NCA1

2 3/4 Note) Pivot Pin not included Rod Clevises Part No CB CD CE CH CW F L A KK ER NY-150 0.765 0.5 1 1/2 1 1/2 1 3/4 3/4 7/16-20 1/2 NY-325 1.265 0.75 2 3/8 1 3/8 5/8 1 1/4 1 1/4 1 1/8 3/4-16 3/4 NY-800 1.515 1 3 1/8 1 1/2 3/4 1 1/2 1 1/2 1 5/8 1 -14 1 NY-1000 2.032 1 3/8 4 1/8 2 1 2 2 1/8 2 1 1/4 -12 1 3/8 NY-1200 2.531 1 3/4 4 1/2 2 3/8 1 1/4 2 3/8 2 1/4 2 1/4 1 1/2 -12 1 3/4 NY-1400

5 Port Solenoid Valve SY Series

4 39.4 20 (23.9) (P port) 1/4 0.9 31.5 [38.5] 2 18 40 EA P EB 24.5 28 For manifold gasket positioning 22.2 die-cast hole 36 (EA, EB port) 1/8 39.4 L plug connector (L) : SY7120-L(-F ) C8, N9 C10, N11 1 2 M plug connector (M): SY7120-M(-F ) C8, N9 C10, N11 1 2 DIN terminal (D): SY7120-D(-F ) C8, N9 C10, N11 1 2 M8 connector (W0): SY7120-W0(-F ) C8, N9 C10, N11 1 2 Applicable cable O.D. 3.5

2/3 Port Valve

MainPort Rc(PT) Pilot port Rc(PT) A Model B C D E F H J K L 1 8 1 4 1 4 105 120 140 77 96 113 53 60 74 26.5 30 37 120.5 137 160 20 24 24 129.5 147 170 229.5 247 270 197 214.5 237.5 55 63 74 1 4 1 2 1 1 2 VNC5-32A VNC6-40A VNC7-50A 4.2-24 VNC Port size: 32A, 40A, 50A Flange connection Applicable flange Pilot port Rc(PT) A Model B C D E F H J K L 32 40 50 1 8 1 4 1 4 130 150 180 210.5 226 250

CHKD/CHKG

e CH2 H E h + Stroke C B + Stroke 4 x K through 8 x L counter bore CHA J A + Stroke M Rod end male thread Related Products D(mm) A B C D E F G H J K L M P Q R S Bore size (mm) 20 51 43 8 12 10 M8 x 1.25 10 6 30 5.5 9.5 depth 5.4 43 1/8 16.5 6 11.5 25 53 45 8 14 12 M10 x 1.5 12 6 36 5.5 9.5 depth 5.4 49 1/8 17 8 12 32 66 56 10 18 14 M12 x 1.75 15 7 47 6.6 11 depth 6.5 63 1/4 19.5 10 19.5

5 Port Solenoid Valve, Series VQC

10A-1 VVQ2000-10A-1 Dual flow fitting assembly VVQ1000-52A-C8 VVQ2000-52A-C10 Perfect block VVQ1000-FPGVVQ2000-FPGCYL to port Conforms to IP40 Individual SUP spacer VVQ1000-P-1-C6 VVQ2000-P-1-C8 Port plug VVQ0-58A (For VQC1000) VVQ1000-58A (For VQC2000) EXH block plate assembly Elbow fitting assembly VVQ1000-F-L VVQ2000-F-L Electrical wiring specifications [-K] C3 C4 C6 M5 VVQC1000-19AD S

C95

R 1 GL WB T BG VD 4xRT I 9 H1 Q V VB 4xRT BG GF G I12 F GE BN 1 + Stroke 8 ZZ + Stroke AM WH H VA Be 11 46 52 65 75 95 114 Bore size (mm) B AM BP BN D EE GE BG GL 1 H 2 E1 GF H F GL E G GA GC GD 1 18.3 19.5 22.4 20.7 26 26 6 8 11 11 13 16 48 54 69 69 86 91 97 104 120.5 134.5 169 189 12 16 20 20 25 30 16 16 16 16 16 16 88.5 96.5 111.2 123.5 157 177 45.5 52.5 58.5 68 81 96 13 13 14 14 20 20

Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

invalid 4..5 Idle output (IO-Link) 0: Clear 1: Hold 2: Force ON 6..7 Idle output (DO) 0: 2 / 2 / 2 / 2 1: 4 / 4 / 4 / 4 2: 8 / 8 / 8 / 8 3: 16 / 16 / 2 / 2 4: 32 / 2 / 2 / 2 Process data mapping Port1/Port2/Port3/Port4 (Input and Output) 4 0..7 0 L+ control Port 1 0: L+ ON, 1: L+ OFF 1 L+ control Port 2 0: L+ ON, 1: L+ OFF 5 2 L+ control Port 3 0: L+ ON, 1: L+ OFF 3 L+ control Port 4

Cylinder with Lock

Overall length: h + H + S + (2 x Stroke) [mm] h + Stroke S + Stroke f 10.2 10.2 10.2 l f 10.2 l + Stroke ZZ + (2 x Stroke) h Bore size A AL B B1 BH1 BH2 BH3 BN BP C D E F GA GB GC GD GE GF H H1 J 32 22 19.5 46 46 23 38.5 46.5 59 1/8 32.5 12 30 13 37.5 13 37.5 18.5 4 13 47 6 M6 x 1.0 40 30 27 57 52 28.5 42.5 48.5 73 1/8 38 16 35 13 59.5 14 44.5 19.5 4 51 8 M6 x 1.0 50 35 32 66 65 33 49 55.5

Vacuum System Peripherals:

R L B 01 1 Nil F G Rc 1 8 ... ...

PSxx-OMM0006CN

D ZS-24-D X X X ZS-35-C X X X X X E ZS-35-D X X ZS-35-F X X X X X + F ZS-35-G X X 1/ 1 ZS-24-A A M35 L,M45 L 2 ZS-24-B B M45 L, 2 ZS-24-D D M35 L,M45 L 2 ZS-35-C (01,N01) ZS-35-D (W1,WF1,M5,C4,C6) ZS-35-F +(01,N01) ZS-35-G +(W1,WF1,M5,C4,C6) -10No.PS-OMM0006CN-E M8(3 ) 01 N M L ISE40A 1/ 2 ISE40A -0.11.000 MPa Y ZSE40A 0.0-101.3 kPa K + T + 1 01 R1/8(M5) N01 NPT1/8(M5) A A

Bag Filter

Applicable model Note 1) Cover 1 FGFC/R Carbon steel 1 FGF1 Cover 1 Stainless steel 1 FGFS/L Stainless steel 1 FGF1 Case 2 Stainless steel 1 Case Note 2) 2 FGFC/R Carbon steel 1 FGF1A FGF-BT01 1 Basket 3 Stainless steel FGF3A-40 3 FGF1B FGF-BT02 1 Stainless steel BT-3S FGF5A-60 5 FGF1A EJ501S1 3 Basket Element 4 Polyester FGF3B-40 3 FGF1B EJ601S1 Stainless steel BT-4S FGF5B-60 5 FGF1

CXWM/CXWL

Table (2) Housing Mounting Style with Auto Switch (CDBXW -) Component Parts for Mounting Switches and No. of Component Parts M L 10 16 20 25 32 Assembly model no. for mounting switch Component parts Material CDBXW 10MM L CDBXW 16MM L CDBXW 20MM L CDBXW 25MM L CDBXW 32MM L 1 1 1 1 Magnet mounting block ass'y Aluminum alloy 1 1 1 1 1 Aluminum alloy Switch mounting rail 2 Spacer Mounting block

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

W H T U Pin no. n LEC-CSNA-1 39 37.2 12.7 14 14 773 LECY M U Series Options cable type M LEC Y C 1 Cable length (L) Motor type Y AC servo motor L* 0.2 m J 0.5 m 1 1 m 3 3 m Cable description M MECHATROLINK-2cable U MECHATROLINK-3cable * Not available for the MECHATROLINK2cable. * LEC-CYM-l is JEPMC-W6002-ll-E manufactured by YASKAWA CONTROLS CO., LTD. * LEC-CYU-l is JEPMC-W6012-ll-E manufactured

PSxx-OML0002CN

mmHg 1 1 -26No.PS-OML0002CN-G [F 1] OUT1 OUT1 ONON OUT1ON,OFF 29 <> [F 1] 22 [P_1] [n_1]"P""n" [P_1] [P1L][P1H] -27No.PS-OML0002CN-G ON OFF ON OFF [F 1] OUT1 1 2 2 -28No.PS-OML0002CN-G () (H_1) () (H1) (H1) (H_1) (H1) (H1) OUT1 OUT2"1""2"() P_1 P_2 -29No.PS-OML0002CN-G [F 2] OUT2 OUT2 OUT1, <> [F 2] [F 1] OUT1(2729) 1[-], [F 3] <> [F 3] [F 3] -30No.PS-OML0002CN-G [F 4]

JXCx-OMT0061CN

CC-Link (P.77) D 1 () E 2 F 0 OFFON 1 17 () 8F 1:ABS 2:INC 70 L 1 1mm/s 2 F8 H (-) (+) 3 F0 L 0.01mm 11.1 (P.47) )RWw0,bit6: ON 655.37 4 F0 H 70 L 1 (*3) 2 1 mm/s 5 1% F8 H 1 (*3) 70 L 2 1 mm/s [mm](65537d=1000 1h) RWw3=0001h RWw4=0001h 6 1% F8 H 70 L *3 1mm/s 1% F8 H 7 42 - 8 70 L *3 1% F8 H 9 70 L *3 1mm/s F8 H 10 70 L *3 1% F8 H 11 F0 L (-) (+) 1 0.01mm 12 F0

SV

94.5 2 B 2 B 2 B 2 B 1 P 1 P F F V 5 V 1 P Light/Surge voltage suppressor 3 E (6) Individual SUP spacer Interface regulator SV2000-M1Interface regulator MAX.21 (DIN rail dimension) 71.5 Individual EXH spacer 56.5 SV2000-0061.2 (47.3) 7.5 19.7 Block separation lever B B B B 145.6 127.6 A A A A B A B A B A B A L Dimension n: Stations L n 2 148 137.5 109.5 22.5 3 160.5 150 125.5 20.5 4 173

Non-contact Gripper

XT661-2A: F = f x (1/t) = 0.8 x (1/2) = 0.4 N XT661-4A: F = f x (1/t) = 3.8 x (1/2) = 1.9 N XT661-6A: F = f x (1/t) = 5.9 x (1/2) = 2.95 N XT661-8A: F = f x (1/t) = 7.5 x (1/2) = 3.75 N XT661-10A: F = f x (1/t) = 14.4 x (1/2) = 7.2 N 9700 g 9700 x 9.8/1000 = 95.06 N XT661-10A: Temporary lifting force 11.2 N < Workpiece mass 9700 g (95.06 N) 3) Confirm the relationship temporary lifting force

Slider Type/Ball Bushing Bearing

6 @4 @1 @8 #0 #1 $1 w @9 i #2 !1 o q u r y e @6 @5 @3 @7 CY1L10 to 40 @2#9 @0$0 t !9 #5$2 #8 !2 !0 !6!7@4 @1 !8 !4 !5 $0 @8 #7 #6 $1 F G Area G (10) Enlarged view F 10, 15 w u i o !1 #2 q !3 r y e @6 @5 @3 $1 #0 @7 #1 10 Component Parts Note No. Description Material No.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

A A F F A F L L L 6 6 6 L = 80 mm L = 80 mm L = 80 mm MXP6-5 MXPJ6-5 MXP6-10 MXPJ6-10 MXP6-5 MXPJ6-5 MXP6-10 MXPJ6-10 MXP6-5 MXPJ6-5 MXP6-10 MXPJ6-10 0.05 0.05 0.06 Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) 0.04 0.04 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local

Rotary Actuator

AU MU CRQ2 MSQ MSZ B CRQ2X MSQX SOL.1 Rc1/4 (Port size) (Opposite side) D (g6) DD (h9) MRQ W K b SC F H l U VJ 35 44.5 SE SD BA 37 76 107 S VL SB 49 (Max.) BA VH VK A C Drawing shows the appearance for rotation of 90 and 100. * ( ) are the dimensions for rotation of 180 and 190. Drawing shows that SOL.1 is in the de-energized state.