP) [F 4] [F 5] [F 6] [F 7] [F 8] [F 9] [Anr.] Standard condition [1.00] 1 second Selects the mode or decreases the ON/OFF set value. Press this button to change to the bottom display mode. CAUTION indicates a hazard with a low level of risk which, if not avoided, could result in minor or moderate injury.

HRX-OM-X084

Piping thread type : When F is selected, G thread adapter set will be added.

240

Table displacement due to pitch moment load (marked with the arrow) Table displacement due to yaw moment load (marked with the arrow) Table displacement due to roll moment load (marked with A) F A F F L L Distance L [mm] Model LEPS6 LEPS10 Stroke [mm] 25 50 25 50 Distance L [mm] 53.0 77.0 59.5 82.0 LEPS6 LEPS6 LEPS6 0.30 0.30 0.10 0.25 0.25 Displacement [mm] Displacement [mm] Displacement

HRX-OM-R016

Model number: HRS030-F-20 The transition connector from Rc to G is enclosed as an accessory. For G piping, be sure to use this connector.

High Precision Digital Pressure Switch, Series ZSE40/ISE40

Note 2) For ZSE40 (F)/ISE40-Note 3) For ZSE40 (F)/ISE40-Note 4) For ZSE40F (compound pressure) with "psi" indication, this is 0.03 to 0.04 psi.

IDX-OM-W020

(2.8C) (17 m 3/h) (25 m 3/h) (43 m 3/h) (70 m 3/h) (100 m 3/h) (120 m 3/h) 11 SCFM 16 SCFM 26 SCFM 43 SCFM 62 SCFM 80 SCFM 45 F (7.2C) (19 m 3/h) (27 m 3/h) (45 m 3/h) (74 m 3/h) (106 m 3/h) (136 m 3/h) 17 SCFM 28 SCFM 45 SCFM 65 SCFM 86 SCFM 12 SCFM 50 F (10C) (20 m 3/h) (28 m 3/h) (47 m 3/h) (77 m 3/h) (110 m 3/h) (147 m 3/h) 100psig (0.7MPa) 100 F (37.8C) 100 F (37.8C) 115V 60Hz

VCA

VCA20-12-1A 41 52 30 40 4.5 6 VCA30-12-1A 48 56 36 44 5.5 7 VCA40-12-1A 50 62 38 50 5.5 7 2 mounting screws (for mounting brackets) are included in bracket part no. 17-2-12 7 Series VCA Direct Operated 2 Port Solenoid Valve For Air Dimensions Grommet: G Conduit: C Q F D Q F 300 280 D VC G1/2 C R C R L VDW IN E E VQ Manual override A B B A 2-P Port size 2-P Port size VX2 VX Manual override