Compact Low Friction Cylinder Series MQQ ø10, ø16, ø20, ø25, ø30, ø40

3 e i o w !0 !5 Lateral load resisting type: MQQL (Built-in ball bushing) !1 !6 !

Conforming to OSHA Standard Pressure Relief 3 Port Valve With Locking Holes Series VHS20/30/40/50 How to Order 30 03 RZ VHS Made to Order Standard Nil Body: Red X1 Built-in silencer (EXH port) X502 Pressure relief Optional specifications 3 port valve Des

Body size Port size Thread type Nil N F Symbol Port size Rc NPT G 01 02 03 04 06 10 1/8 1/4 3/8 1/2 3/4 1 A spacer or spacer with bracket is required if the valve is combined with modular FRL. SUP SUP Applicable air preparation equipment Spacer with bracket part no. Pressure relief 3 port valve VHS20 VHS30 VHS40 VHS40-06 VHS50 IN OUT Spacer part no.

Series ARP20 to ARP40 10- 10- 21- 21- Direct฀Operated฀Precision฀Regulator Series ARP20K to ARP40K 10- 10- Direct฀Operated฀Precision 21- 21- Regulator฀with฀Backflow฀Function

Example) 10-ARP30K-03BG-1RY Clean room compliant, copperfree, fluorine-free, silicone-free Clean room compliant Symbol Description 20 30 40 Body size 20 30 40 Body size Nil K Without backflow function With backflow function With backflow function + Nil N F Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) H a Without mounting option With bracket With set nut (For

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J 1n 114 250 3/8 350 112 450 3/4 5 5 0 1 650 1 1i2 850-2 I I Port Sr" I PT pofts ilodel Bracket Beplacement Element AMG150 BM5'I AMG-EL150 02 1/4 (AMG 1s0) 03 3y8 (AMG 250) 04 1/2 (AMG 350) 06 3/4 (AMG 4s0) 1 o 1 ( A M G 5 5 O ) 14 1 1/2 (AMG 6s0) 20-2(AMGsso) AMG250 BM52 AMG-EL25O AMG35O BM53 AMG-EL35O AMG45O BM54 AMG-EL45O AMG550 BM55 AMG-EL55O AMG65O BM56 AMG-EL65O AMG850 BM57 AMG-EL85O

lVFl 10

Wl00-3-2 (s-sta.) Mounting screws: MT624-26 fincluded with manitold bar) Blank station kit: WFl00-02 Hol'VTO ORDER NVV3F1-30OO1 -01T-F ---T---_ T _ T I loptions | -None To order assembled manifold and valves: Ex.

Series LC7R Dedicated Regenerative Absorption Unit

Contact pin (preassembled) N 3 Terminal Pin no.

3 Way, 3 Port NVF110 Series Direct Solenoid Operated

Wl00-3-2 (s-sta.) Mounting screws: MT624-26 fincluded with manitold bar) Blank station kit: WFl00-02 Hol'VTO ORDER NVV3F1-30OO1 -01T-F ---T---_ T _ T I loptions | -None To order assembled manifold and valves: Ex.

5.1, 3 m, Conductor area: 0.2 mm2, Insulator O.D.: 1.12 mm PSE56 - -28: Oil proof heavy-duty vinyl cable with air tube, 2 cores, ?5.1, 3 m, Conductor area: 0.2 mm2, Insulator O.D.: 1.12 mm194 g102 g

5.1, 3 m, Conductor area: 0.2 mm2, Insulator O.D.: 1.12 mm PSE56 - -28: Oil proof heavy-duty vinyl cable with air tube, 2 cores, ?5.1, 3 m, Conductor area: 0.2 mm2, Insulator O.D.: 1.12 mm194 g102 g

NAMUR Interface 3 Port Solenoid Valve VFN200N Series [Option]

Grommet terminal, Conduit terminal, DIN terminal 1 (P) 3 (R) Note 1) Use dry-air at low temperature.

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5.1, 3 m, Conductor area: 0.2 mm2, Insulator O.D.: 1.12 mm PSE56 - -28: Oil proof heavy-duty vinyl cable with air tube, 2 cores, ?5.1, 3 m, Conductor area: 0.2 mm2, Insulator O.D.: 1.12 mm194 g102 g

Ambient Dryer Series AMG

J 1n 114 250 3/8 350 112 450 3/4 5 5 0 1 650 1 1i2 850-2 I I Port Sr" I PT pofts ilodel Bracket Beplacement Element AMG150 BM5'I AMG-EL150 02 1/4 (AMG 1s0) 03 3y8 (AMG 250) 04 1/2 (AMG 350) 06 3/4 (AMG 4s0) 1 o 1 ( A M G 5 5 O ) 14 1 1/2 (AMG 6s0) 20-2(AMGsso) AMG250 BM52 AMG-EL25O AMG35O BM53 AMG-EL35O AMG45O BM54 AMG-EL45O AMG550 BM55 AMG-EL55O AMG65O BM56 AMG-EL65O AMG850 BM57 AMG-EL85O

Vacuum Regulator Series IRV

pump Filter Symbol Bore IRV1000 IRV2000 IRV3000 01 02 03 04 1/8 1/4 3/8 1/2 Flow meter Accessories None With bracket With pressure gauge Nil B G Differential pressure sensor Specifications Pressure gauge mounting IRV1000 Model IRV2000 IRV3000 Nil: Standard Set pressure 100 to 1.3kPa (750 to 10mmHg) Air Fluid VAC (vacuum pump side) SET (pad side) SMC P K U C S O H L 5 to 60C Ambient and fluid

A, B Port Size: 02 (1/4), Thread: F (G)

Function: 3 (3 Position Closed Center), Piping: 3 (Body Ported), Exhaust: 3 (Common), Low Wattage: None, Pressure Specification: Standard (0.7MPa), Coil Specification: Standard, Voltage: 3 [110VAC (115 VAC) 50/60Hz], Lead Wire: D (DIN Terminal w/Connector), Light/Surge Suppressor: Z (With light/surge voltage suppressor), Manual Override: Non-locking Push Type, A, B Port Size: 02 (1/4)

Function: 3 (3 Position Closed Center), Piping: 3 (Body Ported), Exhaust: 3 (Common), Low Wattage: None, Pressure Specification: Standard (0.7MPa), Coil Specification: Standard, Voltage: 3 [110VAC (115 VAC) 50/60Hz], Lead Wire: D (DIN Terminal w/Connector), Light/Surge Suppressor: Z (With light/surge voltage suppressor), Manual Override: Non-locking Push Type, A, B Port Size: 02 (1/4), Thread

B Port Size: 02 (1/4), Thread: F (G)

Function: 3 (3 Position Closed Center), Piping: 3 (Body Ported), Exhaust: 3 (Common), Low Wattage: None, Pressure Specification: Standard (0.7MPa), Coil Specification: Standard, Voltage: 3 [110VAC (115 VAC) 50/60Hz], Lead Wire: D (DIN Terminal w/Connector), Light/Surge Suppressor: Without light/surge voltage suppressor, Manual Override: Non-locking Push Type, A, B Port Size: 02 (1/4)

02 (1/4)